Diffractive optical element for shaping gauss beam into flat-topped beam, and preparation method thereof

A diffractive optical element and flat-hat beam technology, which is applied in the field of diffractive optical element and its preparation, can solve problems such as complex manufacturing process, achieve high energy transmittance, simple installation and use, and flexible use

Active Publication Date: 2013-11-20
北京润和微光科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The advantage of the Gaussian to flat-top conversion of the diffraction element lies in its high flexibility - the divergence angle...

Method used

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  • Diffractive optical element for shaping gauss beam into flat-topped beam, and preparation method thereof
  • Diffractive optical element for shaping gauss beam into flat-topped beam, and preparation method thereof
  • Diffractive optical element for shaping gauss beam into flat-topped beam, and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Example 1: Realizing the DOE (groove type) of the square top spot

[0051] There is a laser incident light source with a wavelength of 532nm and a spot diameter of 2mm. According to the DOE requirements, a square flat-top spot with a side length of 200um can be obtained under a focusing lens with a focal length of 200mm. In order to obtain the best shaping effect, the incident light source needs to be expanded and collimated to a diameter of about 6mm.

[0052] The implementation steps are as follows:

[0053] The first step is to carry out theoretical simulation design according to the above requirements, and generate a GDS file. The side length of the square groove in the GDS file is 4mm;

[0054] In the second step, the photoresist is spin-coated on the photoresist mask plate evaporated with metal chromium, and then the photoresist is exposed according to the GDS file using the mask plate preparation equipment;

[0055] The third step is to develop and fix the exp...

Embodiment 2

[0064] Example 2: Realize the DOE of the square flat top spot (step type)

[0065] There is a laser incident light source with a wavelength of 532nm and a spot diameter of 2mm. According to the DOE requirements, a square flat-top spot with a side length of 200um can be obtained under a focusing lens with a focal length of 200mm. In order to obtain the best shaping effect, the incident light source needs to be expanded and collimated to a diameter of about 6mm.

[0066] Implementation steps refer to embodiment 1, the difference is:

[0067] The first step is to carry out theoretical simulation design according to the above requirements, and generate a GDS file. The side length of the square step in the GDS file is 4mm;

[0068] The seventh step is to use the prepared photolithographic mask to expose, develop and fix the photoresist on the quartz substrate, so as to obtain a photoresist pattern consistent with the designed GDS file on the quartz substrate;

[0069] The 8th st...

Embodiment 3

[0071] Embodiment 3 Realize the DOE (groove type) of circular flat top spot:

[0072] There is a laser incident light source with a wavelength of 532nm and a spot diameter of 2mm. According to DOE requirements, a circular flat-top spot with a diameter of 200um can be obtained under a focusing lens with a focal length of 200mm. In order to obtain the best shaping effect, the incident light source needs to be expanded and collimated to a diameter of about 6mm.

[0073] Implementation steps refer to embodiment 1, the difference is:

[0074] The first step is to carry out theoretical simulation design according to the above requirements, and generate a GDS file. The diameter of the circle in the GDS file is 4mm;

[0075] The 8th step, as described in embodiment 1, difference is that what obtain is that diameter is the circular groove of 4mm;

[0076] All the other steps are the same as in Example 1.

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Abstract

The invention provides a new diffractive optical element for shaping a gauss beam into a flat-topped beam, and the diffractive optical element is called DOE for short; the invention also provides a preparation method of the DOE. Grooves or steps with different shapes and sizes are prepared in the center of a quartz substrate, and the DOE is then arranged at the different positions of a light path and is matched with a beam expanding collimation lens and a focusing lens, so that the flat-topped beam can be realized. The DOE has the outstanding advantages of being high in energy transmittance, less sensitive to the incident laser mode change, and simple and flexible in installation and use.

Description

technical field [0001] The invention relates to the technical field of laser beam shaping, in particular to a diffractive optical element for shaping a Gaussian beam into a flat-hat beam and a preparation method thereof. Background technique [0002] At present, the laser processing industry, especially the development of laser drilling equipment, laser welding equipment and laser display equipment, has put forward higher and higher requirements for beam quality. On the one hand, fine processing requires laser spots to be smaller and smaller. Hole equipment is already capable of punching holes with a diameter of tens of microns. On the other hand, fine processing requires that the laser spot is flat-topped rather than Gaussian. The so-called flat-top distribution means that the laser energy is uniform inside the spot. Gaussian distribution is characterized by high center energy and low edge energy. When the Gaussian beam is used for drilling, there will be problems such a...

Claims

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Application Information

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IPC IPC(8): G02B27/09G03F7/20
Inventor 王晓峰潘岭峰
Owner 北京润和微光科技有限公司
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