Trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system and operating method

A trichlorosilane three-tower, differential pressure coupling technology, applied in the field of rectification, can solve the problems of many theoretical plates, large reflux ratio, and high energy consumption of polysilicon, so as to reduce production costs and energy consumption, save heating and energy-saving losses, The effect of improving market competitiveness

Active Publication Date: 2010-07-28
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existing trichlorosilane rectification process is a conventional rectification technology, and the polysilicon industry consumes a lot of energy due to many theoretical plates and a large reflux ratio

Method used

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  • Trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system and operating method
  • Trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system and operating method
  • Trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system and operating method

Examples

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example 1

[0031] The operating method of the A process that adopts the primary tower (1) feed is as follows:

[0032] Such as figure 1As shown, after the trichlorosilane raw material (12) is separated through the primary tower (1), the light component A (13) is divided into the reflux material A (15 ) and the extracted material A (14), the delight liquid A (16) at the bottom of the tower is divided into two parts, and a part enters the tower kettle condensation reboiler (3) to form a high boiling liquid A (17) after heating and returns to the first-stage tower ( 1), the other part enters the secondary tower (4) and forms high boiling liquid A (21) in the tower still after rectification, forms trichlorosilane gas phase A (18) at the top of the tower and enters the heating of the condensation reboiler (3) The medium inlet provides the required heat for the condensing reboiler to form the feed liquid A (19) into the auxiliary condenser (5) to become the condensed feed liquid A (20), and p...

example 2

[0043] The operating method of the B process that adopts three-stage tower (7) feeding is as follows:

[0044] Such as figure 2 Shown, the operating method of process flow B is: after trichlorosilane raw material (12) is separated through three-stage tower (7), tower top light component B (30) enters the heating medium inlet of condensing reboiler (6), After providing the required heat for the condensing reboiler, it becomes the condensed feed liquid B (31), and then a part (33) of the auxiliary condenser (8) is returned to the top of the third-stage tower (7) with a certain reflux feed ratio, and a part is collected Out of (32), part of the light liquid B (34) removed from the tower kettle is returned to the third-stage tower (7) after being heated by the tower kettle reboiler (9), and the other part uses the pressure difference between the two towers to directly enter the second-stage tower as a feed. The tower (4) is separated, and the light component B (35) at the top of...

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Abstract

The invention relates to a trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system and an operating method. The trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system comprises a primary tower, a secondary tower and a tertiary tower; the three towers are connected in series from low pressure to highpressure or from high pressure to low pressure, and a condensation re-boiler is arranged between the primary tower and the secondary tower and between the secondary tower and the tertiary tower respectively; and the three towers can be used for light removal, heavy removal and light removal in turn, and also can be used for combining light removal, heavy removal and light removal. According to the characteristics of approach full tower composition and approach temperature in the process of rectifying the trichlorosilane, the invention provides a trichlorosilane differential pressure coupling rectifying process which is expected to greatly reduce the production cost and energy consumption and theoretically rectify and save energy by nearly 70 percent. The technology remarkably improves themarket competitiveness of polycrystal silicon materials and promotes the development of a photovoltaic and information material industry chain.

Description

technical field [0001] The invention relates to the technical field of rectification, in particular to a trichlorosilane three-tower differential pressure coupling energy-saving rectification purification system and an operation method. Background technique [0002] Trichlorosilane is also known as trichlorosilane, silicon chloroform, English name: trichlorosilane or siliconochloroform, molecular formula is SiHCl 3 It is used in the synthesis of organosilanes and alkyl, aryl and organofunctional group chlorosilanes. It is the most basic monomer in organosilane coupling agents and is also the raw material for the production of semiconductor silicon and single crystal silicon. [0003] Trichlorosilane is an important intermediate for the synthesis of organosilicon and the main raw material for the manufacture of polysilicon. With the rapid development of polysilicon and organic silicon industry, there is a great demand for trichlorosilane. However, due to the restriction of f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
CPCY02P20/10
Inventor 黄国强苏国良王红星
Owner TIANJIN UNIV
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