The invention belongs to the technical field of
laser processing, and particularly relates to a curved-surface substrate
laser confinement cleaning
system and method. The
system comprises a
control system, a three-dimensional motion platform, a
laser and a laser focusing unit, wherein a curved-surface substrate of a
metal pattern to be cleaned is fixed on the three-dimensional motion platform; the visual auxiliary
positioning system is used for recognizing the space posture of the cleaning area and is electrically connected with the
control system. And the
control system generates a CAD model and a cleaning path based on an identification result, and cooperatively controls the three-dimensional motion platform and the laser, so that the laser incidence direction is kept within the range of + / -5 degrees of the normal of the target point, and confinement cleaning of the curved surface
metal pattern is realized. According to the method, an intelligent reverse
decision model of'performance deviation-trimming quantity-laser parameters' is further established, deviation of actually measured electromagnetic performance and a design target is used as input, the
material removal quantity and the laser parameters are automatically solved, and closed-
loop control of performance diagnosis and trimming
machining is formed. The method has the advantages of high-precision positioning, normal incidence control, curvature adaptive compensation and performance-oriented intelligent trimming, and is suitable for high-precision and low-damage local
metal removal of LTCC substrates and array plane
microstrip lines.