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3695results about "Material capacitance" patented technology

Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing

In-line thickness measurement of a dielectric film layer on a surface of a workpiece subsequent to a polishing on a chemical-mechanical polishing machine in a polishing slurry is disclosed. The workpiece includes a given level of back-end-of-line (BEOL) structure including junctions. The measurement apparatus includes a platen and an electrode embedded within the platen. A positioning mechanism positions the workpiece above the electrode with the dielectric layer facing in a direction of the electrode. A slurry dam is used for maintaining a prescribed level of a conductive polishing slurry above the electrode, the prescribed level to ensure a desired slurry coverage of the workpiece. A capacitance sensor senses a system capacitance C in accordance with an RC equivalent circuit model, wherein the RC equivalent circuit includes a resistance R representative of the slurry and workpiece resistances and the system capacitance C representative of the dielectric material and junction capacitances. Lastly, a capacitance-to-thickness converter converts the sensed capacitance to a dielectric thickness in accordance with a prescribed system capacitance / optical thickness calibration, wherein the prescribed calibration corresponds to the given level of BEOL structure of the workpiece.
Owner:IBM CORP

System for predicting geologic hazard based on rainfall intensity, moisture content of slope soil and deformation

The invention discloses a system for predicting geologic hazard based on rainfall intensity, moisture content of slope soil and deformation. The system comprises an automatic rainfall gauge, a soil moisture sensor, an omnibearing tilt sensor, an omnibearing vision sensor, an embedded system and a monitoring center computer, wherein the automatic rainfall gauge is used for monitoring rainfall and rainfall intensity of a geologic hazard point; the soil moisture sensor is used for monitoring moisture in soil at the geologic hazard point; the omnibearing tilt sensor is used for detecting earth surface deformation and internal deformation of the geologic hazard point; the omnibearing vision sensor is used for evaluating geologic hazard scale; the embedded system is used for wirelessly transmitting video and monitoring data; and the monitoring center computer is used for predicting and forecasting the geologic hazard and comprises a communication module, a data receiving module, a rainfall and rainfall intensity-based geologic hazard prediction module, a slope displacement-time curve-based geologic hazard prediction module, a soil moisture, rainfall and rainfall intensity-based geologichazard prediction module and a soil moisture content and slope deformation-based geologic hazard prediction module. The system has the advantages of complete monitoring means, accurate prediction andforecast, high intelligence and on-line real time.
Owner:ZHEJIANG UNIV OF TECH
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