The invention relates to the technical field of microelectronic manufacturing, and discloses a preparation method and a transfer method of a bearing support plate for transferring a miniature LED
chip, and the preparation method comprises the steps: carrying out the cleaning and
oxygen plasma activation of a bearing support plate base material; a five-layer structure
composite membrane material is prepared by adopting a roller blade
coating process, and the
composite membrane material comprises a PET base material layer, and a first
silica gel layer and a second
silica gel layer which are respectively coated on two sides of the PET base material layer; after curing, the second
silica gel layer side of the
composite membrane material is attached to the bearing carrier plate base material; according to the transferring method,
chip transferring is achieved through the steps of contact attaching,
laser stripping and
thermocompression bonding by means of the bearing carrier plate. According to the invention, the thickness uniformity of an
adhesive layer is improved, precise
adhesive force regulation and control of
chip picking and releasing are realized, the high-temperature process of a traditional
spin coating process on a carrier plate is avoided, the problems of chip fragmentation, displacement and the like are effectively solved, and the yield, efficiency and precision of Micro LED
mass transfer are greatly improved.