72 results about "Tetrafluoride" patented technology

The invention belongs to the technical field of battery materials, and discloses a composite biomass hard carbon material as well as a preparation method and application thereof. The preparation method comprises the following steps: (1) carrying out mixed reaction on biomass and a composite acid solution to obtain esterification modified biomass; (2) performing gas phase modification treatment on the esterified and modified biomass in a mixed gas atmosphere to obtain a gas phase modified product; (3) mixing the gas-phase modified product with nano silicon, and pre-carbonizing in a protective gas atmosphere to obtain a composite pre-carbonized product; and (4) carrying out two-stage gradient sintering on the composite pre-carbonized product in a protective gas atmosphere, then cooling, and carrying out heat preservation reaction in a fluorine gas substance atmosphere to prepare the composite biomass hard carbon material. The fluorine gas substance comprises fluorine gas or carbon tetrafluoride. The composite biomass hard carbon material obtained by the preparation method has high specific capacity and cycling stability.

The invention provides natural graphite powder for a high-temperature gas cooled reactor nuclear fuel element and a preparation method of the natural graphite powder. The preparation method comprises the following steps: performing screening, crushing, shaping and grading treatment on graphite fine powder to obtain powder with the particle size of 25-35 microns; carrying out primary purification and secondary purification on the powder by using a mixed acid solution, heating the obtained chemically purified graphite powder in vacuum, carrying out high-temperature purification, introducing a mixed gas of argon and carbon tetrafluoride when the temperature reaches 1800 DEG C, and starting a circular reaction; then continuously carrying out gradient heating to 2000 DEG C, 2200 DEG C and 2400 DEG C, and respectively carrying out circular reaction at each temperature; then cooling to 300-400 DEG C, introducing mixed gas of oxygen and argon, and carrying out oxidation treatment; and finally, scattering and homogenizing to obtain a natural graphite powder finished product. The natural graphite powder provided by the invention realizes lower total impurity element content and total boron equivalent and higher specific surface area.

The invention discloses a hydrophobic diamond-like carbon coating and a preparation method thereof. The hydrophobic diamond-like carbon coating comprises a transition layer and an F-DLC layer. The preparation method comprises the following steps: S1, cleaning the substrate; s2, the coating chamber is vacuumized and heated, and the coating chamber and the base body are baked; s3, carrying out ion etching cleaning on the surface of the substrate; s4, after etching is completed, a Cr layer or a Ti layer is deposited on the surface of the base body in a magnetron sputtering mode to serve as a transition layer; and S5, inert gas and carbon tetrafluoride are introduced, the graphite target is started, and the F-DLC layer is deposited in an arc ion plating mode. Wherein in the step S5, the ratio of the introduced inert gas to the carbon tetrafluoride is 1: 0.3-1: 4, the cavity pressure of the coating cavity is 0.1-5.0 Pa, the bias voltage of the substrate is 20-800 V, and the target current of the graphite target is 20-400 A. The hydrophobic diamond-like coating is prepared in an electric arc ion plating mode, the characteristics that the target material particle energy is improved, the deposition rate is high, and the film layer compactness is good are achieved, and the prepared coating is better in hydrophobic angle and excellent in anti-sticking performance.

The invention discloses a near-infrared light mediated heterogeneous composite photocatalyst as well as a preparation method and application thereof, the heterogeneous composite photocatalyst is an up-conversion luminescent material loaded semiconductor material, and can realize up-conversion luminescent catalysis under the irradiation of 980nm near-infrared light; the up-conversion luminescent material is rare earth ion doped fluoride nanoparticles, fluoride is one or two of yttrium fluoride and sodium yttrium tetrafluoride, the doped rare earth ions comprise rare earth luminescent center ions and light absorption ions, the luminescent center ions comprise one of Er < 3 + >, Tm < 3 + >, Tb < 3 + > and Pr < 3 + >, and the light absorption ions comprise Yb < 3 + >; the semiconductor material is of a heterojunction structure which is tightly formed by Co3O4 quantum dots and g-C3N4 nanosheets. The up-conversion nanoparticles are synthesized by adopting a simple hydrothermal method and are loaded on the g-CN nanosheets modified by the CoO quantum dots, and the obtained composite material can effectively convert near-infrared light into visible green light, so that generation of photocatalytic reaction species is increased, and the up-conversion nanoparticles are recycled and reused for multiple times without inactivation.

The invention belongs to the field of chemical purification, and discloses a method and equipment for separating carbon tetrafluoride in nitrogen trifluoride through pressurized absorption of a deep eutectic solvent, and the method comprises the following steps: (1) increasing the pressure of nitrogen trifluoride crude gas to 0.5 MPa or above; (2) cooling the crude gas to below 40 DEG C through a crude gas feeding heat exchanger; (3) through the absorption tower, the crude gas entering from the tower kettle is in countercurrent contact with the eutectic solvent entering from the tower top, and the content of carbon tetrafluoride in the crude gas is reduced to 5 ppm or below; (4) reducing the content of carbon tetrafluoride in the eutectic solvent to be less than 1ppm through a two-stage flash tank; and (5) reducing the temperature of the eutectic solvent to be below 30 DEG C through a eutectic solvent discharging heat exchanger and a eutectic solvent cooler, and circulating the eutectic solvent back to the absorption tower from the bottom of the absorption tower. According to the method, the quality of the nitrogen trifluoride product can be improved, the carbon tetrafluoride impurity in the nitrogen trifluoride purity can be reduced to 5ppm, and the cost is low.

The utility model discloses a carbon tetrafluoride purification device which comprises a precooler, a low-boiling-point rectifying tower and a high-boiling-point rectifying tower, the precooler comprises a first tower body, a cooling structure communicated with the top of the first tower body and a heat exchanger communicated with the bottom of the first tower body, and the first tower body is provided with an incoming material inlet through which CF4 crude gas enters the precooler; the low-boiling-point rectifying tower is used for separating the CF4 crude gas cooled by the precooler to form a liquid-phase CF4 mixed solution; the high-boiling rectifying tower comprises a second tower body as well as a high-boiling tower cooling assembly and a reboiler which are positioned at the two ends of the second tower body, the second tower body is provided with a high-boiling tower filler section and a high-boiling tower feed port communicated with the high-boiling tower filler section, the high-boiling tower feed port is used for allowing liquid-phase CF4 to enter, the reboiler at the bottom can vaporize CF4 gas in condensed liquid, and the liquid-phase CF4 gas in the condensed liquid enters the high-boiling tower cooling assembly; and high-purity CF4 gas is obtained at the top, heavy-component impurities are obtained at the bottom, and the liquid-phase CF4 can perform heat and mass transfer with the filler section of the high-boiling tower, so that the purification effect of the CF4 is improved.

The invention belongs to the technical field of PVC material processing, and discloses a cable sheath PVC material waterproof protection treatment method and application, the method comprises the following steps: using carbon tetrafluoride as a working medium gas for plasma discharge, using a predefined plasma modification platform and combining a dielectric barrier discharge technology to carry out modification treatment on a PVC material, and obtaining a modified PVC material; the modified polyvinyl chloride material is obtained; carrying out physical and chemical property test on the modified polyvinyl chloride material to obtain a surface energy change state, carrying out hydrophilic angle test on the modified polyvinyl chloride material based on the surface energy change state, and regulating the hydrophilicity of the polyvinyl chloride material according to a hydrophilic angle test result; and sequentially carrying out pulse current attenuation test and breakdown voltage band test on the modified polyvinyl chloride material by utilizing a pulse current attenuation technology. Fluorination treatment is performed on the PVC surface through a CF4 plasma technology, so that the hydrophobicity and weather resistance of PVC are effectively improved.

The invention discloses a system for preparing high-abundance carbon-13 isotope by using carbon tetrafluoride as a medium and a refrigerant, the system comprises a microchannel rectification device, the microchannel rectification device comprises a rectification unit, a reboiler and a condenser, the raw material of the microchannel rectification device is first carbon tetrafluoride with natural abundance, and the second carbon tetrafluoride with natural abundance is a second carbon tetrafluoride with natural abundance; the condenser is configured to condense a component in a gas state in first carbon tetrafluoride to be rectified into liquid, the reboiler is configured to heat the component in the liquid state into gas, and a refrigerant in the condenser is second carbon tetrafluoride. The device adopts a micro-channel rectification mode, so that the height of the rectification tower can be obviously reduced, mass production can be realized, and energy consumption is reduced.

The invention relates to the technical field of gas purification, in particular to a carbon tetrafluoride purification system and method, and the purification system comprises a precooling unit, a low-boiling tower and a high-boiling tower; packing layers in array distribution are arranged in the low-boiling tower and the high-boiling tower, a distribution disc is arranged between the packing layers, and telescopic mass transfer parts in array distribution are arranged on the distribution disc; a low-boiling condenser and a high-boiling condenser are arranged at the tops of the low-boiling tower and the high-boiling tower respectively, and refrigerants of the low-boiling tower and the high-boiling tower are introduced into the telescopic mass transfer part through an input pipe after condensation operation is completed and then are discharged through an output pipe; the flow meter is used for detecting the gas discharge amount and the liquid backflow amount of the rectifying tower, the backflow ratio change of the rectifying tower is calculated according to the gas discharge amount and the liquid backflow amount of the rectifying tower, and then the amount of refrigerants introduced into the telescopic mass transfer part can be adjusted and controlled by adjusting the operation power of the booster fan and the opening size of the adjusting valve; therefore, the top height of the telescopic mass transfer part is adjusted.

Mixtures configured to etch a thin film of an integrated circuit material are disclosed. The mixtures may include a first compound comprising one or more of: A, B, and C; and a second compound comprising one or more of: oxygen, argon, helium, nitrogen, octafluorocyclobutane (C4F8), hexafluorobutadiene (C4F6), carbonyl fluoride (COF2), difluoromethane (CH2F2), trifluoromethane (CHF3), carbon tetrafluoride (CF4), methyl fluoride (CH3F), octafluorocyclopentene (C5F8), 2,3,3,3-tetrafluoropro-l-ene (C3H2F4), 2,3,3,3-tetrafluoropro-l-ene (C3H2F4), hexafluoropropene (C3F6), hexafluorocyclopropane (C3F6), or 1,1,3,3,3-pentafhioropropene (C3HF5).

The invention provides a detection method and a detection device for water temperature and organic matters in water, trace organic matters in a flowing water body are detected based on the change of an up-conversion luminescence peak intensity ratio corresponding to a first characteristic peak and a second characteristic peak in an up-conversion luminescence spectrum of sodium yttrium tetrafluoride particles (NaYF4: Yb, Tm), and the trace organic matters in the flowing water body are detected based on the change of the up-conversion luminescence peak intensity ratio corresponding to the first characteristic peak and the second characteristic peak in the up-conversion luminescence spectrum of the sodium yttrium tetrafluoride particles (NaYF4: Yb, Tm). The temperature change of the flowing water body is detected according to the change of the up-conversion luminescence peak intensity ratio corresponding to the third characteristic peak and the fourth characteristic peak in the up-conversion luminescence spectrum. The method can be used for efficiently detecting the organic matters in the water and detecting the temperature of the water body, has universality, is simple and quick, does not need to generate fluorescence by the target organic matters, and is wide in applicability.

The invention discloses a high-temperature oxygen-free plasma stress release method for a PCB pattern electroplating clamping film. The method comprises the following steps: carrying out primary film stripping treatment on a PCB subjected to pattern electroplating; the PCB with the film clamping residues after film stripping is placed in plasma processing equipment; an oxygen-free plasma system is adopted for treatment, and the plasma system comprises mixed gas of carbon tetrafluoride and inert gas; the plasma treatment parameters are controlled as follows: the radio frequency power is 4000-5000 w, the treatment air pressure is 50-200 pa, and the treatment time is 10-15 min; and after the plasma treatment is completed, secondary film stripping treatment is carried out. The problems that in the prior art, pattern electroplating clamping film is abnormal, and the removing efficiency is poor are solved.

The application belongs to the field of chemical purification, and discloses a method for separating carbon tetrafluoride in nitrogen trifluoride by using a eutectic solvent under pressure and an equipment thereof, which comprises the following steps: (1) increasing the pressure of crude nitrogen trifluoride gas to more than 0.5 MPa; (2) cooling the temperature of the crude gas to below 40 DEG C through a crude gas feeding heat exchanger; (3) reducing the content of carbon tetrafluoride in the crude gas to below 5 ppm by countercurrent contact between the crude gas entering the tower kettle and the eutectic solvent entering the top of the absorption tower through the absorption tower; (4) reducing the content of carbon tetrafluoride in the eutectic solvent to below 1 ppm through two-stage flash tanks; and (5) reducing the temperature of the eutectic solvent to below 30 DEG C through a eutectic solvent discharging heat exchanger and a eutectic solvent cooler, and circulating the eutectic solvent from the bottom of the absorption tower back to the absorption tower. The method can improve the quality of the nitrogen trifluoride product, and the content of carbon tetrafluoride impurities in the nitrogen trifluoride product can be reduced to 5 ppm, and the cost is low.

The invention discloses a preparation method and application of an in-situ copolymerized PIM-pillararene composite membrane, a tetrahydroxy-containing compound and a tetrafluoro-containing compound are used as reaction monomers, a precursor matrix is synthesized by adjusting the proportion of the tetrafluoro-containing compound, and then a mixed matrix polymer is obtained by in-situ doping of polyhydroxy pillararene. Dissolving a polymer in an organic solvent to obtain a membrane casting solution; and coating a solvent-resistant substrate with the membrane casting solution, and drying in a drying oven to obtain the composite membrane with high separation performance. Fluorine groups in a PIM matrix and hydroxyl groups on cyclic polyhydroxy aromatic hydrocarbon molecules are subjected to chemical cross-linking reaction to enhance the porosity of the polymer and increase the specific surface area, and column aromatic rings are introduced to promote adsorption of guest molecules, so that rich high-performance transmission channels are formed. On the basis of PIM synthesis, a polyhydroxy pillar arene compound is further introduced, the membrane stability can be improved through a rich net structure, and the separation performance of common organic solvents is remarkably improved.

The invention belongs to the technical field of fluorescence detection, and particularly relates to a method for detecting trace water in an organic solvent. In the invention, the sodium erbium tetrafluoride serving as the probe can emit light under the irradiation of exciting light, and the detection of trace water in an organic solvent can be realized through the change of the intensity ratio of two specific light-emitting peaks along with the water content by utilizing the difference of the multi-phonon relaxation probability influence degrees of water molecules on the light-emitting energy levels of all excited states of erbium ions. The trace water detection nanoprobe adopted by the invention is non-toxic, stable in photochemical property, strong in anti-interference capability, easy to store, high in detection sensitivity and simple to operate, and is expected to be used in the fields of industrial production, drug synthesis, food processing, environmental monitoring and the like.

The invention discloses a corrosion-resistant composite material for an industrial ton bag and a preparation method of the corrosion-resistant composite material. The preparation method of the composite material comprises the following steps: firstly, carrying out plasma activation treatment on polypropylene fibers to improve the surface activity of the polypropylene fibers, then immersing the polypropylene fibers into a graphene oxide dispersion liquid, carrying out drying and heat setting to form a graphene reinforced support layer, and then carrying out plasma etching through carbon tetrafluoride and oxygen to construct a micro-nano dual-scale structure on the surfaces of the fibers so as to obtain the graphene reinforced composite material. And finally, performing high-pressure emulsification on fluorinated polyolefin emulsion containing polyethylene, fluoroelastomer, nano silicon dioxide and the like, blade-coating the surface of the fiber with the emulsified fluorinated polyolefin emulsion, and performing hot-pressing compounding. Through multi-layer synergistic modification, the mass change rate of the composite material in a strong acid and strong alkali environment is lower than 1%, the strength retention rate exceeds 89% after ultraviolet aging for 500 h, the peel strength reaches 8.2 N / 25 mm, the composite material has excellent corrosion resistance, aging resistance and interface bonding force, and the service life of the ton bag in a severe environment is effectively prolonged.

The application provides a two-dimensional nanosheet film material, a preparation method thereof, a permeation energy power generation film material and an application thereof. The preparation method comprises the following steps: preparing an intermediate film material by suction filtration through two-dimensional nanosheets, and performing plasma treatment on the intermediate film material to obtain the two-dimensional nanosheet film material; wherein the ionized gas used in the plasma treatment comprises at least one of air, oxygen and carbon tetrafluoride; in the plasma treatment, the flow rate of the ionized gas is 0.5-30 slm, and the ionization power is 10-500 W. The application further provides the two-dimensional nanosheet film material obtained by the above preparation method, a permeation energy power generation film material comprising the two-dimensional nanosheet film material or prepared from the two-dimensional nanosheet film material, and an application of the permeation energy power generation film material. The above preparation method is simple in process, safe and reliable, and high in operability; the two-dimensional film material prepared has high output power, and has wide industrial application prospect.

The invention provides a method for chiral resolution of a cyflumetofen enantiomer. The cyflumetofen enantiomer in a cyflumetofen test solution is separated by adopting an ultrahigh liquid chromatography, a stationary phase is a polysaccharide derivative chiral chromatographic column, a mobile phase A is an organic solvent, a mobile phase B is deionized water, the mobile phase B is subjected to gradient elution according to a volume percentage ratio of 15-5% within 0-5 minutes, and the mobile phase B is subjected to gradient elution according to a volume percentage ratio of 15-5% within 5-10 minutes. The mobile phase B is subjected to isocratic elution according to the volume percent of 5%, the column temperature is 35 DEG C, and the flow velocity is 0.7 mL / min; a detector is adopted for determination, and cyflumetofen chiral monomer fractions are collected in a fraction collector. The invention provides the cyflumetofen chiral enantiomer which can be effectively separated and can be used for preparing a certain scale, the method overcomes the defects in the prior art, and the method has the characteristics of mild and simple operation conditions, high sensitivity, high separation speed, high purity of the separated monomer, green and environment-friendly mobile phase and the like.

This invention relates to the field of membrane separation, specifically to a membrane separation system and method for removing nitrogen from carbon tetrafluoride. The invention creatively connects two complementary membranes—a highly permeable, moderately selective organic membrane and a highly selective, moderately permeable molecular sieve membrane—in a two-stage series configuration via an intelligent composition analysis and control unit. The permeate composition of the first-stage membrane is the key control point determining the final separation performance. Only when the carbon tetrafluoride concentration is precisely controlled within 90-92% can the second-stage highly selective membrane achieve maximum efficiency, thereby simultaneously achieving ≥99.0% purity and ≥95.0% recovery rate.

The invention relates to a method and a device for separating and refining nitrogen trifluoride and carbon tetrafluoride. The crude nitrogen trifluoride gas enters an adsorber in an adsorption state, an adsorbent selectively adsorbs carbon tetrafluoride, and a high-purity nitrogen trifluoride product is obtained at an outlet; meanwhile, hot inert gas is utilized to purge the adsorber in a desorption state, outlet regenerated gas enters a compressor after being cooled, and the regenerated gas enters a membrane separation assembly after being compressed; carbon tetrafluoride is used as permeation gas to permeate through the separation membrane, and residual waste gas is discharged to an incinerator. Main equipment comprises an adsorber in an adsorption state, an adsorber in a desorption state, a regeneration gas heater, a regeneration gas cooler, a compressor, a membrane separation assembly and the like. According to the method, nitrogen trifluoride and carbon tetrafluoride are separated through temperature swing and pressure swing adsorption, carbon tetrafluoride is efficiently and selectively adsorbed through the adsorbent to obtain the high-purity nitrogen trifluoride product, carbon tetrafluoride is separated and recycled through the membrane separation assembly, and the method has the advantages of being high in product purity and yield, low in cost and simple in process.

The invention belongs to the technical field of inorganic non-metallic materials, and particularly relates to a potassium yttrium pentafluoride compound as well as a preparation method and application thereof. The preparation method of the yttrium potassium pentafluoride compound provided by the invention comprises the following steps: dropwise adding ammonia water into a rare earth nitrate solution to adjust the pH value to 6-10, and carrying out heat preservation and aging to obtain a precipitate A; rare earth nitrate in the rare earth nitrate solution comprises yttrium nitrate; mixing the precipitate A, sodium fluoride and water, and performing hydrothermal reaction to obtain a precipitate B; and mixing the precipitate B and potassium fluoride, and sequentially carrying out grinding and heat treatment to obtain the yttrium potassium pentafluoride compound. The preparation method comprises the following steps: preparing rare earth layered hydroxide powder (precipitate A) through an ammonia dropping method, continuously carrying out a hydrothermal reaction to prepare a sodium yttrium tetrafluoride compound precursor, and then preparing the potassium yttrium pentafluoride compound through a grinding and sintering method. The preparation method provided by the invention is simple in process, mild in reaction condition and simple and convenient to operate.

The present invention belongs to the technical field of conductive materials and their preparation, and specifically relates to poly (3-bromofuran) materials with electrochemical energy storage, and preparation methods and applications thereof. The preparation method of the poly (3-bromofuran) material with electrochemical energy storage described in the present invention comprises the following steps: dissolving tetrabutylammonium boron tetrafluoride in a mixed solution of acetonitrile and boron trifluoride ether, and then adding 3-bromofuran to obtain an electrochemical polymerization solution; in a one-chamber three-electrode system, using an ITO electrode as a working electrode, using a constant potential polymerization method, the electrochemical polymerization solution is deposited on the ITO electrode to obtain a poly (3-bromofuran) material with electrochemical energy storage. The poly (3-bromofuran) material with electrochemical energy storage provided by the present invention has good energy storage capacity, strong electron transmission capacity, and strong charge and discharge performance. The present invention also provides a preparation method thereof, which is simple to operate, and the prepared poly (3-bromofuran) material is applied to the electrode of a capacitor.

The invention relates to methods for processing ammonium polyfluoride and producing nitrogen trifluoride (NF3). The technical result is the creation of a comprehensive, low-waste, explosion-proof technology for producing nitrogen trifluoride and, additionally, a group of inorganic fluorides: nitrogen trifluoride, carbon tetrafluoride, carbonyl fluoride, hydrogen fluoride and hydrofluoric acid. The proposed method envisages removing excess liquid ammonium polyfluoride from a reactor and sending it to be flaked or reacting it with oxygen, or with oxygen and carbon, or with oxygen and hydrogen-containing substances, or with oxygen and carbon and hydrogen-containing substances, or with fluorine, or with fluorine and hydrogen-containing substances, and recovering low-boiling substances by distillation and isolating hydrogen fluoride or hydrofluoric acid.

The invention belongs to the technical field of sulfuryl fluoride preparation methods, and particularly relates to a method for continuously preparing sulfuryl fluoride by a fluidized bed, which comprises the following steps: S1, by taking carbon tetrafluoride as working gas, pretreating a hydrogen fluoride-amine complex by adopting plasma for later use; s2, preheating a fluidized bed to 150-180 DEG C, adding fluoride salt powder and the pretreated hydrogen fluoride-amine complex into the fluidized bed, and heating to 190-200 DEG C; preheating the gasified sulfuryl chloride to 100-120 DEG C, and introducing the preheated sulfuryl chloride into the fluidized bed for two-stage heating reaction; and S3, carrying out gas-solid separation, and washing and drying the gas to obtain sulfuryl fluoride. The plasma treatment is combined with the fluidized bed, so that the synthesis efficiency is improved, the generation of byproducts is reduced, and the product purity is improved.

The invention discloses a catalyst for cracking hexafluoroethane in crude carbon tetrafluoride gas, a preparation method of the catalyst and a carbon tetrafluoride production device and method. The catalyst comprises a carrier, active metal and a structural aid. The carrier is gamma-Al2O3, the specific surface area is 180-250 m / g, and the particle size is 3-5 mm; the active metal is one or more of nickel, copper, iron, cobalt and the like, and the loading capacity is 15-20wt%; the structural additive is selected from one of magnesium, calcium or strontium, and the loading capacity is 0.5-2.5%. The catalyst is prepared by dipping the alkaline earth metal auxiliary agent, roasting, then introducing active metal, aging, drying, reducing and carrying out fluorination activation, and is applied to deep cracking of CF4 crude gas. The purity of the cracking gas is more than 99% after the cracking gas is subjected to water washing, alkali washing and drying. The catalyst has the advantages of high activity, long service life and the like.

The utility model provides an industrial carbon tetrafluoride tail gas recovery processing device which comprises a bottom plate, an absorption tank, a plasma processing part and a post-processing part are arranged on the bottom plate, an input pipe is arranged on the lower portion of the absorption tank, a first control valve and a flow meter are arranged on the input pipe, an adsorption box is arranged at the upper end of the input pipe, and a second control valve is arranged at the lower end of the adsorption box. A tail gas inlet pipe is arranged at the upper part of the adsorption box, a gas inlet pipe and a liquid discharge pipe are arranged on the side surface of the absorption tank, and a second control valve is arranged on the gas inlet pipe. According to the industrial carbon tetrafluoride tail gas recovery treatment device provided by the utility model, impurities in tail gas, carbon tetrafluoride gas, part of organic pollutants and the like are subjected to adsorption, plasma treatment reaction and other impurity removal through multiple times of impurity removal, so that the tail gas is better treated and absorbed; and meanwhile, the plasma treatment part and the post-treatment part are used for detecting and refluxing the discharged gas, so that the concentration of carbon tetrafluoride in the discharged gas does not exceed the qualified standard.

The invention relates to a preparation method of a probe surface coating of an MEMS probe card. The preparation method comprises the following steps: 1) fixing a metal probe in a deposition chamber of a three-dimensionally rotatable magnetron sputtering tool; (2) introducing inert gas into the deposition chamber, and applying direct-current negative bias to remove pollutants on the surface of the probe; (3) applying negative bias voltage in a pulse mode; (4) sputtering and depositing a metal and silicon composite coating in an inert gas atmosphere; (5) introducing acetylene, applying negative bias to deposit a high-hardness diamond-like carbon layer on the surface of the composite coating, and synchronously introducing carbon tetrafluoride; (6) continuously increasing the flow of carbon tetrafluoride and reducing the flow of acetylene; (7) stopping introducing acetylene when the flow of the carbon tetrafluoride reaches 120sccm and the refractive index is less than or equal to 1.8; (8) switching off the power supply, introducing inert gas for temperature control cooling, and taking out the probe after cooling to room temperature; and (9) stripping the coatings of the probe head and the probe tail, so that the conductivity of the probe is not influenced.

The invention relates to the technical field of tail gas absorption and recovery, in particular to a hydrogen fluoride tank car vented tail gas absorption and recovery system and method, and solves the problems that some hydrogen fluoride tank car vented tail gas absorption and recovery devices are single in structure and prone to causing insufficient tail gas absorption and purification. The absorption tank is fixedly installed on one side of the supporting table in a penetrating mode, the side, close to the bottom end, of the absorption tank is connected with an air inlet pipe in a penetrating mode, a spraying pipe which is annularly arranged is installed in the absorption tank and located above the air inlet pipe, and the bottom end of the spraying pipe is connected with a plurality of atomizing nozzles in a penetrating mode. Alkaline washing liquid is sprayed into the absorption tank through the atomization spray head, so that the alkaline washing liquid is in full contact with HF-containing tail gas flowing upwards, HF is neutralized, the neutralized gas continues to flow upwards and is adsorbed through a filler plate and activated carbon in the top seat, and the absorption effect is improved. Therefore, residual tetrahydrogen fluoride and hydrogen fluoride gas in the tail gas can be fully absorbed and purified.

The utility model discloses a carbon tetrafluoride reaction system and a reactor, relates to the technical field of carbon tetrafluoride production, and aims to solve the problem that gas at the bottom of a carbon tetrafluoride reactor is short-circuited easily due to an existing gas inlet mode. The upper end of the reactor body is provided with a carbon adding port and a carbon tetrafluoride outlet which are both communicated with an inner cavity of the reactor body, the position, close to the lower end, of the reactor body is provided with an ash collecting barrel, and the ash collecting barrel is provided with an air inlet enabling inlet air flow to diffuse downwards, so that fluorine entering the reactor body firstly faces downwards and then can diffuse upwards. According to the carbon tetrafluoride reactor, the inner cavity of the reactor body is provided with a plurality of supporting pipes which are arranged at equal intervals, the pipe diameters of the supporting pipes are the same, and the periphery of the reactor body is provided with a water cooling jacket used for cooling, so that the situation that gas at the bottom of the carbon tetrafluoride reactor is short-circuited in the gas inlet process is avoided, loose carbon blocks are ignited by fluorine gas, and subsequent reaction is ensured.

The invention discloses a photoinduction-based catalyst-free aryl cyano compound synthesis method, which comprises: dissolving alkyl trifluoroborate and cyano aromatic hydrocarbon in a polar solvent to form a homogeneous reaction system; performing anaerobic treatment on the homogeneous reaction system to obtain an anaerobic reaction environment; irradiating the homogeneous reaction system by adopting a light source containing ultraviolet light with the wavelength of 200nm-780nm to excite the alkyl trifluoroborate to crack to generate an alkyl free radical intermediate and boron tetrafluoride anions; the boron tetrafluoride anions and the cyano aromatic hydrocarbon form an EDA compound; and directly synthesizing the aryl cyano compound from the alkyl radical intermediate and the EDA compound. The synthesis result does not depend on a metal catalyst, an oxidant or a chemical additive, and the reaction conditions are mild, green and efficient.