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318results about "Silicon hydrides" patented technology

Method of high purity silane preparation

A process for the preparation of high purity silane, suitable for forming thin layer silicon structures in various semiconductor devices and high purity poly- and single crystal silicon for a variety of applications, is provided. Synthesis of high-purity silane starts with a temperature assisted reaction of metallurgical silicon with alcohol in the presence of a catalyst. Alcoxysilanes formed in the silicon-alcohol reaction are separated from other products and purified. Simultaneous reduction and oxidation of alcoxysilanes produces gaseous silane and liquid secondary products, including, active part of a catalyst, tetra-alcoxysilanes, and impurity compounds having silicon-hydrogen bonds. Silane is purified by an impurity adsorption technique. Unreacted alcohol is extracted and returned to the reaction with silicon. Concentrated mixture of alcoxysilanes undergoes simultaneous oxidation and reduction in the presence of a catalyst at the temperature -20 DEG C. to +40 DEG C. during 1 to 50 hours. Tetra-alcoxysilane extracted from liquid products of simultaneous oxidation and reduction reaction is directed to a complete hydrolysis. Complete hydrolysis of tetra-alcoxysilane results in formation of industrial silica sol and alcohol. Alcohol is dehydrated by tetra-alcoxysilane and returned to the reaction with silicon.
Owner:ALLIANCE FOR SUSTAINABLE ENERGY

Device and method for preparing high-purity silane through disproportionation reactive distillation of trichlorosilane

ActiveCN103172071ASimple process equipmentRealization of multi-step disproportionation processChemical industrySilicon hydridesProcess equipmentGas phase
The invention relates to a device and a method for preparing high-purity silane through disproportionation reactive distillation of trichlorosilane. The method comprises a disproportionation reactive distillation process (A), a silicon tetrachloride absorption process (B), a fixed bed absorption process (C) and a product filling process (D). The method comprises the steps that: two-step disproportionation reaction is adopted, and the distillation separation action of a reactive distillation column is utilized to finally obtain a mixed gas of silane and dichlorosilane on a column top to be used as non-condensable gas of a condenser to be extracted, and a silicon tetrachloride product is obtained at a column bottom after reaction formation; a gaseous product which is recovered through a disproportionation reactive distillation column enters into a silicon tetrachloride absorption column, wherein the main ingredient of an absorbed gas is silane, an absorption liquid is filled into a silicon tetrachloride desorption column, the desorbed dichlorosilane is recovered on the column top, and the desorption liquid of the column reflows back to the silicon tetrachloride absorption tower; the absorbed gas is filled into a fixed bed to absorb so as to obtain a high-purity silane product; and the silane product is filled into a buffer tank under the pressurization condition. Technological equipment is simple, and the obtained silane product has high purity.
Owner:TIANJIN UNIV
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