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643results about How to "Improve Sensing Performance" patented technology

Vibratory double-axially sensing micro-gyroscope

The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180 degrees; when the gyroscope is rotated horizontally, the suspending arm and the platform will generate horizontal displacement caused by Coriolis force and, by measuring the change of capacitance value, the magnitude of the angular velocity of vibration is obtained; since its structure has symmetrical property, so it has sensing ability in both X or Y axes and, because it has superior stability and is able to resist environment noise and vibration, its sensing capability is enhanced and, since its machining method is simple, so it is adapted for mass production for having lower manufacturing cost.
Owner:IND TECH RES INST

Double-microring resonator optical biochemical sensing chip based on vernier effect

The invention provides a double-microring resonator optical biochemical sensing chip based on the vernier effect and aims to solve the detection problem of some biochemistry matters. The double-microring resonator optical biochemical sensing chip mainly comprises an input straight waveguide, an output straight waveguide and two microring resonators, wherein the first microring resonator comprises an annular waveguide and is coupled with the input straight waveguide and the output straight waveguide; the second microring resonator is positioned on the inner side of the annular waveguide of the first microring resonator and has a free spectral range different from that of the first microring resonator, and the two microring resonators are connected in an optical coupling manner. Through the above scheme adopted by the optical biochemical sensing chip, the second optical resonator is positioned on the inner side of the first optical resonator and connected with the first optical resonator in a lateral coupling manner to form the vernier effect and detect the influence on an optical signal from external substances. Under the condition of meeting the same sensing performance, the size of the optical biochemical sensing chip is greatly reduced, and miniaturization of the optical biochemical sensor and the on-chip sensing system are favorably realized.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA
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