4546 results about "By-product" patented technology

A method and apparatus is described for reducing CO poisoning of a thin metal film formed on a substrate using a metal carbonyl precursor. The thin metal film is formed on the substrate resting on a substrate holder in a thin film deposition system. The substrate holder comprises a shield ring positioned on a peripheral edge of the substrate holder and configured to surround the peripheral edge of the substrate, whereby the shield ring reduces the production of CO by-products at the peripheral edge of the substrate.

A technique capable of preventing by-products from adhering to a lower portion of a process vessel utilizes a substrate processing apparatus including: a process vessel having a process chamber; a lid configured to close a lower end opening of the process vessel; a substrate retainer; an insulating structure; a process gas supply mechanism configured to supply a process gas; a purge gas supply unit configured to supply a purge gas to a lower region of the process vessel via a gap between the insulating structure and the lid; and a restrictor disposed in the gap. The restrictor regulates flow of the purge gas such that the flow rate of the purge gas supplied to a first portion of the lower region of the process vessel is greater than a flow rate of the purge gas supplied to a second portion of the lower region of the process vessel.

A method and apparatus for a chemical vapor deposition (CVD) chamber provides uniform heat distribution, uniform distribution of process chemicals in the CVD chamber, and minimization of by-product and condensate residue in the chamber. The improvements include a processing chamber comprising a chamber body, a base, and a chamber lid defining a processing region, a substrate support disposed in the processing region, a gas delivery system mounted on a chamber lid, the gas delivery system comprising an adapter ring and two blocker plates that define a gas mixing region, and a face plate fastened to the adapter ring, an exhaust system mounted at the base, a heating element positioned to heat the adapter ring; and a heating element positioned to heat a portion of the exhaust system.

A method of suppressing the etch rate for exposed silicon-and-nitrogen-containing material on patterned heterogeneous structures is described and includes a two stage remote plasma etch. The etch selectivity of silicon relative to silicon nitride and other silicon-and-nitrogen-containing material is increased using the method. The first stage of the remote plasma etch reacts plasma effluents with the patterned heterogeneous structures to form protective solid by-product on the silicon-and-nitrogen-containing material. The plasma effluents of the first stage are formed from a remote plasma of a combination of precursors, including nitrogen trifluoride and hydrogen (H₂). The second stage of the remote plasma etch also reacts plasma effluents with the patterned heterogeneous structures to selectively remove material which lacks the protective solid by-product. The plasma effluents of the second stage are formed from a remote plasma of a fluorine-containing precursor.

The present invention relates to a method of forming an amorphous carbon film and a method of manufacturing a semiconductor device using the method. An amorphous carbon film is formed on a substrate by vaporizing a liquid hydrocarbon compound, which has chain structure and one double bond, and supplying the compound to a chamber, and ionizing the compound. The amorphous carbon film is used as a hard mask film.

It is possible to easily control characteristics of the amorphous carbon film, such as a deposition rate, an etching selectivity, a refractive index (n), a light absorption coefficient (k) and stress, so as to satisfy user's requirements. In particular, it is possible to lower the refractive index (n) and the light absorption coefficient (k). As a result, it is possible to perform a photolithography process without an antireflection film that prevents the diffuse reflection of a lower material layer.

Further, a small amount of reaction by-product is generated during a deposition process, and it is possible to easily remove reaction by-products that are attached on the inner wall of a chamber. For this reason, it is possible to increase a cycle of a process for cleaning a chamber, and to increase parts changing cycles of a chamber. As a result, it is possible to save time and cost.

A method of etching silicon oxide from a trench is described which allows more homogeneous etch rates up and down the sides of the trench. One disclosed method includes a sequential introduction of (1) a hydrogen-containing precursor and then (2) a fluorine-containing precursor into a substrate processing region. The temperature of the substrate is low during each of the two steps in order to allow the reaction to proceed and form solid residue by-product. A second disclosed method reverses the order of steps (1) and (2) but still forms solid residue by-product. The solid residue by-product is removed by raising the temperature in a subsequent sublimation step regardless of the order of the two steps.

A process is provided for the production of 1,1,1,3,3-pentachloropropane. The process comprises: (a) producing a product mixture in a reactor by reacting carbon tetrachloride and vinyl chloride in the presence of a catalyst mixture comprising organophosphate solvent, iron metal and ferric chloride under conditions sufficient to produce 1,1,1,3,3-pentachloropropane; (b) subjecting the 1,1,1,3,3-pentachloropropane containing product mixture from step (a) to evaporation such that a fraction enriched in 1,1,1,3,3-pentachloropropane is separated from the product mixture and a bottoms fraction results which comprises the iron metal/ferric chloride catalyst components and heavy end by-products; and (c) recycling at least a portion of the bottoms fraction from step (b) to the reactor.

A method of cleaning the interior of a processing chamber first performs a halogenation treatment by supplying a treatment gas containing a halogenating gas into the processing chamber and heating a support member for a target substrate, thereby halogenating a metal element in a by-product film. A reduction treatment is then performed by supplying a treatment gas containing a reducing gas into the processing chamber, thereby reducing a halide of the metal element and liberating the metal element. An oxidation treatment is then performed by supplying a treatment gas containing an oxidizing gas into the processing chamber and heating the casing walls of the processing chamber, thereby passivating the liberated metal element by oxidation.

The present invention describes methods of detecting a nucleic acid in a sample, based on the use of terminal-phosphate-labeled nucleotides as substrates for nucleic acid polymerases. The methods provided by this invention utilize a nucleoside polyphosphate, dideoxynucleoside polyphosphate, or deoxynucleoside polyphosphate analogue which has a colorimetric dye, chemiluminescent, or fluorescent moiety, a mass tag or an electrochemical tag attached to the terminal-phosphate. When a nucleic acid polymerase uses this analogue as a substrate, an enzyme-activatable label would be present on the inorganic polyphosphate by-product of phosphoryl transfer. Cleavage of the polyphosphate product of phosphoryl transfer via phosphatase leads to a detectable change in the label attached thereon. When the polymerase assay is performed in the presence of a phosphatase, there is provided a convenient method for real-time monitoring of DNA or RNA synthesis and detection of a target nucleic acid.

Methods and apparatus for deposition of a film on a substrate in a reaction chamber by an atomic layer deposition (ALD) or chemical vapor deposition (CVD) process include providing one or more reactants, and providing a volatile neutral coordinating ligand capable of coordinating at least one selected from the following: (i) one of the reactants; (ii) a reaction by-product formed during the deposition process. The neutral coordinating ligand thus improves volatility of either reactants and/or by-products, either in the gas phase or aiding in removal of species from reaction space surfaces. The neutral coordinating ligand is provided during the deposition process, either during or after reactant supply.

The present invention relates to an integrated process for preparing combustible gaseous products via the hydromethanation of carbonaceous feedstocks in the presence of steam, carbon monoxide, hydrogen, a hydromethanation catalyst and optionally oxygen, and generating electrical power from those combustible gaseous products as well as a hydrogen and/or methane by-product stream.

The invention is a continuous process for the preparation of polytrimethylene ether glycol from 1,3-propanediol reactant. In addition, the invention is directed to a continuous multi-stage process comprising reacting at least one reactant in a liquid phase in an up-flow column reactor, and forming a gas or vapor phase by-product wherein the gas or vapor phase by-product is continuously removed at the top and at least one intermediate stage.

The present invention relates to improved methods of detecting a target using a labeled substrate or substrate analog. The methods comprise reacting the substrate or substrate analog in an enzyme-catalyzed reaction which produces a labeled moiety with independently detectable signal only when such substrate or substrate analog reacts. The present invention, in particular, describes methods of detecting a nucleic acid in a sample, based on the use of terminal-phosphate-labeled nucleotides as substrates for nucleic acid polymerases. The methods provided by this invention utilize a nucleoside polyphosphate, dideoxynucleoside polyphosphate, or deoxynucleoside polyphosphate analogue which has a colorimetric dye, chemiluminescent, or fluorescent moiety, a mass tag or an electrochemical tag attached to the terminal-phosphate. When a nucleic acid polymerase uses this analogue as a substrate, an enzyme-activatable label would be present on the inorganic polyphosphate by-product of phosphoryl transfer. Cleavage of the polyphosphate product of phosphoryl transfer via phosphatase leads to a detectable change in the label attached thereon. When the polymerase assay is performed in the presence of a phosphatase, there is provided a convenient method for real-time monitoring of DNA or RNA synthesis and detection of a target nucleic acid.

A new, cost effective process for the production of ultrafine particles which is based on mechanically activated chemical reaction of a metal compound with a suitable reagent. The process involves subjecting a mixture of a metal compound and a suitable reagent to mechanical activation to increase the chemical reactivity of the reactants and/or reaction kinetics such that a chemical reaction can occur which produces a solid nano-phase substance. Concomitantly, a by-product phase is also formed. This by-product phase is removed so that the solid nano-phase substance is left behind in the form of ultrafine particles. During mechanical activation a composite structure is formed which consists of an intimate mixture of nano-sized grains of the nano-phase substance and the reaction by-product phase. The step of removing the by-product phase, following mechanical activation, may involve subjecting the composite structure to a suitable solvent which dissolves the by-product phase, while not reacting with the solid nano-phase substance. The process according to the invention may be used to form ultrafine metal powders as well as ultrafine ceramic powders. Advantages of the process include a significant degree of control over the size and size distribution of the ultrafine particles, and over the nature of interfaces created between the solid nano-phase substance and the reaction by-product phase.

A process for preparing low-carbon olefin from methanol or dimethyl ether includes loading its raw material and silicon aluminium phosphate (SAPO34) molecular sieve as catalyst into gas-solid parallel down-flowing fluidized bed reactor, super-short contact, reaction, fast gas-solid separation to separating resultant from catalyst to prevent secondary reaction, and regerating catalyst for cyclic use. Its advantages include high output rate (93%), high conversion rate of raw material, and less by-product.

A composition is provided that includes particulates from wood, chaff, hulls, crop compost, biochar, or waste residue, wood or crop ash and biochar, and a nitrogen source from waste residue from gasification processes, food processing waste water or other residual by-products of forest, aquatic, food or feed processing. Ideally, all of the components are environmentally friendly, from natural products, and free of manufactured chemicals.

On-board ILS sensors for detecting illegal drugs and based on intracavity laser spectroscopy (ILS) are provided for detecting the presence of drugs and their metabolized by-product vapors in an enclosed space, such as a vehicle. The sensor comprises: (a) a laser comprising a gain medium having two opposed facets within a laser resonator and functioning as an intracavity spectroscopic device having a first end and a second end, the first end operatively associated with a partially reflecting (i.e., partially transmitting) surface; (b) a reflective or dispersive optical element (e.g., a mirror or a diffraction grating) operatively associated with the second end to define a broadband wavelength laser resonator between the optical element and the first end and to thereby define an external cavity region between at least one facet of the gain medium and either the first end or the second end or both ends; (c) the external cavity region being exposed to air in the enclosed space to enable any drugs or their metabolized by-product molecules to enter thereinto; (d) a detector spaced from the first end; (e) appropriate electronics for measuring and analyzing the detector signal; (f) a housing for containing at least the laser, the partially reflecting surface, and the optical element, the housing being configured to prevent escape of stray radiation into the enclosed space and to permit air from the enclosed space to continuously circulate through the external cavity region for analysis; and (g) means for driving the laser (e.g., electrical or optical). A method is provided for measuring concentration of drug vapors and their metabolized by-product vapors in the vehicle or other enclosed space employing the on-board sensor. The method comprises: (1) sensing any drugs and their metabolized by-product vapors in the enclosed space by the on-board sensor; and (2) providing a signal indicative of presence of any drugs or metabolized vapors.

The invention provides a one-step process for preparing a cell-binding agent cytotoxic agent conjugate comprising contacting a cell-binding agent with a cytotoxic agent to form a first mixture comprising the cell-binding agent and the cytotoxic agent and contacting the first mixture comprising the cell-binding agent and the cytotoxic agent with a bifunctional crosslinking reagent, which provides a linker, in a solution having a pH of about 4 to about 9 to provide a second mixture comprising the cell-binding agent cytotoxic agent conjugate, wherein the cell-binding agent is chemically coupled through the linker to the cytotoxic agent, free cytotoxic agent, and reaction by-products. The second mixture is then optionally subjected to purification to provide a purified cell-binding agent cytotoxic agent conjugate.

The invention discloses a method for extracting krill oil with high phosphatide content from Antarctic krills. The method comprises the following steps: (1) drying fresh Antarctic krills to obtain dry Antarctic krills; (2) performing extraction to dry Antarctic krills for 3 times with organic solvent; (3) mixing the extracting solutions, evaporating the mixed extracting solution to obtain Antarctic krill oil with the phosphatide content of 30-35%; then introducing nitrogen or carbon dioxide to remove the residual organic solvent; and adding polar organic solvent in the Antarctic krill oil, mixing evenly, standing to ensure that the mixed solution performs natural layering; and evaporating the lower solution to obtain the Antarctic krill oil with high phosphatide content, and then introducing nitrogen or carbon dioxide to remove the residual polar organic solvent so as to obtain a product. The extraction technology is performed at a low temperature, thus the red color of krill oil can be maintained and the beneficial ingredients in the product can not be damaged. The invention has high extraction efficiency and good phosphatide accumulation effect. Therefore, the Antarctic krill oil with high phosphatide content can be obtained and other byproducts can also be obtained.

A method and system to produce biodiesel from a combination of corn (maize) and other agro feedstock may be simarouba, mahua, rice, pongamia etc. Germ is separated (either by wet process or dry process) from corn, crude corn oil extracted from germ and corn starch milk/slurry is heated and cooked in jet cooker to about 105 degree Celsius, enzymes added to convert starch into fermentable sugars in liquification and saccharification process and rapidly cooled down to about 30 degree Celsius. Simarouba fruits syrup, mahua syrup is mixed with corn starch milk (after saccharification). When yeast is added the fermentation takes place for about 72 hours. Thereafter the fermented wash is distilled to produce ethanol. Water consumed in dry process is very less compared to traditional wet process system. Corn oil and mixture of other oils is fed into transesterification (reaction) vessels where ethanol with catalyst, usually sodium hydroxide is added and reaction takes place for about a period of 2-8 hours. Crude biodiesel and crude glycerin as by-products is produced. Excess ethanol removed by distillation process. Crude biodiesel washed with warm water to remove residual soaps or unused catalyst, dried and biodiesel stored for commercial use. Oil extracted from spent bleach mud (used sodium bentonite), a waste product of edible oil refineries may also be utilized for economical production of biodiesel in combination of corn oil and ethanol.

A method of processing a wafer in a chamber including a wafer stage and a showerhead is disclosed. The method includes forming a first protection layer on the wafer stage, heating the wafer stage to a first temperature, heating the showerhead at a second temperature lower than the first temperature, forming a second protection layer on inner surfaces of the process chamber including at least the wafer stage and showerhead, loading a wafer onto the wafer stage, forming a material layer on the wafer, and then unloading the wafer from the wafer stage, and removing by-products generated on the inner surfaces of the process chamber during formation of the material layer while maintaining the first temperature of the wafer stage and the second temperature of the showerhead.

It has been discovered that fluids viscosified with viscoelastic surfactants (VESs) may have their viscosities reduced (gels broken) by the direct or indirect action of a biochemical agent, such as bacteria, fungi, and/or enzymes. The biochemical agent may directly attack the VES itself, or some other component in the fluid that produces a by-product that then causes viscosity reduction. The biochemical agent may disaggregate or otherwise attack the micellar structure of the VES-gelled fluid. The biochemical agent may produce an enzyme that reduces viscosity by one of these mechanisms. A single biochemical agent may operate simultaneously by two different mechanisms, such as by degrading the VES directly, as well as another component, such as a glycol, the latter mechanism in turn producing a by-product (e.g. an alcohol) that causes viscosity reduction. Alternatively, two or more different biochemical agents may be used simultaneously. In a specific, non-limiting instance, a brine fluid gelled with an amine oxide surfactant can have its viscosity broken with bacteria such as Enterobacter cloacae, Pseudomonas fluorescens, Pseudomonas aeruginosa, and the like.

The invention makes burnable renewal fuel (RF) briquettes from recovered coal from coal slurry ponds, biomass, and a binder. The briquettes may be augmented with one or more of recovered environmental burnable fraction from municipal solid waste (MSW), agricultural livestock waste, lumber processing residue, solid wood waste material, agricultural by-products and crops, and like burnable waste material. Accordingly, the method for making burnable renewal fuel (RF) briquettes includes the steps of recovering coal from coal slurry ponds; recovering biomass; adding a binder to said recovered coal and said biomass; and forming solid burnable RF fuel briquettes therefrom.

The invention relates to hydrogen production and hydrogen storage technologies and materials, in particular to a catalyst for catalytic hydrolysis of borane for the hydrogen production and a preparation method thereof, thereby solving the problems that the direct application of powder catalyst in a catalytic hydrolysis solid-liquid reaction system can cause the loss of the catalyst, the catalytic hydrolysis reaction is difficult to control and the hydrolysis by-products are difficult to be recovered, etc. The catalyst is composed of an active component and a carrier; the active component is a binary, ternary or multinary alloy or a single precious metal or the combination thereof which is composed of one or more transition metals, rare earth metals or precious metals and metalloids; the active component is deposited on the carrier through the improved chemical plating technology, the surface thereof is rough and porous, and the structure of the prepared catalyst is the amorphous or the nanocrystalline structure. The preparation method has simple preparation process, high preparation efficiency and convenient large-scale preparation; the sources of the used raw materials are rich; the catalytic activity of the prepared supported catalyst is high, the real-time control of the catalytic hydrolysis reaction of the borane can be realized, the catalytic performance is stable, and the catalyst can be repeatedly used for a plurality of times.

A process for producing levulinic acid and its esters from biomass is disclosed comprising: (i) feed preparation module characterized by subjecting biomass to a high-temperature refining treatment; (ii) hydrolysis reaction module that facilitates the hydrolysis of biomass to its respective sugars and their subsequent transformation to levulinic acid, formic acid, furfural, and char as well as facilitates the separation of lignin-based char by-product; (iii) product separation and recovery module utilizing a solvent extraction technique such as using furfural by-product as extracting solvent; and (iv) optionally, conversion of levulinic acid to levulinate ester. When desired, the disclosed process may be integrated into existing pulp mills.

The invention belongs to the technical field of cultivation of agricultural crops and provides a pollution-free high-yield rice cultivating method. The pollution-free high-yield rice cultivating method includes selecting a production base accordant with pollution-free rice production standards and selecting novel high-quality high-yield anti-disease variety; selecting drought seedlings and strong seedlings of the right age, fertilizing a soil bed and cultivating the seedlings dryly; slinging the seedlings without tillage and for multiple tillers; fertilizing pollution-free rice according to the principle of taking base fertilizer as the principal and topdressing as complement, and simultaneously, interplanting glutinous rice; comprehensively preventing and controlling disease and pests, and timely harvesting in sunny days when the ripeness degree of the rice is up to 85-90%; and storing and processing the harvested rice and processing by-products of the harvested rice. The rice produced by the pollution-free high-yield rice cultivating method is high in quality and yield, safe and pollution-free, low in planting cost and simple in management method and has higher popularization and application value.

A process for producing organic acid di- or tri-esters, particularly citric acid tri-esters, with the available acid groups esterified using countercurrent reactive distillation using acid catalysts in a structured packing is described. In the reactive distillation an organic acid di- or tri-ester is formed by chemical reaction and purified to its final state within the single column. Organic acid di- or tri-esters are produced at relatively low cost, with less waste production in by-products of the reaction, and in a less complicated manner than prior processes. Organic acid di- and tri-esters have uses as solvents, as plasticizers and in conversion products.

The present invention relates to the production of a highly digestible, high protein product (high protein distillers dried grains or high protein DDG) from corn endosperm, and more particularly to a method for the recovery of high protein DDG by using: (i) dehulling and degermination to isolate a low fat, low fiber corn endosperm fraction, (ii) enzymatic hydrolysis to solubilize and alcoholic fermentation to assimilate the starch and non-starch carbohydrates present in the corn endosperm, and (iii) filtration and/or centrifugation to recover the dealcoholized insoluble solids that remain after fermentation of the corn endosperm. The present invention provides an alternative to the traditional dry mill method of processing corn to produce ethanol, and results in the production and recovery of a distillers' by-product (high protein DDG) with increased value and range of use as an ingredient in feeds for farm-raised ruminants and non-ruminants and pet foods. The product of the present invention contains less than about 2.0 weight percent starch, from about 55.0 to about 65.0 weight percent protein, from about 4.5 to about 7.5 weight percent fat, from about 3.0 to about 5.0 weight percent crude fiber, and from about 78.0 to about 90.0 percent total digestible nutrients, and improves the palatability and digestibility of animal feeds and/or pet foods into which it is incorporated, and aids in the management of the health and weight gain of the animal.

Disclosed herein are yeasts, which, when cultured, can produce relatively high concentrations of lactic acid. Also disclosed herein are culture media that result in relatively lower levels of by-product impurities when lactic acid-producing yeast are cultured in them.

A film formation apparatus for a semiconductor process includes a cleaning gas supply circuit, a concentration measuring section, and an information processor. The cleaning gas supply circuit is configured to supply a cleaning gas into a reaction chamber to perform cleaning of removing from an inner surface of the reaction chamber a by-product film derived from a film formation gas. The concentration measuring section is disposed in an exhaust system to monitor concentration of a predetermined component contained in exhaust gas from the reaction chamber. The information processor is configured to compare a measurement value obtained by the concentration measuring section with a preset value and to thereby determine an end point of the cleaning.