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2945 results about "Capacitance transducer" patented technology

Capacitive Transducers. The capacitive transducer is the capacitor with variable capacitance. The capacitive transducer consists of two parallel metal plates that are separated by the dielectric material such as air. In a normal capacitor, the distance between the two plates is fixed, but in capacitance transducers the capacitance is variable.

Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing

In-line thickness measurement of a dielectric film layer on a surface of a workpiece subsequent to a polishing on a chemical-mechanical polishing machine in a polishing slurry is disclosed. The workpiece includes a given level of back-end-of-line (BEOL) structure including junctions. The measurement apparatus includes a platen and an electrode embedded within the platen. A positioning mechanism positions the workpiece above the electrode with the dielectric layer facing in a direction of the electrode. A slurry dam is used for maintaining a prescribed level of a conductive polishing slurry above the electrode, the prescribed level to ensure a desired slurry coverage of the workpiece. A capacitance sensor senses a system capacitance C in accordance with an RC equivalent circuit model, wherein the RC equivalent circuit includes a resistance R representative of the slurry and workpiece resistances and the system capacitance C representative of the dielectric material and junction capacitances. Lastly, a capacitance-to-thickness converter converts the sensed capacitance to a dielectric thickness in accordance with a prescribed system capacitance / optical thickness calibration, wherein the prescribed calibration corresponds to the given level of BEOL structure of the workpiece.
Owner:IBM CORP
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