210 results about "Quartz substrate" patented technology

The invention belongs to the technical field of optical film measurement, and particularly relates to a method and system for measuring the thickness of a quartz substrate optical film. The method comprises the following steps: acquiring a surface coordinate model of a quartz substrate, and dividing a film area into a parallel measurement area and a non-parallel measurement area; performing parallel measurement and non-parallel measurement on the two types of regions respectively to obtain first thickness data and second thickness data which jointly form original thickness data; determining measurement parameters corresponding to the original thickness data acquisition process, wherein each measurement parameter represents the offset of the corresponding measurement point; and correcting the original thickness data based on the measurement parameters to generate corrected thin film thickness data, and taking the corrected thin film thickness data as the thickness of the thin film area. According to the invention, dynamic error correction is carried out on the original thickness data, the accuracy and reliability of the thickness data of the thin film are improved, and meanwhile, comprehensive scanning of the irregular thin film is realized through a partition measurement strategy.

The invention provides an interposer and a preparation method thereof, and a photoelectric co-packaging structure, and the interposer comprises a substrate which comprises a glass substrate or a quartz substrate; the functional layer is arranged on the substrate, the refractive index of the functional layer is higher than that of the substrate, and the optical structure arranged on the functional layer at least comprises a micro-nano optical structure. The interposer realizes integration of an optical structure through the preset functional layer, and solves the problems of difficult micro-nano processing, difficult alignment, low integration level and the like of a glass material.

Aspects and embodiments disclosed herein include a surface acoustic wave device comprising a quartz substrate, a layer of a first lithium-based piezoelectric material disposed on an upper surface of the quartz substrate, a layer of a second lithium-based piezoelectric material formed of a material different from the first lithium-based piezoelectric material disposed on an upper surface of the layer of the first lithium-based piezoelectric material, and interdigital transducer electrodes disposed on an upper surface of the layer of the second lithium-based piezoelectric material.

The invention belongs to the technical field of inertial devices, and particularly relates to a quartz base plane differential type quartz vibrating beam accelerometer and a packaging method thereof.The accelerometer comprises a shell, a circuit board, a VIA chip, a quartz substrate and a conductive contact pin, the interior of the shell is a vacuum cavity, the quartz substrate is composed of a quartz body, a rectangular step and a solder film, and the conductive contact pin is connected with the circuit board; the rectangular step is used for positioning and fixing the VIA chips, the solder film realizes welding connection of the chips, the two VIA chips output positive and negative signals through differential detection, and the circuit board provides driving signals for the chips and amplifies the output signals; the conductive pin transmits a signal and receives a control signal to regulate and control the working state of the chip. Through the vacuum cavity design, the differential detection technology, the high-precision assembly method and the reliable packaging technology, the problems that in the prior art, instability is caused by mismatching of the gluing technology and the thermal expansion coefficient, and the performance is affected by assembly errors are solved, and the measurement precision, the anti-interference capacity and the assembly stability of the accelerometer are improved.

The invention discloses a transmission type liquid crystal terahertz spatial light modulator with a large switch ratio. The transmission type liquid crystal terahertz spatial light modulator structurally comprises an upper-layer quartz substrate, an upper-layer metal structure, a liquid crystal layer, a lower-layer metal structure and a lower-layer quartz substrate in sequence from top to bottom, the upper-layer metal structure is adhered to the back surface of the upper-layer quartz substrate and is a four-opening square ring reverse structure array, and the lower-layer metal structure is adhered to the top surface of the lower-layer quartz substrate; and the liquid crystal layer is filled between the upper-layer metal structure and the lower-layer metal structure to form a metal-medium-metal structure. The electro-optical effect of the liquid crystal is utilized, the FPGA is communicated with the electrodes corresponding to the metal structures, voltage is applied between the upper-layer metal structure and the lower-layer metal structure, the effective dielectric constant of the liquid crystal can be changed by adjusting the voltage, and therefore on-off of terahertz waves is achieved. And the upper computer controls the FPGA to output voltage through an instruction so as to realize programmable regulation and control of the device.

The invention relates to the technical field of nano photonics and metasurfaces, in particular to a metasurface sensor based on a non-radiative dark state, which comprises a quartz substrate and dumbbell-shaped slotted silicon blocks arranged on the surface of the quartz substrate periodically; the dumbbell-shaped slotted silicon block is composed of two symmetrical circular slots and a rectangular channel connecting the two circular slots, the period P of the dumbbell-shaped slotted silicon block is 600-1000 nm, the length and width p of the silicon block are 500-700 nm, the height H of the dumbbell-shaped slotted silicon block is 80-120 nm, the width a of the channel is 15-30 nm, the length b of the channel is 30-50 nm, and the radiuses R1 and R2 of the initial circular slots are 70-100 nm. The device can excite two non-radiation modes at the same time, namely, an anapole mode and a quasi-continuous domain bound state (q-BIC) mode. By designing the dielectric metasurface structure composed of the dumbbell-shaped slotted silicon block and the quartz substrate, the high Q factor and strong electric field enhancement effect is achieved, and the device not only has excellent optical performance, but also shows high sensitivity and modulation depth in multiband sensing, and is suitable for high-precision optical sensing application.

The invention discloses a super-resolution micro lens and a preparation method thereof. The lens comprises a photoresist spherical micro lens and a mixed substrate plane lens which are sequentially arranged from top to bottom. The specific preparation method comprises the following steps: S1, preparing a photoresist cylinder on a quartz substrate; s2, reflowing the photoresist cylinder into a micron lens by using a photoresist reflowing process; s3, preparing a mixed substrate plane lens on the surface of the to-be-detected sample; and S4, transferring the micron lens to the surface of the mixed substrate plane lens. By changing the thickness of the mixed substrate plane lens, adjustment of the amplification coefficient and the numerical aperture can be realized, and compared with a micro lens without a mixed substrate, the micro lens has higher imaging resolution. The method has a wide prospect in the technical field of optical imaging.

The present invention discloses a quartz substrate lithium niobate mode spot converter, which relates to the fields of optical communication and microwave photonics. The present invention includes a quartz substrate layer, a silica cladding layer, a lithium niobate waveguide layer, an oxide interlayer and an oxide upper cladding layer. The lithium niobate waveguide layer is a three-layer stepped structure, and the cross-sections of the fiber coupling ends of the three-layer lithium niobate waveguide layers are all isosceles trapezoids. The cross-sections of the fiber coupling ends of the oxide interlayer and the oxide upper cladding layer are both provided with notches at the lower part and isosceles trapezoidal protrusions at the upper part, and the oblique side angles of the isosceles trapezoidal protrusions of the oxide interlayer and the oxide upper cladding layer and the isosceles trapezoidal cross-sections of the lithium niobate waveguide layer do not exceed 70°. The present invention can achieve high coupling and low transmission loss when optical signals are coupled between an integrated lithium niobate photonic chip and an optical fiber, and reduces the process processing difficulty, and has high practicability.

The invention provides an integrated cutting and contour grinding method for a square quartz substrate, and belongs to the technical field of quartz substrate machining. The method comprises the steps that a square quartz substrate blank to be machined is cut through multi-wire cutting equipment, cutting parameters are monitored and adjusted in real time, and cooling liquid is evenly sprayed to a cutting area during cutting so as to prevent the square quartz substrate blank from cracking or deforming caused by thermal stress; a self-adaptive control numerical control engraving and milling machine is used for grinding the length, the width and the chamfered edge of the cut and formed square quartz substrate workpiece, the position and the size deviation of the workpiece are automatically detected, and the grinding path is dynamically adjusted to achieve micron-grade precision grinding; an environment compensation mechanism is introduced, and grinding parameters are automatically adjusted based on workshop temperature and humidity changes. High-precision integrated cutting and contour grinding of the square quartz substrate are achieved, the machining efficiency and the product quality are remarkably improved, and the consistency of the size precision and the surface quality is ensured.

The invention discloses a preparation method of a single-walled carbon nanotube, which comprises the following steps: (1) annealing a quartz substrate to obtain a pretreated substrate; (2) putting a catalyst precursor and an accelerant into the pretreated substrate, putting the pretreated substrate into a constant-temperature area of a tubular furnace, introducing protective gas, raising the temperature to 600-800 DEG C in the atmosphere of the protective gas, and keeping the constant temperature for 6-10 minutes; (3) hydrogen is preheated, the preheated hydrogen is introduced into the tubular furnace, the temperature is increased to 800-1000 DEG C, and heat preservation is conducted for 6-10 min; and (4) preheating the carbon source gas, introducing the carbon source gas into the tubular furnace, preserving heat for 20-30 minutes at the temperature of 800-1000 DEG C, stopping conveying the hydrogen and the carbon source gas, cooling to 180-220 DEG C, stopping conveying the protective gas, introducing air, cooling, and collecting a product to obtain the single-walled carbon nanotube. According to the preparation method of the single-walled carbon nanotube, the tube diameter of the single-walled carbon nanotube is 1-3 nm, the carbon yield is larger than 12%, the single-walled carbon nanotube can be produced in batches, and the single-walled carbon nanotube is used for preparing carbon nanotube conductive paste.

The invention provides a square quartz substrate double-face grinding method and system and a process production line, and belongs to the technical field of quartz substrate machining. The method comprises the steps that a square quartz substrate workpiece subjected to profiling contour grinding is loaded in a grinding jig of a double-face grinding machine, thickness change dynamic parameters of the square quartz substrate workpiece are collected in real time, and a grinding pressure value is adjusted based on the thickness change dynamic parameters; the method comprises the following steps: mixing artificial carborundum and nanoscale alumina particles according to a mixing ratio of 5-50%, and preparing a multi-stage particle size grinding fluid with the particle size of W5-W28; the rotating speed of the double-sided grinding machine in the coarse grinding stage is set to be 8 r / min-30 r / min, and the rotating speed of the double-sided grinding machine in the fine grinding stage is set to be 8 r / min-25 r / min; and the actual removal amount of the workpiece in the grinding process is obtained, and the grinding time is dynamically adjusted based on the actual removal amount of the workpiece. And the machining efficiency, the thickness uniformity and the surface quality can be improved, so that efficient and precise double-sided grinding of the square quartz substrate is realized.

The present invention discloses an additive manufacturing method for a laser window with a micro-nano structure and a laser window. The steps include: 1) ultrasonically cleaning the polished quartz glass with a chemical reagent; (2) self-assembling polystyrene microspheres using a micro-injection pump and transferring them onto the ultrasonically cleaned quartz glass; (3) reducing the diameter of the polystyrene microspheres using an ion beam assisted coating technique and then coating a silica material thereon; (4) cleaning the quartz substrate with a chemical reagent to wash away the polystyrene microspheres with a part of silica; (5) performing secondary ion beam assisted coating on the cleaned quartz substrate. The laser window with a micro-nano structure prepared by this method has a high transmittance, a wide anti-reflection band, and strong laser damage resistance.

The application discloses a kind of light field regulation detection method and device based on computing spectral reconstruction, belong to spectral analysis technical field.The method is by introducing medium-metal composite nanostructure, integrates metal nanoisland array and silicon nitride nanocolumn array on quartz substrate, realizes electric field enhancement using the local surface plasmon resonance effect excited by metal nanoisland array, simultaneously realizes wide spectral range phase coding by medium nanocolumn array;Super surface chip is integrated with single point detector, combines pre-calibrated super surface sensing matrix A and enhancement factor matrix E, and reconstructs spectrum using compressed sensing or Tikhonov regularization algorithm.The application keeps the advantages of miniaturization and no moving parts, realizes directional high sensitivity detection to weak signal, and signal-to-noise ratio is improved.

The invention provides a high-quality-factor metal arched quartz resonator and a preparation method thereof, and relates to the technical field of sensors. The structure of the metal arched quartz resonator sequentially comprises a lower metal electrode layer, a lower adhesion layer, a quartz substrate, an upper adhesion layer, an upper metal electrode layer and a metal arched structure from bottom to top. And each layer coincides with the geometric center normal of the metal arch structure. The metal arched structures are consistent in height and comprise a central symmetrical metal structure and a plurality of annular metal structures surrounding the periphery of the central symmetrical metal structure, and the two annular metal structures are concentric. The ring widths of the annular metal structures are integrally decreased from the center to the periphery, and the distances are integrally increased from the center to the periphery. According to the design, the metal arched quartz resonator has the advantages of high quality factor, high yield and low processing cost.

The present invention relates to the technical field of graphene, and discloses a quartz-based graphene preparation method, which comprises: placing a quartz substrate in a reducing atmosphere at a temperature of 1160-1200 DEG C, and carrying out heat preservation for 100-140 min, the reducing atmosphere comprising hydrogen and an inert gas, and the hydrogen accounts for 5-10% of the total volume of the hydrogen and the inert gas; and introducing a carbon source gas, and depositing and growing graphene on the surface of the treated quartz substrate. According to the method, the proportion of hydrogen is reduced, the reducing capacity in the atmosphere is reduced, hydroxyl groups are gradually separated out from a quartz bulk phase, the quartz surface is in the oxygen-containing atmosphere, a substrate can be subjected to phase change at the temperature of 1,160-1,200 DEG C and is converted into a cristobalite crystal phase, the melting point of cristobalite can reach 1,700 DEG C, the tolerance temperature of the cristobalite is greatly increased, the deposition environment of graphene is improved, and the quality of graphene is improved.

To provide a high frequency and low CI vibration element, a vibrator, and an oscillator.SOLUTION: A vibration element 1 includes a quartz crystal substrate 10 having a vibration portion 11 including a vibration region 13 and a support portion 12 that is thicker than the vibration portion 11, and excitation electrodes 31, 32 arranged in the vibration region 13, and satisfies the relationship y≤11.4exp(-x / 174.8)+1.8, and y [nm] is the surface roughness in the vibration region 13 of the quartz crystal substrate 10 and x [MHz] is the oscillation frequency.SELECTED DRAWING: Figure 5

This invention provides a highly reliable substrate in which fine through-holes are filled with metal, enabling high-density mounting and high reliability, as well as a method for manufacturing the same. [Solution] The above problem is solved by a micro-through-hole filled substrate 10 in which a plurality of micro-through holes 2 formed in a substrate 1 are filled, wherein the micro-through holes 2 are filled with a conductive layer (at least 3b) formed on their inner wall surface and a metal solder layer 3c formed on the conductive layer, the conductive layer having a copper plating layer 3b formed on the metal solder layer side, and the metal solder layer 3b being filled with nickel-containing molten solder treated with an organic fatty acid-containing solution. The substrate 1 is preferably a quartz substrate or a glass substrate, and an intermetallic compound layer 4 is formed on the conductive layer 3b side of the metal solder layer 3c that combines with the copper component constituting the conductive layer 3b to prevent copper corrosion.

The application relates to a full-quartz-encapsulated doped quartz whispering gallery microsphere sensor and a preparation method thereof, and belongs to the technical field of microcavity lasers. The full-quartz-encapsulated doped quartz whispering gallery microsphere sensor comprises a quartz substrate, a T-shaped groove is engraved on the quartz substrate, a fiber taper is transversely placed in the T-shaped groove of the quartz substrate, a doped quartz whispering gallery microsphere is vertically placed in the T-shaped groove of the quartz substrate, and the doped quartz whispering gallery microsphere is directly in contact with the fiber taper for coupling. The full-quartz-encapsulated doped quartz whispering gallery microsphere sensor provided by the application encapsulates the fiber taper-microsphere coupling system in the groove of the quartz substrate, has the characteristics of miniaturization, high integration and stable structure, and has good reliability in high-temperature, high-pressure and corrosive environments, and is suitable for various high-temperature measurement and detection scenes.

The application relates to the technical field of laser packages, in particular to an in-situ optical shaping VCSEL array integration method and an optical interconnection module, which comprises the following steps: S1, a quartz substrate is used, a femtosecond laser pulse is focused and scanned in the quartz substrate, and a three-dimensional profile of a micro hole is defined in advance; S2, a VCSEL chip is precisely placed into the micro hole in an array arrangement with the VCSEL chip facing upwards, and epoxy resin is cured by heating; S3, a metal layer is sputtered on the quartz substrate, and an electrical interconnection track is formed through photolithography; S4, a two-photon polymerization direct writing system is used to initiate two-photon polymerization of photoresist, solidification is realized, and the production of a polymer lens is completed. The application selects fused quartz glass as the only passive integrated substrate; the substrate has four characteristics of optical transparency, electrical insulation, thermal stability and three-dimensional micro machining at the same time, replaces the multilayer composite substrate in a traditional scheme at one time, and realizes the original integration design basis of an optical path, an electrical circuit and a thermal path.

This invention discloses a tool setting system and process for automatic machining of FMS semiconductor quartz rings. The tool setting system is an in-machine tool setting system of the MC, and its functional modules are integrated with the machining center's mechanics and signals. It includes the following functional modules: Control module: composed of the machining center and a built-in CNC control system. The CNC control system has a preset tool setting macro program, which is used to control the automatic execution of the entire tool setting process, the calling of machining parameters, and the coordination of signals of each module. This invention achieves high repeatability positioning accuracy of the tool setting instrument and the machining fixture on the machine tool guide rail through the integrated device of the fixed positioning module. Combined with the precise matching of the positioning pin and the center guide sleeve, it effectively reduces clamping misalignment error. At the same time, for the multi-point tool setting process of wax-bonded quartz substrate and product design, it can completely establish the workpiece coordinate system to ensure that the concentricity, height, and flatness of the quartz ring and the substrate meet the stringent requirements of semiconductor processing.

The application belongs to the technical field of inertial devices, and particularly relates to a quartz base planar differential quartz vibrating beam accelerometer and a packaging method thereof. The accelerometer comprises a shell, a circuit board, VIA chips, a quartz substrate and conductive pins. The inside of the shell is a vacuum cavity. The quartz substrate is composed of a quartz body, a rectangular step and a solder film. The rectangular step is used for positioning and fixing the VIA chips. The solder film realizes the soldering connection of the chips. Two VIA chips output positive and negative signals through differential detection. The circuit board provides driving signals for the chips and amplifies the output signals. The conductive pins transmit signals and receive control signals to regulate the working state of the chips. Through the vacuum cavity design, the differential detection technology, the high-precision assembly method and the reliable packaging process, the application solves the instability caused by the mismatch of the adhesive process and the thermal expansion coefficient and the performance problem affected by the assembly error in the prior art, and improves the measurement accuracy, the anti-interference ability and the assembly stability of the accelerometer.

The invention discloses a bendable quartzite plate for cylinder decoration, and relates to the technical field of quartzite plates, the bendable quartzite plate comprises a quartzite base material, the bottom of the quartzite base material is provided with a clamping groove, the top of the quartzite base material is provided with a clamping rod, and the side wall of the quartzite base material is provided with a limiting groove. Through the arrangement of the quartz stone base materials, the clamping grooves, the clamping rods, the limiting grooves, the limiting blocks, the limiting rods and the limiting sleeves, the limiting blocks are inserted into the limiting grooves, then the limiting rods penetrate through the limiting grooves and the limiting blocks and are fixed through the limiting sleeves in a threaded mode, and the quartz stone base materials are sequentially spliced to be in an end-to-end circular ring shape; compared with a traditional integrated arc-shaped quartz stone base material, the vertical arc-shaped quartz stone base material can decorate cylinders with different diameters through splicing and assembling, a mold does not need to be independently arranged for manufacturing, and the production cost is low.

The invention relates to the technical field of terahertz photoelectric detection. A traditional terahertz frequency mixer generally adopts a semiconductor material with a low dielectric constant, the heat dissipation requirement of a high-frequency circuit is difficult to meet, the dielectric loss of a traditional substrate structure is remarkably increased along with the increase of the frequency of the frequency mixer, a large amount of energy loss is generated when a signal is transmitted in a micro-strip, and the transmission efficiency of a high-frequency signal is influenced; the invention provides a terahertz harmonic mixer structure of a hollow structure substrate and a preparation method thereof, a quartz substrate with a hollow structure is provided with a mixer circuit, the quartz substrate is arranged between a mixer upper cavity and a mixer lower cavity, and the quartz substrate is combined with a metal structure to realize transmission of terahertz signals. The thermal performance of the mixer is improved by the hollow structure, so that the mixer has better stability in a high-temperature environment, parasitic parameters are changed by modifying the structure of the quartz substrate, the impedance matching efficiency is improved, and the mixer is ensured to work stably and efficiently under the terahertz frequency.

This invention relates to a quartz optical window for enhancing solar-blind ultraviolet detection, its fabrication method, and its application. The method includes: etching a periodic array of hollow micro / nano structures with gradually changing morphology on the emitting end face of a quartz substrate with high transmittance in the solar-blind ultraviolet band; cleaning to obtain a quartz element; depositing a solar-blind ultraviolet-transmittance thin film material as the filling material for the hollow structure on the emitting end face of the obtained quartz element; polishing the coated emitting end face to obtain a functional layer of a periodic array of micro / nano structures with a period of 100nm–300nm, a thickness of 80nm–300nm, and a duty cycle greater than or equal to 0.5; cleaning to obtain a quartz optical window for enhancing solar-blind ultraviolet detection with the periodic array of micro / nano structures. This invention improves the quantum efficiency of the cesium telluride photocathode in a solar-blind ultraviolet image intensifier by using a quartz optical window with a micro / nano structure functional layer, thereby improving the cathode sensitivity and achieving long-distance, high-definition detection.

The invention relates to the technical field of micro-nano photonics and nonlinear optics, in particular to a slotted metasurface capable of enhancing third-order nonlinearity, which comprises a silicon dimer metasurface structure unit, and a quartz substrate is arranged at the bottom of the silicon dimer metasurface structure unit; each silicon dimer metasurface structure unit is composed of two symmetrically-arranged nano-plates, the thickness of each nano-plate is 90 nm, the radius of each nano-plate is 180 nm, the refractive index of each nano-plate is 3.48, each nano-plate is provided with a narrow slit with the width of 20 nm and the length of 60 nm, the distance between the two nano-plates is 10 nm, ED / TD destructive interference is achieved through slotted dimer design, and the traditional structure Q factor limitation (Qgt; the method has the advantages that the THG efficiency is improved to 4.6 * 10 <-4 > (the highest level of similar silicon structures) and the parameter regulation and control flexibility (polarization and geometric dimensions), and a new normal form is provided for an on-chip nonlinear optical system.

The application discloses a quartz substrate smooth surface ultrasonic quantitative cleaning process and relates to the technical field of quartz substrate cleaning. In order to solve the problems of inconvenient quartz substrate cleaning process and poor cleaning effect, the application optimizes the composition of the cleaning solution, improves the cleaning efficiency, and realizes efficient cleaning effect through fine solution proportioning and gradual adding in the medium frequency analysis, and the cleaning scheme combines the advantages of low frequency and medium frequency, preliminary cleaning is first carried out to remove most of the dirt, and then fine cleaning is carried out to thoroughly remove the residues in the small gap. Through strict product detection, unqualified products can be found and processed in time in the production process, so that the unqualified products are prevented from flowing into subsequent processes or the market, production cost and quality loss are reduced, the cleaning scheme is re-established according to the comparison difference value, the maximization of the cleaning effect is ensured, the cleaning accuracy and efficiency can be significantly improved, and substrate damage caused by improper cleaning is reduced.

Provided is a bonded substrate having a wide region that is suitable for device processing. A bonded substrate (10) according to the present invention comprises a quartz substrate (11) and a functional substrate (12) bonded to the quartz substrate (11) via a bonding surface, wherein the quartz substrate (11) does not include a seed portion.

The invention discloses a fused quartz substrate integrated laser radar transmit-receive optical module and an adjusting method, and belongs to the technical field of optical instruments. According to the module, all optical elements for transmitting and receiving optical paths are integrated on the same fused quartz substrate, and each element is provided with a micro sensor and a micro adjusting device. The system comprises a first control loop, a second control loop, a first central signal gating and routing unit and comparative judgment and arbitration logic. By means of six predefined paragraph diagnosis modes, the system can accurately position misalignment paragraphs in an optical path and only drives the micro adjusting devices corresponding to the misalignment paragraphs to conduct cooperative closed-loop compensation, and self-adaptive alignment from local fine adjustment to global search is achieved. The method has the beneficial effects of full-life-cycle self-maintenance, accurate and efficient adjustment, global optimization of a transceiving link, remarkable reduction of full-life-cycle cost and the like, and is particularly suitable for the fields of vehicle-mounted laser radars with high reliability requirements and the like.

The invention discloses a method for detecting biomolecules, and relates to the technical field of micro-nano processing technology and LSPR biosensors. An existing LSPR sensor is low in sensitivity and large in spectral formant line width, and an existing MIM structure is complex in machining process, high in cost, tedious in modification step and insufficient in sensing performance stability. A metal-gap-metal composite structure is constructed, a pair of sensing chips is prepared, each sensing chip comprises a quartz substrate and an LSPR gold nanostructure array, a supporting structure is formed on the quartz substrate, buckling assembly is performed to accurately control the distance to form an MIM resonant cavity, and the active regulation and control of the electric field intensity are realized by combining biological modification and detection methods. The sensitivity of the sensor is remarkably improved, the spectral formant line width is reduced, the process is simplified, the cost is reduced, the stability is improved, and the sensor is used for detecting trace tumor marker antigens.

The invention relates to a high-modulation-efficiency phase modulator based on a silicon nitride-lithium niobate waveguide. The modulator comprises an optical transmission unit and an electric transmission unit, the optical transmission unit comprises a quartz substrate layer, a silicon dioxide buffer layer arranged above the quartz substrate layer, a composite waveguide arranged above the middle position of the silicon dioxide buffer layer, and a silicon dioxide cladding covering the outer side of the composite waveguide; the electric transmission unit comprises a metal traveling wave electrode, and the metal traveling wave electrode adopts an embedded double-layer capacitor microstructure load traveling wave electrode. By optimizing the design of the electrode structure and the waveguide structure, the modulation efficiency is remarkably improved, broadband response and low optical loss are considered at the same time, and the device is suitable for application scenes sensitive to phase modulation efficiency and power consumption, such as high-speed optical fiber communication, coherent optical transmission systems, optical phased arrays and quantum optical experiments.