A passive wireless surface acoustic wave torque sensor with temperature and vibration self-compensation

A technology of torque sensor and surface acoustic wave, which is applied in the field of passive wireless torque sensor, can solve the problems of SAW device deformation and affecting measurement results, etc., and achieve the effect of small size and large application potential

Inactive Publication Date: 2011-12-21
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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Problems solved by technology

Similarly, the shaft on which the surface acoustic wave device is pasted vibrates, and vibration interference will cause deformation of the SAW device, thereby affecting the final measurement result

Method used

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  • A passive wireless surface acoustic wave torque sensor with temperature and vibration self-compensation
  • A passive wireless surface acoustic wave torque sensor with temperature and vibration self-compensation
  • A passive wireless surface acoustic wave torque sensor with temperature and vibration self-compensation

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Embodiment Construction

[0016] The specific embodiment of the present invention is described in detail below:

[0017] like figure 1 Shown is the sensor unit used in the present invention. The surface acoustic wave single-ended resonator is mainly composed of a quartz piezoelectric substrate, an interdigital transducer (IDT), and a reflection grid.

[0018] The four resonators are pasted two by two on the two platforms of the elastic shaft, such as figure 2 . Resonator 1 and resonator 2 are located on one side of the axis, and resonator 3 and resonator 4 are on the other side of the platform. It is pasted on the surface of the platform at 45° to the axis to respond to the surface strain of the elastic axis.

[0019] (1) Temperature compensation scheme

[0020] Only one surface acoustic wave resonator is arranged on the shaft. Under the action of the measured force F and the ambient temperature T, the output frequency of the sensor can be approximately expressed as:

[0021] f ...

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Abstract

The invention relates to a sensor suitable for passive wireless measurement of torque. The sensor has temperature and vibration compensation functions. The passive wireless torque sensor of the present invention includes four surface acoustic wave resonators with different center frequencies, a small antenna and an elastic shaft of the sensor. The surface acoustic wave resonator of this sensor uses quartz as the substrate of the resonator. The interdigital transducer and reflection grid are deposited on the substrate, and the piezoelectric effect and inverse piezoelectric effect are used to excite and receive the surface acoustic wave. The four surface acoustic wave resonators of the torque sensor are pasted on the elastic shaft according to the design angle. When torque is applied to the elastic shaft, the four surface acoustic wave resonators can respectively detect the deformation in the pasting direction. The four deformations can be obtained by processing the temperature , Torque information after vibration compensation. The four surface acoustic wave resonators are connected with the antenna, which can realize the wireless transmission of force state information. The invention has the advantages of simple structure, small size, light weight, high precision, passive wireless, and is suitable for passive wireless measurement of torque of important shaft parts such as aerospace, transmission machinery, precision machine tools, and heavy vehicles.

Description

1. Technical field [0001] The invention relates to a temperature and vibration self-compensating passive wireless torque sensor, which adopts the surface acoustic wave technology. As one of the main products of MEMS, torque sensing sensor has broad application prospects in civil industry and national defense and military industry. 2. Background technology [0002] Torque is an important working parameter of rotating power machinery, and the torque signal is the main source of information for power machinery operation status monitoring, safety and optimal control, fault prediction, and life assessment. Accurate torque measurement can provide scientific data for the design of the transmission device, carry out necessary inspections on whether the power output of the power machinery reaches the design value, carry out necessary monitoring and fault alarms on the operation status of the power machinery, and provide equipment components Provide basic data for damage cause analys...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L3/00
Inventor 徐春广周世圆张运涛肖定国赵新玉郝娟许寒晖孔涛王立久
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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