A kind of
power module packaging
structure based on embedded glass substrate.The present application relates to the field of
power semiconductor device packaging technology, provide a kind of low parasitic parameter, high reliability and high interconnect density embedded
power module packaging scheme.With multilayer stacked glass substrate as core carrier, including top plate, bottom plate and middle layer plate with cutout.
Semiconductor chip is embedded in the cutout of middle layer plate, and the thickness of plate layer is adapted to the thickness of
chip.The top surface of top plate has exposed pads, and the bottom surface of bottom plate has flat exposed
copper layer.The surface of glass substrate is processed with rewiring layer, and is integrated with vertical via through glass substrate, to lead out the gate, source and drain of
chip, to realize three-dimensional
interconnection.The present application is different from mainstream embedded packaging, uses glass substrate to replace PCB organic substrate, makes full use of its low loss, high insulation, high
thermal stability and the advantages such as more matched
thermal expansion coefficient with SiC material.In addition, with the help of glass via glass via technology, smaller aperture and higher
aspect ratio can be realized, which significantly improves the electrical
interconnection density.