The invention discloses a double-clamping-jaw
manipulator for
mask cleaning equipment, and belongs to the technical field of
semiconductor processing equipment. The double-clamping-jaw
manipulator is provided with a grabbing mechanism, and the grabbing mechanism comprises a clamping jaw, a bearing jaw and a power
assembly. The power
assembly comprises a shell and air cylinders, the clamping claw and the bearing claw penetrate through through holes in the shell to be connected with the two air cylinders correspondingly, and the air cylinders drive the clamping claw and the bearing claw to act. A clamping block and a bearing block are arranged at the
tail end of the clamping jaw and the
tail end of the bearing jaw respectively, and the clamping block is located outside the bearing block. In the action process of the mechanical arm, the clamping claw is matched with the bearing claw, so that the
mask is supported firstly, and then clamping is completed. According to the double-clamping-jaw mechanical arm, the problem that grabbing fails or is unstable due to the fact that error deflection angles exist between the clamped face of a
mask and the clamping face of the mechanical arm can be effectively solved, the telescopic
stroke of the mechanical arm is increased, and the moving space of the mechanical arm is enlarged.