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123 results about "Trichlorosilane" patented technology

Trichlorosilane is an inorganic compound with the formula HSiCl₃. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.

Method for producing high-purity silane by gradient catalysis anti-decomposition reactive distillation method

The system comprises a gradient catalytic reaction rectifying tower and a temperature control system, the rectifying tower is sequentially provided with a rectifying section, a reaction section and a stripping section from top to bottom, the reaction section is filled with an ion exchange resin solid catalyst, and the stripping section is filled with an ion exchange resin solid catalyst. The radiuses of the catalyst bag units are distributed in a gradient mode from small to large along the height of the tower, the catalyst bag units have the functions of catalytic reaction and mass transfer separation, the rectifying section and the stripping section are filled with structured packing or high-separation-capacity metal wire mesh packing, a gas-liquid separator is arranged at an outlet of the stripping section, and a temperature control system achieves segmented monitoring through a multi-point temperature sensor. The surface of the catalyst can be subjected to functional treatment to improve the decomposition resistance; the method comprises the following steps: feeding trichlorosilane generated by cold hydrogenation into the upper part of a reaction section from a feed port, carrying out disproportionation reaction at the gradient temperature of 20-100 DEG C and the pressure of 0.3-0.6 MPa according to the reflux ratio of (15-30): 1 to generate silane, and carrying out rectification and extraction separation to obtain high-purity silane with the purity of 99.999% or above.
Owner:绍兴职业技术学院

Trichlorosilane hydrogen reduction polycrystalline silicon growth monitoring system fusing multi-source data

The invention relates to the technical field of chemical engineering, and discloses a trichlorosilane hydrogen reduction polycrystalline silicon growth monitoring system fusing multi-source data. Comprising a multi-sensor monitoring module, a multi-sensor data acquisition module, a multi-source data preprocessing module, a growth process data analysis module, a growth state online evaluation module, a process parameter online regulation and control module, a regulation and control result feedback module and a system collaborative management module, the multi-sensor monitoring module monitors the growth process of trichlorosilane hydrogen reduction polycrystalline silicon through multiple sensors, the multi-sensor data acquisition module acquires original data, the multi-source data preprocessing module preprocesses the data, the growth process data analysis module carries out data calculation, and the growth state online evaluation module carries out online comprehensive evaluation. The process parameter online regulation and control module regulates and controls process parameters online, the regulation and control result feedback module generates an adjustment strategy, and the system collaborative management module performs system parameter recording and storage, system optimization and exception handling.
Owner:SUZHOU XINJING ARTIFICIAL INTELLIGENCE TECH RES & DEV CO LTD

Preparation method of warm-keeping and health-care composite fabric

The invention discloses a preparation method of a warm-keeping and health-care composite fabric, and relates to the technical field of functional fabrics. The preparation method comprises the following steps: firstly, combining fumed silica with graphene oxide hydrogel to prepare mixed aerogel; the mixed aerogel is combined with allyl trichlorosilane, and is grafted to a macromolecular chain of polypropylene through maleic anhydride, so that the compatibility is improved, and the agglomeration problem is solved; secondly, calcining tourmaline, then directly carrying out quenching hydration modification, combining Si-OH groups on the surface with active groups in a polyester molecular chain, and spinning into hollow fibers; the mixed aerogel can absorb far infrared rays dissipated and emitted by the modified tourmaline, and the aerogel absorbing the far infrared rays can generate a resonance effect and a warm effect and permeate into the deep layer of the skin; the modified tourmaline has the capability of generating negative ions, and the gull rock powder is added for combined action, so that the antibacterial effect is achieved by destroying the structure of bacteria, and the health-care effect is achieved. The composite fabric prepared by the invention has warm-keeping and health-care effects.
Owner:NANTONG XUANMI TEXTILE CO LTD

A dynamic control method for a feed of trichlorosilane synthesis

The application discloses a kind of feed dynamic regulation methods of synthesizing trichlorosilane, through multispectral synergistic detection, through the accurate calculation of key parameters such as hydroxyl inhibition factor, amorphous phase activity gain and metal impurity inhibition factor, the activity condition of silicon powder in fluidized bed can be accurately and real-time reflected, the technical bottleneck that silicon powder activity cannot be monitored on line is broken through, and then in industrial production, for the proportion of fluidized bed feed etc. Real-time regulation provides control basis.Through feed dynamic regulation mechanism, silicon powder feed rate, H2 / SiCl4 ratio and catalyst addition amount can be optimized in real time, ensure that silicon powder is always in high activity state, promote the reaction to proceed, improve trichlorosilane yield and purity, solve the problem that traditional fixed regulation mode and silicon powder dynamic activity do not match, and then improve regulation accuracy.
Owner:INNER MONGOLIA DAQUAN NEW ENERGY RESEARCH INSTITUTE CO LTD

Method and system for preparing trichlorosilane from silicon iron

The invention relates to a method and a system for preparing trichlorosilane from ferrosilicon, the method comprises the following steps: taking ferrosilicon, silicon tetrachloride and hydrogen as raw materials, fully reacting in a fluidized bed reactor to obtain trichlorosilane and FeSiy alloy, xlt; 40). The system comprises a fluidized bed reactor (200), a cyclone separator (300), a washing tower (400), a gas-liquid separator (500) and a coarse distillation tower (600). Compared with the prior art, the method has the remarkable characteristics that the silazite is used as a silicon source and is low in cost and easy to obtain, the reaction activity of trichlorosilane and FeSiy generated by reaction of the silazite, silicon tetrachloride and hydrogen is high, the utilization rate of silicon elements in the compound is high, no extra catalyst needs to be added in the co-hydrogenation reaction, meanwhile, the byproduct FeSiy alloy is produced, and the production cost is low.
Owner:SHANGHAI JIAOTONG UNIV

Method for synthesizing and refining electronic-grade hexachloroethyldisilane

The application relates to a method for synthesizing and refining electronic-grade hexachloroethyldisilane, and specifically, trichlorosilane raw material is mixed with protective gas into a raw material buffer tank, a mixed gas obtained through the mixing is subjected to a catalytic synthesis reaction under the irradiation of an ultraviolet light source, a product obtained through the reaction is subjected to condensation separation, gaseous trichloromethane returns to the raw material buffer tank to continuously participate in the synthesis reaction, the mixed liquid in the cold trap is warmed and vaporized, hexachloroethyldisilane is obtained through two-step refining, and the purity of the product hexachloroethyldisilane can reach the electronic grade. The application takes trichlorosilane as the initial raw material, the price of the raw material is low; the photo-catalysis is used as the synthesis process, the synthesis process is simple, the reaction yield is high, energy is saved, and the environment is protected; the two-step method is used for refining and purifying the product, the depth of the refining and the efficiency of the refining are high, large-scale production is suitable, the monopoly of foreign enterprises is broken, and the application has important significance.
Owner:PERIC SPECIAL GASES CO LTD

Method for recovering tail gas generated in production of carbon nanotubes

The invention provides a method for recovering tail gas generated in production of carbon nanotubes. The method comprises the following steps: compression: introducing tail gas containing methane and hydrogen into a compressor for pressurization; first-stage separation: the pressurized tail gas is introduced into a first-stage membrane separator for separation, methane and first-stage tail gas are obtained, and the main component of the first-stage tail gas is hydrogen; and second-stage separation: introducing the first-stage tail gas into a second-stage membrane separator for separation to obtain hydrogen and second-stage tail gas containing hydrogen. Through two-stage membrane separation, methane and hydrogen are recovered, the methane separated in the first stage can return to the continuous furnace to be continuously used as a raw material for producing carbon nanotubes, and the hydrogen separated in the second stage can be used for producing trichlorosilane, so that the recovery and utilization of resources can be realized.
Owner:GCL IND DESIGN RES (XUZHOU) CO LTD

Method and system for improving SiC bulk doping yield based on retention boundary layer design

The invention relates to a method and a system for improving SiC bulk doping yield based on retention boundary layer design, and relates to the technical field of semiconductor material preparation, chemical vapor deposition treatment is carried out on gas-phase raw materials on the surface of a substrate, and the gas-phase raw materials are gaseous methyl trichlorosilane, hydrogen, nitrogen and helium; the method comprises the following steps: collecting the flow rate and chemical vapor deposition processing parameters of a gas-phase raw material in real time, controlling the volume flow ratio of hydrogen to gaseous methyl trichlorosilane to be 3-15, and calculating the thickness of a retention boundary layer of the gas-phase raw material according to the flow rate and chemical vapor deposition processing parameters of the gas-phase raw material, the thickness of the retention boundary layer of the gas-phase raw material is compared with the preset thickness of the retention boundary layer, the flow velocity of the gas-phase raw material and / or chemical vapor deposition processing parameters are / is adjusted according to the comparison result, and the SiC block material prepared through the method is compact and free of pores or free carbon or silicon carbide nanowires, and the adjustable range of the resistivity is wide.
Owner:BEIJING NORTH HUACHUANG VACUUM TECH CO LTD

A method and system for continuous co-production of diphenyldichlorosilane and triphenylchlorosilane

The application discloses a kind of continuous co-production diphenyl dichlorosilane and triphenyl chlorosilane method and system, belong to organic silicon monomer synthesis technical field.The method will silicon powder and chlorobenzene direct method synthesis high-temperature gas phase product, after cyclone separation precision filtration dust removal, in turn through cascade condensation, obtain rich one phenyl trichlorosilane stream;It is directly introduced into disproportionation reaction kettle, and aluminium trichloride catalyst is added to carry out disproportionation and redistribution reaction;After reaction, add tertiary butyl alcohol, make aluminium trichloride into solid tertiary butyl alcohol aluminum, and remove by solid-liquid separation;Filtrate is separated by reduced pressure distillation, ultra vacuum distillation, and high-purity diphenyl dichlorosilane and triphenyl chlorosilane are obtained.The process coupling is closely, and heat energy is reasonably utilized, and catalyst treatment is green and environmental protection, and no strong corrosive gas and chlorine-containing wastewater is generated, the yield and selectivity of high value-added phenyl chlorosilane monomer are significantly improved, and the process is continuous and stable, with high degree of automation, suitable for large-scale industrial production.
Owner:SHAANXI DEXINXIANG SPECIAL MATERIALS TECH CO LTD

Trichlorosilane deep rectification composite impurity removal process

PendingCN121948462ASolve the bottleneck of azeotropic separationhigh purityHalogenated silanesPhysical chemistryDichlorosilane
The invention discloses a trichlorosilane deep rectification composite impurity removal process, and belongs to the technical field of polycrystalline silicon production raw material purification. According to the process, deep purification of crude trichlorosilane is achieved through the steps of pre-protection and primary adsorption, directional rectification enrichment of methyl dichlorosilane narrow fractions, concentration, mixing with silicon tetrachloride, catalytic reaction rectification conversion, differential pressure thermal coupling rectification purification, double-tank parallel deep purification, tail gas treatment and the like. According to the method, the impurity methyl dichlorosilane difficult to remove is precisely separated through side extraction, the impurity methyl dichlorosilane is converted into a component easy to separate through a catalytic reaction, and the boron and phosphorus impurities are deeply removed in combination with differential pressure thermal coupling energy saving and double-tank alternate adsorption. The process can efficiently remove moisture, metals and key impurities boron and phosphorus, obviously improves the purity of the trichlorosilane product, realizes gradient utilization of energy and hydrogen circulation, and has the advantages of high purity, low energy consumption and continuous production.
Owner:QINGHAI CSG NEW ENERGY TECHNOLOGY CO LTD +1

Activation methods for liquid fatty amines, preparation processes of liquid fatty amines and silanes.

This invention provides an activation method for a liquid fatty amine, a preparation process for the liquid fatty amine and silane, wherein the liquid fatty amine has a tertiary amine group; the activation method involves activating the liquid fatty amine with silicon tetrachloride; this method can significantly improve the catalytic effect of the liquid fatty amine, and the activated liquid fatty amine exhibits higher catalytic activity in the process of disproportionation of trichlorosilane to prepare silane, which can effectively reduce the reaction activation energy, increase the reaction rate, and improve the single-pass reaction efficiency and conversion rate.
Owner:GCL NEW (SHANGHAI) PHOTOVOLTAIC TECH CO LTD

Silicon granule for preparation of trichlorosilane and associated production method

To provide a production method for silicon granules that are brought about by reusing waste generated when cutting silicon ingots and are particularly suitable for preparing trichlorosilane.SOLUTION: The production method comprises: a) a step of supplying silicon waste derived from substrates, wherein the waste comprises silicon particles covered with an insulating or metal surface layer; b) a step of chemically treating the silicon waste to remove the insulating or metal surface layer and drying the silicon particles to form a powder; c) a step of metallurgically treating the powder to melt the silicon particles and form a liquid silicon bath; d) a step of introducing at least one co-catalyst into the liquid silicon bath; and e) a step of solidifying the liquid silicon to form silicon granules, wherein the silicon granules comprise a size of 10 to 500 μm, a dopant comprising phosphorus or boron each having a mass fraction of less than 5 ppm, a co-catalyst having a mass fraction of 1 to 2500 ppm, and metal impurities excluding the co-catalyst and having a mass fraction of less than 50 ppm.SELECTED DRAWING: None
Owner:ロシ

A method for preparing a thin high-resistance silicon epitaxial wafer for a photomultiplier tube device

The present application relates to a kind of preparation methods of thin layer high resistance silicon epitaxial wafer for photomultiplier tube device, by before the silicon substrate piece is mounted, design and carry out etching and polycrystalline silicon coating layer cycle cleaning process to reaction cavity and graphite base multiple hydrogen chloride gas, the growth environment of reaction cavity is purified, and by accurately adjusting the flow of process hydrogen, the flow of trichlorosilane, the temperature process parameter of silicon epitaxial layer reaction growth in the process of silicon epitaxial layer growth, the growth rate of silicon epitaxial layer is significantly reduced, to extend the reaction process of thin layer silicon epitaxial layer, expand the proportion of steady-state growth phase, realize the high uniformity distribution of thin layer high resistance silicon epitaxial layer, finally obtain a kind of preparation method of thin layer high resistance silicon epitaxial layer, the thickness of silicon epitaxial layer is in 1 μm order of magnitude, process is simple, strong compatibility, greatly improve production efficiency, save production cost, suitable for industrialized continuous production, meet the production order delivery requirements of thin layer high resistance silicon epitaxial wafer for photomultiplier tube device.
Owner:CHINA ELECTRONICS TECH GRP NO 46 RES INST +1

A recovery process of silicon powder in a cold hydrogenation process and a synthesis process of trichlorosilane

The application discloses a silicon powder recovery process in a cold hydrogenation process and a trichlorosilane synthesis process. The silicon powder recovery process in the cold hydrogenation process comprises the following steps: (1) after the residual material of the cold hydrogenation process is subjected to static pressure, a silicon powder mixture containing chlorosilane and a small amount of high-boiling substances is obtained; (2) the silicon powder mixture is dried to obtain silicon residue; (3) after the silicon residue is subjected to neutral high-salt water hydrolysis, solid-liquid separation is performed to obtain solid silicon residue; and (4) the solid silicon residue is subjected to drying and physical screening to remove iron impurities. The silicon powder recovery process in the cold hydrogenation process and the trichlorosilane synthesis process solve the problem of reaction between liquid alkali and silicon powder, improve the silicon content, reduce the content of silicon dioxide impurities, thereby about 60-70% of effective silicon residue in the cold hydrogenation residue slurry is recovered, the silicon residue can be sent to trichlorosilane synthesis, or the silicon residue is mixed with dead ash and then sent to trichlorosilane synthesis, the environmental protection pressure is reduced, and the cost is greatly reduced.
Owner:XINJIANG DAQO NEW ENERGY CO LTD

Gas phase device control method, device and equipment and storage medium

The invention relates to the technical field of gas phase device control, and discloses a gas phase device control method, device and equipment and a storage medium. Calculating the first gas total pressure, the first hydrogen flow and the pipeline temperature based on a preset operation liquid phase pre-judgment algorithm to obtain a liquid phase possible value; if the liquid phase possible value is larger than the possible threshold value, a gas phase device bypass control instruction is generated; in the bypass working state, a gas phase device access control instruction is generated according to the current vaporization state and a preset error threshold value; through multi-dimensional parameter collection and intelligent pre-judgment, accurate identification of liquid phase risks and reliable switching of valve paths are achieved, actions are performed only during complete vaporization, misoperation is avoided, system logic is rigorous, gas phase conveying automation and control precision are improved, and continuous, stable and safe operation of trichlorosilane vaporization conveying is guaranteed.
Owner:JIHUA LAB

A method for synthesizing an aluminum-containing high molecular weight polycarbosilane

ActiveCN117467143BAluminium chlorideChloride
The application discloses a synthesis method of an aluminum-containing high-molecular-weight polycarbosilane, and comprises the following steps: S1, preparing a homogeneous solution of liquid polycarbosilane and trichlorosilane; S2, under the protection of an inert atmosphere, adding anhydrous aluminum chloride into the homogeneous solution, and condensing and refluxing under certain conditions until the anhydrous aluminum chloride is completely dissolved; and S3, removing unreacted small molecules through vacuum distillation to obtain a target product. The application has the following advantages: the preparation temperature is low, the process is environment-friendly and efficient, the process can be scaled up by equal proportion, and the prepared product has good stability at room temperature.
Owner:NAT UNIV OF DEFENSE TECH

Super-hydrophobic membrane for deoxidizing boiler feed water and preparation method of super-hydrophobic membrane

The invention discloses a super-hydrophobic membrane for boiler feed water oxygen removal and a preparation method thereof.The preparation method comprises the steps that octadecyl trichlorosilane is dissolved in n-octane, surface spraying is conducted with a commercial polyvinylidene fluoride (PVDF) membrane as a base membrane, and after spraying is completed, the PVDF membrane is dried; the preparation method comprises the following steps: adding zinc oxide nanoparticles into n-octane for ultrasonic dispersion, adding perfluorodecyl trichlorosilane in a stirring state to obtain fluorinated zinc oxide, and spraying the fluorinated zinc oxide on a PVDF film to form a micro-nano composite structure on the surface of the film, thereby greatly enhancing the hydrophobicity of the film. When the membrane prepared by the method is applied to a boiler make-up water deoxygenization process, the removal rate of oxygen in water can be effectively improved.
Owner:ZHEJIANG UNIV OF TECH +1

Device for separating trichlorosilane tail gas and co-producing fumed silica

The utility model relates to the technical field of chemical gas recovery, and provides a device for separating trichlorosilane tail gas and co-producing fumed silica, which adopts a combined process to treat the trichlorosilane tail gas and is provided with a rectification separation seat provided with a low-temperature cold energy recovery mechanism. Hydrogen, hydrogen chloride and chlorosilane in the tail gas are separated step by step through the rectification separation assembly, the hydrogen chloride and the chlorosilane are directly conveyed to the combustion assembly, the purity of the hydrogen chloride is recycled to the trichlorosilane tail gas treatment assembly, recycling after separation is achieved, and the purposes of further saving energy consumption and improving the purity are achieved; a fumed silica combustion furnace suitable for low-boiling-point chlorosilane is adopted, so that the chlorosilane and hydrogen are mixed and combusted to generate fumed silica and hydrogen chloride, and the fumed silica can be directly discharged through a fumed silica discharge pipe; and the generated hydrogen chloride is recovered into the trichlorosilane tail gas treatment seat through a second hydrogen chloride return pipe, and closed-loop utilization is realized.
Owner:YUNNAN ANHE NEW MATERIALS CO LTD

A device for producing high-purity silane from trichlorosilane and a method thereof

ActiveCN117861251B
The application discloses a device for producing high-purity silane from trichlorosilane, which comprises a reaction rectifying tower, an auxiliary reaction system, a multistage condensing system, a booster pump and a rectifying system; the side line of the reaction rectifying tower is connected with the auxiliary reaction system; the feed inlet of the multistage condensing system is connected with the top of the reaction rectifying tower, and the liquid phase discharge port of the multistage condensing system is connected with the reaction rectifying tower; the discharge port of the multistage condensing system is connected with the feed inlet of the booster pump, and the discharge port of the booster pump is connected with the rectifying system; and the application further discloses a method for producing high-purity silane by using the device. The device has the advantages of low energy consumption, high reaction efficiency, safety and environmental protection, and high product purity.
Owner:ZHEJIANG QUHUA FLUOR CHEM CO LTD

Apparatus and method for producing trichlorosilane

The application provides a device and a method for preparing trichlorosilane, and the device comprises a trichlorosilane synthesis system, a dry dust removal system, a wet dust removal system, a heavy component removal and purification system and a slag slurry treatment system; the trichlorosilane synthesis system comprises a trichlorosilane reactor; the dry dust removal system comprises a cyclone separator; the wet dust removal system comprises a spray tower, a reboiler, a heat exchanger and a first condenser; and the heavy component removal and purification system comprises a heavy component removal tower and a carbon adsorption tower. The device combines the pneumatic conveying of silicon powder in the entire polysilicon industry, and combines the energy-saving technology of condensing mixed gas as the liquid phase of spray washing by using the heat exchanger, the energy-saving means of bidirectional extraction of trichlorosilane and tetrachlorosilane components, and the technology of slag slurry concentration and recovery, so that the effective resource integration of the entire system is achieved, the technical effects of low energy consumption and cyclic reuse are fully realized, and a high-purity trichlorosilane production system which can run independently and self-compensate is created.
Owner:XINTE ENERGY CO LTD +1

Water-based pretreatment agent, preparation method and application thereof, and preparation method of hot-dip galvanized color-coated sheet

The invention relates to the field of metal iron-based surface coating, and discloses a water-based pretreatment agent, a preparation method and application thereof, and a preparation method of a hot-dip galvanized color-coated sheet, the raw materials for preparing the water-based pretreatment agent comprise a water-soluble resin polymer, metal salts, an oxidizing agent, a hole sealing agent, an auxiliary agent, an organic solvent and water; wherein the water-soluble resin polymer contains water-based acrylic resin and water-based polyurethane resin; the metal salts comprise a titanium salt, a zirconium salt, a molybdenum salt and a cerium salt; the oxidizing agent is sodium permanganate; perfluorooctyl trichlorosilane is adopted as the hole sealing agent; the auxiliary agent contains polyphosphate and phytic acid; the organic solvent contains normal propyl alcohol and methyl acrylate; by developing a novel pretreatment formula, the problems of poor adhesive force and reduced durability of the hot-dip galvanized environment-friendly color-coated sheet in the processing process can be solved.
Owner:МААНЬШАНЬ АЙРОН ЭНД СТИЛ КО ЛТД

Hydrogenation furnace

The invention relates to a hydrogenation furnace in the field of polycrystalline silicon production. The hydrogenation furnace comprises a vertical furnace body, a silicon powder feeding pipe and a first flow guide unit, an air inlet and an air outlet are respectively formed in the bottom and the top of the vertical furnace body; the silicon powder feeding pipe is communicated with an inner cavity of the furnace body. The first flow guide unit is composed of a first flow guide plate and four first flow guide channels, and the four channels extend in the height direction of the furnace body, are located on the same cross section and are connected end to end in the first circumferential direction. A plurality of flow guide plates are obliquely arranged in each channel, and the projection directions of the flow guide plates in the height direction are clockwise and vertically distributed. On the cross section, the plurality of first flow guide units work cooperatively, so that air flow rises spirally, the growth of bubbles is effectively limited through a shearing effect, non-uniform contact of reactants caused by bubble accumulation is avoided, the trichlorosilane synthesis efficiency is remarkably improved, and a technical support is provided for the development of the polycrystalline silicon industry.
Owner:HAIDONG RED LION SEMICON CO LTD +5

Method for absorbing hydrogen chloride in hydrogen gas recovered in polysilicon production

The application provides a method for absorbing hydrogen chloride in hydrogen gas in polysilicon production hydrogen recovery by using trichlorosilane, comprising the following steps: after cooling compression and chlorosilane separation treatment, the reduction tail gas enters an absorption tower, trichlorosilane is used as an absorbent in the absorption tower to absorb hydrogen chloride in hydrogen gas under high-pressure and low-temperature conditions, high-purity hydrogen gas is generated at the top of the absorption tower, and rich liquid is generated at the bottom of the absorption tower; the rich liquid is sent into a desorption tower to carry out desorption under low-pressure and high-temperature conditions, high-purity hydrogen chloride is generated at the top of the desorption tower, and regenerated lean liquid is generated at the bottom of the desorption tower; and the regenerated lean liquid is mixed with fresh supplemented trichlorosilane after cooling and then returned to the absorption tower to form a cycle.
Owner:新疆晶诺新能源产业发展有限公司

Preparation device of electronic-grade silane

The utility model provides a preparation device of electronic-grade silane. According to the preparation device, a first disproportionation reaction is carried out on the basis of the first reactor, dichlorosilane is rectified and separated to serve as a raw material for a second disproportionation reaction, silane can be obtained on the basis of cheap trichlorosilane and a catalytic reagent, and electronic-grade silane can be obtained on the basis of traditional purification after rectification; based on heat exchange between tower top materials of the rectifying tower I and a tower kettle reboiler of the rectifying tower II, differential pressure thermal coupling integration is realized, condensing equipment and operation steps can be omitted, energy consumption is reduced, and the defects of high preparation cost and high energy consumption of a silane preparation device in the prior art are overcome.
Owner:HUBEI HEYUAN NEW MATERIALS CO LTD

Automatic filtering and drying equipment for phenyl trichlorosilane

The utility model relates to the technical field of production of organic silicon compounds, in particular to automatic filtering and drying equipment for phenyl trichlorosilane. The phenyl trichlorosilane automatic filtering and drying equipment comprises a shell, a feeding barrel, a filtering chamber, a filtering net, an electromagnetic valve II, a drying chamber, a heating pipe, a discharging opening and a controller, a support is arranged outside the drying chamber and serves as a main support of the equipment, and the heating pipe is connected to the inner side of the drying chamber. By arranging the filter frame in the feeding barrel, most solid impurities can be removed firstly, then secondary filtering is conducted through the filter screen in the filter chamber, meanwhile, raw materials on the filter screen are extruded through the pressing plate, the filtering speed is increased, the solid impurities are prevented from penetrating through the filter screen through the design of the through holes, and the filtering efficiency and quality are improved; the backflow pipe, the liquid pump I and the electromagnetic valve I are arranged, so that the filtered raw materials can be filtered twice or even multiple times, and the filtering effect is further guaranteed.
Owner:JIANGXI FORD CHEM NEW MATERIAL CO LTD

Method for increasing growth rate of selective epitaxial growth

Embodiments of the present disclosure generally relate to methods for forming a doped silicon epitaxial layer on a semiconductor device at increased pressure and reduced temperature. In one embodiment, the method includes heating a substrate disposed within a process chamber to a temperature of about 550 °C to about 800 °C, introducing a silicon source including trichlorosilane (TCS), a phosphorous source, and a gas including a halogen into the process chamber, and depositing a silicon-containing epitaxial layer including phosphorous on the substrate, the silicon-containing epitaxial layer having a phosphorous concentration of about 1 x 1018atoms per cubic centimeter or more, wherein the silicon-containing epitaxial layer is deposited at a chamber pressure of about 150 Torr or more. 21 ​
Owner:APPLIED MATERIALS INC

Process for the preparation of long chain alkyl green silane coupling agents

The application discloses a preparation method of long-chain alkyl green silane coupling agent, comprising the following steps: step one, 10-undecene-1-ol is reacted with chlorosulfoxide under the conditions of low-temperature dropwise adding and medium-temperature preservation, and 11-chloro-1-undecene is obtained through vacuum rectification purification; step two, under the action of a platinum catalyst, 11-chloro-1-undecene is subjected to addition reaction with trichlorosilane, excessive raw materials are removed, and 11-chloro undecyl trichlorosilane is obtained through rectification; step three, 11-chloro undecyl trichlorosilane is subjected to alkoxylation reaction with biological methanol or biological ethanol, by-products and excessive biological alcohol are removed, and high-purity long-chain alkyl green silane coupling agent is obtained through rectification. The carbon sources of raw materials are all biological, the method is green and low-carbon, the product has a long-chain structure, and the product has flexibility, fatigue resistance and aging resistance, and can be further derived into functional silane such as amino, mercapto and thiocyanogen; the long-chain alkyl green silane coupling agent can be widely applied to high-end flexible composite materials such as flexible electronics and robot joints, and effectively improves the service life and safety of the materials.
Owner:FUJIAN BAIYI TECH CO LTD

Adsorption and impurity removal system for boron and phosphorus impurities in trichlorosilane

The invention discloses an adsorption and impurity removal system for boron and phosphorus impurities in trichlorosilane, and relates to the technical field of polycrystalline silicon production.The adsorption and impurity removal system for boron and phosphorus impurities in trichlorosilane comprises a reactor, a feeding pipeline and a quantitative structure.The feeding pipeline is arranged on the reactor and used for conveying an adsorbent into the reactor, and the quantitative structure is arranged on the feeding pipeline; the quantitative structure comprises a centralizing box, a detection device, a supporting plate, a pushing plate and a first driver, the centralizing box is arranged on the throwing pipeline, a discharging opening is formed in the centralizing box and communicates with the throwing pipeline, the detection device is arranged at the bottom of an inner cavity of the centralizing box, and the supporting plate is movably arranged in the centralizing box and located at the top of the detection device; the detection device is used for detecting the weight of materials on the supporting plate, the pushing plate is movably arranged in the concentration box, and the first driver is installed on the concentration box, is in driving connection with the pushing plate and is used for driving the pushing plate to push the materials on the supporting plate to move towards the discharging port.
Owner:THE SIXTH CONSTR CO LTD OF CHINA NAT CHEM ENG

High efficiency cold hydrogenation fluidized bed reactor

A high-efficiency cold hydrogenation fluidized bed reactor is characterized by comprising a lower head, a cylinder and an upper head; a material inlet is arranged at the bottom of the lower head, and a gas distributor is arranged above the material inlet; a mixture of silicon tetrachloride and hydrogen enters from the material inlet and is uniformly distributed through the gas distributor; a silicon powder inlet, a silicon powder outlet and a plurality of bubble breakers are arranged above the gas distributor. By symmetrically arranging guide vanes, the airflow forms an "eight" symmetrical direction flow in a single grid block and forms a rotating flow between multiple grid blocks; the reverse arrangement of the guide vanes of the upper and lower bubble breakers makes the bubbles form a rotating cutting when passing through the grid block, which can effectively reduce the diameter of the bubbles and prevent the gas from re-agglomerating into bubbles along the vertical direction after breaking; meanwhile, the residence time of the material can be increased, and the turbulent flow degree of the material in the reactor can be increased, so that the flow field in the cold hydrogenation fluidized bed reactor can be improved, and the conversion efficiency of trichlorosilane can be improved.
Owner:JIANGSU SUNPOWER HEAT EXCHANGER & PRESSURE VESSEL CO LTD

Synthesis method of chloromethyl phenethyl trichlorosilane

The invention relates to the technical field of organosilicon chemistry, and particularly discloses a synthesis method of chloromethyl phenethyl trichlorosilane. The preparation method specifically comprises the following steps: fully mixing trichlorosilane, chloropropene and chloromethyl styrene to obtain a mixed raw material; the preparation method comprises the following steps: mixing the raw materials in a reaction kettle, then introducing 9-11wt% of the mixed raw materials into the reaction kettle, then adding a platinum catalyst and an organic amine regulating agent, uniformly dispersing, then heating, dropwise adding the residual mixed raw materials into a reaction system, after dropwise adding, continuing to react for 2-4 hours, and finally sequentially cooling and rectifying to obtain a target product. According to the method disclosed by the invention, efficient conversion under a mild reaction condition is innovatively realized; the atom economy is excellent, the target product yield is remarkably improved, the whole technological process is stable, safe and controllable, the operation parameter window is wide, the adaptability is high, and outstanding industrial application potential and economic benefits are shown.
Owner:NANJING SHUGUANG FINE CHEM CO LTD