The invention discloses a
silicon-based structure of a micro
heat pipe and a
processing technology, solves the problems that in the prior art, a
metal micro
heat pipe for heat dissipation of a
silicon-based
chip increases the thickness of the
chip, and interface stripping and
cracking are prone to occurring, and has the beneficial effects that heat dissipation of the micro
heat pipe is achieved, and meanwhile the thickness of the
silicon-based
chip is effectively controlled. According to the specific scheme, the silicon-based structure of the micro heat
pipe comprises a silicon-based chip substrate and a
glass sheet, the silicon-based chip substrate and the
glass sheet are attached together, a liquid absorption core is integrated on the side, facing the
glass sheet, of the silicon-based chip substrate, and the liquid absorption core comprises an
evaporation section, a heat insulation section and a condensation section which are sequentially connected; the length of the heat insulation section and the condensation section is larger than that of the
evaporation section, the
evaporation section comprises a plurality of working medium channels, all the working medium channels communicate with the heat insulation section, the working medium channels are arranged in an array mode, and every two adjacent working medium channels communicate with each other.