The present application relates to photoelectric
detector, specifically to a segmented bandwidth enhancement high
responsivity silicon germanium photodetector, solve the problem that the volume of the
germanium absorption layer of the existing
silicon germanium photodetector is large, which leads to large RC parameter of the whole device, and then leads to low photoelectric bandwidth, and reducing the size of the germanium
absorption layer may not fully absorb light, resulting in reduced
responsivity, the present application uses segmented germanium
absorption layer, removes the germanium absorption layer without
light field distribution by
etching groove, reduces the volume of the germanium absorption layer, reduces the RC parameter, while maintaining the
responsivity of the
silicon germanium
photodetector unchanged, effectively improves the photoelectric bandwidth of the
detector, and improves the communication ability of the device. The
distributed bragg reflector structure promotes the secondary absorption of light by the germanium absorption layer, further improves the responsivity of the
detector, while not affecting the bandwidth,
dark current and other performances.