119 results about "Quartz substrate" patented technology

The invention belongs to the technical field of optical film measurement, and particularly relates to a method and system for measuring the thickness of a quartz substrate optical film. The method comprises the following steps: acquiring a surface coordinate model of a quartz substrate, and dividing a film area into a parallel measurement area and a non-parallel measurement area; performing parallel measurement and non-parallel measurement on the two types of regions respectively to obtain first thickness data and second thickness data which jointly form original thickness data; determining measurement parameters corresponding to the original thickness data acquisition process, wherein each measurement parameter represents the offset of the corresponding measurement point; and correcting the original thickness data based on the measurement parameters to generate corrected thin film thickness data, and taking the corrected thin film thickness data as the thickness of the thin film area. According to the invention, dynamic error correction is carried out on the original thickness data, the accuracy and reliability of the thickness data of the thin film are improved, and meanwhile, comprehensive scanning of the irregular thin film is realized through a partition measurement strategy.

The invention discloses a super-resolution micro lens and a preparation method thereof. The lens comprises a photoresist spherical micro lens and a mixed substrate plane lens which are sequentially arranged from top to bottom. The specific preparation method comprises the following steps: S1, preparing a photoresist cylinder on a quartz substrate; s2, reflowing the photoresist cylinder into a micron lens by using a photoresist reflowing process; s3, preparing a mixed substrate plane lens on the surface of the to-be-detected sample; and S4, transferring the micron lens to the surface of the mixed substrate plane lens. By changing the thickness of the mixed substrate plane lens, adjustment of the amplification coefficient and the numerical aperture can be realized, and compared with a micro lens without a mixed substrate, the micro lens has higher imaging resolution. The method has a wide prospect in the technical field of optical imaging.

The application discloses a kind of light field regulation detection method and device based on computing spectral reconstruction, belong to spectral analysis technical field.The method is by introducing medium-metal composite nanostructure, integrates metal nanoisland array and silicon nitride nanocolumn array on quartz substrate, realizes electric field enhancement using the local surface plasmon resonance effect excited by metal nanoisland array, simultaneously realizes wide spectral range phase coding by medium nanocolumn array;Super surface chip is integrated with single point detector, combines pre-calibrated super surface sensing matrix A and enhancement factor matrix E, and reconstructs spectrum using compressed sensing or Tikhonov regularization algorithm.The application keeps the advantages of miniaturization and no moving parts, realizes directional high sensitivity detection to weak signal, and signal-to-noise ratio is improved.

The invention provides a high-quality-factor metal arched quartz resonator and a preparation method thereof, and relates to the technical field of sensors. The structure of the metal arched quartz resonator sequentially comprises a lower metal electrode layer, a lower adhesion layer, a quartz substrate, an upper adhesion layer, an upper metal electrode layer and a metal arched structure from bottom to top. And each layer coincides with the geometric center normal of the metal arch structure. The metal arched structures are consistent in height and comprise a central symmetrical metal structure and a plurality of annular metal structures surrounding the periphery of the central symmetrical metal structure, and the two annular metal structures are concentric. The ring widths of the annular metal structures are integrally decreased from the center to the periphery, and the distances are integrally increased from the center to the periphery. According to the design, the metal arched quartz resonator has the advantages of high quality factor, high yield and low processing cost.

This invention provides a highly reliable substrate in which fine through-holes are filled with metal, enabling high-density mounting and high reliability, as well as a method for manufacturing the same. [Solution] The above problem is solved by a micro-through-hole filled substrate 10 in which a plurality of micro-through holes 2 formed in a substrate 1 are filled, wherein the micro-through holes 2 are filled with a conductive layer (at least 3b) formed on their inner wall surface and a metal solder layer 3c formed on the conductive layer, the conductive layer having a copper plating layer 3b formed on the metal solder layer side, and the metal solder layer 3b being filled with nickel-containing molten solder treated with an organic fatty acid-containing solution. The substrate 1 is preferably a quartz substrate or a glass substrate, and an intermetallic compound layer 4 is formed on the conductive layer 3b side of the metal solder layer 3c that combines with the copper component constituting the conductive layer 3b to prevent copper corrosion.

The application relates to a full-quartz-encapsulated doped quartz whispering gallery microsphere sensor and a preparation method thereof, and belongs to the technical field of microcavity lasers. The full-quartz-encapsulated doped quartz whispering gallery microsphere sensor comprises a quartz substrate, a T-shaped groove is engraved on the quartz substrate, a fiber taper is transversely placed in the T-shaped groove of the quartz substrate, a doped quartz whispering gallery microsphere is vertically placed in the T-shaped groove of the quartz substrate, and the doped quartz whispering gallery microsphere is directly in contact with the fiber taper for coupling. The full-quartz-encapsulated doped quartz whispering gallery microsphere sensor provided by the application encapsulates the fiber taper-microsphere coupling system in the groove of the quartz substrate, has the characteristics of miniaturization, high integration and stable structure, and has good reliability in high-temperature, high-pressure and corrosive environments, and is suitable for various high-temperature measurement and detection scenes.

The application relates to the technical field of laser packages, in particular to an in-situ optical shaping VCSEL array integration method and an optical interconnection module, which comprises the following steps: S1, a quartz substrate is used, a femtosecond laser pulse is focused and scanned in the quartz substrate, and a three-dimensional profile of a micro hole is defined in advance; S2, a VCSEL chip is precisely placed into the micro hole in an array arrangement with the VCSEL chip facing upwards, and epoxy resin is cured by heating; S3, a metal layer is sputtered on the quartz substrate, and an electrical interconnection track is formed through photolithography; S4, a two-photon polymerization direct writing system is used to initiate two-photon polymerization of photoresist, solidification is realized, and the production of a polymer lens is completed. The application selects fused quartz glass as the only passive integrated substrate; the substrate has four characteristics of optical transparency, electrical insulation, thermal stability and three-dimensional micro machining at the same time, replaces the multilayer composite substrate in a traditional scheme at one time, and realizes the original integration design basis of an optical path, an electrical circuit and a thermal path.

This invention discloses a tool setting system and process for automatic machining of FMS semiconductor quartz rings. The tool setting system is an in-machine tool setting system of the MC, and its functional modules are integrated with the machining center's mechanics and signals. It includes the following functional modules: Control module: composed of the machining center and a built-in CNC control system. The CNC control system has a preset tool setting macro program, which is used to control the automatic execution of the entire tool setting process, the calling of machining parameters, and the coordination of signals of each module. This invention achieves high repeatability positioning accuracy of the tool setting instrument and the machining fixture on the machine tool guide rail through the integrated device of the fixed positioning module. Combined with the precise matching of the positioning pin and the center guide sleeve, it effectively reduces clamping misalignment error. At the same time, for the multi-point tool setting process of wax-bonded quartz substrate and product design, it can completely establish the workpiece coordinate system to ensure that the concentricity, height, and flatness of the quartz ring and the substrate meet the stringent requirements of semiconductor processing.

The invention relates to the technical field of terahertz photoelectric detection. A traditional terahertz frequency mixer generally adopts a semiconductor material with a low dielectric constant, the heat dissipation requirement of a high-frequency circuit is difficult to meet, the dielectric loss of a traditional substrate structure is remarkably increased along with the increase of the frequency of the frequency mixer, a large amount of energy loss is generated when a signal is transmitted in a micro-strip, and the transmission efficiency of a high-frequency signal is influenced; the invention provides a terahertz harmonic mixer structure of a hollow structure substrate and a preparation method thereof, a quartz substrate with a hollow structure is provided with a mixer circuit, the quartz substrate is arranged between a mixer upper cavity and a mixer lower cavity, and the quartz substrate is combined with a metal structure to realize transmission of terahertz signals. The thermal performance of the mixer is improved by the hollow structure, so that the mixer has better stability in a high-temperature environment, parasitic parameters are changed by modifying the structure of the quartz substrate, the impedance matching efficiency is improved, and the mixer is ensured to work stably and efficiently under the terahertz frequency.

Provided is a bonded substrate having a wide region that is suitable for device processing. A bonded substrate (10) according to the present invention comprises a quartz substrate (11) and a functional substrate (12) bonded to the quartz substrate (11) via a bonding surface, wherein the quartz substrate (11) does not include a seed portion.

The invention discloses a fused quartz substrate integrated laser radar transmit-receive optical module and an adjusting method, and belongs to the technical field of optical instruments. According to the module, all optical elements for transmitting and receiving optical paths are integrated on the same fused quartz substrate, and each element is provided with a micro sensor and a micro adjusting device. The system comprises a first control loop, a second control loop, a first central signal gating and routing unit and comparative judgment and arbitration logic. By means of six predefined paragraph diagnosis modes, the system can accurately position misalignment paragraphs in an optical path and only drives the micro adjusting devices corresponding to the misalignment paragraphs to conduct cooperative closed-loop compensation, and self-adaptive alignment from local fine adjustment to global search is achieved. The method has the beneficial effects of full-life-cycle self-maintenance, accurate and efficient adjustment, global optimization of a transceiving link, remarkable reduction of full-life-cycle cost and the like, and is particularly suitable for the fields of vehicle-mounted laser radars with high reliability requirements and the like.

The invention discloses a method for detecting biomolecules, and relates to the technical field of micro-nano processing technology and LSPR biosensors. An existing LSPR sensor is low in sensitivity and large in spectral formant line width, and an existing MIM structure is complex in machining process, high in cost, tedious in modification step and insufficient in sensing performance stability. A metal-gap-metal composite structure is constructed, a pair of sensing chips is prepared, each sensing chip comprises a quartz substrate and an LSPR gold nanostructure array, a supporting structure is formed on the quartz substrate, buckling assembly is performed to accurately control the distance to form an MIM resonant cavity, and the active regulation and control of the electric field intensity are realized by combining biological modification and detection methods. The sensitivity of the sensor is remarkably improved, the spectral formant line width is reduced, the process is simplified, the cost is reduced, the stability is improved, and the sensor is used for detecting trace tumor marker antigens.

The invention relates to a high-modulation-efficiency phase modulator based on a silicon nitride-lithium niobate waveguide. The modulator comprises an optical transmission unit and an electric transmission unit, the optical transmission unit comprises a quartz substrate layer, a silicon dioxide buffer layer arranged above the quartz substrate layer, a composite waveguide arranged above the middle position of the silicon dioxide buffer layer, and a silicon dioxide cladding covering the outer side of the composite waveguide; the electric transmission unit comprises a metal traveling wave electrode, and the metal traveling wave electrode adopts an embedded double-layer capacitor microstructure load traveling wave electrode. By optimizing the design of the electrode structure and the waveguide structure, the modulation efficiency is remarkably improved, broadband response and low optical loss are considered at the same time, and the device is suitable for application scenes sensitive to phase modulation efficiency and power consumption, such as high-speed optical fiber communication, coherent optical transmission systems, optical phased arrays and quantum optical experiments.

To provide a high-frequency, low-CI-value vibrating element, vibrator, and oscillator.SOLUTION: A vibrating element 1 comprises a crystal substrate 10 having a vibration part 11 and a support portion 12 with a thickness greater than that of the vibrating portion 11, and excitation electrodes 31, 32 positioned on the vibrating part 11, and the oscillation frequency is 300 MHz or higher, and the area of excitation electrodes 31 and 32 is 35% or less of the area of the vibrating part 11.SELECTED DRAWING: Figure 5

The invention relates to the technical field of nitrogen-containing graphene, in particular to a method for preparing nitrogen-containing graphene by taking chitosan as a raw material, which comprises the following steps: dissolving chitosan in an acetic acid solution with the concentration of 3-5% to form a mixed solution, uniformly coating the mixed solution on the surface of a quartz base material by adopting a spin-coating technology, and under a nitrogen protection environment, preparing the nitrogen-containing graphene by taking the chitosan as the raw material. Slowly heating the base material coated with the mixed solution to 200-3500 DEG C, and annealing for 2 hours to obtain a chitosan film; then carrying out two-step carbonization to obtain a pre-carbonized product; and uniformly mixing the obtained pre-carbonized product with a regulation agglomeration agent, carrying out two-step activation treatment, and after the activation is completed, carrying out post-treatment on the product to obtain a nitrogen-containing graphene product. The nitrogen-containing graphene prepared by the method has a D / G ratio of 0.87 and a 2D / G ratio of 0.71, has few defects and has a good layered crystal structure, and the dielectric constant of a nitrogen-containing graphene device prepared subsequently is only 3.53.

The invention discloses a terahertz wavefront regulator based on a liquid crystal programmable phase shifter array, which comprises an array structure composed of a plurality of phase shift units, and is characterized in that each phase shift unit is composed of an upper quartz substrate, an upper metal structure, a liquid crystal layer, a lower metal structure and a lower quartz substrate, and is used for realizing adjustable terahertz wave phase regulation; the array is driven by the programmable logic gate array, and voltage distribution between the upper metal electrode and the lower metal electrode can be independently adjusted, so that orientation of liquid crystal molecules is changed, and accurate control of pixel-level phases is realized. According to the geometric arrangement of the upper-layer metal structure, the array can be designed as a gradient phase plate to realize beam deflection, or can be designed as a spiral phase plate to generate vortex waves; different phase shifter arrays can also be modularly combined so as to realize dynamic regulation and control of complex wavefronts. The Terahertz laser has the advantages of being simple in structure, low in power consumption and flexible in control, and is suitable for various application scenes such as Terahertz communication, imaging and sensing.

A variable temperature load (VTL) or noise source including a grounded coplanar waveguide (GCPW) comprising a first metallization patterned on a fused quartz substrate, the first metallization comprising a first end for connecting to a coaxial connector and a second end for connecting to a coplanar waveguide (CPW); the CPW coupled to a 50 ohm termination and comprising a second metallization patterned on a top surface of a crystal quartz substrate; a temperature sensing diode thermally coupled to the crystal quartz substrate and the second metallization; and a heater resistor coupled to the crystal quartz substrate via contact metallization.

To provide a high-frequency, low-CI-value vibration element, vibrator, and oscillator.SOLUTION: A vibration element 1 comprises a crystal substrate 10 having a vibration portion 11 containing a vibration region 13 and a support portion 12 with a thickness greater than that of the vibration portion 11, and excitation electrodes 31, 32 positioned in the vibration region 13, and when the thickness variation y[nm] in the vibration region 13 of the crystal substrate 10 is taken as the variable and the oscillation frequency x[MHz] is taken as the variable, the relationship y≤329.8exp(-x / 76.7)+4.0 is satisfied.SELECTED DRAWING: Figure 5

The invention discloses a structural material centrosymmetric double-embossment beam combining grating for the central wavelength of 1064 nanometers. The beam combining grating comprises a quartz substrate, a high-reflective film system, a matching layer, two non-centrosymmetric embossments, a lower embossment, an upper embossment and a filling layer between the two embossments which are sequentially plated from bottom to top. The filling layer can be filled by plating Ta2O5, or is filled by air. Under the action of different fillers, the following effects can be realized: under the filling of Ta2O5, under TE polarization, in the bandwidth of 1051-1070.3 nm, the incident-grade 1 diffraction efficiency is greater than 99% at 38.49 degrees, and the highest diffraction efficiency can reach 99.9%; under air filling, under TE polarization, within the bandwidth of 1030-1094.5 nanometers, 38.49-degree incidence-1-level diffraction efficiency is larger than 99%, the highest diffraction efficiency can reach 99.9%, the material has important application value in the fields of high-energy spectrum beam combining laser and ultra-strong and ultra-short laser pulse compression, meanwhile, the material has extremely high structural freedom degree, and the material is suitable for being used in the field of high-energy spectrum beam combining laser and ultra-strong and ultra-short laser pulse compression. And various application scenes in beam combination can be adapted by regulating and controlling the structure.

The invention provides a terahertz amplitude modulator, and the modulator comprises a first quartz substrate layer which is disposed on the incident surface layer of terahertz waves, and is used for carrying out the resonant coupling superposition of a plurality of reflected waves of the terahertz waves; the semiconductor film layer is laid on the lower surface of the quartz substrate in parallel; the gold electrode layer comprises a first gold electrode and a second gold electrode which are arranged in an isolated manner; wherein the first electrode layer is connected with the edge part of the semiconductor film layer; a sealed cavity is formed between the second gold electrode layer and the main body part of the semiconductor thin film layer through the insulating material around the second gold electrode layer; the ionic liquid is contained in the sealed cavity below the semiconductor thin film layer; the reflectivity between the ionic liquid and the semiconductor thin film layer is the same; a dynamic voltage is applied between the first gold electrode and the second gold electrode, the change of the conductivity of the semiconductor film layer causes the change of the reflectivity of the plurality of reflecting surfaces, the terahertz reflected waves reflected by the plurality of reflecting surfaces are subjected to resonant coupling superposition, the amplitude change of the reflected waves is obtained, and the amplitude modulation is realized.

The application discloses an etching process for deep silicon oxide waveguide and groove. The wafer is etched and the wafer to be etched comprises photoresist, shallow silicon oxide, metal chromium, deep silicon oxide, quartz substrate and back metal chromium from top to bottom. The etching process comprises the following steps: S1, using photoresist with a preset thickness as a mask for the shallow silicon oxide and using a first process parameter to perform a first etching process. The first etching process is as follows: introducing fluorine-based gas into the cavity to perform plasma etching on the shallow silicon oxide on the upper layer of the metal chromium, so as to transfer the pattern on the photoresist to the shallow silicon oxide. The etching process for deep silicon oxide waveguide and groove disclosed by the application can realize the etching of an etching structure with a high aspect ratio, high absolute depth, perpendicular sidewall angle and smooth sidewall.

The utility model discloses a novel terahertz wave detection module, and relates to the technical field of terahertz wave detection. The detection module comprises a terahertz input waveguide and a quartz substrate, a terahertz waveguide conversion probe on the quartz substrate stretches across the terahertz input waveguide, and the outer side end of the terahertz waveguide conversion probe extends to the left end of the quartz substrate. The end part of the inner side of the terahertz waveguide conversion probe is connected with one end of a terahertz detection Schottky diode through a terahertz detection Schottky diode matching network, and the other end of the terahertz detection Schottky diode is connected with one end of an intermediate frequency filter through an intermediate frequency filter matching network; the other end of the intermediate-frequency filter is connected with the output end of the direct-current bias module and the input end of the intermediate-frequency interface, one end of a beam lead is connected with the terahertz detection Schottky diode matching network through a microstrip line, and the other end of the beam lead extends to the outer side of the quartz substrate and is used for being connected with a cavity. And grounding is realized. The detection module has the advantages of wide detection range, high sensitivity and the like.

The invention relates to a quartz harmonic oscillator surface metallization method based on an atom transfer radical polymerization method. The method comprises the following steps: firstly, carrying out surface cleaning and hydroxylation on a quartz substrate; then immersing the quartz substrate into a toluene solution of (3-aminopropyl) triethoxysilane, continuously reacting, immersing the quartz substrate into anhydrous tetrahydrofuran or dichloromethane, and adding an acid absorbent for reacting; mixing the quartz substrate with a monomer with a metal coordination functional group, a catalyst, a ligand and a solvent, and carrying out polymerization reaction; after polymerization, immersing the quartz substrate into a metal salt solution for metal ion adsorption; and taking out, cleaning, reducing and annealing to obtain a pure quartz surface metal layer. According to the method, the absolutely uniform polymer template can be formed on a workpiece with a complex three-dimensional curved surface macroscopically through microcosmic quartz surface modification of the polymer and a dipping-metal reduction method, then uniform atomic layer scale metal deposition is achieved, and extremely high uniformity and shape preserving performance are achieved.

The utility model discloses a cooling system for quartz body cutting, which belongs to the technical field of quartz substrate processing, and comprises a base, one side of the base is provided with an accommodating groove, the inner bottom of the accommodating groove is fixedly connected with a liquid storage tank, the top of the liquid storage tank is provided with a filter frame, the filter frame is provided with a locking assembly, and the locking assembly is fixedly connected with the liquid storage tank. A collecting groove is formed in the top of the base, and the top of the base is fixedly connected with a protective cover and a driving box. By arranging the locking assembly, the filter frame and the liquid storage tank can be quickly assembled and disassembled, the threaded rod is rotated to drive the pair of bolts to move oppositely, the assembling and disassembling process is quick and labor-saving, the cleaning and overhauling time is greatly shortened, and the equipment operation and maintenance efficiency is improved; the glass window on the observation window is easily blurred, the sight of operators is hindered, the cleaning assembly can clean the glass window, the clear view field can be quickly recovered, and the cutting quality is further guaranteed.

The present application relates to the technical field of optical information storage, and particularly relates to a preparation method of a deep ultraviolet gray-tone mask based on a blue printing process, which comprises the following steps: mixing a blue printing aqueous solution and a gelatin aqueous solution according to a volume ratio of 2:5-4:5 to obtain a blue printing photosensitive agent solution; uniformly covering the blue printing photosensitive agent solution on the surface of a quartz substrate by using a drop coating method or a spin coating method; controlling the exposure dose distribution of the blue printing photosensitive solution on the surface of the quartz by using the light transmittance difference of a gray-tone film mask; placing the quartz in ice water after ultraviolet exposure; removing the unexposed soluble iron salt by washing with water; developing the blue image; adding hydrogen peroxide aqueous solution to enhance the contrast of the Prussian blue pattern; forming a light shielding layer gradient; drying; and obtaining the deep ultraviolet gray-tone mask based on the blue printing process. The method combines the light shielding layer gradient of the blue printing process with the ultraviolet light transmittance of the quartz substrate, and realizes the preparation of the ultraviolet gray-tone mask with low cost and high flexibility.

The utility model belongs to the field of polishing machines, and particularly relates to a polishing device for quartz substrate processing, which comprises a base, a containing groove is fixedly mounted at the top of the base, an arch-shaped mounting frame is arranged at the top of the base and positioned on the outer side of the containing groove, an L-shaped mounting frame is arranged on the inner side of the arch-shaped mounting frame, and the L-shaped mounting frame is fixedly mounted on the base. The inner side of the L-shaped mounting frame is rotationally connected with a polishing roller, and a mounting base is fixedly mounted in the containing groove. According to the quartz substrate polishing device, the containing groove is used for containing the mounting base, the mounting base and the suction cup are used for fixing a quartz substrate to be polished, follow-up polishing is facilitated, the polishing roller is used for polishing the quartz substrate, and the polishing efficiency is improved. And a connector, a guide pipe, a nozzle and a mounting rod are arranged for cleaning the quartz substrate before polishing and cleaning the quartz substrate after polishing, so that subsequent use is facilitated, and meanwhile, damage to the quartz substrate caused by subsequent cleaning is avoided.

The invention discloses an all-dielectric terahertz sensor based on an asymmetric eccentric circle structure, which comprises a quartz substrate layer, a plurality of unit cells arranged periodically are arranged on the quartz substrate layer, the structures of the plurality of unit cells are the same, each unit cell comprises a cylindrical silicon dielectric layer, and a through eccentric hole is vertically formed in the silicon dielectric layer. The invention further discloses application of the all-dielectric terahertz sensor based on the asymmetric eccentric circle structure. According to the invention, the problem of polarization interference in the prior art is solved, and accurate response of target polarization signals and non-target interference shielding are realized.

The invention relates to the technical field of metasurface sensing, in particular to a disc double-notch-shaped multifunctional metasurface sensor and a preparation method thereof.The sensor comprises a quartz substrate and double-notch silicon nanometer discs arranged on the quartz substrate in a periodic array; the double-notch silicon nanodisk comprises a first notch and a second notch, the opening directions of the first notch and the second notch are opposite, and the included angle between the opening directions of the first notch and the second notch and the side length direction of the quartz substrate is 45 degrees; and the first gap and the second gap are different in geometric dimension and / or position, so that the double-gap silicon nano-disk forms an asymmetric structure for exciting Fano resonance of the magnetic dipole to realize a sensing function. The method has the advantages that the limitation of traditional single-parameter detection is broken through, multi-parameter synchronous measurement and multi-phase detection (gas and liquid) are realized, the practical application scene is greatly expanded, and the method can be widely applied to the fields of environmental monitoring, biomedical detection, optical switch control and the like.

The application provides a preparation method of a metal film layer on a quartz substrate surface based on a metal transition layer, which comprises the following steps: depositing a non-noble metal layer on the surface of a curved quartz substrate as a transition layer for enhancing the bonding force, and then depositing a noble metal layer as a conductive layer, so as to form a metal film layer on the quartz substrate surface based on the metal transition layer. The metal film layer prepared by the method has strong bottom surface bonding force and good uniformity. The non-uniformity of the transition layer is less than 4%, the non-uniformity of the conductive layer is less than 5%, and the resistance of the conductive layer is less than 50Ω. The tensile strength between the entire film layer prepared by the PE-ALD and the curved quartz substrate is greater than 10MPa. The plasma source of the PE-ALD can reduce the reaction temperature of the metal film, remove the surface pollutants and the surface oxides, and improve the bonding force between the multilayer films.

A resonator element, a resonator, and an oscillator. Provided are a high-frequency and low-CI-value resonator element, a resonator, and an oscillator. The resonator element includes: a quartz substrate having a vibrating portion and a support portion having a thickness larger than that of the vibrating portion; and an excitation electrode which is disposed in the vibrating portion, has an oscillation frequency of 300 MHz or more, and has an area of 35% or less of an area of the vibrating portion.