488 results about "Oxygen plasma" patented technology

The invention relates to a high / low-temperature-resistant wear-resistant tear-resistant fluorosilicone rubber compound and a preparation method thereof, and belongs to the technical field of special rubber materials, the high / low-temperature-resistant wear-resistant tear-resistant fluorosilicone rubber compound comprises the following components: raw fluorosilicone rubber, a reactive liquid rubber compatibilizer, a reinforcing filler, a tear-resistant aid, a high-temperature-resistant aid, a vulcanizing agent, an accelerant, an anti-aging agent and an anti-attrition filler, the provided reaction type liquid rubber compatibilizer contains vinyl carboxyl liquid fluorosilicone rubber, the tear-resistant auxiliary agent contains zinc polymethacrylate, the high-temperature auxiliary agent contains vinyl fluorosilane modified carbon nanotubes, and the anti-friction filler contains molybdenum disulfide and layered nano zirconium phosphate which are treated by oxygen plasma. The high and low temperature resistance stability, oil resistance, wear resistance and tear strength of the fluorosilicone rubber are synergistically improved by regulating and controlling the multi-cross-linked network structure of the fluorosilicone rubber, strengthening the interface action of the rubber and the filler and optimizing the composite vulcanization system, meanwhile, structuralization of a rubber compound is prevented by optimizing the preparation process, and the requirement for adaptability to severe working conditions is met.

The invention belongs to the field of macromolecules, and particularly relates to a PBO fiber surface modification method for a synergistic copolymer coating through plasma treatment. According to the method, modification is designed by adopting a synergistic mechanism of plasma treatment and a functional coating: firstly, the PBO fiber is treated by oxygen plasma, a microstructure and an active group are formed on the surface of the PBO fiber, and the surface activity of the PBO fiber is rapidly improved; then coating a monomer solution containing a photoinitiator, exciting light to initiate free radical polymerization through ultraviolet irradiation, forming a random copolymer coating on the surface of the PBO fiber, and repairing the damage of oxygen plasmas to the PBO fiber structure while introducing active groups into the coating; and active groups formed by oxygen plasma treatment can enhance the adhesive force between the coating and the PBO fiber. Finally, the invention provides an environment-friendly and controllable PBO fiber surface synergistic modification technology, the intrinsic performance of the PBO fiber and the interface bonding strength are improved for a long time, and a support is provided for engineering application of the high-performance PBO fiber.

The invention discloses a method for coating fluorescent powder with aluminum oxide through plasma-assisted atomic layer deposition, which comprises the following steps of: building an atomic layer deposition system, and placing a base station in a vacuum chamber of the atomic layer deposition system; fluorescent powder is placed on a base station, a vibration motor is turned on, and then the fluorescent powder is pretreated, including degassing treatment and oxygen plasma pretreatment; sequentially and alternately introducing two precursors into a vacuum chamber of the atomic layer deposition system, so that the two precursors are chemically adsorbed on the surface of the fluorescent powder and react to generate an aluminum oxide film; and after each precursor is introduced and reacts, the vacuum chamber needs to be cleaned by inert gas. According to the method, high-precision monoatomic-layer-level film control is achieved through the plasma-assisted atomic layer deposition technology, the defect that powder is prone to agglomeration in deposition is overcome through the vibration type fluidized bed technology, and therefore a high-quality aluminum oxide protection layer can be formed on the surface of the fluorescent powder; the water resistance and the luminescence property of the fluorescent powder are obviously improved.

The invention discloses a preparation method of a magic angle nano-cavity and a topological body cavity based on a quantum dot single photon source, and the method comprises the steps: carrying out the preprocessing of a substrate, and enabling the substrate to comprise a quantum dot layer, a substrate layer, and a sacrificial layer located between the quantum dot layer and the substrate layer; treating the pretreated substrate by adopting oxygen plasma; photoresist is spin-coated on the surface of the quantum dot layer of the substrate, exposure and development are carried out, and a pattern is formed on the surface of the photoresist; transferring the pattern on the photoresist to the quantum dot layer through etching; and removing the sacrificial layer by wet etching to prepare two photonic crystal cavities, namely a magic angle nano cavity and a topological body cavity. Through fine electron beam exposure dose control, precise inductively coupled plasma gas component and etching rate control and appropriate corrosive liquid concentration and time control, a high-stability and high-repeatability photonic crystal suspension cavity structure, namely a magic angle nano cavity and a topological body cavity, with a line width of 30-50 nm is realized.

The invention discloses a preparation method of a multifunctional polyvinyl composite film and application of the multifunctional polyvinyl composite film in food preservation. The preparation method comprises the following steps: firstly, preparing Ag-coated MOF through a hydrothermal method, then uniformly dispersing the Ag-coated MOF and tannic acid into a carboxymethyl chitosan solution, and carrying out crosslinking modification on the Ag-coated MOF; and coating the prepared CMCS / TA / Ag (at) MOF mixed solution on a polyethylene film treated by oxygen plasma, and drying to form a film, so as to obtain the multifunctional polyethylene-based composite film. The CMCS and the TA are adopted to perform crosslinking modification on the Ag-coated MOF, so that the stability of the Ag-coated MOF can be further improved, and the release of silver ions is reduced. Compared with a common PE preservative film, the composite film prepared on the basis has better barrier capacity and mechanical property, and has antibacterial, anti-ultraviolet and anti-oxidation effects. The multifunctional preservative film is convenient to use and low in price, and has an important application prospect in the aspect of fresh-keeping packaging of meat products.

The invention relates to the technical field of glass fiber felts, in particular to a high-strength fire-resistant glass fiber felt and a preparation method thereof. The high-strength fire-resistant glass fiber felt is characterized by comprising a fire-resistant glass fiber felt base material prepared by mixing glass fibers and chopped basalt fibers, and the mass ratio of the glass fibers to the chopped basalt fibers is (4-5): 1; the glass fibers and the chopped basalt fibers are subjected to oxygen plasma treatment. The glass fiber and the short-cut basalt fiber are compounded according to a specific proportion, and the performance advantages of the glass fiber and the short-cut basalt fiber are combined. The glass fibers provide high modulus and corrosion resistance, and the basalt fibers enhance high temperature stability and impact resistance. Active groups are introduced to the fiber surface through oxygen plasma treatment, and chemical bonding with resin is enhanced. The optimized fiber mixing ratio remarkably improves the tensile strength and high temperature resistance of the base material, meanwhile, the binding force of the fibers and the resin is enhanced through oxygen plasma treatment, internal pores of the material are reduced, and the material is more compact and durable.

The invention discloses a selective ink transfer printing method based on a liquid-like surface. The selective ink transfer printing method comprises the following steps that 1, the surface of a base body is treated through oxygen plasma; step 2, dissolving a reaction monomer in methylbenzene containing saturated water; step 3, placing the substrate subjected to oxygen plasma treatment in the reaction solution in the step 2 to form a PDMS molecular brush; step 4, performing pattern design on the surface of the PDMS molecular brush by adopting a mask process, treating by using an alkali solution, selectively removing the molecular brush in an unprotected area, and restoring the molecular brush to a hydrophilic glass surface; step 5, coating oil-based ink on the surface treated in the step 4 to form a clear pattern; and step 6, enabling the surface of the printing ink with the pattern to be in direct contact with a target substrate, and applying pressure to transfer the printing ink. According to the method, the problems of resolution, ink diffusion control and pattern uniformity of the existing printing technology are solved, and the printing precision and applicability are improved.

The invention belongs to the technical field of lithium ion battery positive electrode materials, and provides a plasma-assisted in-situ constructed lithium ion conductor coated high-nickel ternary positive electrode material as well as a preparation method and application thereof. Oxygen plasma active groups are formed through high-pressure ionization of oxygen, and the generated active groups interact with gas generated by thermal decomposition of an added solid source; the residual alkali on the surface of the high-nickel ternary positive electrode can be consumed, and a thin, continuous and compact lithium ion conductor coating layer with good conductivity is formed on the surface of the high-nickel ternary positive electrode material in situ, so that the development of the high-nickel ternary positive electrode material of the lithium ion battery is promoted. The high-nickel ternary positive electrode material prepared by the invention shows high specific capacity, excellent cycling stability, rate capability and first charge-discharge efficiency. Meanwhile, the preparation method provided by the invention is simple, rapid, efficient, convenient and low in cost, the residual alkali on the surface of the high-nickel ternary positive electrode material can be effectively removed, and the structural stability of the high-nickel ternary positive electrode material is improved.

The invention discloses an instrument capable of being separated through light control and a preparation method and application of the instrument, and belongs to the technical field of biomedical engineering and flexible electronics. The instrument capable of being separated through light control comprises a flexible substrate layer, an electrode layer and a gel integration layer, the preparation method comprises the following steps: (1) forming an electrode pattern on a silicon wafer through photoetching, and carrying out oxygen plasma treatment to prepare a hydrophilic surface; (2) spin-coating a water-soluble polymer solution to form a sacrificial layer; (3) spin-coating silicone rubber pre-polymerized liquid and curing to form a flexible substrate layer; (4) dissolving the sacrificial layer with water to realize demolding, and embedding a patterned conductive material into the surface to form an electrode layer; and (5) coating the photo-responsive adhesive hydrogel pre-polymerization liquid, and performing cross-linking curing to form a gel integration layer, thereby obtaining the photo-responsive adhesive hydrogel. Through integrated structural design and functional material integration, the brain-computer interface ECoG electrode with high flexibility, high adhesion, high conductivity and controllable debonding capacity and the like is provided, and a technical basis and an application platform are provided for a next-generation intelligent implantable brain-computer system.

The invention provides a micro-fluidic chip capable of culturing oral squamous cell carcinoma organoid and a preparation method thereof, and relates to the technical field of micro-fluidic chips, the chip comprises a four-layer structure: the first layer is a closed layer, the second layer is a culture solution / drug pool layer (containing a concentration gradient injection channel and a slow flow channel), the third layer is a matrix culture pool layer, and the fourth layer is a matrix culture pool layer. The fourth layer is a matrigel inflow layer (containing an S-shaped flow channel); the second layer and the third layer are integrally formed, and all the layers are connected through oxygen plasma welding; the problems that in the prior art, matrigel is prone to shifting, drug gradient regulation and control is poor, operation is tedious, and adaptability is insufficient are solved, the matrigel and organoids can be stably fixed, the drug concentration gradient can be precisely regulated and controlled, the nutrition supply efficiency is enhanced, the structural integration level and operation convenience are improved, and the application prospect is wide. The method is suitable for oral squamous cell carcinoma organoid culture, drug screening and tumor mechanism research.

The invention discloses a preparation method of an ABM ceramic substrate with a metal through hole, and particularly relates to the technical field of ceramic substrates, a Si3N4 ceramic substrate is prepared through tape casting and hot pressed sintering, a conical stepped through hole is processed by using ultrafast femtosecond laser, the aperture of the through hole is 100-300 [mu] m, and the smoothness of the wall of the through hole is Rat; 1 [mu] m; performing oxygen plasma activation on the inner wall of the through hole to generate a Si-O active group; sputtering a nano titanium transition layer to enhance metal-ceramic interface bonding; the through holes are filled layer by layer through pulse electrochemical deposition, the current density is controlled, and a compact non-porous structure is achieved; in-Sn-Ag low-temperature active brazing filler metal is used, and a surface copper layer is bonded under the assistance of plasma; a fine circuit is formed through photoetching and micro-electroplating, the line width and the spacing of the circuit are the same, and the line width and the spacing of the circuit are both smaller than 20 microns; etching a micro-channel network on the back surface of the substrate by using ultraviolet laser, and filling heat-conducting silicone grease; and finally, carrying out vacuum annealing for 2 hours in an environment with the temperature of 250 DEG C.

The invention relates to a glass fiber reinforced polyurethane composite material and a preparation process thereof, and belongs to the technical field of polymer composite materials. The formula of the glass fiber reinforced polyurethane composite material comprises the following components in parts by weight: 60-80 parts of thermoplastic polyurethane, 15-25 parts of modified glass fiber, 2-5 parts of an interface modifier, 1-2 parts of an antioxidant and 1-3 parts of a lubricant. A covalently bonded silane coupling agent-nano silicon dioxide composite transition layer is formed by mixing chopped glass fibers and continuous glass fibers to construct a synergistic enhancement system and combining argon-oxygen plasma activation and nano silicon dioxide sol coating processes, so that the interfacial shear strength is remarkably improved, the stress concentration is effectively relieved, and the service life is prolonged. The tensile strength and the impact strength of the material are obviously improved.

A flexible ultrasonic sensor with an ultrasonic-driven liquid metal as a conductive material and a manufacturing method thereof are provided. The method includes: pumping a liquid metal into an inflow channel with a pre-embedded copper wire in an ultrasonic pumping mode; in a vacuum atmosphere, enabling a encapsulation film subjected to oxygen plasma treatment to slowly fall on the previously obtained material through a clamping apparatus; clamping a piezoelectric organic polymer by the obtained material and a liquid metal electrode bottom plate, enabling the piezoelectric organic polymer to be located at a central position through a positioning plate, and pasting a flexible encapsulation layer to a lower part of a whole device in the vacuum atmosphere; and sintering upper and lower layers of liquid metal electrodes by power ultrasound after heating to ensure electrical connectivity, thereby completing manufacturing of the flexible ultrasonic sensor.

The invention provides a preparation method of a bionic double-layer aerogel thermal fabric, which comprises the following steps: S1, weaving a double-layer texture fabric, selecting superfine polyester as warp yarns and aerogel modified polyester and spandex as weft yarns in a surface texture, and selecting modal fibers as warp yarns and weft yarns in a lining texture; s2, performing low-temperature oxygen plasma treatment on one side of the inner texture of the double-layer texture fabric; s3, soaking the fabric subjected to plasma treatment in a finishing liquid containing cellulase for finishing; s4, after drying the finished fabric, soaking the fabric in a mixed finishing liquid containing protease / lipase for finishing to obtain a protease / lipase finished fabric; and S5, coating one side of the inner tissue of the fabric subjected to protease / lipase finishing with the salt-containing chitosan / waterborne polyurethane finishing liquid, drying, and washing to dissolve out salt, so as to obtain the warm-keeping fabric. According to the invention, material modification and structural design are combined, so that high-efficiency thermal insulation performance is realized.

The invention relates to the field of optical thin films, in particular to a preparation method of an optical diffusion film. A preparation method of an optical diffusion film comprises the following steps: uniformly mixing a curing agent and polydimethylsiloxane, curing, and then carrying out oxygen plasma treatment and room temperature aging treatment to obtain a polydimethylsiloxane flat plate; dissolving PET particles and PMMA particles in a solvent to obtain a polymer solution; and placing a polydimethylsiloxane flat plate above the polymer solution, and standing to obtain the optical diffusion film. According to the application, PMMA is used as a high glass transition temperature component to be blended with PET, so that the overall glass transition temperature of a blending system is improved, and the practicability of the optical diffusion film in a high-temperature environment is improved; strong scattering is provided through the refractive index difference between air holes and a polymer phase, and a refractive index gradient is formed by using the refractive index difference between PET and PMMA, so that a secondary scattering interface is formed, and light absorption is reduced and high transmittance is maintained while high haze is ensured.

The invention provides a lithium metal negative electrode current collector, a preparation method thereof and a lithium metal battery, and the method comprises the following steps: carrying out single-side treatment on carbon cloth in oxygen plasma for 8-12 seconds to obtain gradient activated carbon cloth; the preparation method comprises the following steps: dissolving Zn (NO3) 2 and urotropine in water, and slowly adding ammonia water to obtain a colorless and transparent precursor solution; and transferring the precursor solution into a polytetrafluoroethylene liner, carrying out hydrothermal reaction on the precursor solution and gradient activated carbon cloth, cooling to room temperature, and washing and drying to obtain the lithium metal negative electrode current collector. The three-dimensional carbon cloth current collector with longitudinal zinc oxide gradient distribution is obtained through single-sided oxygen plasma treatment and a one-step hydrothermal method, and meanwhile, lithium is induced to deposit from bottom to top and uniformly grow in a three-dimensional carbon cloth framework with ZnO lithium-loving sites gradient distribution by effectively controlling the concentration distribution of ZnO, so that the formation of lithium dendrites is inhibited; the cycle stability of the electrode is improved, and long cycle stability and high energy density of the lithium battery are realized.

The invention relates to the technical field of semiconductor devices, in particular to a light-emitting diode epitaxial structure and a preparation method thereof. The light-emitting diode epitaxial structure comprises a substrate, an h-BN / O2 layer, a low-temperature GaN buffer layer, an N-type semiconductor layer, a multi-quantum well layer and a P-type semiconductor layer which are arranged in sequence, the h-BN / O2 layer subjected to oxygen plasma treatment is inserted between the heterogeneous substrate and the GaN epitaxial layer, the low-temperature GaN buffer layer is grown on the h-BN / O2 layer by controlling the process conditions, and the h-BN / O2 layer and the low-temperature GaN buffer layer are matched, so that lattice mismatch dislocation, residual stress and thermal mismatch of an epitaxial material grown on the heterogeneous substrate can be effectively modulated, the scattering efficiency under high current is improved, and the light emitting efficiency is improved. The probability of radiation recombination of the heteroepitaxial material is improved, and the requirement for heteroepitaxy is lowered.

The invention relates to the field of fiber processing, and particularly discloses a processing technology of colored superfine flat elastic polyester interlaced yarn, which comprises the following steps: S1, carrying out oxygen plasma treatment on PET (polyethylene terephthalate) slices, then adding maleic anhydride coated nano whiskers at 60-70 DEG C, gradually heating to 200-210 DEG C, pre-crystallizing for 24-28 hours, and then drying at 155-165 DEG C, so as to obtain the colored superfine flat elastic polyester interlaced yarn; crystallization slices are obtained; s2, performing melt spinning on the crystal slices to obtain cellosilk; s3, performing circular blowing cooling, spinning on an oil frame and elasticizing treatment on the cellosilk to obtain a finished product terylene interlaced yarn; meanwhile, the super-fine fiber has the advantages of being good in dyeing effect, stable in color and luster, super-fine, high in strength, good in elasticity, easy in flatness control and good in stability.

The invention discloses a reinforced and toughened modified composite material based on recycled PET (Polyethylene Terephthalate) and a green preparation process, and belongs to the field of preparation of polymer-based composite materials. The invention aims to solve the problems of insufficient mechanical strength, poor interfacial compatibility, green preparation contradiction, recycling bottleneck and the like of the existing PET material. The composite material is prepared from 15 to 20 parts of bamboo fiber, 100 to 120 parts of natural rubber, 100 to 120 parts of PET resin, NR-g-MAH, a bio-based epoxy chain extender, an antioxidant and the like. According to the preparation process, the bamboo fibers are modified through low-temperature oxygen plasma and ultrasonic synergism, and reinforcing and toughening are achieved in combination with natural rubber dynamic vulcanization, supercritical CO2-assisted blending and ester bond crosslinking of a chain extender and PET in a double-screw extruder. The tensile strength of the obtained material is 85-95 MPa, the notch impact strength is 18-22 kJ / m, the heat distortion temperature is 105-110 DEG C, the bio-based content is greater than or equal to 30%, and the material has excellent mechanical properties and environmental friendliness.

The invention provides a preparation method and application of a novel crystal glass surface nano self-cleaning coating, and belongs to the technical field of self-cleaning coatings, the method comprises the following steps: (1) pretreatment of a base material: cleaning the glass surface by adopting oxygen plasma, removing organic matters and activating; (2) spraying a bottom coating: mixing 10-15 parts of nano silicon dioxide sol and 3-5 parts of a silane coupling agent, and curing at 120-150 DEG C for 30 minutes after spraying; (3) coating a functional layer; and (4) post-treatment: after ultraviolet curing, carrying out heat treatment at 180-200 DEG C for 10 minutes to form a compact cross-linked structure. Through material innovation (such as nitrogen-doped titanium dioxide and a dynamic disulfide bond ultraviolet light absorber) and process optimization (low-temperature curing and electrostatic atomization), the three major problems of single function, short service life and complex process of a traditional coating are solved, meanwhile, the coating is expanded to the scenes of photovoltaics, automobiles, buildings and the like, and the comprehensive advantages of being efficient, self-cleaning, long-acting, durable and environmentally friendly are achieved.

The invention relates to the technical field of cables, in particular to a semiconductive shielding material and a preparation method thereof, oxygen plasma reaction equipment and a cable. The semi-conductive shielding material is prepared from the following components in parts by weight: 55 to 65 parts of vinyl resin matrix, 1.5 to 2 parts of cross-linking agent and 30 to 40 parts of filler, the filler at least comprises modified conductive filler; the modified conductive filler comprises a first oxygen-containing functional group and a second oxygen-containing functional group, the first oxygen-containing functional group comprises one or more of hydroxyl and ether, and the second oxygen-containing functional group comprises one or more of carbonyl, COO-and carboxyl; the modified conductive filler meets the following relational expression: C1 / n1 < = C2 / n2, C1 is the total concentration of the first oxygen-containing functional groups, n1 is the number of functional group types included in the first oxygen-containing functional groups, C2 is the total concentration of the second oxygen-containing functional groups, and n2 is the number of functional group types included in the second oxygen-containing functional groups.

The invention discloses an oilless bearing surface wear-resistant self-lubricating hydrogen-free carbon-based coating and a preparation method thereof, the oilless bearing surface wear-resistant self-lubricating hydrogen-free carbon-based coating comprises a binding force layer, a wear-resistant self-lubricating coating and a surface C layer, and the binding force layer, the wear-resistant self-lubricating coating and the surface C layer are sequentially arranged on the surface of an oilless bearing from bottom to top through magnetron sputtering. The C target material is used as a carbon source, so that the use of flammable and explosive gases such as methane and acetylene is avoided, the safety of the process is guaranteed, the risks of subsequent hydrogen embrittlement cracking and the like of the coating are reduced, and the service life of the coating is prolonged; by arranging the surface C layer, the self-lubricating performance of the coating is further improved, the friction force among all parts of the oilless bearing is reduced, and the service life of the oilless bearing is prolonged; meanwhile, oxygen plasma treatment is carried out before the surface C layer is deposited, so that the bonding strength between the surface C layer and the wear-resistant self-lubricating coating is improved, and the service life of the coating is prolonged.

The invention discloses a preparation method of a vanadium battery electrolyte oxidation corrosion resistant composite membrane, which comprises the following steps: S1, uniformly dispersing graphene oxide nanosheets on the surface of an SPEEK (sulfonated polyether ether ketone) matrix by using sulfonated polyether ether ketone as a substrate to obtain an SPEEK / GO (graphene oxide) substrate; s2, treating the SPEEK / GO substrate in oxygen plasma treatment equipment, and ultrasonically cleaning the SPEEK / GO substrate with isopropanol for 10-20 minutes; s3, dissolving polybenzimidazole in N, N-dimethylacetamide (the concentration is 3-5wt%), and magnetically stirring until the polybenzimidazole is completely dissolved; the preparation method comprises the following steps: adding TiO2 nanoparticles (the particle size is 20-25nm, and the TiO2 nanoparticles are pretreated by a silane coupling agent KH-570) according to the mass ratio of 15-20%, ultrasonically dispersing and carrying out ice bath to obtain PBI-TiO2 dispersion liquid; s4, the SPEEK / GO substrate treated in the step S1 is vertically immersed in PBI-TiO2 dispersion liquid, the final coating thickness is 1.5 + / -0.2 [mu] m, and a pretreated film is obtained; and S5, carrying out hot pressing on the pretreated membrane by using a hot press, and then carrying out gradient cooling to room temperature to obtain the final composite membrane. The vanadium battery is better in vanadium resistance and corrosion resistance and suitable for high-power-density vanadium batteries.

The invention belongs to the field of semiconductor processes and devices, and particularly relates to a method for preventing photoresist denaturation in the process of etching graphene by oxygen plasma based on an isolating layer. The method comprises the following steps: transferring graphene to a substrate through a mechanical stripping and transferring technology; exposing the two ends of the graphene in the environment through photoetching, and evaporating Se serving as an isolating layer onto the developed graphene pattern; covering photoresist to protect Se from being influenced by subsequent etching, and performing photoetching to form a graphene channel; processing the graphene substrate covered by the photoresist by adopting oxygen plasma, and etching a graphene channel; and annealing to remove Se. The method is suitable for manufacturing semiconductor devices, and has wide application prospects in the fields of micromachining, patterning and functionalization treatment of graphene-based materials. The method can be used for preparation processes of graphene integrated circuits, graphene sensors, photoelectric devices and other microelectronic devices, and especially has a promotion effect on high-precision graphene processing.

The invention discloses a cleaning method and a cleaning system for a deposition chamber. The cleaning method comprises the following steps that dissociated NF3 is introduced from the top of a cavity so as to at least clean tungsten residues in the upper half area in the cavity for one time; stopping introducing the dissociated NF3, and introducing dissociated O2 from the top of the chamber so as to at least clean the carbon residues in the upper half area for one time; and dissociated NF3 is introduced from the top and the bottom of the cavity at the same time, so that the tungsten residues and the carbon residues in the upper half area and the lower half area in the cavity are subjected to secondary cleaning. By executing the steps, the problem that the cleaning effect on the carbon residues in the chamber is poor due to combination of nitrogen plasma and oxygen plasma caused by simultaneous dissociation and introduction of NF3 and O2 into the chamber can be solved, so that the cleaning effect on the carbon residues is improved, the cleaning time is shortened, and the cleaning efficiency is improved. And the process effect and the process stability of the tungsten carbide thin film in the chamber are further improved.

The invention discloses a gallium oxide-based Schottky barrier diode and a preparation method thereof. The method comprises the following steps: preparing a gallium oxide substrate; performing oxygen plasma treatment in a reactive ion etching system; feeding the sample into a tubular furnace, and annealing in an air atmosphere; then sending the annealed sample into electron beam evaporation equipment for back metal silver electrode growth; next, the sample is sent into rapid thermal annealing equipment to be annealed in the N2 atmosphere, and ohmic contact is formed; then, under the conditions that the growth speed is 0.01-0.1 nm / s and the vacuum degree is lower than 1 * 10 <-4 > Pa, field plate oxide Al2O3 grows on the surface treatment acting layer of the substrate through electron beam evaporation; and finally growing a metal anode at the top of the device by electron beam evaporation equipment. According to the technical scheme provided by the invention, the problem of preparing the gallium oxide-based Schottky barrier diode with low forward conduction loss under the condition of maintaining high breakdown voltage of the device is solved.

The invention provides a composite acrylic acid low-surface-energy antifouling coating, a preparation method and application, and belongs to the technical field of marine antifouling materials, the composite acrylic acid low-surface-energy antifouling coating comprises a three-layer composite structure, the three-layer composite structure comprises a bottom layer, a middle layer and a surface layer from bottom to top, the bottom layer is capsaicin-loaded polymethyl methacrylate, and the middle layer is a polymethyl methacrylate surface layer. The bottom layer is made of capsaicin, the middle layer is made of pressure-sensitive adhesive activated by oxygen plasma, the surface layer is made of dihydroxyl-terminated polydimethylsiloxane, the mass ratio of the bottom layer to the middle layer to the surface layer is (23-25): 1: (23-25), and the mass content of capsaicin in the bottom layer accounts for 5.82-5.75% of the total mass; based on the bonding strength change of the pressure-sensitive adhesive generated by oxygen plasma jet and the capsaicin for effectively inhibiting biological growth, polyacrylic acid is used as a self-polishing reservoir to continuously release an environment-friendly antifouling agent; the pressure-sensitive adhesive adheres to the polydimethylsiloxane layer through the adhesive force change generated by oxygen plasma to achieve the low-surface-energy antifouling effect, synergistic gain is achieved, the composite material intervenes into the biological fouling process from multiple aspects, and the composite material copes with the marine biological fouling process jointly.

The invention discloses a high-gain diamond logic phase inverter and a preparation method thereof, and aims to solve the problem that the voltage gain of an existing logic phase inverter is relatively small. According to the high-gain diamond logic inverter, a diamond substrate is subjected to hydrotreating through hydrogen plasma to form the diamond substrate with a hydrogen terminal, a conducting channel is formed after the surface of the hydrogen terminal is in contact with air, and a first source electrode, a first drain electrode, a second source electrode and a second drain electrode are arranged on the diamond substrate. A first ferroelectric medium layer and a second ferroelectric medium layer are deposited on a diamond substrate, a first grid electrode is arranged on the first ferroelectric medium layer, and a second grid electrode is arranged on the second ferroelectric medium layer. According to the invention, an electron beam evaporation process is adopted to form an orthorhombic phase on a ferroelectric material deposited at a low temperature, the ferroelectric material has convertible ferroelectric characteristics, and ultra-steep sub-threshold swing is realized; the surface conductivity can be regulated and controlled by treating the surface of the hydrogen terminal diamond through the oxygen plasma, current matching is achieved, and the logic inverter works in a deep subthreshold region.

The invention relates to the technical field of semiconductor devices, in particular to a high-performance AlGaN / GaN-based photoelectric synapse device and a preparation method thereof, and the device comprises an AlGaN / GaN epitaxial film after oxygen plasma processing and an electrode; the AlGaN / GaN epitaxial thin film structurally comprises an AlGaN barrier layer with the wavelength of 20 nm, an AlN buffer layer with the wavelength of 1-2 nm and a GaN channel layer with the wavelength of 250-300 nm from top to bottom. The electrode is arranged on the surface of the AlGaN barrier layer, and the surface of the AlGaN barrier layer is covered with an oxide layer. And a deep energy level defect exists in the AlGaN barrier layer. According to the method, an AlGaN / GaN-based photoelectric synapse device is processed by using oxygen plasma, so that the device can sense weak ultraviolet light and enhance a continuous photoconductive (PPC) effect.

The invention discloses a method for promoting matching of thermal expansion coefficients of a glass through hole substrate and copper through magnetron sputtering of a boride-doped metal barrier layer, which comprises the following steps of: after carrying out ultrasonic cleaning and oxygen plasma treatment on the glass through hole substrate, co-sputtering and depositing the boride-doped metal barrier layer on the substrate in a vacuum environment and inert gas; and finally, sputtering and depositing metal Cu on the substrate, wherein the metal is any one of Ag, Ti, Cr and Bi. According to the invention, the multi-target co-sputtering technology is adopted, and the metal-doped ZrB2 thin film is introduced to relieve the thermal expansion coefficient difference between the Cu thin film and the glass substrate so as to promote the thermal expansion coefficient matching between the glass through hole substrate and the copper layer, so that the generation of residual stress in the copper electroplating process is reduced, and the warping phenomenon of the copper film is prevented. The boride doped metal disclosed by the invention has excellent conductivity and dielectric constant, so that an electromagnetic coupling effect does not occur in a signal transmission process, and the integrity of the signal is ensured.