The invention discloses a heterogeneous
hybrid integration method of a
planar optical waveguide device, and relates to the technical field of integrated
silicon photonics, the method is used for heterogeneous
hybrid integration of PLC chips with large
waveguide feature
size difference in different material systems, and the method comprises the following steps: firstly, carrying out large-angle
grinding on a light emitting end of a front-end
chip to enable a
waveguide to form a reflection angle; a
grating coupler is arranged on a front-end
chip, a device surface of the front-end
chip is opposite to a device surface of a rear-end chip, so that emergent light of the front-end chip can be reflected to the device surface of the rear-end chip and is aligned with the
grating coupler on the device surface of the rear-end chip, and finally the two aligned chips are packaged to realize optical
interconnection of the two chips. According to the technical scheme, when heterogeneous integration is carried out, emergent light of the front-end chip can be directly aligned to the
grating coupler of the rear-end chip, the
height difference problem of the two chips does not need to be considered, the problems that in an existing end face
coupling technology, the chip
height difference is sensitive, and
coupling modes are difficult to match are solved, and the
coupling efficiency is improved. And the integration level of the discrete device optical network
system is effectively improved.