639 results about "Silicon monoxide" patented technology

A method of forming a silicon oxide layer on a substrate. The method includes providing a substrate and forming a first silicon oxide layer overlying at least a portion of the substrate, the first silicon oxide layer including residual water, hydroxyl groups, and carbon species. The method further includes exposing the first silicon oxide layer to a plurality of silicon-containing species to form a plurality of amorphous silicon components being partially intermixed with the first silicon oxide layer. Additionally, the method includes annealing the first silicon oxide layer partially intermixed with the plurality of amorphous silicon components in an oxidative environment to form a second silicon oxide layer on the substrate. At least a portion of amorphous silicon components are oxidized to become part of the second silicon oxide layer and unreacted residual hydroxyl groups and carbon species in the second silicon oxide layer are substantially removed.

Silicon nanowires and silicon nanoparticle chains are formed by the activation of silicon monoxide in the vapor phase. The silicon monoxide source may be solid or gaseous, and the activation may be by thermal excitation, laser ablation, plasma or magnetron sputtering. The present invention produces large amounts of silicon nanowires without requiring the use of any catalysts that may cause contamination.

A substrate processing method capable of selectively removing a nitride film. Oxygen plasma containing plasmarized oxygen gas is made to be in contact with a silicon nitride film, which is made of SiN, of a wafer to thereby cause the silicon nitride film to be changed to a silicon monoxide film. The silicon monoxide film is selectively etched by hydrofluoric acid generated from HF gas supplied toward the silicon monoxide film.

The invention discloses a silicon-carbon composite material, a lithium ion battery, and a preparation method and application of the silicon-carbon composite material. The preparation method of the silicon-carbon composite material comprises the steps: uniformly mixing silicon powder and silicon monoxide powder, then mixing with a solution containing an organic carbon source dispersant, and performing wet-process ball milling to obtain a slurry; uniformly mixing the slurry, graphite and a conductive agent, and performing spray drying to obtain spherical-like particles, wherein graphite is synthetic graphite and/or intermediate-phase graphite; mixing the spherical-like particles and asphalt, performing cladding processing under the inert atmosphere to obtain a cladded material; and then performing carbonizing processing to obtain the silicon-carbon composite material, wherein silicon powder, silicon monoxide powder, graphite and asphalt respectively accounts for 5-15%, 3-10%, 45-75% and 5-40% by weight of the sum of the above materials, and the organic carbon source dispersant and the conductive agent both accounts for 0.1-2% by weight of the sum of silicon powder, silicon monoxide powder and graphite. The silicon-carbon composite material has relatively good cycle performance, and can be directly used as a cathode material of the lithium ion battery. The preparation method is simple in technology, low in cost and applicable to industrial production.

A method of preparing a polycrystalline silicon for solar batteries adopts combined means of silicon monoxide disproportionation, acid dipping separation and vacuum melting and processes by the following procedures: (1) the silicon monoxide is made from chemical pure industrial silicon and high purity sand quartz. (2) the high purity silicon is obtained by disproportionation of the silicon monoxide. (3)impurities boron and phosphorus in the silicon are removed by soaking with aquafortis. (4) the high purity silicon is further purified by melting of a vacuum electro beam furnace, and parts with impurities heavily gathered in a cast ingot are cut. (5) nitrogen or nitrogen plus hydrogen is fed into a plasma furnace for melting, so as to further remove the rest boron, phosphorus and other impurities, and conduct directional solidification. (6)the outer skin and parts with impurities heavily gathered of the cast ingot are cut, and finally the high purity silicon which is above 6N pure and applicable to solar batteries is obtained. The invention rejects the technical route of the Siemens method, prevents environment pollution, improves safety of production, and is good for promotion and application in China.

The present invention provides anode materials, methods of producing them, anodes, methods of producing them, electrochemical cells, and lithium-ion batteries, where the anode material comprises a silicon monoxide nanoparticle. In certain embodiments, the silicon monoxide is porous or mesoporous. In certain embodiments, the porous or mesoporous silicon additionally comprises other materials within its pores, such as lithium.

The invention discloses a silicon monoxide/silicon/lithium metasilicate composite negative electrode material. The silicon monoxide/silicon/lithium metasilicate composite negative electrode material comprises a silicon monoxide/silicon/lithium metasilicate composite material and an inorganic matter coating layer. The invention also provides a preparation method of the silicon monoxide/silicon/lithium metasilicate composite negative electrode material. The preparation method comprises the following steps: taking silicon monoxide and an inorganic compound of lithium element, mixing and ball-milling the silicon monoxide and the inorganic compound of the lithium element, sintering the obtained mixture in a protection gas environment, and naturally cooling the sintered mixture to obtain the silicon monoxide/silicon/lithium metasilicate composite material; and mixing and ball-milling the silicon monoxide/silicon/lithium metasilicate composite material and sintering the obtained mixture undera protection gas condition. The preparation method of the silicon monoxide/silicon/lithium metasilicate composite negative electrode material has the advantages of simplicity, safety, low cost, and easiness in operation and industrial production, and the obtained composite negative electrode material has the advantages of high reversible capacity, excellent cycle performances and high initial Coulomb efficiency.

The invention discloses a silicon-carbon composite material, a preparation method thereof and a lithium ion battery prepared by adopting the material. The preparation method of the silicon-carbon composite material comprises the following steps: (1) mixing a composite material (silica-coated nano-silicon) manufactured by silicon monoxide, a porous carbon-based material and excessive hydrofluoric acid solution to obtain another composite material in which nano-silicon particles are compounded in pores of the porous carbon-based material; and (2) heating a composite material in which nano-silicon particles are compounded in pores of a high polymer-coated porous carbon-based material under an inert atmosphere to obtain the silicon-carbon composite material coated by porous carbon spheres. The process raw materials are accessible and simple to prepare. The silicon-carbon composite material has electrochemical reversible embedded lithium removal performance, greatly relieves efflorescence and falling-off phenomena of active particles in the charge-discharge process and has the high lithium storage capacity characteristic of silicon materials and the high cycling stability of carbon materials, and a battery prepared by the silicon-carbon composite material has better cyclicity.

Silicon alloys have the highest specific capacity when used as anode material for lithium-ion batteries, however, the drastic volume change inherent in their use causes formidable challenges toward achieving stable cycling performance. Large quantities of binders and conductive additives are typically necessary to maintain good cell performance. In one embodiment of the invention, only 2% (by weight) functional conductive polymer binder without any conductive additives was successfully used with a micron-size silicon monoxide (SiO) anode material, demonstrating stable and high gravimetric capacity (>1000 mAh/g) for ˜500 cycles and more than 90% capacity retention. Prelithiation of this anode using stabilized lithium metal powder (SLMP®) improves the first cycle Coulombic efficiency of a SiO/NMC full cell from ˜48% to ˜90%. This combination enables good capacity retention of more than 80% after 100 cycles at C/3 in a lithium-ion full cell.

A method for manufacturing a memory device having a vertical structure according to one embodiment of the present invention comprises: a step for alternatingly laminating one or more insulation layers and one or more sacrificial layers on a substrate; a step for forming a penetration hole for penetrating the insulation layer and the sacrificial layer; a step for forming a pattern for filling up the penetration hole; a step for forming an opening for penetrating the insulation layer and the sacrificial layer; and a step for removing the sacrificial layer by supplying an etchant through the opening, wherein the step for laminating the insulation layer includes a step for depositing a first silicon oxide film by supplying to the substrate at least one gas selected from the group consisting of SiH₄, Si₂H₆, Si₃H₈, Si₄H₁₀, and the step for laminating the sacrificial layer includes a step for depositing a second silicon oxide film by supplying dichlorosilane (SiCl₂H₂) to the substrate.

The invention discloses a silicon monoxide composite cathode material for a lithium ion battery, and a preparation method of the silicon monoxide composite cathode material, aiming at improving the cycle performance. The composite cathode material comprises the components by mass percent: 10-30% of composite particle material and 70-90% of natural graphite or artificial graphite, wherein the composite particle material is silicon monoxide covered by a carbon nano tube and an amorphous carbon coating layer. The method comprises the following steps of: forming the carbon nano tube and the amorphous carbon coating layer on the surface of silicon monoxide to obtain composite particles, and mixing the composite particles with the graphite. Compared with the prior art, the preparation method enables cracking carbon to be covered on the surfaces of silicon monoxide particles, so that the volume effect of the silicon monoxide particles can be effectively inhibited in the charge-discharge process of a battery, the cycle performance is good, the specific capacity is more than 500mAh/ g, and the capacity retention ratio is more than 85% after the circulation is carried out for 100 times; and the preparation method is simple in preparation technology, low in raw material cost and suitable for the cathode material for the high-capacity lithium ion battery.

The invention discloses a silicon monoxide composite cathode material for a lithium ion battery, and a preparation method thereof. The method comprises steps that: (1) silicon monoxide is sintered under a high temperature in an inert atmosphere, such that nano-sized silicon particles and amorphous silicon dioxide are produced; (2) a certain amount of sintered silicon monoxide and a certain amount of a conductive agent are accurately weighed, the materials are added into a planetary ball mill, and composite ball-milling is carried out upon the materials, such that the silicon monoxide composite cathode material is obtained, wherein silicon monoxide takes 30% to 90% of a total mass of the silicon monoxide composite cathode material. The silicon monoxide composite cathode material provided by the invention has advantages of high capacity, good cycling performance, and good conductivity. The preparation method has advantages of low raw material cost, simple preparation technology, and suitability for industrialized productions.

A silicon monoxide powder for secondary battery of the present invention is characterized in that the silicon monoxide powder for secondary battery is used in a negative-electrode material of a lithium secondary battery and a hydrogen gas content is not less than 80 ppm. In the silicon monoxide powder for secondary battery, a discharge capacity and a cycle capacity durability rate can dramatically be improved, and miniaturization and cost reduction of the lithium secondary battery can be achieved. In a method for producing the silicon monoxide powder for secondary battery of the present invention, a silicon dioxide powder and a silicon powder with a hydrogen gas content of not less than 30 ppm are mixed together, heated to temperatures of 1250° C. to 1350° C. to vaporize a silicon monoxide, wherein the silicon monoxide thus vaporized is deposited on a deposition substrate to be subsequently crushed. Therefore, the silicon monoxide powder can efficiently be produced to largely reduce production costs such as electric power cost, thus enabling the present invention to be widely applied to the silicon monoxide powder for secondary battery.

The invention discloses a lithium ion battery anode material, and a preparation method thereof. The preparation method comprises following steps: 1, a carbon source is mixed with an organic solvent so as to obtain a sol A; 2, nano silicon monoxide, a surfactant, the carbon source, and the organic solvent are mixed so as to obtain a sol B; 3, the sol A and the sol B are taken as raw materials for electrostatic spinning so as to obtain a composite fiber with a double-layer structure, wherein a shell layer is formed by the sol A, and a core layer is formed by the sol B; and 4, the composite fiber is dried, is subjected to pre-oxidation, and then is subjected to calcination at an insert atmosphere. The process of the preparation method is simple and controllable; large-scale production is easy to realize; an obtained composite material is a carbon-coated flexible self-supported silicon monoxide/amorphous carbon composite fiber anode material; in charging-discharging process of lithium ion batteries prepared from the composite material, the volume change of silicon-based oxide anode materials is controlled effectively, electrode structures are maintained to be complete, first time coulombic efficiency is increased obviously, cycling life is prolonged, and electrochemical performance is excellent.

The invention provides a method and device for producing silicon monoxide. The method disclosed by the invention is mainly characterized in that a silicon-containing substance such as silicon oxide, monatomic silicon, silicon-containing gas (liquid) , and non-completely oxidized silicon, particularly dried solid silicon powder separated from diamond wire silicon cutting waste slurry is subjected to further oxidation (including incomplete oxidation), reduction or addition of silicon dioxide to approach to an ideal ratio of generation of silicon monoxide, and then a silicon monoxide gas is formed under a condition facilitating overflow of silicon monoxide, and then the gas is condensed into rod-shaped, plate-shaped, granular or powdery silicon monoxide. In one embodiment, an oxide layer (SiO2) on the surface of silicon particles (Si) is controlled, so that a silicon monoxide precursor can be prepared, and the preparation process can be oxidization of the silicon or reduction of overly-oxidized silicon-oxygen compounds, and optionally, in another embodiment of the present application, a silicon monoxide powder can be directly produced by utilizing incomplete oxidation of a silicon-containing gas.

The invention discloses a silicon monoxide-based carbon negative electrode material, a negative electrode plate, a preparation method thereof and a lithium ion battery. Through special treatment of asilicon monoxide raw material (calcination, heat preservation, cooling to room temperature, and ball milling, dispersion of the silicon monoxide after ball milling to a sodium hydroxide solution witha concentration of 0.2M to 2M to prepare slurry, etching for 1h to 5h in a magnetic stirrer, and washing and vacuum drying treatment of the slurry to obtain silicon monoxide after pre-treatment), thecontent of oxygen in the silicon monoxide is changed, first effects of silicon monoxide can be effectively improved, the conductivity is increased, expansion is alleviated, and the purposes of improving the first effects of the material or improving the cycle performance of the material are thus achieved. Through improvement of the preparation process, the negative electrode material capacity execution ability is greatly improved, more graphite can be blended to relieve the strain and suppress the rebound, and at the same time, in combination of measures such as surface coating carbon, the material is higher compatible with the current commercial battery system.

The invention relates to a phosphorus-contained negative electrode composite material. The composite material comprises red phosphorus, a conductive carbon elementary substance, and at least one kind of elemental silicon and silicon monoxide. The invention also relates to a preparation method for the phosphorus-contained negative electrode composite material, wherein the preparation method comprises the steps of providing the red phosphorus and a silicon-carbon compound, and enabling the red phosphorus and the silicon-carbon compound to be uniformly mixed. The invention also relates to a lithium ion battery.

The invention discloses a powder pre-lithiated silicon-based negative electrode material, a preparation method and application thereof. A lithium-containing carborane cluster compound coated silicon monoxide material is firstly prepared and obtained, then through segmented heating sintering, boron element in a lithium-containing carborane cluster compound is diffused into a silicon-based materialcontinuously, a part of silicon atoms are replaced to form displaced doping, and the vacancy current-carrying concentration is improved, so that the intrinsic electronic conductivity of the silicon material is improved. Moreover, in the high temperature sintering process, incompletely reacted lithium ions inside the lithium-containing carborane cluster compound react with silicon monoxide, and thebyproducts such as lithium metasilicate, lithium silicate and lithium oxide are further formed to realize pre-lithiation, so that the initial coulomb efficiency of the battery prepared from the material is improved. And then, a uniformly compact carbon layer is formed on the surface of the material through chemical vapor deposition, and the defect that the carbon layer formed by the carbonizationof the carborane cluster compound is relatively loosened and porous can be solved, so that the cycling stability of the material is further improved.

The invention provides a preparation method of a silicon-based composite negative electrode material, which comprises the following steps: (1) corroding silicon monoxide particles to obtain silicon monoxide with a porous structure; (2) in the presence of a catalyst, growing carbon nanotubes in situ on the surface and in pores of the silicon monoxide with the porous structure; (3) carrying out carbon coating on the material obtained in the step (2) by adopting a chemical vapor deposition method to form a first coating layer; and (4) preparing mixed slurry from the material obtained in the step(3), graphite, a conductive agent, a binder and a solvent, and carrying out spray drying granulation on the mixed slurry to form a second coating layer outside the first coating layer. The preparationmethod is simple in process and low in cost, and can be used for industrial production; meanwhile, the obtained silicon-based composite negative electrode material has good conductivity and cycling stability. The invention also provides a silicon-based composite negative electrode material and application thereof.