207 results about "Surface acoustic wave resonators" patented technology

A surface acoustic wave resonator comprises a multi-layer piezoelectric substrate including a carrier substrate, a layer of a first dielectric material disposed on the carrier substrate, and a layer of piezoelectric material disposed on the layer of the first dielectric material, interdigital transducer electrodes disposed on the layer of piezoelectric material and including interleaved electrode fingers, and a layer of a second dielectric material disposed on a central interleaved region of the interleaved electrode fingers, gap regions of the interdigital transducer electrodes being either free of the layer of the second dielectric material or having a thinner layer of the second dielectric material than the central interleaved region to reduce spurious signals in an admittance curve of the surface acoustic wave resonator.

The invention relates to the technical field of fault detection, in particular to a high-voltage connector loosening fault detection method and device and an automobile, and the method comprises the following steps: forming a surface acoustic wave resonator array based on an interdigital transducer array, an acoustic wave resonator and a flexible waveguide; butting a signal source radio frequency cable with the pin interdigital electrode chip, triggering data acquisition, performing Fourier transform on original data, and judging the loosening risk of the connector according to each parameter threshold value; carrying out three-dimensional modeling on the connector plugging interface, carrying out modal analysis on the model, and obtaining surface acoustic wave frequencies, group velocities and phase distribution under different pre-tightening forces so as to identify a contact force abnormal region; based on a multi-stage early warning mechanism, rapid locking is achieved through electrorheological fluid, and displacement is finely adjusted through a magnetostrictive rod. According to the invention, the loosening hidden danger can be quickly and accurately locked, a tight protection system is constructed by multi-stage early warning and mechanical self-locking, and the loosening risk of the high-voltage connector can be greatly reduced from early warning to active intervention.

The invention discloses a surface acoustic wave resonator and an electronic device, which are applied to the technical field of surface acoustic waves, an interdigital transducer comprises two outer-layer bus bars arranged oppositely and at least two inner-layer bus bars arranged oppositely, the inner-layer bus bars are arranged between the outer-layer bus bars, and the outer-layer bus bars and the inner-layer bus bars are both parallel to the length direction; the inner-layer bus bar is provided with a plurality of first protruding parts protruding out of the edge of the inner-layer bus bar in the width direction, the first protruding parts are arranged in the length direction, so that an inner-layer edge sound velocity area is formed on at least one side of the inner-layer bus bar based on the first protruding parts, and an inner-layer sound velocity area is formed on the basis of the inner-layer bus bar; the sound velocity of the inner-layer edge sound velocity area is smaller than that of the inner-layer sound velocity area. The sawtooth structure formed by the plurality of first protruding parts can enable sound waves to generate diffuse reflection during transverse propagation, so that the Q value of a transverse clutter mode is reduced, and the generation of a transverse mode is effectively inhibited.

The invention discloses a surface acoustic wave resonator and a filter. The surface acoustic wave resonator comprises a substrate; the interdigital transducer is positioned on one side of the substrate; the reflecting grating and the interdigital transducer are arranged on the same layer, and the reflecting grating is located on the two sides of the interdigital transducer in the first direction; the plurality of reflecting gratings are arranged along a first direction and extend along a second direction; in the first direction, a reflecting grating gap is formed between any two adjacent reflecting gratings; the first direction and the second direction intersect and are parallel to the plane where the substrate is located; the orthographic projection of the acoustic impedance structure on the plane where the substrate is located is at least overlapped with the orthographic projection of the reflecting grating gap on the plane where the substrate is located; the acoustic impedance of the acoustic impedance structure is different from the acoustic impedance of the reflecting grating. By adopting the technical means, the acoustic impedance structure is arranged, and the acoustic impedance of the acoustic impedance structure is different from that of the reflecting grating, so that a stray mode in the resonator can be inhibited, and the performance of the surface acoustic wave resonator is further improved.

Aspects and embodiments disclosed herein include a surface acoustic wave resonator comprising a multilayer piezoelectric substrate and interdigital transducer (IDT) electrodes disposed on an upper surface of the multilayer piezoelectric substrate, the IDT electrodes having at least partially rounded upper sides.

The embodiment of the invention provides a surface acoustic wave resonator, a filter, a radio frequency front-end module and electronic equipment, relates to the technical field of radio frequency, and is used for improving the suppression effect on a miscellaneous mode in the SAW filter. The surface acoustic wave resonator comprises a substrate, and a low-sound-velocity layer, a first high-sound-velocity layer, a piezoelectric layer and an interdigital electrode which are arranged on the same side of the substrate. And the material of the piezoelectric layer comprises LiNbO3 single crystals. The first high-sound-velocity layer is arranged on the side, away from the substrate, of the low-sound-velocity layer, the piezoelectric layer is arranged on the side, away from the substrate, of the first high-sound-velocity layer, and the interdigital electrode is arranged on the side, away from the substrate, of the piezoelectric layer. The first high-sound-velocity layer is arranged between the low-sound-velocity layer and the piezoelectric layer, so that the intensity of a rayleigh mode on the low-frequency side of a main mode in the surface acoustic wave resonator can be effectively inhibited.

The present disclosure provides a multi-coefficient coupled-mode surface acoustic wave resonator and a manufacturing method therefor. During operation of the surface acoustic wave resonator, at least two different piezoelectric coefficients are coupled and jointly excite acoustic waves. The multi-coefficient coupled-mode surface acoustic wave resonator comprises: a substrate; a piezoelectric layer, provided on the substrate; an electrode unit, provided on the surface of the piezoelectric layer and comprising at least one interdigital electrode pair; and a reflective grating unit, comprising at least two grating structures which are symmetrically arranged on the two sides of the electrode unit, wherein the equivalent density of the electrode unit is greater than 4000kg / m3. The electric field distribution is changed by changing the mass loading effect of the interdigital electrode pair and the ratio of the electrode wavelength to the thickness of the piezoelectric layer, such that at least two piezoelectric coefficients are mutually coupled to jointly excite acoustic waves, thus achieving the surface acoustic wave resonator having an electromechanical coupling coefficient exceeding 25%.

The invention discloses a surface acoustic wave resonator and a filter. The resonator comprises an interdigital transducer arranged on a piezoelectric substrate, reflecting gratings located on the two sides of the interdigital transducer and at least one laminated protection structure arranged in the outer side area of the reflecting gratings. The laminated protection structure comprises an interdigital capacitor arranged on the surface of the piezoelectric substrate and an organic material layer covering the interdigital capacitor; two bus bars of the interdigital capacitor are electrically connected with two signal ports of the resonator respectively, and the interdigital capacitor is connected with the interdigital transducer in parallel. According to the invention, the anti-ESD capability of the resonator can be effectively improved under the condition of not increasing additional process steps and not changing the electrode structure of the normal working area of the resonator.

The present application relates to bolt state monitoring technical field, disclose a kind of embedded wireless passive bolt tightness state monitoring method based on surface acoustic wave technology, specifically includes the following steps: based on the real-time acquisition frequency drift amount of surface acoustic wave resonator, and the looseness risk of bolt is judged in real time, generates looseness warning signal and safety signal;Based on warning signal, the frequency drift amount before generating warning signal is analyzed at change rate, and the change rate degree is judged;Based on the change rate degree judging result, the time point when frequency drift amount reaches frequency drift amount risk value is predicted.The present application can judge bolt looseness risk in real time, generates warning signal in time when bolt appears looseness sign, reminds relevant personnel to pay attention to bolt state, avoid bolt looseness further development and not be perceived, to reduce the possibility of equipment failure, accident.

The application provides a manufacturing method of a surface acoustic wave resonator and the surface acoustic wave resonator, and the manufacturing method comprises the following steps: providing a substrate; forming a plurality of interdigital electrode grooves and mass block grooves on the substrate, at least one mass block groove in communication with the interdigital electrode groove is arranged on each interdigital electrode groove; and arranging metal material in the interdigital electrode groove and the mass block groove to integrally form an interdigital electrode and a mass block. By forming a plurality of interdigital electrode grooves and mass block grooves on the substrate first, and then arranging metal material in the interdigital electrode groove and the mass block groove to integrally form an interdigital electrode and a mass block, the interdigital electrode and the mass block are formed simultaneously through one step, the processing steps are reduced, the production efficiency is improved, there is no separated interface between the integrally formed interdigital electrode and the mass block, the suppression effect of the mass block on the second harmonic wave can be ensured, the stability of the surface acoustic wave resonator is improved, and the product yield is ensured.

The invention relates to the technical field of sensors, and discloses a fire-fighting fire real-time monitoring method and system based on intelligent sensing, and the method comprises the steps: deploying a fire monitoring device in a target area of a to-be-monitored fire-fighting fire, and the fire monitoring device comprises a cavity light force sensor, a surface acoustic wave resonator and a gas sensor; the method comprises the following steps: acquiring sensor data in a target area through a fire monitoring device, and performing oscillation rhythm synchronization on the sensor data to obtain an oscillation phase matrix; the oscillation phase matrix is mapped into a three-dimensional toroidal manifold, topology reconstruction is carried out on the three-dimensional toroidal manifold, a risk field manifold in the target area is obtained, and the risk field manifold comprises curvature distribution, coherent group base vectors and risk intensity; and analyzing a fire abnormal region, a fire spreading path and a fire spreading duration in the target region by using the risk field manifold. According to the method, the spatial path topology and the time evolution quantitative index of fire spreading can be synchronously generated.

Provided in the present disclosure are a multi-coefficient coupled mode-based surface acoustic wave resonator and a manufacturing method therefor, which can be applied to the technical field of resonators. The multi-coefficient coupled mode-based surface acoustic wave resonator comprises a substrate; a piezoelectric layer arranged on the substrate, the tangential direction of the piezoelectric layer being a Z tangential direction, a piezoelectric coefficient matrix that corresponds to the piezoelectric layer at least comprising a non-zero first piezoelectric coefficient e15 and second piezoelectric coefficient e16 and, under the action of a transverse electric field and on the basis of the first piezoelectric coefficient e15 and the second piezoelectric coefficient e16, the coupled mode of the piezoelectric layer being excited; and at least two interdigital electrodes arranged on the piezoelectric layer, the ratio of the center distance of the two adjacent interdigital electrodes to the thickness of the piezoelectric layer being 0.25-5, and the ratio of the thickness of each interdigital electrode to the thickness of the piezoelectric layer being less than 0.5.

The invention relates to the technical field of radio frequency, in particular to a pressure detection method and device based on a single surface acoustic wave resonator and a storage medium, and the method comprises the steps: S1, obtaining the temperature sensitivity coefficient information and strain sensitivity coefficient information of the resonant frequency and anti-resonant frequency of a piezoelectric substrate; s2, determining a target tangential range according to the temperature sensitivity coefficient information and the strain sensitivity coefficient information; s3, calculating and determining a strain-frequency incidence relation based on the target tangential range; and S4, detecting and determining pressure information according to the strain-frequency association relationship. Through the resonant frequency information and the anti-resonant frequency information of the piezoelectric substrate, pressure inspection and temperature compensation are realized, and only one resonator is needed, so that the overall size of the device is small, and the problem that the temperatures of a multi-resonator structure are different does not exist.

An apparatus is disclosed for a surface acoustic wave (SAW) device a dual mode (DMS) resonator configuration with near synchronous operation. One aspect comprises a piezoelectric material, a first reflector disposed over the piezoelectric material, a second reflector disposed over the piezoelectric material, and a plurality of interdigitated transducers (IDTs) disposed over the piezoelectric material and positioned between the first reflector and the second reflector, wherein a magnitude of a pitch of electrode fingers in the first reflector and the second reflector is higher than a pitch of electrode fingers in the plurality of interdigitated transducers, wherein a variation of the pitch of the electrode fingers in the plurality of interdigitated transducers is less than 3% across the plurality of interdigitated transducers.

The invention discloses a surface acoustic wave resonator and a manufacturing method thereof, and the manufacturing method comprises the steps: providing a piezoelectric substrate which comprises a first region and a second region; forming a first metal layer on the piezoelectric substrate, patterning the first metal layer to form a first interdigital transducer in the first region and a first lead connected with the first interdigital transducer, and forming a second lead in the second region; forming a first passivation layer covering the first interdigital transducer, wherein the first passivation layer has a first thickness; and forming a second metal layer covering the first passivation layer, patterning the second metal layer to form a first bonding pad above the first lead in the first region, and forming a second interdigital transducer and a second bonding pad above the second lead in the second region. According to the invention, the lead connected with the second interdigital transducer is formed while the first interdigital transducer is formed, and the first bonding pad and the second bonding pad are formed while the second interdigital transducer is formed, so that the process steps and cost of the bonding pad layer are saved.

This application provides a surface acoustic wave (SAW) resonator and an electronic device. The SAW resonator includes interdigital transducers; along the SAW propagation direction, the duty cycle of the interdigital transducers gradually decreases, while the finger spacing gradually increases. This gradual decrease in duty cycle and increase in finger spacing along the SAW propagation direction helps reduce the excitation of stray modes and decrease the nonlinear harmonics generated by the coupling of the stray mode strain field E1 and the electrostatic field E2, effectively suppressing the generation of nonlinear harmonics and improving nonlinear effects.

An apparatus for a surface acoustic wave (SAW) apparatus having a dual mode (DMS) resonator configuration with near-synchronous operation is disclosed. One aspect includes a piezoelectric material, a first reflector disposed over the piezoelectric material, a second reflector disposed over the piezoelectric material, and a plurality of interdigital transducers (IDTs) disposed over the piezoelectric material and positioned between the first reflector and the second reflector, wherein a pitch of the electrode fingers in the first reflector and the second reflector is greater than a pitch of the electrode fingers in the plurality of interdigital transducers, and wherein a variation in the pitch of the electrode fingers in the plurality of interdigital transducers is less than 3% across the plurality of interdigital transducers.

A surface acoustic wave resonator comprising a multilayer piezoelectric substrate including a layer of piezoelectric material, and interdigital transducer (IDT) electrodes disposed on the layer of piezoelectric material, the IDT electrodes including a first and second bus bars, a first plurality of electrode fingers extending from the first bus bar toward the second bus bar, and a second plurality of electrode fingers extending from the second bus bar toward the first bus bar and interleaved with the first plurality of electrode fingers in a central region of the resonator, gap regions defined between tips of the first plurality of electrode fingers and the second bus bar and between tips of the second plurality of electrode fingers and the first bus bar, regions of piezoelectric material forming the layer of piezoelectric material in the gap regions having a lesser permittivity and / or piezoelectricity than the piezoelectric material in the central regions.

The present invention discloses a surface acoustic wave resonator and filter. The resonator comprises an interdigital structure comprising a first interdigital region and a second interdigital region; the first interdigital region comprises a plurality of first fingers, and the second interdigital region comprises a plurality of second fingers; a reflective grating disposed on either side of the interdigital structure in a first direction, the reflective grating being coplanar with the plurality of first fingers and the plurality of second fingers; the reflective grating and the plurality of first fingers intersecting perpendicularly with each other, and the reflective grating and the plurality of second fingers intersecting perpendicularly with each other; in the first direction, each first finger is arranged opposite each second finger, with a gap formed between the first and second fingers; in the second direction, the plurality of first fingers are arranged in parallel, and the plurality of second fingers are arranged in parallel; the first direction is perpendicular to the second direction. The present invention can reduce lateral energy leakage in the first direction and suppress high-order spurious modes of the surface acoustic wave resonator in the first and second directions.

A surface acoustic wave resonator (100) comprises a layered substrate including a carrier substrate (110) and a dielectric layer (112) having a low acoustic velocity. Another dielectric layer (122) is disposed on a piezoelectric layer (113) and interdigitated electrodes (131, 132) having an acoustic velocity lower than the acoustic velocity of the carrier substrate (110) and a positive temperature coefficient of frequency.

An apparatus for a surface acoustic wave (SAW) device having an aluminum nitride substrate layer is disclosed. In one aspect, a SAW includes: a substrate layer comprising an aluminum nitride (AlN) substrate layer, an electrode structure including interdigitated transducers, and a piezoelectric layer disposed between the electrode structure and the substrate layer. In some aspects, the piezoelectric layer is lithium niobate or lithium tantalate.

This application discloses a surface acoustic wave (SAW) resonator, filter, and electronic device, belonging to the field of semiconductor technology. The SAW resonator includes: a substrate; a piezoelectric layer located on one side of the substrate along its thickness direction; an interdigital transducer located on the side of the piezoelectric layer opposite to the substrate, the interdigital transducer including a plurality of electrode fingers extending along a first direction and spaced apart along a second direction; the overlapping region of the plurality of electrode fingers along the second direction constitutes an active region; the thickness direction, the first direction, and the second direction are mutually perpendicular; a functional layer located in the active region and between the plurality of electrode fingers, the SAW velocity of the functional layer being greater than the SAW velocity of the piezoelectric layer. This application can suppress stray modes and improve the performance of the resonator.

The invention discloses a surface acoustic wave resonator and electronic equipment, and belongs to the technical field of surface acoustic wave devices. The surface acoustic wave resonator includes: a piezoelectric layer; the interdigital transducer is arranged on one side of the piezoelectric layer, the interdigital transducer comprises two interdigital electrodes which are oppositely arranged in the first direction, each interdigital electrode comprises a bus bar, a first interdigital and a second interdigital, and the first interdigital and the second interdigital are connected with the bus bar and extend in the first direction; the first interdigitals and the second interdigitals on the same interdigital electrode are alternately arranged along a second direction intersected with the first direction, and the first interdigitals and the second interdigitals on the two interdigital electrodes are oppositely arranged and have gaps; the length of the first interdigitals is greater than that of the second interdigitals, the first interdigitals at least extend along the second direction in a virtual gap region to form an additional phase shift element, and the virtual gap region is a region corresponding to the gap and extending along the second direction. Transverse energy leakage of the surface acoustic wave can be reduced, and the performance of the surface acoustic wave resonator can be improved.

The invention relates to a surface acoustic wave resonance device, a filter, and a duplexer or multiplexer. The surface acoustic wave resonance device includes: a piezoelectric layer; the at least two resonance units are arranged on the surface of the piezoelectric layer, each resonance unit comprises an interdigital electrode and reflection structures located on the two sides of the interdigital electrode in the propagation direction of the surface acoustic wave, and the at least two resonance units are connected in parallel; and the phases of the surface acoustic wave signals corresponding to the at least two resonance units are the same. In the embodiment of the invention, the at least two resonance units are connected in parallel, and the phases of the corresponding surface acoustic wave signals are the same, so that the transverse wave modes of different resonance units can be mutually suppressed, and the transverse wave suppression effect of the surface acoustic wave resonance device is improved.

A radio frequency multiplexer comprises a piezoelectric substrate, a first surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate and having a first metal layer formed of a first metal and a second metal layer disposed on the first metal layer and formed of a second metal having a higher density than the first metal, and a second surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate and having a first metal layer formed of the first metal, but lacking the second metal layer.

This application discloses a surface acoustic wave (SAW) resonator, filter, and electronic device, relating to the field of resonators. The SAW resonator includes: a piezoelectric substrate; interdigitated electrodes located on one side surface of the piezoelectric substrate; the interdigitated electrodes include first and second fingers alternately arranged along a first direction, the first and second fingers extending along a second direction, the first and second directions intersecting in a plane parallel to the piezoelectric substrate; a first groove is formed in the surface of the piezoelectric substrate between adjacent first and second fingers; two reflective gratings are disposed on the same side surface of the piezoelectric substrate as the interdigitated electrodes; in the first direction, the interdigitated electrodes are located between the two reflective gratings; the reflective gratings include multiple third fingers arranged sequentially along the first direction; a second groove is formed in the surface of the piezoelectric substrate between adjacent third fingers. The technical solution of this application can improve the steepness of the filter in the transition band.

The present application belongs to the technical field of resonators. Provided are a surface acoustic wave resonator, a filter, a radio frequency front-end module and an electronic device. The surface acoustic wave resonator comprises an interdigital transducer, the interdigital transducer comprising a first bus bar, a second bus bar, a plurality of first electrode fingers, and a plurality of second electrode fingers. A first dielectric block is provided between each first electrode finger and the second bus bar, the first dielectric block being separately and fixedly connected to the first electrode finger and the second bus bar. A second dielectric block is provided between each second electrode finger and the first bus bar, the second dielectric block being separately and fixedly connected to the second electrode finger and the first bus bar. The first dielectric blocks reduce the vibration amplitude of the first electrode fingers, and the second dielectric blocks reduce the vibration amplitude of the second electrode fingers. Thus, reducing the vibration amplitude of the first electrode fingers and the vibration amplitude of the second electrode fingers can suppress the shear horizontal (SH) mode and coupled modes of the surface acoustic wave resonator.

The invention relates to the technical field of semiconductors, in particular to a surface acoustic wave resonance device, which comprises a substrate comprising a piezoelectric layer; the interdigital electrode is located on the piezoelectric layer, and the interdigital electrode sequentially comprises a first bus, a first gap part, an overlapping part, a second gap part and a second bus in the first direction; the piezoelectric layer sequentially comprises a first part, a first failure part, an effective part, a second failure part and a second part in the first direction, and the electromechanical coupling effect of the effective part is effective; the first bus is located on the first portion, the first gap portion is located on the first failure portion, the overlapping portion is located on the effective portion, the second gap portion is located on the second failure portion, and the second bus is located on the second portion. On the premise of not obviously influencing insertion loss, power tolerance and chip size, high-order nonlinearity, such as cubic nonlinearity, caused by electromechanical coupling outside a resonance area is effectively inhibited. In addition, the failure part extends to the bus, so that gap mode can be effectively inhibited.

This application relates to a surface acoustic wave resonator and a surface acoustic wave filter, including an interdigital transducer, which includes a first busbar, and first electrode fingers and first dummy electrode fingers alternately arranged and connected to the first busbar; a second busbar, and second electrode fingers and second dummy electrode fingers alternately arranged and connected to the second busbar. A first gap is provided between the first electrode finger and the second dummy electrode. A second gap is provided between the second electrode finger and the first dummy electrode finger. Each first gap is arranged along a first direction. Each second gap is arranged along a second direction. An angle between the first direction and a third direction is different from that between the second direction and the third direction. By setting the angle between the first and third direction to be different from that between the second and third direction in this application, lateral energy leakage in surface acoustic waves can be blocked, transverse mode ripples in the surface acoustic waves can be suppressed, and electrical performance can be improved.

Aspects and embodiments disclosed herein include an acoustic wave device comprising a substrate, a pair of IDT electrodes formed on the substrate, fingers of one IDT electrode arranged interleaved with fingers of the other IDT electrode, reflectors formed on the substrate, one of the reflectors being adjacent to one side of the pair of IDT electrodes and another reflector being adjacent to the opposite side of the pair of IDT electrodes so as to interpose the pair of IDT electrodes therebetween, the reflectors and the pair of IDT electrodes arranged along a propagation direction of a main acoustic wave, and a dielectric film covering the pair of IDT electrodes and the reflectors, the dielectric film having a first thickness covering at least a portion of the reflectors, the dielectric film having a second thickness covering the pair of IDT electrodes, the first thickness being different from the second thickness.