181 results about "Silicon photonics" patented technology

A co-packaged electro-optical module includes: a first planar light circuit (PLC) block; a silicon photonics chip electrically coupled to one or more chips; a splitter embedded in the first PLC block and to receive laser light from an optical fiber, to split the laser light into two portions, and to provide respective portions of the laser light to two planar waveguides; a planar surface of the silicon photonics chip to receive the portions of the laser light from the two planar waveguides in a direction perpendicular to the planar surface; modulators embedded in the silicon photonics chip and to modulate the portions of the laser light; a side edge of the silicon photonics chip extending perpendicular to the planar surface and to output the modulated portions of the laser light; and a second PLC block coupled to the side edge and to transmit the modulated portions of the laser light.

The invention provides a liquid cooling optical module, and relates to the technical field of optical communication, the liquid cooling optical module comprises a shell, a circuit board, a metal sealing cover, a silicon optical assembly, a coupling jumper wire and a digital signal processing chip, the metal sealing cover and the circuit board are welded through soldering tin, and a sealing cavity is formed by the metal sealing cover and the circuit board; the silicon optical assembly is arranged on the circuit board and located in the sealing cavity. The silicon optical assembly comprises a laser light source chip, a collimating lens, a concave-convex lens, an isolator, a focusing lens and a silicon optical integrated chip which are sequentially arranged. The coupling jumper wire comprises a main connecting wire and a sub connecting wire, and a connector of the sub connecting wire and at least part of the sub connecting wire are located in the sealing cavity; a metal welding block is arranged on the part, penetrating through the metal sealing cover, of the sub-connecting line; and the metal welding block is welded with the metal sealing cover and the circuit board through tin soldering. According to the liquid cooling optical module provided by the invention, the sealing performance of the sealing cavity is improved.

In one embodiment, an optical transceiver includes: a photonic integrated circuit (PIC) formed on a semiconductor die having a first side and a second side opposite the first side, where the first side includes a first optical circuit and a second optical circuit and the second side is to electrically couple with a substrate. The PIC may further have one or more through silicon vias (TSVs) formed through the semiconductor die to electrically couple the first side with the second side, where at least one of the TSVs is to enable electrical coupling between a first other die adapted to the first side and a second other die. Other embodiments are described and claimed.

A device having a hybrid silicon photonic-on-glass substrate is provided. The device includes a glass substrate having a plurality of through-glass vias (TGVs), an oxide layer, and metal contacts coupled with the TGVs. The device also includes a silicon photonic layer having metal pads and an oxide layer. The metal pads are bonded with the metal contacts and the oxide layer of the silicon photonic layer is bonded with the oxide layer of the glass substrate such that the silicon photonic layer is hybrid bonded to the glass substrate by a metal-to-metal, oxide-to-oxide hybrid bond. Methods of assembly are also provided.

Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects are provided. An example optical interconnect joins first and second optical conduits. A first direct oxide bond at room temperature joins outer claddings of the two optical conduits and a second direct bond joins the inner light-transmitting cores of the two conduits at an annealing temperature. The two low-temperature bonds allow photonics to coexist in an integrated circuit or microelectronics package without conventional high-temperatures detrimental to microelectronics. Direct-bonded square, rectangular, polygonal, and noncircular optical interfaces provide better matching with rectangular waveguides and better performance. Direct oxide-bonding processes can be applied to create running waveguides, photonic wires, and optical routing in an integrated circuit package or in chip-to-chip optical communications without need for conventional optical couplers. An example wafer-level process fabricates running waveguides, optical routing, and direct-bonded optical interconnects for silicon photonics and optoelectronics packages when two wafers are joined.

An optical communication system includes a transceiver device and a passive multiplexer and demultiplexer (PMAD). The transceiver device transmits or receives optical signals. The PMAD has a Mach-Zehnder interferometer structure, is connected to the transceiver device, and operates as a passive multiplexer or a passive demultiplexer. The PMAD includes: a first arm including a first waveguide, the first arm having a first dimension; a second arm including i) a second waveguide, and ii) a third waveguide, the second waveguide having a second dimension, the third waveguide having a third dimension, the second dimension being based on the first dimension and finely adjusts at least one performance parameter of the passive multiplexer and demultiplexer, and the third dimension being based on the first dimension and coarsely adjusts the at least one performance parameter; and a splitter and a coupler that propagate the optical signals.

The invention relates to an optical signal transmission device. The optical signal transmission device comprises an optical transmitter and an optical receiver. The optical transmitter and the optical receiver are connected through an optical fiber, the optical transmitter comprises a laser and a silicon optical chip, and the laser is used for outputting multiple paths of optical signals to be transmitted to the silicon optical chip; the silicon optical chip is used for carrying out modulation and wave combination processing on multiple paths of optical signals to be transmitted and transmitting the processed optical signals to the optical receiver through an optical fiber; and the optical receiver is used for performing photoelectric conversion on the processed optical signal to generate an electric signal corresponding to the optical signal to be transmitted. According to the invention, the silicon optical chip is directly adopted to realize modulation and wave combination processing at the same time instead of adopting semiconductor chips such as a laser chip for modulation and then adopting an independently arranged wave combiner for wave combination, so that the optical transceiver module can be arranged more ingeniously, the integrity of optical signal transmission can be ensured, and the optical signal transmission efficiency is improved. And the optical signal transmission performance can be improved.

Silicon Photonics is a candidate technology for adding integrated optics functionality, either passive or active optical waveguides) to integrated circuits by leveraging the economies of scale of the CMOS microelectronics industry and using materials for the waveguide core such as silicon nitride (SiXNY) and silicon oxynitride (SiOXN1-X) for example. Microelectromechanical systems (MEMS) provide for movable platforms relative to the substrate allowing additional functionality to be added to a silicon circuit but also Silicon Photonics. Accordingly, by combining “fixed” waveguides formed upon the substrate with “movable” waveguides formed upon one or more movable platforms the inventors have established a series of Integrated Optics MEMS (IO-MEMS) based on Silicon Photonics. Such IO-MEMS include optical switches, optical attenuators, optical gates, optical switch matrices, configurable wavelength division multiplexer / demultiplexer devices, etc. exploiting both platforms and deformable beams.

A method of wavelength tuning in a silicon photonics circuit includes receiving a bus waveguide, a ring resonator optically coupled to the bus waveguide, and a dielectric layer over the bus waveguide and over the ring resonator. The method further includes performing a first heat process at a first temperature to heat up the dielectric layer, where the first heat process shifts an initial resonance wavelength of the ring resonator to a first resonance wavelength shorter than the initial resonance wavelength. The first heat process permanently shifts the initial resonance wavelength to the first resonance wavelength, the first resonance wavelength being a wavelength when no heat is being applied to the ring resonator.

A system comprising a plurality of optical fibers and a first microlens array including a plurality of microlenses. Each of the plurality of optical fibers is bonded to one of the plurality of microlenses. The system also includes a prism disposed adjacent the first microlens array, a second microlens array disposed adjacent the prism, and a silicon photonics substrate disposed adjacent the second microlens array and including a plurality of input coupling elements and one or more optical waveguides.

An electro-optical device is disclosed. The device includes a glass substrate having a plurality of through-glass vias. The device also includes a photonic integrated circuit hybrid bonded to the glass substrate by way of a metal-to-metal, oxide-to-oxide hybrid bond. The PIC has a plurality of through-silicon vias that are coupled with the through-glass vias. The device also includes an electronic integrated circuit coupled with the photonic integrated circuit. A method of assembling a device, or a plurality of devices, is also disclosed.

A system comprising a plurality of optical fibers and a first microlens array including a plurality of microlenses. Each of the plurality of optical fibers is bonded to one of the plurality of microlenses. The system also includes a prism disposed adjacent the first microlens array, a second microlens array disposed adjacent the prism, and a silicon photonics substrate disposed adjacent the second microlens array and including a plurality of input coupling elements and one or more optical waveguides.

The present invention relates to the field of optical components, and in particular to a multi-wavelength silicon optical transmitter chip, whose input waveguide is used to input dual-band optical signals. A first multimode interference coupler is connected to the input waveguide and is used to distribute the dual-band optical signals from the input waveguide to two transmission paths. Each transmission path includes a silicon optical modulator and two second multimode interference couplers. The silicon optical modulator is connected between the two second multimode interference couplers via a waveguide. The silicon optical modulator includes a reverse bias electrode and two high-frequency electrodes, the two high-frequency electrodes being located on opposite sides of the waveguide and connected to the waveguide, and the reverse bias electrode being located in the middle of the waveguide. The high-frequency electrode includes multiple sub-electrodes arranged along a first direction, each of the multiple sub-electrodes including a main body, a connecting portion, and an end portion. The connecting portion and the end portion are connected to one side of the main body along a second direction, and the connecting portion and the end portion form a T-shaped structure. The end portion extends toward the waveguide and is connected to the waveguide. High-speed signal modulation is achieved.

The invention relates to a silicon optical chip which is provided with a first input waveguide, a plurality of first output waveguides and a Loop loop on the same side. The Loop loop has a second input waveguide and a second output waveguide, the second input waveguide dividing 90% of the light into the MPD and dividing 10% of the light into the second output waveguide. An optical fiber array for chip-level testing is provided with a first polarization-maintaining optical fiber, a third polarization-maintaining optical fiber, a multimode optical fiber and four second polarization-maintaining optical fibers, the first polarization-maintaining optical fiber corresponds to a first input waveguide in a silicon optical chip, the third polarization-maintaining optical fiber corresponds to a second input waveguide in the silicon optical chip, and the multimode optical fiber corresponds to a second output waveguide in the silicon optical chip. And the four second polarization maintaining optical fibers are respectively corresponding to four first output waveguides in the silicon optical chip. The method has the advantages that the chip testing speed can be greatly increased, and the chip cost cannot be additionally increased due to the fact that the chip area and the MPD number are not increased.

The invention discloses an FMCW laser radar system which comprises a silicon optical chip, a laser generation module, a signal receiving and transmitting module, a signal processing module, a control module and a two-dimensional scanning module. The signal receiving and transmitting module is integrated on the silicon optical chip; the control module is electrically connected with the signal processing module and the two-dimensional scanning module. The laser generation module is used for emitting laser signals; the signal receiving and transmitting module is used for receiving echo signals reflected after the laser signals pass through the two-dimensional scanning module and scan the plane of the target object, and the echo signals and the laser signals form beat frequency signals; the signal processing module is used for collecting beat frequency signals and processing the beat frequency signals to form preprocessed signals; the control module is used for controlling the arrangement mode of the two-dimensional scanning module so as to change the light emitting direction of the laser signal; and obtaining a pre-processing signal, calculating the distance and the speed of the target object according to the pre-processing signal, and generating a multi-dimensional point cloud picture. The system realizes point cloud picture output, and is small in size and easy to integrate.

A first electrode bonding pad is arranged on the upper surface of a heat sink, an N electrode of a DFB chip is attached to the first electrode bonding pad, a second electrode bonding pad is arranged at the position, behind the DFB chip, of the heat sink, a P electrode of an MPD chip is attached to the second electrode bonding pad, a photosensitive surface and a first N electrode are sequentially arranged on the MPD chip in the direction away from the DFB chip, and a second electrode bonding pad is arranged at the position, behind the second electrode bonding pad, of the MPD chip. The P electrode of the DFB chip is provided with a plurality of first gold threads which are distributed side by side, the first gold threads stride across the photosensitive surface and then are routed on the first N electrode of the MPD chip, and backlight of the DFB chip is reflected on the photosensitive surface of the MPD chip through the arc-shaped first gold threads. A CPO silicon light engine comprises a high-power light source COC. The MPD chip has the beneficial effects that the backlight of the DFB chip is reflected on the photosensitive surface of the MPD chip by adopting the first gold wire for supplying power to the DFB chip, so that the MPD chip finishes monitoring the optical power of the DFB chip, and the cost is reduced.

The present application discloses a method for heterogeneous hybrid integration of planar optical waveguide devices, relating to the field of integrated silicon photonics technology. The method is used for heterogeneous hybrid integration of PLC chips with greatly different waveguide characteristic dimensions in different material systems. The method first grinds the light-emitting end of the front-end chip at a large angle to form a reflection angle for the waveguide. The device surface of the front-end chip is then arranged relative to the device surface of the back-end chip so that the light emitted by the front-end chip can be reflected to the device surface of the back-end chip and aligned with the grating coupler on the device surface of the back-end chip. Finally, the aligned two chips are packaged to achieve optical interconnection between the two chips. When performing heterogeneous integration, the technical solution of the present application can directly align the light emitted by the front-end chip to the grating coupler of the back-end chip without considering the height difference between the two chips. This solves the problem of the existing end-face coupling technology being sensitive to the chip height difference and difficult coupling mode matching, and effectively improves the integration level of the discrete device optical network system.

The utility model discloses a composite multimode waveguide structure, which belongs to the technical field of optoelectronic devices and comprises a plasmon unit made of a metal material or a material with a negative real part dielectric function. The plasmon unit is structurally characterized by comprising nanoparticles, nanowires, nanopore arrays or gradient structures; the dielectric waveguide is made of a semiconductor material with a high refractive index, and the dielectric waveguide is designed to be one of a strip-shaped waveguide, a ridge-shaped waveguide or a slit waveguide; and the substrate layer is located below the plasmon unit and the dielectric waveguide and comprises at least one low-refractive-index supporting layer, and the material system of the low-refractive-index supporting layer is one of an oxide material, a nitride material, a fluoride material or a composite substrate structure. According to the scheme, the contradiction of a plasma device and silicon photonics among mode degree of freedom, loss and process compatibility is solved.

Visible spectrum quantum dot (QD) light emitting sources integrable with integrated silicon photonics include a plurality of epitaxially grown InP QDs within an active region. The light emitting sources include light emitting diodes (LEDs) and semiconductor lasers.

This application provides a silicon photonics thin-film lithium niobate hybrid integrated optoelectronic chip, its fabrication method, and a system, relating to the field of optoelectronics technology. Based on a thin-film lithium niobate platform, multiple thin-film lithium niobate modulators are fabricated on a thin-film lithium niobate wafer, and qualified thin-film lithium niobate modulator chips are selected. Based on a silicon photonics process platform, optoelectronic device structures other than the modulators are fabricated on a silicon photonics wafer, and a wafer map is generated to identify the locations of qualified chips. A transition structure with dimensions matching the silicon photonics wafer is then provided. The silicon photonics wafer and the transition structure are assembled to form a composite wafer. Based on the wafer map, qualified thin-film lithium niobate modulator chips are transferred and mounted one by one onto the composite wafer, and optical and electrical connections are completed. Finally, the mounted composite wafer is sliced ​​and tested to obtain the silicon photonics thin-film lithium niobate hybrid integrated optoelectronic chip. The solution provided in this application has the advantages of good process compatibility, high yield, and low cost.

This invention belongs to the field of communication network convergence technology and discloses a protective wavelength spacing configuration method and a QKD and OTN co-fiber transmission system. The system includes: a QKD transmitter, a synchronous negotiation transmission unit, an OTN transmitter, a first silicon photonics integrated wavelength division multiplexing chip, a common transmission optical fiber, a second silicon photonics integrated wavelength division multiplexing chip, a QKD receiver, a quantum optical detection unit, a synchronous negotiation receiving unit, an OTN service receiving unit, and a control and management module. The control and management module executes the protective wavelength spacing configuration method. Compared with existing technologies, this invention, through the protective wavelength spacing configuration method, can dynamically determine the isolation distance based on bandwidth, temperature drift, filter roll-off, and safety margin, reducing the probability of crosstalk and Raman scattering noise from adjacent channels entering the quantum receiving window. It also makes linked decisions based on bit error rate, key generation rate, receiver count rate, OTN bit error rate, optical power, chip temperature, and alarm information, improving the adaptive capability of the co-fiber system.

The invention discloses a non-polishing low-loss coupling optical fiber array adaptive to a deep silicon etching photon chip, a deep silicon etching photon chip coupling assembly and a method, and belongs to the technical field of silicon photon integration. The device comprises an optical fiber array main body, a V-shaped groove substrate and a special-shaped cover plate, the special-shaped cover plate is attached to the upper surface of the V-shaped groove substrate, an avoiding groove is formed in the position, corresponding to a deep silicon etching area of the end face of the chip, of the special-shaped cover plate, and the depth of the avoiding groove is not smaller than the total height of a residual step on the end face of the chip and a deep groove protruding structure so as to eliminate mechanical interference. The tail end of the optical fiber is positioned in the V-shaped groove, and the light-emitting end face is parallel and tightly butted with the end face of the chip. The customized avoiding groove is integrated in the cover plate, direct, lossless and low-loss coupling of the optical fiber array and the deep silicon etching silicon optical chip with the composite three-dimensional morphology end face can be achieved without extending the optical fiber, removing a bottom cover or polishing the end face of the chip, the integrity of the end face of the chip is effectively protected, and the coupling precision and the device yield are improved.

The invention provides a micro-ring modulator and a silicon optical chip, the micro-ring modulator comprises an annular waveguide and a strip-shaped waveguide, and the annular waveguide is arranged at one side of the strip-shaped waveguide; the strip-shaped waveguide receives input light, the annular waveguide is coupled with the strip-shaped waveguide, the annular waveguide receives coupling input light of the strip-shaped waveguide, and the coupling input light is transmitted along a path of the annular waveguide; the annular waveguide is provided with a first part close to the strip-shaped waveguide and a second part far away from the strip-shaped waveguide, the first part has a first width, the second part has a second width, the first width is smaller than the second width, and the width of the annular waveguide is gradually increased from the first part to the second part. The silicon optical chip is applied to the micro-ring modulator, process errors can be resisted, and the performance stability of the micro-ring modulator is ensured.

To provide an optical waveguide device that is high in position accuracy of a silicon waveguide of a silicon photonics chip, and an optical waveguide core layer.SOLUTION: An optical waveguide device according to the present invention has: a first silicon photonics chip in which a first silicon waveguide and an electrode are provided on a main plane side; a second silicon photonics chip in which a second silicon waveguide and an electrode are provided on a main plane side; an optical waveguide that includes a core layer, first and second clad layers; and encapsulation resin. In the core layer, one end part is arranged in the first silicon photonics chip main plane and optically coupled to the first silicon waveguide, and the other end part is arranged in the second silicon photonics chip main plane and optically coupled to the second silicon waveguide. The first clad layer coats main planes of first and second silicon photonics chip lateral planes, and a core layer top plane between the one end part and the other end part, and a second clad layer is laminated on a core layer side of the first clad layer, and coats the main planes of the first and second silicon photonics chips, a core layer lower plane, and a lateral plane. The encapsulation resin is laminated on an opposite side with respect to the first and second clad layers and coats the first and second silicon photonics chips.SELECTED DRAWING: Figure 1

A package for a silicon photonics device and an implementation method thereof are disclosed. The package for a silicon photonics device according to one embodiment includes a step difference control part having an upper surface, where a silicon photonics device platform having a silicon photonics device mounted thereon is mounted, and configured to control a step difference generated between the silicon photonics device platform and one or more functional electronic devices mounted on an upper surface of a board and a body part configured to transfer heat transferred through the step difference control part and heat transferred through a lower surface of the board to the outside by mounting the step difference control part on at least a partial region of an upper surface thereof and bringing the lower surface of the board into close contact with at least a part of the remaining region except for the partial region.

Provided in the present disclosure are a silicon photonics wafer test apparatus and a test method therefor, and a silicon photonics wafer test system. The silicon photonics wafer test apparatus comprises a camera assembly and a deflection optical path assembly; a prober for carrying a silicon photonics wafer; a fiber coupling module; and a driving assembly. When the driving assembly moves the silicon photonics wafer into the imaging field of view of the camera assembly, the camera assembly is adjusted such that the coordinate system is parallel to scribe lines of the silicon photonics wafer; when the driving assembly moves the deflection optical path assembly into the imaging field of view of the camera assembly, the camera assembly captures lateral images of a fiber end from at least two different directions via the deflection optical path assembly. The fiber coupling module is used for adjusting the pose of the fiber end on the basis of the lateral images and the direction of the coordinate system of the camera assembly, enabling initial alignment between the fiber end and the silicon photonics wafer. The present disclosure reduces the operational difficulty of alignment coupling between the fiber end and a silicon photonics waveguide, thereby simplifying the apparatus structure and reducing apparatus costs.

An optical waveguide device includes a first and a second silicon photonics chip, an optical waveguide, and an encapsulation resin. The optical waveguide includes a core layer and a first and a second cladding layer. The core layer has a first and a second end portion optically coupled with a first and a second silicon waveguide, respectively, on surfaces of the first and the second silicon photonics chip. The first cladding layer covers a surface of the core layer between the first and the second end portion, and is thinner than the first and the second silicon photonics chip. The second cladding layer is stacked on the first cladding layer and covers the surfaces of the first and the second silicon photonics chip and the core layer. The encapsulation resin is stacked on the first cladding layer and covers the first and the second silicon photonics chip.

Silicon Photonics is a candidate technology for adding integrated optics functionality, either passive or active optical waveguides) to integrated circuits by leveraging the economies of scale of the CMOS microelectronics industry and using materials for the waveguide core such as silicon nitride (SiXNY) and silicon oxynitride (SiOXN1-X) for example. Microelectromechanical systems (MEMS) provide for movable platforms relative to the substrate allowing additional functionality to be added to a silicon circuit but also Silicon Photonics. Accordingly, by combining “fixed” waveguides formed upon the substrate with “movable” waveguides formed upon one or more movable platforms the inventors have established a series of Integrated Optics MEMS (IO-MEMS) based on Silicon Photonics. Such IO-MEMS include optical switches, optical attenuators, optical gates, optical switch matrices, configurable wavelength division multiplexer / demultiplexer devices, etc. exploiting both platforms and deformable beams.

A LIDAR sensor system for a vehicle includes a silicon photonics substrate. The silicon photonics substrate includes: a semiconductor wafer; one or more surface features on a first surface of the semiconductor wafer; and a photoresist layer formed on the first surface of the semiconductor wafer, wherein the photoresist layer includes a laminated dry film. The silicon photonics substrate can be manufactured by obtaining a semiconductor wafer having one or more surface features; applying a dry film photoresist layer to a first surface of the semiconductor wafer; performing an adhesion bake process on the semiconductor wafer; developing the dry film photoresist layer to produce one or more developed regions in the dry film photoresist layer; and forming one or more solder bumps in the one or more developed regions.

This application provides a method, system, electronic device, and storage medium for determining silicon photonics bias voltage, relating to the field of optical communication technology. The method includes: acquiring at least four pre-set sampling voltages and sequentially applying each sampling voltage to the heating element of a silicon photonics modulator; acquiring the output power of the silicon photonics modulator under each sampling voltage; fitting and generating a response curve between voltage and output power based on the multiple sampling voltages and the corresponding output power; determining a target voltage corresponding to a preset operating state based on the response curve between voltage and output power, and using the target voltage as the operating bias voltage of the silicon photonics modulator under the preset operating state, achieving high-precision, adaptive bias voltage tracking, greatly improving the production efficiency of optical modules, and being simple and reliable.