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202 results about "Boron trichloride" patented technology

Boron trichloride is the inorganic compound with the formula BCl₃. This colorless gas is a reagent in organic synthesis. It is highly reactive toward water.

Method of patterning lead zirconium titanate and barium strontium titanate

In an embodiment of the present invention, a method is provided of patterning PZT layers or BST layers. For example, a PZT layer or a BST layer is plasma etched through a high-temperature-compatible mask such as a titanium nitride (TiN) mask, using a plasma feed gas comprising as a primary etchant boron trichloride (BCl3) or silicon tetrachloride (SiCi4). Although BCl3 or SiCl4 may be used alone as the etchant plasma source gas, it is typically used in combination with an essentially inert gas. Preferably the essentially inert gas is argon. Other potential essentially inert gases which may be used include xenon, krypton, and helium. In some instances O2 or N2, or Cl2, or a combination thereof may be added to the primary etchant to increase the etch rate of PZT or BST relative to adjacent materials, such as the high-temperature-compatible masking material. A TiN masking material can easily be removed without damaging underlying oxides. The selectivity of PZT or BST relative to TiN is very good, with the ratio of the etch rate of the PZT film to the etch rate of the TiN mask typically being better than 20:1. In addition, the etch rate for PZT using a BCl3-comprising plasma source gas is typically in excess of 2,000 Å per minute. A substrate bias power is applied to direct ions produced from the BCl3 or SiCl4 toward the surface to be etched. The bias power is controlled to avoid sputtering of a conductive layer or layers in contact with the PZT layer, so that the surface of the etched PZT is not contaminated by a conductive material, which can cause the semiconductor device which includes the patterned PZT to short out.
Owner:APPLIED MATERIALS INC

High-boron content silicon-boron-carbon-nitrogen precursor and preparation method thereof

InactiveCN109369918AAvoid over-crosslinkingIncreased boron contentViscous liquidElemental composition
The invention relates to a high-boron content silicon-boron-carbon-nitrogen precursor and a preparation method thereof. The preparation method comprises the following steps: uniformly mixing functional, bifunctional and trifunctional chlorosilane containing unsaturated groups and hexamethyl-disilazane at a low temperature according to a certain ratio, raising the temperature and completely reacting, dropping 1,3-diethyl cycloborazane under low temperature conditions according to a certain ratio, fully reacting the reactants, and finally performing reduced pressure distillation to obtain the solvent and by-products produced by the reaction, thereby obtaining faint yellow viscous liquid or a solid product, namely the SiBCN ceramic precursor. According to the synthetic method disclosed by theinvention, a novel Polyborosilicate resin is prepared by adopting a 'double boron source', the boron content of the prepared SiBCN ceramic can reach 20%, and the problems that the boron content is low and improvement of high temperature resistance and oxidation resistance of the ceramic is not obvious can be solved. The elementary composition regulation range of the precursor disclosed by the invention is wide, and resins which are suitable to serve as a high-temperature-resistant coating, a fiber reinforcement or a ceramic-based composite material matrix and have different elementary compositions can be prepared.
Owner:AEROSPACE RES INST OF MATERIAL & PROCESSING TECH +1

Procaterol hydrochloride impurity preparation method

The invention discloses a procaterol hydrochloride impurity preparation method, which comprises: 1, adding procaterol hydrochloride to an organic solvent under an alkaline condition, adding an appropriate amount of benzyl halide, carrying out heating reflux until the reaction is complete, and carrying out post-treatment to obtain an intermediate 1; step 2, adding the intermediate 1 into a reaction bottle, then adding an organic solvent, raising the temperature, adding an oxidant aqueous solution, pouring into ice water after heating reaction is completed, and separating out a solid to obtain an intermediate 2; and step 3, adding the intermediate 2 into a reaction bottle, then adding an organic solvent, cooling to a low temperature, slowly adding boron trichloride, keeping the low temperature until the reaction is complete, pouring into ice water, separating out solids, and filtering to obtain the procaterol impurity. Procaterol hydrochloride which is easy to obtain is used as an initial raw material to prepare the procaterol hydrochloride impurity, the synthesis cost of the procaterol hydrochloride impurity is reduced, the preparation steps of the procaterol hydrochloride impurity are simplified, and the selectivity is improved, so that the preparation time is saved, and the preparation efficiency is improved. The total yield of the reaction is 50-70%.
Owner:SHENZHEN NEPTUNUS PHARMA RES INST CO LTD

SiBCN metal-free ceramic wave-absorbing material obtained from cracking conversion of benzene ring-containing polymer and preparation method thereof

The invention discloses a SiBCN metal-free ceramic wave-absorbing material obtained from cracking conversion of benzene ring-containing polymer and a preparation method thereof, wherein the preparation method includes synthesis of benzene ring-containing hyperbranched polyborosilazane and preparation of the SiBCN ceramic wave-absorbing material. The hyperbranched polyborosilazane is synthesized bymethyl dichlorodiphenylsilazane, dichlorosilazane, boron trichloride and hexamethyldisiliazide, then the hyperbranched polyborosilazane is crosslinked and tabletted into a blank body, and the blank body is cracked into the ceramic wave-absorbing material. Starting from the design of the structure of a ceramic polymer precursor, synthesis of a high ceramic yield polyborosilazane precursor and construction of a crosslinking topology system are performed, and the benzene ring is directly introduced into the structure of the polyborosilazane precursor, so that sp2 hybrid carbon atoms in the benzene ring directly form graphite carbon, carbon nanotubes and other structures in situ in cracking conversion process, the high temperature wave absorbent is uniformly dispersed in the structure of an amorphous low-loss carrier, and the metal-free ceramic based composite material with good wave absorbing properties is obtained.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Chromatography sampling system for gas boron-trichloride analysis for electronic industry

PendingCN108896689AAvoid decomposition clogging problemsComponent separationFour-way valveBoron trichloride
The invention discloses a chromatography sampling system for gas boron-trichloride analysis for electronic industry. The chromatography sampling system comprises a helium replacement system, a venturivacuum pump system and a chromatography pre-processing system; the helium replacement system comprises a helium inlet, a switch valve a, a switch valve b and a four-way valve; the venturi vacuum pumpsystem comprises a venturi vacuum pump, a nitrogen inlet and a waste-gas outlet, both the nitrogen inlet and the waste-gas outlet are in air circuit connection with the venturi vacuum pump, and the venturi vacuum pump is in air circuit connection with a three-way valve b through a switch valve d. According to the chromatography sampling system for gas boron-trichloride analysis for electronic industry, as for the problem that boron trichloride is decomposed in water, hyper-pure helium is used for replacement, a sampling pipe is blown and swept, the system is vacuumized, and moisture of a sampling system can be reduced to 0.1 ppm or below through several times of blowing sweeping-vacuum replacement; as for the problem that the boron trichloride cannot enter a vacuum pump, a venturi vacuumpump is adopted, nitrogen serves as blowing sweeping air, and the decomposition and blocking problems of the boron trichloride can be solved.
Owner:朗析仪器(上海)有限公司
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