The utility model provides an industrial carbon
tetrafluoride tail gas
recovery processing device which comprises a bottom plate, an absorption tank, a
plasma processing part and a post-
processing part are arranged on the bottom plate, an input
pipe is arranged on the lower portion of the absorption tank, a first control valve and a flow meter are arranged on the input
pipe, an adsorption box is arranged at the upper end of the input
pipe, and a second control valve is arranged at the lower end of the adsorption box. A
tail gas inlet pipe is arranged at the upper part of the adsorption box, a gas inlet pipe and a liquid
discharge pipe are arranged on the side surface of the absorption tank, and a second control valve is arranged on the gas inlet pipe. According to the industrial carbon
tetrafluoride tail gas
recovery treatment device provided by the utility model, impurities in tail gas, carbon
tetrafluoride gas, part of organic pollutants and the like are subjected to adsorption,
plasma treatment reaction and other
impurity removal through multiple times of
impurity removal, so that the tail gas is better treated and absorbed; and meanwhile, the
plasma treatment part and the post-treatment part are used for detecting and refluxing the discharged gas, so that the concentration of carbon tetrafluoride in the discharged gas does not exceed the qualified standard.