This invention discloses a production method of flexibility humidity sensor. Its character is washing a dimethyl siloxane interlayer on silicon dice carrier firstly, after solidification in room-temperature, activing the surface with oxygen plasma, then washing high viscosity polyimide again and procuring with staged technology, then, overlapping and depositing all the metal coating and using stripping technology and wet-method corroding figure technology to firm mental humidity-dependent resistor and electric connector, after this, overlapping a light low viscosity PI protective layer, using wet method to corrode the outside metal press welding part; then putting the device on the heating plate and peeling the interlayer from the flexible carrier, after all, putting the flexible carrier peeled into the bake oven to solidify it to two PI membranous layers completely, so realizing the compatible craft. The method to make it is simple, the cost is low and the rate of finished products is high, and it is more near the achievement of mass production and the integration of the high density sensor.