Method of manufacturing a thin film magnetic head
a manufacturing method and technology of magnetic head, applied in the field of manufacturing a thin film magnetic head, can solve the problems of reducing the ion beam irradiation amount, increasing the width of the pole portion, and insufficient yield, etc., and achieves the effects of improving yield, high precision, and extremely minute pole width
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first embodiment
[0042]First of all, referring to FIGS. 1A and 1B to FIGS. 6A and 6B, and FIGS. 7 to 9, an example of a method of manufacturing a composite thin film magnetic head as a method of manufacturing a thin film magnetic head according to a first embodiment of the invention will be described.
[0043]In FIGS. 1A and 1B to FIGS. 6A and 6B, FIGS. 1A to 6A show cross sections each of which is perpendicular to the air bearing surface and FIGS. 1B to 6B show cross sections each of which is parallel to the air bearing surface of the pole portion. FIGS. 7 to 9 show perspective structures corresponding to main manufacturing processes. Here, FIG. 7 corresponds to a state shown in FIGS. 1A and 1B. FIG. 8 corresponds to a state shown in FIGS. 2A and 2B. FIG. 9 corresponds to a state shown in FIGS. 5A and 5B. However, insulating films 13, 15 and 17, thin film coils 14 and 16, an overcoat layer 18 and the like shown in FIGS. 6A and 5B are omitted in FIG. 9.
[0044]In the following description, the X axis dir...
second embodiment
[0097]Next, a second embodiment of the invention will be described.
[0098]First of all, referring to FIGS. 15A and 15B to FIGS. 19A and 19B, and FIGS. 20 to 22, a method of manufacturing a composite thin film magnetic head as a method of manufacturing a thin film magnetic head according to a second embodiment of the invention will be described. In FIGS. 15A and 15B to FIGS. 19A and 19B, FIGS. 15A to 19A show cross sections each of which is perpendicular to the air bearing surface and FIGS. 15B to 19B show cross sections each of which is parallel to the air bearing surface of the pole portion. FIGS. 20 to 22 are perspective views corresponding to main manufacturing processes. Here, FIG. 20 corresponds to a state shown in FIGS. 17A and 17B. FIG. 21 corresponds to a state shown in FIGS. 18A and 18B. FIG. 22 corresponds to a state shown in FIGS. 19A and 19B. However, in FIG. 22, insulating films 13, 15 and 17, thin film coils 14 and 16, an overcoat layer 18 and the like in FIGS. 19A and ...
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