The
system comprises a gradient catalytic reaction rectifying
tower and a
temperature control system, the rectifying
tower is sequentially provided with a rectifying section, a reaction section and a stripping section from top to bottom, the reaction section is filled with an
ion exchange resin
solid catalyst, and the stripping section is filled with an
ion exchange resin
solid catalyst. The radiuses of the catalyst bag units are distributed in a gradient mode from small to large along the height of the
tower, the catalyst bag units have the functions of catalytic reaction and
mass transfer separation, the rectifying section and the stripping section are filled with
structured packing or high-separation-capacity
metal wire mesh packing, a gas-liquid separator is arranged at an outlet of the stripping section, and a
temperature control system achieves segmented monitoring through a multi-point temperature sensor. The surface of the catalyst can be subjected to
functional treatment to improve the
decomposition resistance; the method comprises the following steps: feeding
trichlorosilane generated by cold hydrogenation into the upper part of a reaction section from a feed port, carrying out
disproportionation reaction at the gradient temperature of 20-100 DEG C and the pressure of 0.3-0.6 MPa according to the
reflux ratio of (15-30): 1 to generate
silane, and carrying out rectification and extraction separation to obtain high-purity
silane with the purity of 99.999% or above.