2312results about "Gyroscopes/turn-sensitive devices" patented technology

A method for manufacturing a vibration element that includes a base portion, a first vibration arm and a second vibration arm that extend from the base portion along a first direction and are arranged along a second direction intersecting the first direction, and bottomed grooves on both main surfaces of the first vibration arm and both main surfaces of the second vibration arm includes: a preparing step of preparing a crystal substrate; a protective film forming step of forming a protective film on the crystal substrate except for groove regions that are regions in which the grooves are formed; and a dry etching step of dry etching the crystal substrate through the protective film to form the grooves. The grooves provided in at least one of the first vibration arm and the second vibration arm include a first groove and a second groove arranged along the second direction.

The invention discloses a hemispherical harmonic oscillator high-precision equal-mass-density modification method, which comprises the following steps: determining the axis direction of a central anchor post of a hemispherical harmonic oscillator through multi-position detection analysis, and taking the axis direction as a measurement basis; measuring three-dimensional contour point cloud coordinates of the outer spherical surface and the inner spherical surface and eccentric coordinates relative to the axis reference, and establishing actual contour models of the outer spherical surface and the inner spherical surface; a modification area and a corresponding removal thickness are determined, and a three-dimensional modification removal model is established; carrying out three-dimensional continuous modification removal processing on the to-be-modified areas of the outer spherical surface and the inner spherical surface by adopting an etching method; and evaluating a modification result according to the middle surface diameter and thickness distribution of the section circles of the outer spherical surface and the inner spherical surface. According to the invention, the mass trimming of the three-dimensional spherical shell of the hemispherical resonator can be realized, and the hemispherical resonator with relatively symmetrical mass density distribution can be obtained through the combined mass trimming of the outer spherical surface and the inner spherical surface, so that the precision of the hemispherical resonator gyroscope can be improved.

The present invention discloses a mold and method for thermoforming a micro-hemispherical resonator based on full mold constraint. The mold comprises a main body and a forming ball. The main body has a cavity recessed downward from its top surface, the cavity having a plurality of air holes communicating with the exterior of the main body, and the bottom of the cavity has positioning holes. The forming ball is placed in the cavity through the positioning holes. The shape parameters of the forming ball match the shape parameters of the inner cavity of the micro-hemispherical resonator. The method for thermoforming a micro-hemispherical resonator employs the above-mentioned mold to form the micro-hemispherical resonator. Compared with the prior art, the present invention utilizes a precisely machined forming ball to constrain the shape of the micro-hemispherical resonator during the forming process, thereby further improving the structural symmetry of the micro-hemispherical resonator and enabling control of the shape parameters of the micro-hemispherical resonator.

The invention discloses a percussion drill anti-deviation intelligent correction system and method based on gyroscopes, and particularly relates to the technical field of intelligent correction.The method includes the steps that motion data of a percussion drill are collected through the multiple gyroscopes, the motion data are preprocessed and compared with a preset path, and the collection error of each gyroscope is calculated; then, the percussion drill is partitioned, and the temperature and the vibration state of each region are monitored; according to the temperature and vibration conditions, each area is endowed with a weight, and a comprehensive error is obtained through a weighted average method. Then, actual errors (such as position, angle and speed errors) are converted into fuzzy values, and a fuzzy set is defined to represent the errors and the change rate of the errors; through fuzzification processing, input errors are mapped to corresponding fuzzy sets. And deducing control output by using a fuzzy inference engine. And finally, a reasoning result is converted into a clear control signal, and the system performs control or correction according to the signal to ensure accurate adjustment.

The invention discloses a hemispherical resonator gyroscope inertial navigation system temperature compensation method and compensation system, and the method comprises the steps: constructing a dynamic temperature space model, and achieving temperature drift characteristic modeling; designing an incremental adaptive neural network structure to enable the compensation model to adapt to the temperature change, and optimizing the compensation precision through a successive approximation incremental learning mode; temperature compensation and increment optimization are carried out in real time through combination of a dynamic temperature space model and an increment adaptive neural network, and compensation precision is maintained through dynamic updating of a temperature space and an increment learning mechanism of the increment adaptive neural network; output signal drift and compensation errors are monitored through a self-adaptive feedback mechanism, a dynamic temperature space model and incremental self-adaptive neural network parameters are dynamically adjusted, and the stability and the compensation effect are improved through an online correction and model self-optimization mechanism. According to the method, the problems of insufficient temperature drift modeling precision, poor adaptability and compensation precision attenuation after long-time operation in a traditional compensation method are solved.

The invention discloses a hemispherical gyroscope phase-locking control optimization method and device, and the method comprises the steps: changing the vibration mode azimuth angles of a hemispherical resonator gyroscope, collecting the phase-locking frequency in real time for each vibration mode azimuth angle, and calculating the phase-locking optimization control force in real time according to the collection result, substituting the phase locking frequency and the phase locking optimization control force into an electrode driving excitation model to calculate a driving signal in real time and transmit the driving signal to a driving electrode, and after the phase locking frequency is stable, collecting a stable phase locking optimization control force corresponding to the vibration mode azimuth angle; according to all the vibration mode azimuth angles and the corresponding stable phase-locking optimization control force, constructing a relation model of the two, solving the relation model to obtain phase-locking optimization parameters, calculating the phase-locking optimization control force according to the phase-locking optimization parameters and the relation model, and substituting the phase-locking optimization control force into an electrode driving excitation model to calculate a driving signal. Therefore, the compensation for the driving signal when the hemispherical resonator gyroscope works normally is realized. According to the invention, the influence of the circumferential frequency difference on the output precision of the harmonic oscillator can be eliminated.

The invention discloses a hemisphere gyroscope driving crosstalk rapid self-identification and compensation method and device, and the method comprises the steps: carrying out four rounds of experiments according to a resonant frequency and a preset amplitude range, gradually increasing the amplitude in the preset amplitude range in each round, and for each amplitude, carrying out the self-identification and compensation of the driving crosstalk of a hemisphere gyroscope. A driving signal is calculated in real time within a set time range and transmitted to a driving electrode, and a detection signal of a detection electrode is collected at the same time; the method comprises the following steps: acquiring a detection signal simplification model, decomposing the detection signal according to the detection signal simplification model, constructing a crosstalk parameter identification model according to all driving signals and corresponding detection signals, solving the parameter identification model, and substituting crosstalk identification parameters into a crosstalk compensation model so as to realize crosstalk compensation of the detection signal when the hemispherical resonator gyroscope works normally. According to the method, the accuracy of driving crosstalk compensation of the hemispherical gyroscope can be effectively improved, so that the control precision and the zero-bias stability of the gyroscope are improved.

The invention relates to a gyroscope-oriented temperature compensation method, in particular to an MEMS gyroscope-oriented temperature compensation method, which comprises the following steps: S1, after specific noise is added, decomposing an output signal of a gyroscope into a series of intrinsic mode functions (IMF); s2, dividing the decomposed intrinsic mode function IMF into a noise segment, a mixed segment and a feature segment by using a sample entropy SE; s3, de-noising processing is carried out on the noise section by using long-window time-frequency peak filtering TFPF, and useful signals are reserved while de-noising is carried out on the mixed section by using short-window time-frequency peak filtering TFPF; s4, using an extreme learning machine ELM optimized by a non-dominated sorting genetic algorithm NSGA II to perform temperature compensation on the feature segment containing the temperature drift term; and S5, combining the de-noised noise section, the de-noised mixed section and the compensated feature section, and reconstructing a final gyroscope output signal. According to the temperature compensation method for the gyroscope, interference of noise can be well reduced, and the temperature compensation effect of the gyroscope is greatly improved.

The present disclosure relates to a MEMS inertial sensor device in a semiconductor chip package that includes an integrated circuit configured to process inertial sensor data. Preferred implementations utilize inertial sensors having different sensitivity ranges to adjust operation of dynamic system control such as motion and or attitude control of autonomous vehicles.

The invention relates to a MEMS sensor (100) comprising: a substrate (40) having a main plane of extension; a vibration mass (60) which is movably suspended in the z-direction (1000) relative to the substrate (40); and a sensor device (90) for detecting a measurement signal dependent on the position of the vibration mass (60). The at least two resonators (10, 11, 12) are suspended in an elastically movable manner relative to the substrate in the z-direction (1000). The actuatable electrode arrangement (30) is designed to resonate each of the at least two resonators (10, 11, 12) in order to generate a mechanical resonant vibration and to capacitively detect an interference variable dependent on at least one resonant frequency of the resonant vibration. The invention also relates to a method for compensating for systematic measurement deviations of a MEMS sensor (100).

The invention relates to a system and method for detection on a stationary surface. A method includes generating, by a first motion sensor of an electronic device, first sensor data over an acquisition time window, and determining whether the electronic device is located on a stationary surface, a semi-stationary surface, or in motion by processing the first sensor data to generate first process data. The method further includes determining whether the electronic device is in a steady state based on the first process data, the steady state indicating whether the electronic device is held on the stationary surface for a first predefined time. And, the method further includes stopping processing the first sensor data in response to determining that the electronic device has been in the steady state for a second predefined time.

The invention relates to the technical field of gyroscopes, and discloses a hemispherical resonator gyroscope scale error compensation method, device and equipment and a medium. The method comprises the following steps: acquiring a target temperature value, and acquiring a target resonant frequency value according to the target temperature value; according to the target resonant frequency value and a pre-calibrated temperature compensation coefficient, calculating to obtain a target electrode asymmetric error coefficient; according to the asymmetric error coefficient of the target electrode, a target gyroscope scale factor is obtained through calculation, and according to the target gyroscope scale factor, the output angular velocity of the target gyroscope is obtained through calculation. According to the scheme of the embodiment, the asymmetric error of the gyroscope electrode is subjected to temperature compensation correction, so that the scale error of the hemispherical resonator gyroscope can be reduced, and the precision of the gyroscope can be improved.

The invention relates to the technical field of hemispherical resonator gyroscopes, in particular to a method for reducing vibration coupling of a hemispherical resonator gyroscope, and aims to solve the problem that accurate vibration suppression is often difficult to realize when the HRG faces a complex and multi-frequency mixed vibration environment. Comprising the following steps: step 1, evaluating the frequency range, amplitude and directivity of an external vibration environment; 2, a vibration isolation module is installed to reduce transmission of external vibration; 2, analyzing external vibration characteristics of the hemispherical resonator gyroscope; 3, generating a compensation signal based on the vibration characteristics of the hemispherical resonator gyroscope, and compensating the vibration signal of the hemispherical resonator gyroscope in real time through a compensation system; and 4, debugging and optimizing a vibration isolation and compensation system. By adopting a vibration isolation and active compensation method, external vibration and internal structure coupling vibration are controlled, the interference of vibration coupling on the hemispherical resonator gyroscope is reduced, the performance of the hemispherical resonator gyroscope is improved, and the use requirements in high-precision navigation and complex environments are met.

The invention relates to the technical field of MEMS gyroscopes, in particular to a mode matching MEMS gyroscope temperature self-compensation control system and method, and the system comprises a driving mode control subsystem which is used for carrying out closed-loop control on the phase and amplitude of the driving mode of an MEMS gyroscope; the detection mode control subsystem is used for carrying out closed-loop control on the gain of a band-pass filter of an MEMS gyroscope detection mode and enabling the center frequency of the band-pass filter to be matched with the resonant frequency of the detection mode; force coupling is carried out between the driving mode control subsystem and the detection mode control subsystem through the Coriolis effect. The gain of the band-pass filter is adjusted based on the real-time change of the quality factor of the detection mode, and the center frequency of the band-pass filter is matched with the resonant frequency of the detection mode, so that the suppression and self-compensation of the temperature drift of the gyroscope are realized.

The invention provides a track direction and height detection method and a track detection device.The track direction and height detection method comprises the steps of data acquisition, device track acquisition, compensation value acquisition, real track acquisition and track direction and height data acquisition, angular velocity data is acquired through a gyroscope, angle data is acquired through an inclinometer, and the angular velocity data is acquired through an angle sensor; the contour data of the two steel rails are collected through the line laser sensor, and the mileage data are collected through the mileage detector, so that the three-dimensional track coordinates of the track detection device can be obtained based on the angular velocity data, the angle data and the mileage data; then, based on the high-precision line laser contour data, obtaining a feature point coordinate at a specified position on the inner side of the steel rail as a rail direction compensation value, and compensating a three-dimensional track coordinate of the device by using the feature point coordinate, so as to obtain a real track coordinate at the specified position on the inner side of the steel rail along the x direction and the top surface of the steel rail along the z direction; and accurate rail direction and height data can be calculated.

The invention provides a hemispherical resonator gyroscope which comprises a hemispherical resonator, a driving electric substrate and a detection electric substrate, the hemispherical resonator is of a hemispherical structure, the driving electric substrate is of a flat plate type structure, and the detection electric substrate is of an inner spherical surface structure. A first conductive film layer is arranged on the inner surface of the hemispherical harmonic oscillator, a second conductive film layer is arranged on the end face of the lip edge, the detection electric substrate is provided with a detection electrode, and the driving electric substrate is provided with a potential electrode and a driving electrode. The detection electrode and the first conductive film layer form a detection capacitor, and the driving electrode and the second conductive film layer form a driving capacitor. The detection electrode and the driving electrode are separately arranged, so that the coupling of the driving signal and the detection signal can be reduced. The detection electric substrate is of an inner spherical surface structure, so that the area of a detection capacitor formed by the detection electrode and the first conductive film layer can be increased, and the intensity of a detection signal is improved. The driving electric substrate is of a flat plate type structure, and the potential electrode and the driving electrode are arranged on the driving electric substrate, so that the processing and assembling difficulty can be reduced.

The invention relates to a rapid detection method for the resonant frequency of a hemispherical harmonic oscillator, belongs to the technical field of inertial measurement, solves the problems of long measurement time and low detection precision in the measurement of the second-order resonant frequency of the hemispherical harmonic oscillator in the prior art, and comprises the following steps: S1, providing a voltage excitation source, and applying a broadband sinc excitation signal to the hemispherical harmonic oscillator; s2, continuously recording the detection data in a set continuous recording time period; s3, performing frequency mixing to obtain data after frequency mixing; step S4, carrying out anti-aliasing filtering and down-sampling on the data after frequency mixing; step S5, carrying out N-point fast Fourier transform on the downsampled data to obtain a frequency spectrum of the detection signal; s6, based on the frequency spectrum of the converted detection signal, determining the frequency corresponding to the peak value of the frequency spectrum, and obtaining the measured second-order resonant frequency of the hemispherical harmonic oscillator; and S7, based on the measured second-order resonant frequency of the hemispherical harmonic oscillator, performing frequency phase loop, amplitude loop closed loop and orthogonal closed loop on the hemispherical harmonic oscillator.

The invention relates to the technical field of hemispherical harmonic oscillator assembly, in particular to a welding method and device for an assembled hemispherical harmonic oscillator, and the device comprises a vibration welding platform and a clamping assembly located above the vibration welding platform; the vibration welding platform is used for bearing the sensitive base and providing a thermal field and a vibration field needed by welding, and the clamping assembly is used for clamping the center shaft and sending the center shaft into a center hole of the base. A heating unit and a composite vibration ultrasonic transducer are arranged in the platform, and the platform is configured to apply high-frequency vibration formed by superposition of vertical longitudinal waves and horizontal torsional waves to the base. The high-frequency vibration thixotropic effect is used for reducing the viscosity of the molten solder, the ultrasonic cavitation effect is used for forcibly discharging bubbles at the bottom of the blind hole, and the sound radiation pressure generated by the vibration standing wave field is used for driving the center shaft to achieve friction-free self-centering in the hole. According to the device, the problems of air bolt pseudo soldering and rigid assembly clamping stagnation in the traditional process are solved, and the assembly coaxiality and the connection strength of the harmonic oscillator are remarkably improved.

The invention relates to an automatic test method and system for the zero offset of a hemispherical resonator gyroscope. The automatic test system composed of a double-shaft servo turntable control module, a gyroscope control module and a PC (Personal Computer) upper computer is built; a servo turntable control instruction and a gyroscope control instruction are sent through a serial port according to a certain program through an automatic test logic built in a PC upper computer, a gyroscope vibration mode angle is controlled to be automatically switched from 0 degree to 360 degrees (the step length can be set), and turntable angle and gyroscope vibration mode angle data under each vibration mode angle are synchronously collected; and substituting the acquired data into the error model, completing zero offset error parameter identification by adopting a nonlinear least square method, generating an error compensation formula, and writing the error compensation formula into a gyroscope control unit in real time to realize compensation.

Exemplary system, method and computer-accessible medium for selecting at least one location of (i) at least one receiver or transceiver or (ii) at least one transmitter or transceiver can be provided. For example, it is possible to facilitate a receipt, from the at least one transmitter or transceiver, of a plurality of signals by the receiver(s) or transceiver(s). Each of the signals has a multipath component. Then, it is possible to determine time of flight (ToF) information and angle of arrival (AoA) information of the multipath components present in the signals. Further, it is possible to determine one or more possible locations of (i) the receiver(s) or transceiver(s) or (ii) the transmitter(s) or transceiver(s) based on the ToF information, the AoA information, and a model of physical surroundings. The location(s) of (i) the receiver(s) or transceiver(s), or (ii) the transmitter(s) or transceiver(s) can be selected based on the one or more possible locations and an extended Kalman filter (“EKF”).

A fluctuating magnetic field output drift optimization method for a hemispherical resonator gyroscope comprises the following steps: step 1, primary optimization: calculating a quaternion as a state value of Kalman filtering by using a Gauss-Newton iteration method through measured magnetic field intensity and acceleration, and obtaining a primary optimization estimated value of the quaternion according to the state value; step 2, conversion correction; and step 3, secondary optimization: taking the corrected quaternion as a state quantity, then taking the quaternion obtained by the first Kalman filtering as an observed quantity, carrying out second Kalman filtering, and completing secondary optimization of the quaternion, in the above method, obtaining an optimal estimated quaternion through Kalman filtering, and finally obtaining an optimal estimated quaternion through Kalman filtering. And then compensating the drift of the gyroscope by using a complementary filtering algorithm to obtain a corrected quaternion, and carrying out second optimization on the quaternion through Kalman filtering by using the obtained quaternion and the optimal estimated quaternion obtained by Kalman filtering, thereby reducing the output drift of the hemispherical resonator gyroscope through the optimization method.

A yaw rate sensor and a method for operating a yaw rate sensor comprising a substrate and a double rotor are proposed, wherein the substrate has a main extension plane with an X direction and a Y direction running perpendicular thereto, wherein the double rotor has a first rotor and a second rotor which - spaced apart along the X direction and separated from one another by a central region - are elastically connected to the substrate via a respective suspension and which are elastically connected to one another via a first coupling element such that the two rotors can be excited to antiphase torsional oscillations, wherein the rotation axes of the rotors run in a Z direction perpendicular to the main extension plane of the substrate, wherein the yaw rate sensor has first detection electrodes and second detection electrodes, wherein the first rotor is connected to a first seismic mass and a second seismic mass such thatthat these are each mounted so as to be deflectable in the radial direction relative to the first rotor and substantially parallel to the main extension plane, wherein the second rotor is connected to a third seismic mass and a fourth seismic mass in such a way that these are each mounted so as to be deflectable in the radial direction relative to the second rotor and substantially parallel to the main extension plane, wherein the first seismic mass is connected to the third seismic mass via a first rocker element in such a way that the third seismic mass is deflected in a direction opposite to the radial deflection of the first seismic mass upon a radial deflection of the first seismic mass, wherein the second seismic mass is connected to the fourth seismic mass via a second rocker element in such a way that the fourth seismic mass is deflected in a direction opposite to the radial deflection of the first seismic mass upon a radial deflection of the second seismic mass,the radial deflection of the second seismic mass is deflected in the opposite direction, wherein the first and second rocker elements are elastically connected to one another via a second coupling element such that the radial deflections of the first and second seismic masses are antiparallel and the radial deflections of the third and fourth seismic masses are also antiparallel.

The invention provides a Kalman filtering parameter setting method and device, electronic equipment and a storage medium. The method comprises the following steps: acquiring a variance between an angular velocity measurement value measured by the MEMS gyroscope and a real angular velocity value when the MEMS gyroscope is at different angular velocities, and establishing a first mathematical relationship for representing a mapping relationship between the real angular velocity value and the variance; and when the angular velocity data acquired by the MEMS gyroscope is filtered in real time by using the Kalman filtering algorithm, determining the measured noise variance at the current moment based on the angular velocity estimated value at the previous moment output by the Kalman filtering algorithm and the first mathematical relationship, so as to determine the angular velocity estimated value at the current moment based on the measured noise variance at the current moment. According to the method, the calculated amount in the Kalman filtering parameter setting process can be reduced, and the dynamic performance of the MEMS gyroscope can be effectively tracked.

The invention provides a cattle behavior recognition method based on a three-axis attitude angle, and belongs to the technical field of intelligent animal husbandry management. According to the method, three-axis attitude angle signals such as the yaw angle (Yaw), the pitch angle (Pitch) and the roll angle (Roll) of the head of a cattle are collected in real time through a gyroscope sensor arranged in wearable equipment such as a cattle ear tag. The method does not depend on images, accelerometers, microphones or other modalities, only based on attitude angle signals, multiple algorithms such as a time sequence sliding window, frequency domain analysis, weighted scoring, sudden change detection and state transition modeling are utilized, and multiple typical behaviors such as ingestion, rumination, water drinking, bed lying, limping, licking, fright jumping and low activity are recognized. The method is suitable for multiple cattle breeds such as dairy cattle, beef cattle and buffalo, has the advantages of low power consumption, lightweight calculation, low deployment cost, accurate identification and the like, and is convenient for realizing behavior monitoring and health management of large-scale cattle individuals. The algorithm path can be flexibly selected, but a core input signal is only limited to attitude angle data, so that the technical boundary of the patent protection of the method is formed.

An inertial measurement device includes: an inertial sensor; a first signal processing circuit; a second signal processing circuit; a first communication unit and a second communication unit configured to communicate with an external device; and a mode selection unit configured to select a processing mode from a plurality of modes including a first processing mode and a second processing mode. The first processing mode is a mode in which the inertial measurement device is used alone and outputs a signal processed by the first signal processing circuit from the first communication unit, and the second processing mode is a mode in which the inertial measurement device is used in a state of being coupled to another inertial measurement device, a first signal processed by the first signal processing circuit and a second signal from another inertial measurement device received from the second communication unit are subjected to a calculation process by the second signal processing circuit, and a signal subjected to the calculation process is output from the first communication unit.

The invention provides a double-sided patterning method for a hemispherical resonance plate electrode and a plate electrode, and the method comprises the steps: clamping the side surface of an electrode body by adopting an annular clamp with grids, placing the electrode body in a film plating machine, and plating metal films on the front and back surfaces of the electrode body, meanwhile, the side face of the electrode body is plated with a grid metal strip film by adjusting the magnetron sputtering angle and the grid-shaped clamp; the metal films on the front and back surfaces of the electrode body are communicated through the grid metal strip films on the side surfaces; spraying glue on the surface of the coated electrode; the electrode is placed on a suction cup of a photoetching machine, the T-shaped mark on the suction cup is aligned with the grid metal strip on the side face of the electrode, and first alignment is completed; pushing the suction cup into the photoetching machine, and aligning the T-shaped mark on the mask with the T-shaped mark on the suction cup to complete secondary alignment; and developing and corroding to finish the double-sided patterning for the hemispherical resonance plate electrode. According to the technical scheme, an original porous electrode scheme needing a pin cap lead can be simplified.

The invention discloses a hemispherical resonator gyroscope initial alignment and navigation method based on dual-mode switching, and belongs to the field of hemispherical resonator gyroscope control. According to the invention, the problem that the single working mode of the hemispherical resonator gyroscope is difficult to meet different requirements in the initial alignment and navigation process is solved. According to the method disclosed by the invention, the precision of the hemispherical resonator gyroscope in an initial alignment stage can be improved compared with a single full-angle mode, and meanwhile, the range of the hemispherical resonator gyroscope in a navigation stage can be improved compared with a single force balance mode. The advantages of the two modes can be combined, different requirements for the precision and the measuring range of the hemispherical resonator gyroscope in different stages can be met by switching the two control modes, and the problem that the single working mode of the hemispherical resonator gyroscope is difficult to meet different requirements in the initial alignment and navigation process is solved. The method can be applied to mode switching of the hemispherical resonator gyroscope.

A zero point estimation device is configured to perform a first acquisition process, a second acquisition process, and a zero point estimation process. The first acquisition process is a process of acquiring a plurality of first detection values of a first sensor sampled at different timings from each other while a vehicle is traveling with a change in a direction of travel. The second acquisition process is a process of acquiring a plurality of second detection values of a second sensor sampled in synchronization with the sampling timings of the first detection values to be acquired by the first acquisition process. The zero point estimation process is a process of estimating a zero point of the second sensor by using, as inputs, the plurality of first detection values acquired by the first acquisition process and the plurality of second detection values acquired by the second acquisition process.