Cantilever beam type accelerometer based on photonic crystal microcavity

Abstract

The invention relates to an optical and microelectromechanical technology, in particular to a cantilever beam type accelerometer based on a photonic crystal microcavity. The application of the photonic microcavity in the cantilever beam type accelerometer is further expanded. The cantilever beam type accelerometer based on the photonic crystal microcavity comprises a base, a cantilever beam and a mass block, wherein the base is processed on a semiconductor substrate by a processing process of a microelectromechanical device; the single end of the cantilever beam is fixed to the base; the mass block is fixed to the free end of the cantilever beam; an optical waveguide which is perpendicular to the cantilever beam is arranged on the base; the end part of the cantilever beam, which is fixed to the base, is provided with a zipper cavity; two brackets of the zipper cavity are parallel to the optical waveguide on the base; and the zipper cavity and the optical waveguide form a microcavity-optical waveguide coupling structure. The invention has reasonable and simple structure and good characteristics of high sensitivity, high resolution, high measurement precision, electromagnetic interference resistance, small size, convenient integration, light weight, operation in severe environment, wide application range, and the like.

Description

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AI Technical Summary

Benefits of technology

This new type of sensor called an optronic chip (OCh) allows for precise measurements over extreme environmental factors like pressure, temperature, humidity levels, etc., without being affected by external influences from other things around them. Its technical effect includes improved performance due to increased flexure properties compared to previous designs while maintaining good signal quality at low temperatures.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the accuracy and resolvability of miniature electronic devices made using MEMS techniques due to their ability to generate minute forces caused by external stimuli without being affected by gravity effects during operation. These tiny movements cause errors when measuring physical quantities. To address this issue, there was proposed a new type of sensor called Planck Microcanostor Accelerometry (PCA). PCA allows for precise measurements while maintaining stability against gravitational impact.

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