1057results about How to "High Q value" patented technology

A method for the detection of analytes using resonant mass sensors or sensor arrays comprises frequency encoding each sensor element, acquiring a time-domain resonance signal from the sensor or sensor array as it is exposed to analyte, detecting change in the frequency or resonant properties of each sensor element using a Fourier transform or other spectral analysis method, and classifying, identifying, and / or quantifying analyte using an appropriate data analysis procedure. Frequency encoded sensors or sensor arrays comprise sensor elements with frequency domain resonance signals that can be uniquely identified under a defined range of operating conditions. Frequency encoding can be realized either by fabricating individual sensor elements with unique resonant frequencies or by tuning or modifying identical resonant devices to unique frequencies by adding or removing mass from individual sensor elements. The array of sensor elements comprises multiple resonant structures that may have identical or unique sensing layers. The sensing layers influence the sensor elements' response to analyte. Time-domain signal is acquired, typically in a single data acquisition channel, and typically using either (1) a pulsed excitation followed by acquisition of the free oscillatory decay of the entire array or (2) a rapid scan acquisition of signal from the entire array in a direct or heterodyne configuration. Spectrum analysis of the time domain data is typically accomplished with Fourier transform analysis. The methods and sensor arrays of the invention enable rapid and sensitive analyte detection, classification and / or identification of complex mixtures and unknown compounds, and quantification of known analytes, using sensor element design and signal detection hardware that are robust, simple and low cost.

A wireless power receiving apparatus receives an electric power signal including any one of an electric, magnetic, or electromagnetic field transmitted from a wireless power supply apparatus. A reception coil is configured to receive the electric power signal. A power storage capacitor is arranged having a first terminal set to a fixed electric potential. First and second switches are connected in series to form a closed loop including the reception coil. A connection node that connects these switches is connected to a second terminal of the power storage capacitor. Third and fourth switches are sequentially arranged in series to form a path arranged in parallel with a path comprising the first and second switches. A connection node that connects these switches is set to a fixed electric potential.

An antenna coil 10 comprises an air-core coil 12 which is wound helically in a plane and a plate magnetic core member 13 which is inserted in the air-core coil 12 so as to be approximately parallel with a plane of the air-core coil 12. The magnetic core member 13 is formed by a soft magnetic metal, an amorphous or ferrite, or a composite member of a powder, flake and plastic, or rubber. The magnetic core member 13 is formed by performing an injection molding operation or a compressing molding operation of the composite member. Alternatively, the magnetic core member 13 is a magnetic coating which is formed by applying and drying the composite member. A non-magnetic conductive plate 14 which has a conductivity is layered on a surface of the air-core coil 12 through which the magnetic core member 13 is inserted. The conductive plate 14 is made of a copper, a copper alloy, an aluminum or an aluminum alloy having 0.01 to 2 mm thickness. By doing this, it is operated by relatively high frequency while it is rigid relatively.

A surface acoustic wave device is provided. The surface acoustic wave device includes a piezoelectric substrate and an IDT which is disposed on the piezoelectric substrate and made of Al or an alloy containing Al as a main component and using an SH wave as an excitation wave, wherein the piezoelectric substrate is a rotated Y-cut quartz plate having a cut angle θ set to a range of −64.0°<θ<−49.3° rotated counterclockwise from a Z crystalline axis and a propagation direction of a surface acoustic wave set to a direction of 90°±5° with respect to an X crystalline axis, wherein, when a wavelength of an excited surface acoustic wave is denoted by λ, an electrode film thickness H / λ normalized with wavelength of the IDT is set to a range of 0.04<H / λ<0.12, and wherein, when a line occupancy rate mr of electrode fingers constituting the IDT is defined to be electrode finger width / (electrode finger width+electrode finger spacing), the line occupancy rate mr is set to a range of 0.53≦mr≦0.65.

The invention discloses a broadband tunable single-passband microwave photon filter generating system. The system comprises a laser, an optical coupler, a polarization modulator, a dispersion displacement optical fiber, a photoelectric detector, a vector network analyzer, a strength modulator and an optical fiber; the laser is used for providing continuous light signals; the optical coupler is used for dividing the continuous light signals into the first path of light signals and the second path of light signals; the polarization modulator is used for modulating the polarization state of the first path of light signals; the dispersion displacement light fiber is used for performing stimulated Brillouin scattering on the detection light signals under the induction effect of pump light signals; the photoelectric detector is used for receiving the detection light signals which are processed in a stimulated Brillouin scattering mode and output by the dispersion displacement optical fiber and generating microwave signals; the vector network analyzer is used for receiving microwave signals output by the photoelectric detector, performing measurement frequency response on the microwave signals, and outputting the microwave signals to the a first polarization modulator at the same time; the strength modulator is used for modulating the polarization state of the first path of light signals and outputting the first path of light signals which are modulated; the optical fiber is used for filtering the first path of light signals which are modulated, and the first path of light signals serve as the pump light signals.

The invention provides a microwave dielectric ceramic material and a preparation method thereof, belonging to the technical field of electronic materials. The microwave dielectric ceramic material comprises the following components in percentage by mass: 25-35% of MgO, 60-68% of TiO2, 1-10% of CaO, 0-2% of SiO2, 0-2% of MnO2, 0-2% of Nb2O5 and 0-2% of CeO2; the microwave dielectric ceramic material is prepared by proportioning the MgO, TiO2, CaO, SiO2, MnO2, Nb2O5 and CeO2 according to the mass percentage of each component; performing ball milling and mixing; pre-calcining a mixture at a temperature in a range of 1050-1200 DEG C and sintering the mixture at the temperature in a range of 1250-1360 DEG C. In the invention, the microwave dielectric ceramic material is prepared by utilizing atraditional solid-phase sintering method, the process is simple and the cost is low; according to the prepared microwave dielectric ceramic material, the Q*f value is in a range of 63,000-83,000 GHz,the relative dielectric constant epsilon r is in a range of 20-22, and the temperature coefficient of resonance frequency is within + / -10 ppm / DEG C, so that the preparation requirements of a high-performance microwave device can be met.

A surface acoustic wave device is provided. The surface acoustic wave device includes a piezoelectric substrate and an IDT which is disposed on the piezoelectric substrate and made of Al or an alloy containing Al as a main component and using an SH wave as an excitation wave, wherein the piezoelectric substrate is a rotated Y-cut quartz plate having a cut angle θ set to a range of −64.0<θ<−49.3° rotated counterclockwise from a Z crystalline axis and a propagation direction of a surface acoustic wave set to a direction of 90°±5° with respect to an X crystalline axis, wherein, when a wavelength of an excited surface acoustic wave is denoted by λ, an electrode film thickness H / λ normalized with wavelength of the IDT is set to a range of 0.04<H / λ<0.12, and wherein, when a line occupancy rate mr of electrode fingers constituting the IDT is defined to be electrode finger width / (electrode finger width+electrode finger spacing), the line occupancy rate mr is set to a range of 0.53≦mr≦0.65.

The invention discloses a film bulk wave resonator and a method for raising the quality factor of the film bulk wave resonator. The film bulk wave resonator comprises a first electrode, a piezoelectric layer arranged on the top of the first electrode, and a second electrode arranged on the top of the piezoelectric layer. At least one gap is left between the second electrode and the first electrode, and the effective area of the film bulk wave resonator is at least partially covered with the gap, wherein the effective area is an area where the first electrode, the second electrode and the piezoelectric layer overlap with each other in the thickness direction. According to the invention, the at least one gap is left between the second electrode and the first electrode of the film bulk wave resonator, transverse mode sound wave leakage and energy loss caused by an electrode material are reduced, the Q value of the film bulk wave resonator is increased, and the Q value is greater than 2000.

The invention provides a liquid drop whispering gallery mode laser and a manufacturing method thereof. According to the liquid drop whispering gallery mode laser, a first single-mode optical fiber with the middle being provided with a cone area is connected with a pump light source and a spectrograph, a second single-mode optical fiber is connected to a trapping light source and an annular core optical fiber, the front end of the annular core optical fiber is processed into a cone frustum shaped optical fiber tip, a laser beam emitted by the trapping light source is injected into a fiber core of the annular core optical fiber through the second single-mode optical fiber, total reflection and refraction occur in light at an inclined plane of the cone frustum shaped optical fiber tip of the annular core optical fiber, an annular convergence optical field is formed near the cone frustum shaped optical fiber tip so as to realize an optical tweezers function, the optical tweezers stably capture a micro liquid drop, the captured liquid crystal micro liquid drop is enabled to be close to the cone area of the first single-mode optical fiber, the pump light source injects from the front end of the first single-mode optical fiber, and the spectrograph detects excited laser light at the rear end of the first single-mode optical fiber. According to the invention, a high Q-value liquid drop micro spherical cavity with a perfect surface is formed by surface tension, and the optical tweezers stably control the liquid drop micro-sphere. The liquid drop whispering gallery mode laser provided by the invention has an extremely low threshold.

The invention discloses a tunable microwave photon filter on the basis of a Brillouin optical fiber laser, which belongs to the filed of microwave photonics. The device consists of a Brillouin multiple-wavelength optical fiber laser, a polarization controller, a Mach-Zehnder modulator, a monomode optical fiber and a photoelectric detector. A multiple-wavelength optical signal output by the Brillouin multiple-wavelength optical fiber laser is connected with the optical input end of the Mach-Zehnder modulator through the polarization controller; the radio frequency input end of the Mach-Zehnder modulator loads a radio frequency signal; the optical output end of the Mach-Zehnder modulator is connected with the monomode optical fiber; the other end of the monomode optical fiber is coupled into the photoelectric detector; and a signal acquired by the output end of the photoelectric detector is a microwave filtering signal. Through tuning the wavelength of output laser of the Brillouin optical fiber laser, the tuning of the microwave filtering frequency can be realized.

The invention belongs to the technical field of pressure sensors, particularly relates to a high-temperature pressure sensor and a production method thereof and solves the problem that the existing pressure sensor fails to operate normally in environments of high temperature, moistness and the like due to the insufficiently reasonable design. The high-temperature pressure sensor comprises four layers. A planar square spiral inductor and a capacitor upper electrode are made on the first layer by pasting; a sealed pressure cavity is arranged on the second layer; a capacitor electrode is made on the fourth layer by pasting and is connected with an inner circular core of the top planar square spiral inductor. The production method includes filling the pressure cavity with carbon paste; subjecting the laminated structure to high-temperature sintering to volatilize carbon from air holes so as to form a complete cavity; and after sintering, placing glass beads at the air holes to allow for secondary sintering sealing. The high-temperature pressure sensor is capable of operating at normal temperature and high temperature more than 400 DEG C, and is simple in structure, small in size, simple in manufacture process and easy for industrial production.

A piezoelectric thin film resonator includes: a piezoelectric thin film; a laminated structure which includes a first metal electrode film and a second metal electrode film that interpose at least a part of the piezoelectric thin film, and which is formed on a substrate; and an acoustic insulating layer which is formed on the substrate at a position corresponding to the laminated structure, wherein the first metal electrode film is formed on the substrate and the second metal electrode film is formed on the first metal electrode film while sandwiching the piezoelectric thin film, and a protection film laminated on the second metal electrode film is provided so as to cover the second metal electrode film.

The invention relates to a plurality of novel high-Q microwave medium ceramic materials and preparation methods thereof, belonging to the special ceramic material process technical field. The novel high-Q microwave medium ceramic materials comprise the following four chemical formulas: (1) (1-x)Li2TiO3-xMgO with x ranging between 0 and 0.981; (2) Li2+xTi1-4xNb3xO3 with x ranging from 0 and 0.1; (3) Li2+xTiO3 with x ranging between minus 0.85 and 0.20; (4) Li3Mg2NbO6. The preparation method comprises the following steps: according to the specified chemical formulas, the mass of each raw material is calculated; the raw material adopts chemical analytically pure with the purity of the raw materials including Li2CO3, TiO2, MgO and Nb2O5 more than 99 percent; the specified raw materials, zirconia grinding ball and dehydrated alcohol are packed in a resin ball milling tank according the to weight ratio of 1:2:0.75, and then are dried and screened after 24-hour ball milling; then, polyvinyl alcohol solution is added to carry out granulation and then the mixture is screened; particles are packed in a mould and are formed through dry stamp under 150 MPa pressure; and finally, blocks are calcined two hours under 1,200 DEG C to 1,350 DEG C to obtain the required high-Q microwave medium ceramic materials of rock-salt structures.

The invention discloses a W-waveband dual polarized slot antenna working in a TM210 resonant mode and a feed network. A radiating part and a feed part are respectively composed of a radiation chamberand a substrate integrated waveguide. Characteristics of high Q-value and low loss of a metal radiating chamber and characteristics of easy machining and easy integration are combined. A metal chamberis used as a radiator which has high radiation efficiency and improves integral efficiency of the antenna. The substrate integrated waveguide is used as a feed structure and has advantages of easy machining, relatively simple realization of a multilayer structure, and can remarkably reduce cost when compared with a metal waveguide slot feed network. The upper surface of the metal radiator is provided with four independent radiating channels, and the lower surface is provided with a resonant chamber for coupling signals of a horizontal polarized feed structure and a vertical polarized feed structure into four independent channels, thereby realizing one-to-four same-phase feeding from a single coupling slot to four radiating channels, simplifying the feed structure and reducing complexity of the feed network.

The invention discloses a piezoelectric resonator structure, which comprises a substrate, an acoustic reflection layer, a first electrode, a piezoelectric layer and a second electrode, which are provided with a top surface, a bottom surface, a first tail end, a second tail end and a middle part respectively; the substrate, the acoustic reflection layer, the first electrode, the piezoelectric layer and the second electrode are arranged in turn from the bottom to the top; and an overlapping region of the substrate, the acoustic reflection layer, the first electrode, the piezoelectric layer and the second electrode is defined as an effective excitation region. A series of air gaps and interference structures are formed at the first tail ends and the second tail ends of the piezoelectric layer and the second electrode to improve the electrical performance of a resonator. The piezoelectric resonator structure greatly improves the Q value of the resonator nearby a parallel resonance frequency, meanwhile does not affect the Q value and parasitic mode strength of the resonator nearby a series resonance frequency, and does not reduce the electromechanical coupling coefficient of the resonator. A filter adopting the resonator structure has more predominant electrical properties such as lower pass-band insertion loss and the like.

The invention provides a method for detecting distortion degree of inrush current of a transformer, which adopts abundant high order harmonic resulting in inrush current distortion in inrush current to comprehensively reflect the distortion degree of the inrush current so as to judge whether fault current or magnetizing inrush current leads the current of the transformer to be abnormal according to the distortion degree. Therefore, the distortion degree Q is defined and the calculation method of Q is declared as follows: filtering out direct current components by a difference algorithm; and filtering out fundamental components by a cosine filter. When the judgment result is the fault current, the numerical values of a front sequence and a rear sequence of the cosine filtering are basicallyconsistent, so the Q value is small; when the judgment result is the magnetizing inrush current, the numerical values of the front sequence and the rear sequence of the cosine filtering have big discrepancy, so the Q value is big. The fault current and the magnetizing inrush current can be strictly distinguished by selecting a valve value properly. The method has higher redundancy on the criterion and can use braking with a logic product door, therefore, differential protection can not act in a delaying manner when being dropped into a transformer in fault. The invention has the advantage ofimproving the condition of low long-term correct action rate of the differential protection of the transformer.

An object of the invention is to provide a SAW device where a device size is made smaller than that of a conventional structure, has a high Q value, and is excellent in a frequency temperature characteristic in a SAW device using a quartz substrate. Therefore, IDTs 2 including pluralities of electrode fingers mutually inserted and grating reflectors 3a and 3b positioned on both sides of the IDTs 2 are disposed on a piezoelectric substrate 1. The piezoelectric substrate 1 is a quartz flat plate where a cut angle θ of a rotation Y cut quartz substrate is set to satisfy a range of −64.0°<θ<−49.3° in a counterclockwise direction from a crystal Z-axis and a propagation direction of a surface acoustic wave is set to 90°±5° to a crystal X-axis, and a surface acoustic wave to be excited is an SH wave. The IDTs 2 and the grating reflectors 3a and 3b are made from Al or alloy including Al as a main component, and when a wavelength of a surface acoustic wave is represented as λ, an electrode film thickness H / λ standardized by the wavelength is set to satisfy 0.04<H / λ<0.12.

The product comprises: an outer / inner frame, a drive electrode and a drive feedback electrode both with two group of lateral comb-tooth capacitors and movable electrodes connected to the outer frame, a drive-modal elastic beam, a detection electrode with two group of unequal vertical comb-tooth capacitors for difference detection with movable electrode connected to the inner frame, a detect-modal elastic beam as four group of combined torsion beams everyone with ends connected to former inner / outer frame respectively, and an anchor point fixed on substrate bottom and connected to the outer frame through the drive-modal beam. This invention is simple and fit to large-scale production, compatible to Z-axis gyro and accelerometer, and can be used for MIMU.

The invention discloses a bulk acoustic wave resonator and a manufacturing method thereof. The bulk acoustic wave resonator includes: an air gap outside an effective piezoelectric region, the air gapbeing located between an upper electrode and a piezoelectric layer and / or between the piezoelectric layer and a substrate, and the air gap covering an end portion of a lower electrode close to the airgap or the air gap being connected to an end portion of the lower electrode, wherein the air gap is provided with a first end close to the effective piezoelectric area, and at least part of the uppersurface, starting from the first end, of the air gap is an arc-shaped upper surface. According to the bulk acoustic wave resonator, the Q value, the effective electromechanical coupling coefficientsK2t and eff and the anti-static discharge capacity of the device are improved, meanwhile, the stress in electrodes of the device is reduced, and then the performance and the reliability of the resonator are improved.

A laminated inductor includes: a laminate constituted by multiple insulator layers; external electrodes formed on the outside of the laminate; and a coil conductor formed spirally inside the laminate, wherein the coil conductor has leaders that electrically connect to the external electrodes and a coil body other than the leaders, wherein the coil conductor has conductive patterns formed on the insulator layers, and via hole conductors that penetrate through the insulator layers and electrically connect the multiple conductor patterns, wherein all of the conductor patterns constituting the coil body are either a C-shaped pattern or line-shaped pattern, wherein the coil body has a partial structure where two or more C-shaped pattern layers are stacked together successively, and wherein the number of C-shaped patterns in the coil body is greater than that of line-shaped patterns.

Disclosed is a method for producing a magnetic core for antenna wherein thin metal strips are laminated. This method for producing a magnetic core for antenna is characterized in that a metal thin band is processed into strips having a width of the aimed magnetic core for antenna, then the thin strips are stacked through a resin layer to form a laminate, and after that the laminate is cut into a length of the aimed magnetic core for antenna.

This invention relates to semi-mode base slice integration waveguide filter applied in microwave circuit design, which comprises base, metal sticking pad, metal hole, and tank beam, wherein, metal sticking pad on medium base surface with rectangle in middle part and with two sides connected to input and output ends; locating one row of metal holes in one side in metal sticking part and other side set with tank seam; two tank beam one semi-mode base integration waveguide form one quarter of wave length resonance.

The invention discloses a frequency selective surface with high selectivity and angle stability, and aims to solve the technical problem that the existing frequency selective surface cannot realize high selectivity and angle stability concurrently. The frequency selective surface is formed by M*N passive resonant units arranged periodically, wherein M is greater than or equal to 3, and N is greater than or equal to 3; each passive resonant unit adopts an up-down laminated structure consisting of two layers of dielectric substrates; radiation patches of different structures are printed on the surfaces of the two layers of dielectric substrates; each dielectric substrate is provided with a dielectric through hole structure; and the high selectivity and the angle stability of the frequency selective surface are realized due to the mutual coupling between the radiation patches, the mutual coupling between the self structures of the radiation patches, and star-like gaps on the radiation patches. According to the frequency selective surface, the stop band is changed from 0dB to minus 20dB within a frequency range of 23.6-23.9GHz; meanwhile, good passband characteristic is kept within an angle range of 0-45 degrees and within a frequency range of 24-26GHz, so that the frequency selective surface can be used for the fields of reflector antennas, satellite communication and the like.

The invention discloses a narrow-linewidth adjustable external cavity laser based on a silicon substrate and relates to the field of integrated optics in optical communication. The narrow-linewidth adjustable external cavity laser based on the silicon substrate is characterized in that a light source is connected with a first MMI (man-machine interface) by virtue of a silicone substrate optical coupler; the first MMI is respectively connected with input terminals of two arms of an asymmetric Mach-Zehnder interferometer, and output terminals of the two arms are connected with a third MMI by virtue of a second MMI; the third MMI is respectively connected with input terminals of an add channel and a drop channel of a silicon substrate micro-ring filter; and output terminals of the add channel and the drop channel are respectively connected with a first grating coupler and a second grating coupler. Free spectral range of the silicon substrate micro-ring filter is 5-50nm, and the free spectral range of the asymmetric Mach-Zehnder interferometer is 1-4 times that of the silicon substrate micro-ring filter. The narrow-linewidth adjustable external cavity laser based on the silicon substrate has the advantages that tuning range of wide wavelength can be widened, so that laser light can obtain narrow linewidth; and the narrow-linewidth adjustable external cavity laser based on the silicon substrate is a miniaturized cavity laser and is low in manufacturing cost, easy to integrate and low in technological tolerance, thereby being applicable to popularization.

The invention provides a VCO tuning curve compensation method. In the method, a negative resistance amplifier and an inductor are connected with both ends of a variable capacitor to form a parallel-connection structure, wherein the variable capacitor structure is a five-end AMOS capacitance network, and one end is a tuning curve compensation control end of the AMOS capacitance network, which changes the equivalent capacitance of the AMOS capacitance network by adjusting the DC voltage of a control end to obtain an approximate linearized change curve with respect to VCO output frequency and VCO control voltage, thereby realizing the VCO tuning curve compensation, improving the VCO stability and enabling a VCO circuit module to work in the area having a higher Q value. The invention also provides a VCO circuit module of a differential circuit structure formed by the method. The AMOS capacitance network comprises four AMOS varactors and one RC low-pass filter, wherein the four AMOS varactors are connected in series two by two and are symmetrically arranged, and the specific arrangement mode includes grid electrode series connection and substrate series connection. The VCO module performs voltage control on the AMOS varactors to change the oscillator frequency, and realizes the tuning curve compensation to enable the frequency tuning curve to be approximately linearized by changing the DC voltage of the compensation control end of the tuning curve, thereby realizing a larger frequency tuning range.

A plane nuclear magnetic resonance micro coil micro detector is disclosed that consists of plane nuclear magnetic resonance micro coil [1] and micro flow channel structure [2]. It adopts the integral design; the plane nuclear magnetic resonance micro coil [1] is processed on the surface of the polyimides substrate [3], the micro flow channel structure [2] is rectangle structure and processed on the other surface of the polyimides substrate [3], it is embedded in the inner of the polyimides substrate [3] which is under the plane nuclear magnetic resonance micro coil [1] by the polyimides slice [4]. When it is working, the plane nuclear magnetic resonance micro coil works as the radio-frequency exciter and the signal receiver at the same time, and actuates the sample to be measured to generate the NMR signal and obtain the NMR wave spectrum. The invention can fulfill the detecting requirements of lossless and real-time, the molecular structure and information of images-structure of detecting sample can be supplied. It can be used in fields of analysis detection of tiny sample, real-time dynamic monitoring of chemical reaction, and biological texture and growth status of cell.

The invention relates to a folding self-die substrate integrated waveguide which can be applied to the design of microwave millimeter wave circuits or the design of microwave millimeter wave integrated circuits. A filter is in a multi-layered structure and respectively comprises a front metal patch (3), an upper medium substrate (1), a middle metal layer (4), a lower medium substrate (2) and a bottom metal layer (5) from top to bottom, wherein an input end (8) and an output end (9) are respectively arranged at both ends of a self-die substrate integrated waveguide; a row of first metalized through holes (7) is arranged at one side of the upper medium substrate (1) and the lower medium substrate (2) of the self-die substrate integrated waveguide to form the side wall of the waveguide and is connected with the front metal patch (3), the middle metal layer (4) and the bottom metal layer (5); another row of second metalized through holes (6) is arranged at the other side of the lower medium substrate (2) and is connected with the middle metal layer (4) and the bottom metal layer (5) to form the H-surface metal wall of the waveguide; and the filter is provided with groove gaps (10) on the front metal patch (3) or the middle metal layer (4).

The invention discloses a miniaturized substrate integrated waveguide circulator, and relates to the technology of microwave. A circulator centre junction part and a micro-strip converting and connecting part arranged at an output port are arranged on a medium base plate of which two sides are respectively provided with a metal layer, wherein the centre junction part comprises three substrate integrated waveguide structures which are mutually to be 120 degrees and a center ferrite body column, the micro-strip converting and connecting part comprises a linear gradually-changing micro-strip line arranged at a first port and two composite gradually-changing micro-strip lines symmetrically arranged at a second port and a third port along with an axis, the linear gradually-changing micro-strip line is arranged on a symmetry axis, each composite gradually-changing micro-strip line comprises an arc gradually-changing part and a linear gradually-changing part, the centre junction part is respectively connected with a 50-ohm micro-strip line interface by the linear gradually-changing micro-strip line and the two composite gradually-changing micro-strip lines, and the two composite gradually-changing micro-strip lines are arranged in a waveguide structure. The miniaturized substrate integrated waveguide circulator is better in performance, smaller in volume, lighter in weight, and higher in integrated level.

The invention provides a high-frequency surface acoustic wave resonator and a preparation method thereof. The high-frequency surface acoustic wave resonator comprises a high-wave-velocity supporting substrate, a piezoelectric film located on the upper surface of the high-wave-velocity supporting substrate and a top electrode located on the upper surface of the piezoelectric film, wherein the wavevelocity of bulk waves propagated in the high-wave-velocity support substrate is greater than the wave velocity of target elastic waves propagated in the piezoelectric film. According to the high-frequency surface acoustic wave resonator and the preparation method thereof provided by the invention, the problem that the working frequency of an existing surface acoustic wave resonator is relativelylow is solved.

The invention provides a bulk acoustic wave resonator which comprises a substrate, an acoustic mirror structure, a lower electrode, a piezoelectric film structure and an upper electrode which are sequentially arranged from bottom to top. The upper surface and / or the lower surface of the upper electrode and / or the lower electrode are / is provided with an accessory structure, and the accessory structure is provided with protrusions or pits in the direction perpendicular to the surface of the upper electrode.