System for separating and purifying trichlorosilane in production process of polysilicon and operation method thereof

A technology for the production process of trichlorosilane, applied in the field of rectification, which can solve the problems of large reflux, high equipment investment and energy consumption, and high rectification tower

Active Publication Date: 2009-09-23
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] It can be seen from the above technological process that the product quality of polysilicon is closely related to the treatment of the trichlorosilane rectification unit and the recovered chlorosilane rectification unit. In order to meet the requirements of high purity, most manufacturers use higher rectification towers, The return flow is relatively large, and its equipment investment and energy consumption are relatively high

Method used

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  • System for separating and purifying trichlorosilane in production process of polysilicon and operation method thereof

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Experimental program
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Effect test

Embodiment 1

[0023] For the purification of trichlorosilane in the production of 2000 tons / year polysilicon, the feed composition is as follows:

[0024] The feed composition of the raw materials in the rectification section: the content of dichlorodihydrosilane is 1%; the content of trichlorosilane is 98%; the content of silicon tetrachloride is 1%.

[0025] The feed composition of the reduction and hydrogenation tail gas in the recovery and refining section: the content of dichlorodihydrosilane is 1.43%, the content of trichlorosilane is 37.41%, and the content of silicon tetrachloride is 61.16%.

[0026] Feed mass flow rate: 5,828kg for the rectification section, 17,484kg for the extraction section, and 23,312kg for the total feed.

[0027] The theoretical value of separation energy consumption per Kg of chlorosilane is 1500KCAL / HR.

[0028] The feed ratio of rectification section and recovery refining section is 1:3

[0029] The pressure at the top of the light removal tower 1 is 190...

Embodiment 2

[0040] Process the purification of trichlorosilane in the production of 1000 tons / year polysilicon, operating conditions are the same as embodiment 1, and different conditions are as follows:

[0041] The feed composition is as follows: the feed composition of the raw materials in the rectification section: the content of dichlorodihydrosilane is 1.5%, the content of trichlorosilane is 97.5%, and the content of silicon tetrachloride is 1%.

[0042] Feed mass flow rate: The rectification section feed is 2914kg, the extraction section feed is 4371kg, and the total feed volume is 7285kg.

[0043] The theoretical value of separation energy consumption per Kg of chlorosilane is 1800KCAL / HR.

[0044] The feed composition of the reduction and hydrogenation tail gas in the recovery section: the content of dichlorodihydrosilane is 1.43%, the content of trichlorosilane is 42%, and the content of silicon tetrachloride is 56.57%.

[0045] The feed ratio of the rectification section and t...

Embodiment 3

[0051] Process the purification of trichlorosilane in the production of 2000 tons / year polysilicon, operating conditions are the same as embodiment 1, different conditions are as follows:

[0052] Feed mass flow rate: the feed to the rectification section is 5828kg, the feed to the extraction section is 5828kg, and the total feed volume is 11656kg.

[0053] The theoretical value of separation energy consumption per Kg of chlorosilane is 2000KCAL / HR.

[0054] The feed ratio of rectification section and recovery refining section is 1:1

[0055] The loads of each tower in the trichlorosilane purification process are shown in the following table (table three):

[0056] Table three

[0057] cooling load

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Abstract

The invention provides a system for separating and purifying trichlorosilane in production process of polysilicon and an operation method thereof. The system consists of a rectification working section and a recovery refining working section; wherein, the rectification working section comprises six towers, and the recovery refining working section includes three towers; the connection mode of the six towers of the rectification working section is that a lightness-removing tower I, a lightness-removing tower II, a weight-removing tower, a secondary lightness-removing tower, a secondary weight-removing tower I and a secondary weight-removing tower II are sequentially connected with each other; the connection mode of the three towers of the recovery refining working section is that a lower-removing tower, a higher-removing tower and a product refining tower are sequentially connected with each other. Chlorsilane rectification technical equipment can be one of main technical bottlenecks limiting the production of the high-quality polysilicon material in China. The invention can achieve the separation requirements and energy-saving aim under the condition that the mass flow rate elastic ratio between feeding of the rectification working section and feeding of the recovery working section is 1:1-1:5. The rectification technique is simplified and optimized, the separation efficiency is improved, the energy consumption of rectification products is reduced, the reliability and stability of system operation can be enhanced, and the content of phosphorus, arsenic, boron and metallic contamination in the rectification products can be lowered.

Description

technical field [0001] The invention belongs to the technical field of rectification, uses a multi-tower pressurized continuous rectification process to purify trichlorosilane, and particularly proposes a trichlorosilane separation and purification system and an operation method in the polysilicon production process. Background technique [0002] Polysilicon material is the most basic, main and most important functional material in electronic information industry and solar photovoltaic power generation industry. With the rapid development of electronic information industry and solar photovoltaic new energy industry, the supply and demand of polysilicon products are seriously out of balance. Polysilicon has become a strategic material necessary for the development of my country's electronic information industry and solar photovoltaic new energy industry. The National Development and Reform Commission attaches great importance to the development of my country's polysilicon in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107B01D3/14
CPCY02P20/50
Inventor 黄国强王红星刘雪艳华超李鑫钢
Owner TIANJIN UNIV
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