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628 results about "Thermocompression bonding" patented technology

Thermocompression bonding describes a wafer bonding technique and is also referred to as diffusion bonding, pressure joining, thermocompression welding or solid-state welding. Two metals, e.g. gold (Au)-gold (Au), are brought into atomic contact applying force and heat simultaneously. The diffusion requires atomic contact between the surfaces due to the atomic motion. The atoms migrate from one crystal lattice to the other one based on crystal lattice vibration. This atomic interaction sticks the interface together. The diffusion process is described by the following three processes...

Three-dimensional integrated method of sensor array and signal processing circuits

The invention discloses a three-dimensional integrated method of a sensor array and signal processing circuits in the technical field of semiconductor three-dimensional integration. The three-dimensional integrated method comprises the following steps of: (1) manufacturing sensors on a top layer single crystal material of an insulating substrate device; (2) manufacturing the signal processing circuits and metal interconnection lines on the surface of a signal processing circuit substrate and manufacturing metal salient points on the metal interconnection lines; (3) carrying out a bonding process or a three-dimensional interconnection process; (4) carrying out metal thermocompression bonding on bonding metal salient points and the salient points; (5) removing a temporary bonding polymer layer and auxiliary wafers; and (6) manufacturing plane interconnection lines. By utilizing the three-dimensional integrated method, integration of the sensors and the signal processing circuits is realized, hovering of the sensors is realized, electric signal connection of the sensors and the signal processing circuits is realized by utilizing three-dimensional interconnection lines, the manufacture process is simple, the sensors can be suspended, and excellent consistency of the sensors and large-scale array structure can be obtained.
Owner:TSINGHUA UNIV

Processing method of ultra-thin core board in manufacturing of printed circuit board or integrated circuit package substrate

A processing method of thin core board in manufacturing of printed circuit board or integrated circuit package substrate comprises the followings: copper foil and bonding sheet, two core boards are used for laminating and thermocompression bonding to obtain a processing board with periphery being bonded, and the thickness and strength thereof can satisfy the processing requirements of conventional devices; pattern conversion processing is carried out on the bonded processing board; laminating method is carried out on newly formed conductor line pattern surface, insulating medium and conductor line are formed through laminating, laser beam drilling, plating and pattern conversion technology; the previous processes are repeated to form multilayer processing boards; when two sides of multilayer processing boards reaches certain thickness and strength, the multilayer processing boards are incised at the bonding joint to form two processing boards; conventional laminating, drilling, plating and pattern conversion technologies are adopted to process the two processing boards respectively until the manufacturing of the needed circuit board and package substrate is finished. The invention needs no special device or processing tool to process thin core board, thus greatly reducing cost and improving productivity and yield of the product.
Owner:SHANGHAI MEADVILLE SCI & TECH
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