The present invention provides an optical micro-electromechanical structure with controllable precision modulation, comprising a suspended
mass block, a plurality of suspended tethers, a
photonic crystal microcavity, a suspended optical
waveguide, a first connecting tether, a suspended beam, a second connecting tether, a
rigid block, and a
capacitor, wherein the first
capacitor end of the
capacitor is fixed to the suspended beam, and the second capacitor end is fixed to the
rigid block. The present invention uses a
capacitance modulation method to modulate the
optical microcavity, which can not only calibrate the
optical microcavity produced by the
photolithography process so that the actual
resonance wavelength of the
photonic crystal microcavity is perfectly matched with the designed working
wavelength, but also adjust the offset of the
resonance wavelength caused by changes in the
working environment, thereby improving the measurement accuracy. In the present invention, the capacitor only modulates the gap of the
photonic crystal microcavity and does not affect the mechanical properties of the
mass block, that is, it only modulates the optical properties, thereby avoiding modulation
crosstalk. In the present invention, the optical
waveguide is connected and fixed to one end of the
optical microcavity, and has good
optical coupling stability and overall
system stability.