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14 results about "Dichlorosilane" patented technology
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Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H₂SiCl₂. In its major use, it is mixed with ammonia (NH₃) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS:NH₃ (i.e. 16:1), usually results in lower stress nitride films.