The invention discloses a
heat pump distillation and multi-effect
distillation integrated device and process for purifying
trichlorosilane. The steam at the top of a high-pressure
tower which is a high-boiling-fraction removal column is used to heat liquid at the bottom of a low-pressure
tower which is a low-boiling-fraction removal column, the steam at the top of the high-boiling-fraction removal column is condensed, and the process is a multi-effect
distillation process; meanwhile, the steam at the top of the low-boiling-fraction removal column is subjected to pressure and temperature rise through a compressor and then is used for heating the liquid at the bottom of the high-boiling-fraction removal column, the steam at the top of the low-boiling-fraction removal column is condensed, and the process is a
heat pump distillation process; and the integration of the
heat pump distillation and multi-effect distillation can be realized in the whole process. In the whole process flow, one compressor is additionally arranged, the heat exchange process inside a rectification
system is realized by two heat exchangers and condensers and reboilers are saved simultaneously, that is to say, small amount of
electricity consumption of one compressor is added and a large amount of cold energy and heat public works are saved, and thereby the
energy consumption for the whole rectification and purification process of the
trichlorosilane is greatly reduced.