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267 results about "Silicon monoxide" patented technology

Silicon monoxide is the chemical compound with the formula SiO where silicon is present in the oxidation state +2. In the vapour phase it is a diatomic molecule. It has been detected in stellar objects and it has been described as the most common oxide of silicon in the universe. When SiO gas is cooled rapidly, it condenses to form a brown/black polymeric glassy material, (SiO)ₙ, which is available commercially and used to deposit films of SiO. Glassy (SiO)ₙ is air- and moisture-sensitive. Its surface readily oxidizes in air at room temperature, giving an SiO₂ surface layer that protects the material from further oxidation. However, (SiO)ₙ irreversibly disproportionates into SiO₂ and Si in a few hours between 400 and 800°C, and very rapidly between 1,000 and 1,440°C, although the reaction does not go to completion.

Preparation method of silicon monoxide negative electrode material and external-pressure-free silicon-based solid-state battery

The invention provides a preparation method of a silicon monoxide negative electrode material and an external-pressure-free silicon-based solid-state battery, low-volume-expansion silicon monoxide is used as a negative electrode, a polymer solid-state electrolyte with high ionic conductivity is used as an electrolyte, and a positive electrode is combined to finally assemble a soft package battery or a cylindrical battery. And the silicon monoxide negative electrode has a relatively low volume expansion effect and excellent electrode structure stability, so that the cycle life and the stability of the battery are favorably improved. The polymer solid electrolyte shows excellent stress buffering capability in a solid electrolyte system due to low Young modulus and excellent flexibility, and can effectively adapt to volume change of a silicon-based negative electrode in an electrochemical cycle process. The technology can help the silicon-based solid-state battery get rid of dependence on external pressure, and the technology is relatively simple, high in applicability and wide in application value.
Owner:XIAMEN UNIV

Negative electrode material, method for preparing the same, and secondary battery

The application provides a negative electrode material and a preparation method thereof and a secondary battery, and relates to the technical field of battery materials. The negative electrode material comprises a silicon-based inner core and a carbon layer coated on the surface of the silicon-based inner core, wherein the silicon-based inner core comprises nanosilicon and a silicate containing a metal element M; the negative electrode material is subjected to section analysis and energy spectrum analysis, and meets the conditions of k1<=10, k2<=5 and 0.1 The preparation method of the negative electrode material comprises the following steps: heating and evaporating pre-disproportionated silicon monoxide material and M metal source material to obtain silicon monoxide gas and metal source gas; mixing and condensing the two kinds of gas to obtain an inner core material; and performing carbon coating treatment to obtain the negative electrode material. In the negative electrode material prepared by the application, the metal silicate effectively separates the nanosilicon domain and the silicon oxide domain, and is uniformly distributed, and the negative electrode material has high initial efficiency and excellent cycle performance.
Owner:BTR NEW MATERIAL GRP CO LTD +1

Integrated Brillouin narrow linewidth laser and preparation method thereof

The invention discloses an integrated Brillouin narrow linewidth laser and a preparation method thereof, and belongs to the field of integrated photonics. The integrated Brillouin narrow linewidth laser is composed of two layers of silicon nitride micro-rings, a silicon oxide spacing layer is arranged between the two layers of silicon nitride micro-rings, the free spectral path of the two layers of silicon nitride micro-rings is designed to be Brillouin frequency shift, and coupling waveguides are designed beside the micro-rings. The invention also provides a corresponding preparation method, which comprises the following steps of: sequentially depositing the first silicon nitride layer, the first silicon oxide layer, the second silicon nitride layer, the second silicon oxide layer and the etching pattern on the substrate, and finally depositing silicon oxide as a protective layer. The TM mode is intensively distributed in the silicon oxide between the two layers of silicon nitride through the constraint of the two layers of silicon nitride micro-rings, the defect that the Brillouin gain of a silicon nitride material is weak is overcome, the mode size is reduced, the Brillouin threshold value is reduced, and high-efficiency output of the Brillouin narrow linewidth laser is achieved.
Owner:ZHEJIANG LAB

N-doped graphene coated silicon-based negative electrode material and preparation method thereof

The invention discloses a preparation method of an N-doped graphene-coated silicon-based negative electrode material, which comprises the following steps of: performing carbon coating by using graphene, controlling the particle size of a silicon substrate to be less than 2 microns, and realizing micro-nanocrystallization of a silicon main body material through mechanical ball milling, so that the micro-nanocrystallization silicon material is distributed in a graphite layer while metal-doped silicon monoxide obtains a smaller particle size; according to the preparation method, metal doped silicon monoxide is taken as a silicon source, the surface of the metal doped silicon monoxide is coated with the stripped graphene, the metal doped silicon monoxide is coated with the graphene oxide, finally, a silicon material is further uniformly coated with graphene micro-nanosheets by adopting a rapid spray drying technology, and an electroactive substance is effectively protected from being influenced by volume change caused in the charging and discharging process through the synergistic effect of the graphene micro-nanosheets. The preparation method has the advantages that after the composite material is prepared from micron-sized silicon monoxide and graphene, low-cost preparation of the modified silicon monoxide is realized, the electrode material with excellent electrochemical performance is obtained, the stability of the composite material is effectively improved, the cycle service life is prolonged, and the application and popularization value is relatively good.
Owner:INNER MONGOLIA SHANSHAN TECH CO LTD

Solar cell and preparation method thereof

The invention relates to the technical field of solar cells, in particular to a solar cell and a preparation method thereof, which can improve the passivation performance, the light utilization rate and the antireflection performance of the solar cell to the greatest extent while giving consideration to the ultraviolet attenuation resistance of the solar cell. A solar cell includes a substrate and a first optical adjustment layer; the first optical adjustment layer comprises a first sub-layer, a second sub-layer, a third sub-layer, a silicon oxynitride layer and a first silicon oxide layer which are sequentially stacked in the direction gradually away from the substrate; the refractive index of the first sub-layer is 2.3-2.42, the refractive index of the second sub-layer is 2.12-2.2, the refractive index of the third sub-layer is 2.0-2.1, and the thickness ratio of the first sub-layer to the second sub-layer to the third sub-layer is (10-15): (6-10): (16-24); the refractive index of the silicon oxynitride layer is 1.75-2.0, the refractive index of the first silicon oxide layer is 1.54-1.75, and the thickness ratio of the silicon nitride layer to the silicon oxynitride layer to the first silicon oxide layer is (32-49): (18-26): (10-15).
Owner:TRINA SOLAR CO LTD

Regeneration method and application of silicon-carbon negative electrode material of waste lithium ion battery

The invention discloses a waste lithium ion battery silicon-carbon negative electrode material regeneration method and application thereof, and the method comprises the following steps: S1, mixing a waste lithium ion battery silicon-carbon negative electrode material with an alkaline substance, and calcining in a non-oxidizing atmosphere to obtain a calcined mixture; s2, washing the calcined mixture to be neutral, and performing solid-liquid separation to obtain a graphite material and a silicon-containing solution; s3, adjusting the pH value of the silicon-containing solution to a level at which silicate is precipitated, reacting under heating, carrying out solid-liquid separation, and collecting silicic acid precipitate; s4, mixing the silicic acid precipitate with a silicon simple substance, grinding the mixture into micron-scale powder, calcining the micron-scale powder under a vacuum condition, and collecting generated silicon monoxide; and S5, carrying out carbon coating treatment on silicon monoxide and the graphite material prepared in the step S2 to obtain the regenerated silicon-carbon negative electrode material. According to the scheme, the waste silicon-carbon negative electrode material is successfully converted into a high-quality regenerated material, and the material can be directly applied to production and manufacturing of new batteries.
Owner:ZHEJIANG XINSHIDAI ZHONGNENG RECYCLING TECH CO LTD

Anode material and electrochemical device including the same, and electronic device

An anode material, including a matrix material, and the matrix material comprises carbon-doped silicon monoxide, and a content of the carbon ranges from 0.5% to 10% based on a total mass of the carbon and silicon monoxide. The anode material can significantly improve the cycle performance of an electrochemical device at room temperature and high temperature.
Owner:NINGDE AMPEREX TECHNOLOGY LTD

Modified porous silica negative electrode material of lithium ion battery as well as preparation method and application of modified porous silica negative electrode material

The invention discloses a modified porous silica negative electrode material of a lithium ion battery and a preparation method and application of the modified porous silica negative electrode material, the modified porous silica negative electrode material comprises an inner core layer and a shell layer coating the inner core layer, and the inner core layer is a pre-magnesium silica material, namely porous SiO; the shell layer comprises a carbon nano tube growing on the surface of the porous SiO in situ and a carbon nano tube-nitrogen-doped conductive coating and repairing carbon layer, and the carbon nano tube is embedded in a porous channel of the porous SiO. The modified porous silica negative electrode material is prepared by constructing porous defects on the surface of silicon monoxide, modifying in-situ catalytic growth of carbon nanotubes and doping, coating and repairing a structure; according to the method, the carbon nanotubes can be quickly and uniformly grown on the surface of the porous silica powder and in pore channels, so that firm connection between the inner core layer and the outer shell layer is formed; meanwhile, the electronic conductivity and the ionic conductivity of the material are improved through the point-line-point connection mode. The obtained modified porous silica negative electrode material for the lithium ion battery has relatively high first efficiency, excellent conductivity and cycle rate capability.
Owner:ZHENGZHOU ZHONGKE EMERGING IND TECH RES INST +1

Porous carbon material for silicon-carbon negative electrode and preparation method

The invention provides a porous carbon material for a silicon-carbon negative electrode. The porous carbon material comprises a porous carbon skeleton with a graded pore structure; the silicon-based active units are uniformly dispersed in mesopores and macropores of the porous carbon skeleton, and each silicon-based active unit is composed of a nanometer silicon particle inner core and a silicon monoxide layer coating the surface of the nanometer silicon particle inner core; and the conductive reinforced shell is a gas-phase cracking carbon layer which is completely coated on the outer surface of the complex of the porous carbon skeleton and the silicon-based active unit. The preparation method of the porous carbon material comprises the following steps: preparing a porous carbon skeleton precursor, carrying out graded pore-forming treatment, carrying out surface functionalization treatment, compounding the silicon-based active units, constructing a conductive reinforced shell, carrying out element doping treatment and functionalizing pore channels. The cycle stability and environmental protection property of the silicon-carbon negative electrode are synergistically improved through graded pore constrained expansion, carboxyl bonding stable interface and vapor deposition carbon layer optimized conductivity.
Owner:QINGDAO LONGXIANG PRECISION IND CO LTD

Etching method and etching apparatus

An etching method includes: providing, to an interior of a chamber, a substrate having a three-layered film formed by stacking a first silicon oxide-based film, a silicon nitride-based film, and a second silicon oxide-based film; and collectively etching the three-layered film using a HF—NH3-based gas in the interior of the chamber while adjusting a gas ratio in each of the first silicon oxide-based film, the silicon nitride-based film, and the second silicon oxide-based film.
Owner:TOKYO ELECTRON LTD

Soft and hard carbon coated nanometer silicon-silicon monoxide composite negative electrode material

The invention belongs to the technical field of lithium ion battery electrode materials, and particularly relates to a soft and hard carbon coated nano silicon-silicon monoxide composite negative electrode material. The preparation method comprises the following steps: by taking hydrophobic nano silicon oxide as a silicon source and asphalt as a main carbon source, carrying out temperature-controlled ball-milling treatment on the hydrophobic nano silicon oxide and the asphalt to prepare asphalt-coated nano silicon oxide; adding an emulsifier and a stabilizer, and continuously carrying out ball milling to prepare a suspension system of asphalt coated nano silicon oxide; slowly adding the suspension system into a proper amount of a microstructure regulating agent, stirring to obtain a brown pasty precursor, and performing vacuum drying and heat treatment in an inert atmosphere to obtain carbon / nano silicon oxide composite powder; and reducing the carbon / nano silicon oxide powder by using an aluminothermic reduction method to prepare the soft and hard carbon coated nano silicon-silicon monoxide composite negative electrode material. The preparation method of the composite negative electrode material is simple in process, low in cost, environment-friendly and easy for large-scale production, and the prepared composite negative electrode material has excellent electrochemical performance.
Owner:ANHUI UNIVERSITY OF TECHNOLOGY

Silicon-oxygen-carbon negative electrode material and preparation method and application thereof

The invention relates to the field of electrochemistry, discloses a silicon-oxygen-carbon negative electrode material as well as a preparation method and application thereof, and aims to solve the technical problems of poor conductivity and poor cycling stability of a silicon-oxygen negative electrode material. The preparation method comprises the following steps: dispersing conductive carbon in deionized water, and adding a stabilizer silicon monoxide powder to obtain turbid liquid; the preparation method comprises the following steps: dissolving an amino organic compound in deionized water, adding glacial acetic acid to form a protonated solution A, and adding metal salt to form a solution B; and adding the turbid liquid into the solution B, and carrying out chemical reaction, spray drying and high-temperature carbonization to obtain the silicon-oxygen-carbon negative electrode material. The protonated amino organic matter and a silicon-oxygen Si-O-end bond have an attraction effect, and the amino on the silicon-oxygen surface is further bonded with graphitized carbon such as a carbon tube under the electrostatic action of metal ions to form a graphitized carbon tube and amorphous coated carbon crossed through three-dimensional cross-linked stable carbon layer. According to the invention, the coating uniformity and conductivity of the material are innovatively improved from the material structure, so that the capacity exertion and cycling stability of the lithium ion battery are guaranteed.
Owner:ZHENGZHOU ZHONGKE EMERGING IND TECH RES INST +1

Coated modified ternary positive electrode material as well as preparation method and application thereof

The invention provides a coated modified ternary positive electrode material as well as a preparation method and application thereof. The coated modified ternary positive electrode material comprises a ternary positive electrode material core as well as a silicon monoxide layer, a transition layer and a carbon layer which are sequentially coated on the surface of the ternary positive electrode material core, the transition layer is composed of silicon monoxide and carbon. In the coated modified ternary positive electrode material, the surface of the ternary positive electrode material core is sequentially coated with the silicon monoxide layer, the transition layer and the carbon layer which are uniform in component, and the three coating layers effectively prevent interaction between the ternary positive electrode material core and electrolyte, so that side reaction is reduced, and the cycling stability of the battery is improved; in addition, the silicon monoxide layer and the silicon monoxide in the transition layer provide relatively high lithium ion capacity, so that the lithium ion capacity of the coated modified ternary positive electrode material is improved; in addition, the carbon layer has good electronic conductivity, so that the electronic conductivity of the coated modified ternary positive electrode material is improved, and the rate capability is improved.
Owner:JINGMEN GEM NEW MATERIAL CO LTD +1

Preparation method of high-first-effect high-conductivity silicon monoxide negative electrode plate

The invention relates to the technical field of lithium batteries, in particular to a preparation method of a high-first-efficiency and high-conductivity silicon monoxide negative pole piece, which comprises the following steps: 1, improving the conductivity of silicon monoxide powder in a fluorine-doped carbon coating manner, and enhancing the structural stability of an SEI film formed by the first charge and discharge of the silicon monoxide negative pole piece; 2, through a powder pre-lithiation mode, the lithium content of the silicon monoxide powder is improved, and the initial coulombic efficiency of the silicon monoxide negative electrode plate is enhanced; 3, by introducing a polymer binder containing a conjugated structure, the ion / electron conductivity of the silicon monoxide negative electrode plate is improved, the resistance of the negative electrode plate is reduced, and the volume expansion of silicon monoxide particles in the lithium intercalation and deintercalation process is buffered; and 4, mixing the powder prepared in the step 2 with the conductive polymer binder prepared in the step 3 to obtain the silicon monoxide negative pole piece. The negative pole piece prepared by the preparation method disclosed by the invention has relatively high first coulombic efficiency, relatively high conductivity and relatively high rate capability.
Owner:CHINA ENERGY CONSERVATION ENG TECH RES INST CO LTD

Method for preparing silicon monoxide material by regenerating photovoltaic silicon waste and application of silicon monoxide material

The invention discloses a method for preparing a silicon monoxide material through photovoltaic silicon waste regeneration and application, and belongs to the field of secondary resource recycling. According to the method, photovoltaic cutting waste silicon sludge and silicon dioxide are taken as raw materials, silicon monoxide (SiO) gas is generated through vacuum disproportionation reaction, and a uniform high-purity SiO material is formed by controlling the temperature of a condensation thermal field. According to the preparation method, by utilizing the characteristics of fine granularity, high purity and high activity of the cut waste silicon sludge, the conversion efficiency and uniformity of the SiO product can be remarkably improved, and the SiO product obtained by the preparation method has the characteristics of high purity, good uniformity and the like, and has excellent long-cycle stability when being used as the anode of the lithium ion battery. According to the preparation method, the waste silicon powder is directly regenerated to prepare the SiO product, so that the production cost of SiO can be reduced, value-added cyclic utilization of the waste silicon powder can be realized, the raw material cost is low, the process operation is simple, the practicability is high, and meanwhile, the preparation method also has huge economic benefits and wide application prospects.
Owner:KUNMING UNIV OF SCI & TECH

A secondary gas-phase coated silicon monoxide anode material and its preparation method

The present invention discloses a secondary gas-phase coated silicon monoxide anode material and a preparation method thereof, belonging to the technical field of lithium-ion battery electrode materials. A zinc metal framework is in-situ generated on the surface of graphene oxide nanosheets to obtain zinc metal framework / graphene nanosheets. Then, the zinc metal framework / graphene nanosheets are mixed into water-based epoxy resin to coat the lanthanum-doped magnesium secondary gas-phase coated silicon monoxide powder, and then carbonized to obtain carbon-coated lanthanum-doped magnesium silicon monoxide powder. The carbon-coated lanthanum-doped magnesium silicon monoxide powder, binder, conductive carbon black agent and deionized water are added to a mixing and defoaming machine, stirred and mixed, and dried to prepare the secondary gas-phase coated silicon monoxide anode material; it has higher electrical conductivity, first Coulomb efficiency, 100-cycle capacity retention rate and lower volume change percentage.
Owner:ANHUI UNIV

Substrate processing method and substrate processing apparatus

A technique enabling wet etching of a first silicon oxide film with high selectivity with respect to a metal film and a second silicon oxide film is provided. A substrate processing method of wet-etching a substrate having a stacked structure including a metal film, a first silicon oxide film, and a second silicon oxide film having a moisture content lower than that of the first silicon oxide film is provided. The substrate processing method includes performing an etching while increasing etching selectivity of the first silicon oxide film with respect to the second silicon oxide film and the metal film by supplying an etching liquid, which is prepared by diluting sulfuric acid, hydrogen peroxide and hydrofluoric acid in an anhydrous organic solvent, to the substrate such that the metal film, the first silicon oxide film, and the second silicon oxide film are simultaneously exposed to the etching liquid.
Owner:TOKYO ELECTRON LTD

Selective deposition process on semiconductor substrates

Embodiments of this disclosure relate to a method for selectively depositing polysilicon after forming a fluid polymer film to protect a substrate surface within a feature. A first silicon (Si) layer is deposited by physical vapor deposition (PVD). A fluid polymer film is formed on the first silicon (Si) layer on the bottom. A portion of the first silicon (Si) layer is selectively removed from the top surface and at least one side wall. The fluid polymer film is removed. In some embodiments, a second silicon (Si) layer is selectively deposited on the first silicon (Si) layer to fill the feature. In some embodiments, the remaining portion of the first silicon (Si) layer on the bottom is oxidized to form a first silicon oxide (SiO₂) on the bottom. x ) forms a layer, and a silicon (Si) layer or a second silicon oxide (SiO) layer x The ) layer is the first silicon oxide (SiO x It is deposited on top of layers.
Owner:APPLIED MATERIALS INC

MEMS (Micro Electro Mechanical System) suspended heating bearing structure for TEM (Transmission Electron Microscope) characterization and preparation method thereof

The invention provides an MEMS suspended heating bearing structure for characterization of a projection electron microscope (TEM) and a preparation method of the MEMS suspended heating bearing structure. An SOI silicon wafer comprises device layer silicon, a buried oxide layer and substrate layer silicon. A first silicon oxide layer is arranged on the surface of the device layer, and a heating electrode is arranged on the first silicon oxide layer; the surface of the substrate layer is provided with a second silicon dioxide layer used for back patterning and etching control. The device layer silicon is provided with a first cavity to form a suspended supporting structure, and comprises a central bearing region, a transmission window region and a plurality of supporting beams connected with the central bearing region; the substrate layer silicon is etched from the back surface to form a second cavity, and the second cavity covers the bearing area, the transmission window and the projection range of the supporting beam in the thickness direction. And the second cavity is communicated with the first cavity, so that a through type cavity heat insulation structure is formed. According to the invention, while the permeability of the electron beam transmission window is maintained, stable bearing and controllable heating of the to-be-tested sample are realized, and the requirements of structural reliability, low power consumption and electrical parasitic suppression are considered.
Owner:SUZHOU BONA MICROELECTRONICS TECHNOLOGY CO LTD

Carbon-coated silicon-based composite material as well as preparation method and application thereof

InactiveCN119650655AImprove the first charge and discharge efficiencyImprove conductivityCell electrodesSilicon monoxideElectrical battery
The invention discloses a carbon-coated silicon-based composite material and a preparation method thereof.The preparation method comprises the steps that firstly, a silicon monoxide material and a lithium source liquid phase are mixed in the mode of solvent evaporation after liquid phase mixing, and a layer of lithium silicate precursor is evenly distributed on the surfaces of silicon monoxide particles through high-temperature sintering; and mixing the carbon-coated silicon-based composite material with an organic resin liquid phase, and carrying out high-temperature carbonization to obtain the carbon-coated silicon-based composite material. The invention also discloses an application of the carbon-coated silicon-based composite material as a lithium ion battery negative electrode material. The carbon-coated silicon-based composite material prepared by the method disclosed by the invention has relatively high first coulombic efficiency and excellent cycle performance and rate capability, and the method disclosed by the invention is simple in preparation process and further has the characteristic of industrialization.
Owner:ANHUI ZHONGDING PRECISION TECH CO LTD

A method for preparing silicon dioxide nanopowder

The present invention relates to a method for preparing silicon monoxide nanopowder, and belongs to the technical field of non-metallic powder material preparation. The present invention uses SiO2 aerogel powder with a three-dimensional continuous structure surface as raw material, adsorbs hydrogen molecules on the surface of the powdered SiO2 aerogel, and axially feeds an argon-excited inductively coupled plasma torch. The hydrogen molecules are excited by the argon plasma torch to form a highly active hydrogen-rich plasma, which undergoes a reduction reaction with the SiO2 aerogel powder having the characteristics of high specific surface area and high porosity. The generated silicon monoxide vapor is quenched by argon downstream of the reaction device to obtain highly dispersible silicon monoxide nanopowder. This method overcomes the defects of the traditional solid-solid reaction method for preparing silicon monoxide, which has a slow reaction rate and low raw material conversion rate, and at the same time solves the safety problems existing in the traditional method of producing silicon monoxide by hydrogen reduction, thereby greatly improving production efficiency and safety.
Owner:CHINA ACAD OF AEROSPACE AERODYNAMICS

A silicon monoxide nanomaterial and a preparation method thereof

The present invention discloses a silicon monoxide nanomaterial and a preparation method thereof, belonging to the technical field of nanomaterials. The silicon monoxide nanomaterial comprises the following raw materials in parts by weight: metal silicon powder: 80 - 120 parts, silicon dioxide powder: 20 - 40 parts, binder: 0.5 - 3 parts, surfactant: 2 - 8 parts; in the present invention, intermediate 1 is prepared by the substitution reaction of 3 - allyl - 2 - hydroxybenzaldehyde and epichlorohydrin, then intermediate 2 is prepared by the ring - opening reaction of intermediate 1 and n - decanol, then intermediate 3 is prepared by the sulfonation reaction of intermediate 2 and 1,3 - propane sultone, and finally the surfactant is prepared by the polymerization reaction of 2 - methacryloyloxyethyl phosphorylcholine, 2 - acrylamide - 2 - methylpropanesulfonic acid and intermediate 3. The silicon monoxide nanomaterial prepared by the present invention has a high initial Coulomb efficiency and good cycle performance.
Owner:HAINAN NORMAL UNIV

Technologies for epitaxial perovskite ferroelectric transistors on buffered silicon

Technologies for epitaxial perovskite ferroelectric transistors on buffered silicon are disclosed. In an illustrative embodiment, a barrier layer of titanium nitride is deposited on a silicon substrate using domain matching epitaxy, which allows the titanium nitride to grow with relatively low stress and a low number of defects, despite a 22% misfit between the lattice constant for titanium nitride and that lattice constant for silicon. The barrier layer prevents silicon monoxide (SiO) from forming when oxides are grown as later layers. In some embodiments, some or all of the titanium nitride barrier layer may be used as a gate electrode for the transistor.
Owner:INTEL CORP

Grid electrode side wall and preparation method and application thereof

The invention relates to a grid side wall and a preparation method and application thereof. The method comprises the following steps: depositing a first silicon oxide layer on a semiconductor substrate with a grid structure; depositing a silicon nitride layer on the first silicon oxide layer; depositing a second silicon oxide layer on the silicon nitride layer; the first silicon oxide layer and the second silicon oxide layer are deposited through a TEOS (tetraethyl orthosilicate) process, and the TEOS process comprises n times of precursor gas deposition and (n-1) times of clean gas purging. Stacked growth of the silicon dioxide layer is carried out through n times of precursor gas deposition and n-1 times of clean gas purging, surface silicon dioxide with poor uniformity is repeatedly eliminated, then silicon dioxide is supplemented, and the steps are repeated for several times so that the thickness uniformity of the side wall of the grid electrode can be optimized, and the step covering performance can be improved.
Owner:CHENGDU ZIGUANG SEMICON TECH CO LTD

Method for patterning a silicon oxide-silicon nitride-silicon oxide stack and structures produced by this method

Microfabrication process with the following steps: Providing a structure (800) comprising a layer stack (30, 40, 50) containing, from bottom to top, a first silicon oxide layer (30), a stoichiometric silicon nitride layer (40), and a second silicon oxide layer (50), and a conductive material part (20) below the layer stack (30, 40, 50) and above a substrate (10); Producing a patterned etch mask layer (57) having an opening through this layer over the layer stack (30, 40, 50); and Producing a via cavity (59) extending through the layer stack (30, 40, 50) and downwards to a top side of the conductive material part (20) by isotropic etching of parts of the second silicon oxide layer (50), the silicon nitride layer (40) and the first silicon oxide layer (30) with an isotropic etching process in which an etch rate of the silicon nitride layer (40) is 1 / 10 to 1 / 2 of the etch rate of the first silicon oxide layer (30), wherein: the first silicon oxide layer (30) comprises a first silicon oxide material produced by decomposition of tetraethyl orthosilicate, the stoichiometric silicon nitride layer (40) is produced by chemical vapor deposition at a temperature of less than 300°C, in which a silicon precursor gas and a nitrogen precursor gas are used together to produce a silicon nitride material, and the second silicon oxide layer (50) comprises a second silicon oxide material produced by decomposition of tetraethyl orthosilicate.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Preparation method of pre-magnesium-silicon-oxygen negative electrode material based on photovoltaic waste silicon recycling

The invention relates to the technical field of photovoltaic waste silicon regeneration, in particular to a preparation method of a pre-magnesium-silicon-oxygen negative electrode material based on photovoltaic waste silicon recycling, which comprises the following steps: obtaining waste silicon materials from different sources, and immersing the waste silicon materials with the purity of 80-96% into an alkaline solution of a dehydrogenation additive to obtain a pure silicon wafer; soaking the pure silicon wafer in a hydrofluoric acid solution, adding a sodium hydroxide solution, soaking the common-purity silicon wafer in aqua regia, filtering the solution, and locally melting a silicon rod by adopting high-frequency induction heating to obtain high-purity silicon powder with the purity of 99.9999%; the mixture is added into a vacuum furnace to be heated, silicon monoxide steam and magnesium steam are obtained, and SiO / alpha Mg is obtained through condensation; and adding the SiO / alpha Mg material into a CVD (Chemical Vapor Deposition) furnace to obtain the Mg-SiOx-C composite material. According to the photovoltaic waste silicon disclosed by the invention, the pollution of the photovoltaic waste silicon to the environment is avoided, the secondary pollution easily caused by an immature recovery technology is avoided, the recovery cost is effectively reduced, and the utilization of the photovoltaic waste silicon is improved.
Owner:LESHAN VOCATIONAL & TECHN COLLEGE +1

Pre-lithiated silica composite material as well as preparation method and application thereof

The invention provides a pre-lithiated silicon oxide composite material as well as a preparation method and application thereof, belongs to the technical field of lithium ion batteries, and is used for solving the technical problems of poor initial coulombic efficiency and stability of pre-lithiated silicon monoxide. The preparation method comprises the following steps: carrying out disproportionation reaction on silicon oxide at high temperature; and cooling to a relatively low temperature, introducing inert gas and carbon source mixed gas, and carrying out carbon coating through a chemical vapor deposition technology to form the SiOx / Si-C composite material. And mixing the treated silicon oxide with a lithium supplement agent, heating in an inert gas environment to pre-lithium, and washing and drying the product to prepare the high-performance silicon-oxygen composite material. According to the invention, the initial coulombic efficiency of the lithium ion battery is remarkably improved, and a more stable carbon-coated structure is formed, so that the capacity retention ratio and the cycling stability of the battery are enhanced. In addition, the technology has lower preparation cost, and is suitable for wide application in the battery manufacturing industry.
Owner:ZHENGZHOU ZHONGKE EMERGING IND TECH RES INST +1

Electric furnace thermal reduction magnesium smelting co-production silicon-carbon negative electrode material and device thereof

The invention provides an electric furnace thermal reduction magnesium smelting co-production silicon carbon negative electrode material and a device thereof. MgO, SiO2, coke, biological pyrolytic carbon and methane gas are used as raw materials and are added into a magnesium smelting electric arc furnace for carbon thermal reduction to obtain mixed furnace gas; the mixed furnace gas enters a quenching condenser to be subjected to isentropic expansion and cooling treatment after being subjected to heat compensation through a heat compensation chamber, and solid-phase particles and cooling furnace gas are obtained; the solid-phase particles and the cooling furnace gas are cooled by a first cooling chamber to obtain ternary mixed powder, and the ternary mixed powder is subjected to the operations of metal magnesium vacuum distillation, magnesiothermic reduction and silicon monoxide disproportionation reaction offline; residual gas in the first cooling chamber is secondarily cooled through the second cooling chamber, and a primary material required by the silicon-carbon negative electrode material is co-produced in a gas-phase reaction mode in the magnesium smelting process, so that near-full continuous production of main links of the silicon-carbon negative electrode material and co-production coupling of carbon thermal reduction of magnesium metal are realized.
Owner:HANGZHOU GEOMANTLE FENERGY HYDROGEN TECH CO LTD

Carbon-coated lithium titanate composite silicon negative electrode material and preparation method thereof

The invention discloses a preparation method of a carbon-coated lithium titanate composite silicon negative electrode material, which comprises the following steps: mixing raw materials, carrying out two-stage high-temperature calcination, converting a lithium source and a titanium source into lithium titanate, carrying out disproportionation reaction to convert silicon monoxide into silicon simple substance silicon dioxide, removing silicon dioxide by acid etching, and carrying out carbon coating by chemical vapor deposition to obtain the carbon-coated lithium titanate composite silicon negative electrode material. A final product is obtained. The porous lithium titanate has the characteristics of zero volume expansion, high safety, long service life and low energy density, and the nano silicon has the characteristics of high specific capacity, large volume expansion and poor cycle performance, so that the comprehensive performance of high capacity, long cycle and high safety is finally realized by utilizing the synergistic effect of the porous lithium titanate and the nano silicon; compared with a silane chemical vapor deposition silicon process, the process is safe and low in cost; compared with a process of respectively preparing porous lithium titanate and nano silicon and then mixing, the preparation method disclosed by the invention has the advantages that the problem that nano silicon is easy to agglomerate is avoided, and the electrochemical performance of a finished product is effectively improved.
Owner:SHENZHEN XIANGFENGHUA TECH CO LTD

Ultraviolet radiation resistant resin lens

The utility model discloses a resin lens resistant to ultraviolet radiation. The resin lens comprises a substrate; the first anti-ultraviolet layer is arranged on the outer side of the substrate and comprises a silicon monoxide layer arranged on the outer side of the substrate and a trititanium pentoxide layer arranged on the outer side of the silicon monoxide layer; the second anti-ultraviolet layer is arranged on the inner side of the substrate and comprises a zirconium dioxide layer arranged on the inner side of the substrate and a tantalum pentoxide layer arranged on the outer side of the zirconium dioxide layer; the hardening layer is arranged on the outer side of the first anti-ultraviolet layer; the potassium ion layer is arranged on the outer side of the second anti-ultraviolet layer; the high refraction layer is arranged on the outer sides of the hardening layer and the potassium ion layer; the wear-resistant layer is arranged on the outer side of the high refraction layer; the waterproof layer is arranged on the outer side of the wear-resistant layer. The first uvioresistant layer is arranged on the outer side of the substrate, and the second uvioresistant layer is arranged on the inner side of the substrate, so that the uvioresistant capacity inside and outside the lens is greatly enhanced.
Owner:WUCAI SILAIBAI OPTICAL TECH (JIANGSU) CO LTD