Production method and apparatus for trichlorosilane

Abstract

The invention relates to a method for producing chlorosilane, in particular to a method for producing trichlorosilane and a device thereof and pertains to the chemical field. The method comprises six steps, namely, hydrogenchloride treatment, silica powder drying and pushing material, synthesis reaction, dust removal and condensation, rectification separation and tail gas recovery, and the device relates to a special equipment large fluidized bed reactor. The invention reduces corrosion on the system equipment by hydrogenchloride gas and the fluidization quality of the reactor is high. The tail gas contains chlorosilane and is easy to be condensed, and the consumption of low temperature refrigerant is greatly reduced. The synthesis tail gas is recovered fully, no temperature runaway phenomenon happens at the expansion section of the reactor, reaction heat is removed by heat transfer oil and sent in a waste heat boiler to produce by product steam which is merged into a steam pipe network or directly applied in part heating equipment; the whole technique system is a closed system with self materials cycling and energy recycling. The technique of the invention is advanced and reliable, the reaction temperature can be adjusted accurately and the fluidized bed reactor has long service life and low production cost and is applicable to popularization and application.

Description

technical field

[0001] The invention relates to a method and equipment for producing chlorosilane in the field of chemical industry, in particular to a method and equipment for producing trichlorosilane. Background technique

[0002] Trichlorosilane is an organosilicon monomer with a very wide range of uses. It is mainly used as a raw material for the production of semiconductor silicon, single crystal silicon and polycrystalline silicon. It is widely used in various fields of national defense, national economy and even people's daily life. Trichlorosilane It is also an important raw material for the production of silane coupling agents and other organosilicon compounds. The existing domestic production of trichlorosilane generally adopts a small fluidized bed reactor with a diameter of less than 500mm, and its structure is mostly cylindrical. The straight section is the reaction section, the reaction section is covered with a heater, the upper part is provided with a silic...

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