Wafer processing method for dividing a
wafer (1) along a plurality of dividing lines (3) to obtain a plurality of individual component chips (1c), wherein the dividing lines (3) are formed on the front side (1a) of the
wafer (1) so as to define a plurality of separate regions in which a plurality of components (5) are individually formed, the
wafer processing method comprising: a ring frame preparation step of preparing a ring frame (7) having an inner opening (7a) for receiving the wafer (1); a
polyester film providing step of positioning the wafer (1) in the inner opening (7a) of the ring frame (7) and providing a
polyester film (9) on a back side (1b) of the wafer (1) and on a back side (7c) of the ring frame (7), wherein no
adhesive layer is arranged between the
polyester film (9) and the wafer (1); a bonding step of heating the polyester film (9) while applying pressure to the polyester film (9) after performing the polyester film providing step, whereby the wafer (1) and the ring frame (7) are bonded by
thermocompression bonding via the polyester film (9) to form a frame unit (11) in a state where the front side (1a) of the wafer (1) and the front side (7b) of the ring frame (7) are exposed upward; a dividing step of applying a
laser beam to the wafer (1) along each dividing line (3), the
laser beam having an absorption
wavelength for the wafer (1), after performing the bonding step, thereby forming a dividing groove in the wafer (1) along each dividing line (3) to divide the wafer (1) into the individual component chips (1c); and a receiving step of blowing air to each component
chip (1c) via the polyester film (9) after performing the dividing step to push up each component
chip (1c), thereby receiving each component
chip (1c) from the polyester film (9).