Heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane

A heat pump rectification and multi-effect rectification technology, applied in the field of rectification, can solve the problems such as the shortage of introduction of heat pump rectification and multi-effect rectification technology, and achieve the effect of saving refrigeration and heat public works and reducing energy consumption

Inactive Publication Date: 2011-08-17
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the introduction of heat pump rectification and multi-effect distillation technologies in this field is very short, and the technology of integrating heat pump rectification and multi-effect rectification is even more blank

Method used

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  • Heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane
  • Heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane
  • Heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Embodiment 1: as image 3 As shown, the heat pump rectification and double-effect rectification are integrated to purify the production device and process flow of trichlorosilane, including light removal tower 1, weight removal tower 2, compressor 7, heat exchanger 14, heat exchanger II 5 and several material pipelines, etc. The middle part of the light removal tower 1 is provided with a feed inlet, and one of the discharge pipelines at the bottom of the tower returns to the inner bottom of the light removal tower 1 after being heated up through the heat exchanger 14, and the other pipe is connected with the middle part of the weight removal tower 2 as the inlet of the weight removal tower. material; the discharge pipeline at the top of the light removal tower 1 first passes through the compressor 7 to boost the temperature and then passes through the heat exchanger II 5 to exchange heat with the discharge pipeline at the bottom of the light removal tower 2, and then a ...

Embodiment 2

[0025] Embodiment 2: as Figure 4 As shown, the heat pump rectification and three-effect rectification are integrated to purify trichlorosilane process and its production equipment, including light removal tower 1, weight removal tower 2, secondary light removal tower 3, compressor 7, heat exchanger I 4, heat exchanger II 5, heat exchanger III 6 and several material pipelines. Among them, the pressure level of the three towers is the highest in the second light removal tower 3, followed by the second light removal tower 2, and the lowest in the light removal tower 1. The middle part of light removal tower 1 is equipped with a feed inlet, and the steam at the top of the tower is boosted by compressor 7 and then heated through heat exchanger III 6 to heat the liquid flowing out of the second light removal tower 3, and at the same time, the steam at the top of light removal tower 1 is condensed Finally, one pipeline returns to the top of the light removal tower for reflux, and t...

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Abstract

The invention discloses a heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane. The steam at the top of a high-pressure tower which is a high-boiling-fraction removal column is used to heat liquid at the bottom of a low-pressure tower which is a low-boiling-fraction removal column, the steam at the top of the high-boiling-fraction removal column is condensed, and the process is a multi-effect distillation process; meanwhile, the steam at the top of the low-boiling-fraction removal column is subjected to pressure and temperature rise through a compressor and then is used for heating the liquid at the bottom of the high-boiling-fraction removal column, the steam at the top of the low-boiling-fraction removal column is condensed, and the process is a heat pump distillation process; and the integration of the heat pump distillation and multi-effect distillation can be realized in the whole process. In the whole process flow, one compressor is additionally arranged, the heat exchange process inside a rectification system is realized by two heat exchangers and condensers and reboilers are saved simultaneously, that is to say, small amount of electricity consumption of one compressor is added and a large amount of cold energy and heat public works are saved, and thereby the energy consumption for the whole rectification and purification process of the trichlorosilane is greatly reduced.

Description

technical field [0001] The invention belongs to the technical field of rectification, and relates to a device and process for heat pump rectification and multi-effect rectification, in particular to an integrated device and process for heat pump rectification and multi-effect rectification applied to the purification of trichlorosilane. Background technique [0002] At present, polysilicon production enterprises mainly adopt the improved Siemens method. The method includes five main links: synthesis of trichlorosilane, rectification and purification of trichlorosilane, hydrogen reduction of trichlorosilane, recovery of tail gas and hydrogenation separation of silicon tetrachloride. Among them, the purification of trichlorosilane, the recovery and separation of tail gas and other links involve the rectification process. The required rectification system has the characteristics of high reflux ratio and high theoretical plate, and the content of impurities such as B and P is re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
CPCY02P20/129
Inventor 刘春江段长春李雪袁希钢
Owner TIANJIN UNIV
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