Chromatography sampling system for gas boron-trichloride analysis for electronic industry

Abstract

The invention discloses a chromatography sampling system for gas boron-trichloride analysis for electronic industry. The chromatography sampling system comprises a helium replacement system, a venturivacuum pump system and a chromatography pre-processing system; the helium replacement system comprises a helium inlet, a switch valve a, a switch valve b and a four-way valve; the venturi vacuum pumpsystem comprises a venturi vacuum pump, a nitrogen inlet and a waste-gas outlet, both the nitrogen inlet and the waste-gas outlet are in air circuit connection with the venturi vacuum pump, and the venturi vacuum pump is in air circuit connection with a three-way valve b through a switch valve d. According to the chromatography sampling system for gas boron-trichloride analysis for electronic industry, as for the problem that boron trichloride is decomposed in water, hyper-pure helium is used for replacement, a sampling pipe is blown and swept, the system is vacuumized, and moisture of a sampling system can be reduced to 0.1 ppm or below through several times of blowing sweeping-vacuum replacement; as for the problem that the boron trichloride cannot enter a vacuum pump, a venturi vacuumpump is adopted, nitrogen serves as blowing sweeping air, and the decomposition and blocking problems of the boron trichloride can be solved.

Description

technical field [0001] The invention relates to the technical field of gas analysis, in particular to a chromatographic sampling system for analyzing boron trichloride gas used in the electronic industry. Background technique [0002] Boron trichloride is mainly used in the chemical vapor deposition (CVD) film formation process and plasma dry etching process, which has high technical requirements and has a great impact on the circuit yield in the IC manufacturing process, which will bring great impact on the quality of IC products. It is a critical role and cannot be replaced by other electronic gases. With the rapid development of domestic integrated circuits, the demand for boron trichloride is increasing. The impurity content and purity of boron trichloride will directly affect the quality, performance, technical indicators and yield of ICs and electronic components. In the past, high-purity boron trichloride above 5N could not be produced in China, and this level of pro...

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Problems solved by technology

In the past, high-purity boron trichloride above 5N could not be produced in China, and this level of products was completely imported from several large foreign companies such as the United States, Britain, Japan, etc. In recent years, with the development of domestic technology, 5N can also be purified in China. High-purity boron trichloride, boron trichloride can be decomposed into boron oxide and hydrogen chloride gas when it meets water at room temperature. The system can alleviate the decomposition of boron trichloride, but boron trichloride gas cannot enter the ordinary piston vacuum pump (this kind of vacuum pump is full of oil), so the sampling and analysis of boron trichloride has always been a major difficulty in chromatographic analysis

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