The invention relates to the technical field of
chip packaging, in particular to a packaging structure and method for multilayer
wafer interconnection. Comprising a plurality of stacked wafers, the distribution of bonding pads on each
wafer is the same, the bonding pads of the adjacent wafers are arranged in a staggered mode, through holes are formed in the wafers, one ends of the through holes are flush with the surface of the
wafer on the outermost side, the other ends of the through holes fall on the bonding pads of the wafer on the innermost side, insulating
layers are arranged in the through holes, and conductive columns are arranged in the insulating
layers. And the bonding pads of the adjacent wafers are electrically connected through the conductive columns. Compared with the prior art, the bonding pads are exposed in a stepped mode through
dislocation bonding, holes are uniformly filled after the insulating
layers on the surfaces of the bonding pads are removed, and then electrical
interconnection between wafers can be achieved. Unified via technology with efficient electrical
interconnection is achieved. Therefore, the complicated steps of drilling, depositing and filling holes of multiple layers of wafers are avoided, the overall manufacturing process is simplified, and the production efficiency is remarkably improved.