The invention relates to the technical field of thermal interface
material defect detection, in particular to a nondestructive detection method and
system for thermal interface material application defects, and the
system comprises an electric displacement table, heating
laser, detection
laser, a photoelectric
detector, an acoustic
optical modulator, a lock-in
amplifier, an optical element and a
data processing unit; the electric displacement table is used for fixing a sample and accurately controlling the position of the sample; the sample is of a
silicon-thermal interface material-substrate sandwich structure; the upper-layer
silicon wafer of the sample is plated with a
metal film as a transduction layer; the heating
laser is used for heating the sample; the acoustic
optical modulator is used for modulating the heating laser, so that the heating laser heats the sample in a
sine wave form; the detection laser is used for detecting
sample temperature fluctuation; the photoelectric
detector is used for collecting and detecting laser reflection signals; the lock-in
amplifier is used for extracting and detecting laser phase and amplitude signals. According to the invention, non-destructive
rapid detection of the defects of the thermal interface material in an application scene can be realized.