Patents

Literature

Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

4 results about "Octadecyltrichlorosilane" patented technology

Filter

Efficacy Topic

Property

Owner

Technical Advancement

Application Domain

Technology Topic

Technology Field Word

Patent Country/Region

Patent Type

Patent Status

Application Year

Inventor

Octadecyltrichlorosilane (ODTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH₃(CH₂)₁₇SiCl₃. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.