The invention discloses a method for determining the purity of electronic-grade
hexafluoroethane, and relates to the technical field of the purity of
hexafluoroethane, and the method comprises the following steps: vacuumizing a specific sampling container to 10 <-3 > Pa to 10 <-2 > Pa, forming a super-hydrophobic
coating on the inner wall, sampling in a temperature-controlled,
humidity-controlled and pressure-controlled environment, and removing water and impurities through two-stage pretreatment; enhancing analysis by using a gas chromatograph, a specific carrier gas, a
column temperature program, a micro-fluidic
chip and an
ion mobility spectrometry; then secondary scanning analysis is carried out by using a
mass spectrometer double
ion source and a calibration
system; and finally, learning and matching an
algorithm through a
data processing system machine. Samples can be accurately collected and pretreated,
gas chromatography and
mass spectrometry analysis is more accurate and efficient, a
data processing system can accurately determine impurities and purity, multiple measurement data can be counted and analyzed, the result reliability is improved, all parts of the system are optimized and matched, the accuracy and stability of the whole process are guaranteed, and the purity is calculated; the method further comprises
statistical analysis of multiple measurement data.