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179 results about "Oxygen plasma" patented technology

Oxygen plasma refers to any plasma treatment performed while introducing oxygen to the plasma chamber. Oxygen is often used to clean surfaces prior to bonding. Oxygen(O 2) is the most common gas used in plasma cleaning technology due to its low cost and wide availability. Oxygen plasma is created by utilizing an oxygen source on a plasma system.

Microfluidic chip for rapidly detecting bacteria based on multi-mode detection, preparation method and detection method

The invention relates to the technical field of micro-fluidic biological detection, and discloses a micro-fluidic chip for rapidly detecting bacteria based on multi-mode detection, a preparation method and a detection method.The chip comprises a PDMS runner layer and a glass substrate layer which are sequentially arranged from top to bottom; the PDMS flow channel layer comprises an injection area used for receiving a to-be-detected sample and carrying out pretreatment; the focusing area is used for realizing three-dimensional fluid focusing of the detected particles through a coupling effect of viscoelasticity and an inertial effect; the detection area is used for performing electrical impedance detection and fluorescence detection on the focused particles; the outflow area is used for collecting and outputting the detected sample; the PDMS flow channel layer and the glass substrate layer are bonded through oxygen plasma to form a sealed channel structure, and the sealed channel structure is used for realizing electrical impedance and fluorescence dual-mode synchronous detection of microbial particles in a single flow channel. By optimizing the fluid focusing structure and the electrode design, high-precision synchronous detection of the microbial particles is realized.
Owner:KAILE BIOLOGICAL (NANJING) CO LTD

Breathable stripping-resistant water-based / solvent-free polyurethane synthetic leather and preparation method thereof

The invention belongs to the technical field of synthetic leather, and particularly discloses breathable stripping-resistant water-based / solvent-free polyurethane synthetic leather and a preparation method thereof.The synthetic leather comprises base cloth, a solvent-free polyurethane layer and a water-based polyurethane surface layer, and the solvent-free polyurethane layer and the water-based polyurethane surface layer are sequentially arranged on the base cloth; modifying and activating the base cloth by a wide plasma cleaning machine; the solvent-free polyurethane layer slurry is prepared from a carbon dioxide-based polyether type A material prepolymer, a polyether type B material prepolymer, color paste, a dispersing agent, isocyanate modified aerogel and nano filler; the waterborne polyurethane surface layer slurry is prepared from epoxy resin modified carboxylic acid type waterborne polyurethane emulsion neutralized by triethylamine, epoxy modified aerogel, waterborne color paste, a defoaming agent and a thickening agent. The modified aerogel is introduced into the solvent-free polyurethane layer and the waterborne polyurethane surface layer, and oxygen plasma pretreatment activation on the base cloth is cooperated, so that the obtained waterborne / solvent-free polyurethane synthetic leather has an excellent breathable function and high peel strength, and has a wide market prospect.
Owner:JIANGSU HUAYUAN HI-TECH CO LTD

Magnetic bionic cilia and vesicle complex as well as preparation method and application thereof

The invention belongs to the technical field of bionic cilium sensors, and particularly discloses a magnetic bionic cilium and vesicle complex and a preparation method and application thereof.The preparation method comprises the following steps that S1, a cilium array male mold is prepared; then carrying out oxygen plasma treatment, silanization and curing stabilization; s3, injecting the magnetic composite precursor into a polydimethylsiloxane female die, applying pressure, and striking off; and S4, coating the mold surface with an Ecoflex precursor, performing thermocuring forming, performing magnetization treatment, and performing stripping to obtain the magnetic bionic cilia. According to the magnetic bionic cilia, the vesicle complex and the preparation method and application of the magnetic bionic cilia, the vesicle complex and the preparation method and application of the magnetic bionic cilia, high-magnetic signal output is achieved while the deformability of the cilia is guaranteed, the magnetic bionic cilia is used for non-contact real-time hemodynamic monitoring, meanwhile, specific response release of the vesicle complex is achieved, and a new thought is provided for design of responsive vascular implants.
Owner:BEIJING INST OF TECH

Gradient-structure porous carbon, preparation method thereof and application of gradient-structure porous carbon in lithium ion battery negative electrode

The invention discloses porous carbon with a gradient structure, a preparation method of the porous carbon and application of the porous carbon in a negative electrode of a lithium ion battery. The porous carbon has a gradient structure with compact micropores on the surface and loose macropores inside. The preparation method of the porous carbon comprises the following steps: carrying out oleophylic modification on SiO2 to obtain hydrophobic SiO2; carrying out hydrophilic coating on NH4Cl to obtain PVP (Polyvinyl Pyrrolidone) coated NH4Cl; the preparation method comprises the following steps: mixing coal pitch, methylbenzene, oleic acid, hydrophobic SiO2 and PVP (at) NH4Cl to form a suspension; preparing a spherical precursor by a micro-fluidic emulsification method; and carbonizing, sequentially carrying out oxygen plasma treatment and HF solution etching, and removing the template to obtain the porous carbon with the gradient structure. The gradient distribution of the template and the pore-forming agent is realized through surface modification difference and a microfluidic technology, the pore structure and the particle size can be accurately regulated and controlled, the process is simple, the compatibility is high, the prepared porous carbon can be used as a substrate for a silicon-carbon composite negative electrode material, the volume expansion of silicon can be effectively buffered, and the service life of the silicon-carbon composite negative electrode material is prolonged. And the first coulombic efficiency, the specific capacity and the cycling stability of the lithium ion battery are improved.
Owner:HEFEI GUOXUAN HIGH TECH POWER ENERGY

Antibacterial antiskid PU leather and preparation method and application thereof

The invention discloses antibacterial and antiskid PU leather and a preparation method and application thereof, and belongs to the technical field of PU leather.The preparation method comprises the steps that a ZIF-8 / g-CNcomposite photocatalyst is obtained through an in-situ growth method, silver-doped nano-hydroxyapatite is prepared through an ion replacement method, the ZIF-8 / g-CNcomposite photocatalyst and the silver-doped nano-hydroxyapatite are compounded through liquid phase adsorption, and the antibacterial and antiskid PU leather is obtained. The preparation method comprises the following steps: preparing composite antibacterial powder, uniformly dispersing the composite powder into acrylamide, Arabic gum and polyethylene glycol methyl ether methacrylate serving as monomers, initiating polymerization to form composite coating slurry, performing oxygen plasma activation on PU leather, blade-coating the composite coating slurry, and curing to obtain the antibacterial antiskid PU leather. The material integrates the functions of self-cleaning, antibiosis, skid resistance and wear resistance.
Owner:ANHUI BOBBER SYNTHETIC LEATHER CO LTD

Basalt fiber epoxy resin composite material as well as preparation method and application thereof

PendingCN121592059ABoron nitrideBasalt fiber
The invention relates to the technical field of fiber reinforced resin-based composite materials, and discloses a basalt fiber epoxy resin composite material as well as a preparation method and application thereof. Comprising the following steps: carrying out oxygen plasma treatment and dopamine bionic liquid deposition treatment on basalt fibers, dipping the basalt fibers in a mixed coupling agent solution, and coating the basalt fibers with nano TiO2 sol to obtain nano roughened basalt fibers; mixing bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, hyperbranched polyesteramine and ionic liquid modified boron nitride nanosheets to obtain resin A; mixing an epoxy curing agent with a curing accelerator to obtain resin B; and mixing the resin A and the resin B to obtain a mixed material, and infiltrating the nano roughened basalt fibers in the mixed material to obtain the basalt fiber epoxy resin composite material. After the basalt fiber is subjected to bionic multi-stage interface treatment, the basalt fiber is matched with the modified epoxy resin, so that the interface strength, the mechanical property and the weather resistance of the composite material are remarkably improved, and the composite material has a relatively good application scene.
Owner:WUHAN NARI LIABILITY OF STATE GRID ELECTRIC POWER RES INST +2

Polyelectrolyte hydrogel coating with strong substrate binding performance and method of manufacturing the same

A polyelectrolyte hydrogel coating with strong substrate binding performance and a method of manufacturing the same are provided. The method includes: 1) activating a substrate by applying oxygen plasma; and 2) dissolving a polycationic polymer, a polymeric monomer, a silane coupling agent and an initiator to obtain a precursor solution, vacuumizing the precursor solution to remove air bubbles, applying the vacuumized precursor solution to a surface of the substrate activated by the oxygen plasma, and performing an in-situ polymerization and curing process under nitrogen or rare gas atmosphere. The polymeric monomer includes at least one of: acrylamide, acrylic acid, hydroxyethyl methacrylamide, 2-acrylamido-2-methyl-1-propanesulfonic acid, polyethylene glycol (diol) diacrylate, 2-methacryloxyethylphosphocholine, 3-[[2-(Methacryloyloxy)ethyl]dimethylammonio]propane-1-sulfonate, and 3-[[2-(methacryloyloxy)ethyl]dimethylammonium] propionate. The silane coupling agent has a carbon-carbon double bond functional group.
Owner:ZHEJIANG UNIV

Microcapsule, composite fabric, preparation method thereof and summer quilt

The application provides a microcapsule, a composite fabric, a preparation method of the composite fabric and a summer quilt. The preparation method of the composite fabric comprises the following steps: A1, treating the top surface and the bottom surface of a moisture-permeable layer by using oxygen plasma; A2, adding microcapsules and a crosslinking agent into water to obtain a sticky liquid; coating the sticky liquid on the bottom surface and the top surface of the moisture-permeable layer in a dotted form, bonding the moisture-permeable layer and a moisture-removing and air-permeable layer by taking the top surface of the moisture-permeable layer as a bonding surface, bonding the moisture-permeable layer and a skin-friendly cool layer by taking the bottom surface of the moisture-permeable layer as a bonding surface, drying and hot pressing; the microcapsule comprises a core material and a shell covering the outside of the core material, the core material comprises a glue, and the glue is selected from glue A or glue B or a combination of the two, the glue A is a solvent-free moisture curing reaction type polyurethane hot melt adhesive, and the glue B is an acrylate with an epoxy group and / or a urethane group. The application can guarantee the moisture permeability and air permeability of the composite fabric.
Owner:LUOLAI LIFESTYLE TECH CO LTD +1

Method for manufacturing substrate structure

To provide a method of manufacturing a substrate structure capable of suppressing peeling of a protective film.SOLUTION: A method of manufacturing a substrate structure including an organic film and a silicon substrate, the method comprising: performing an ashing process on the substrate structure at a first temperature while applying a first bias; performing an ashing process on the substrate structure subjected to the first ashing process at a second temperature higher than the first temperature while applying a second bias lower than the first bias or without applying a bias; and forming a protective film on the substrate structure subjected to the second ashing process.SELECTED DRAWING: Figure 2
Owner:CANON KK

Ni-RuO x Modified catalytic materials and their preparation methods, OER catalytic applications and water electrolysis devices

This invention belongs to the field of electrocatalytic materials and water electrolysis for hydrogen production, and discloses a Ni-RuO x Modified catalytic materials and their preparation methods, OER catalytic applications, and water electrolysis devices are disclosed. The preparation method of the catalytic material involves treating a mixture containing a ruthenium source, a nickel source, and potassium bromide with oxygen plasma to obtain a modified Ni-RuO2 precursor. The oxygen plasma treatment process is carried out at a temperature of 150-200℃ and a power of 100-150 W. The modified Ni-RuO2 precursor is then thermally annealed under a protective atmosphere at a temperature of 200-300℃ to obtain the Ni-RuO2 precursor. x Modified catalytic materials. This invention demonstrates that the preparation method described herein can achieve in-situ uniform doping of nickel in the RuO2 lattice, precise control of oxygen vacancies, and directional construction of discrete nanoparticles. This invention also demonstrates that the preparation method can significantly improve the OER performance of the prepared materials.
Owner:CENT SOUTH UNIV +2

A method for preparing an optical diffusion film

The application relates to the field of optical films, in particular to a preparation method of an optical diffusion film. The preparation method of the optical diffusion film comprises the following steps: uniformly mixing a curing agent with polydimethylsiloxane, curing, then performing oxygen plasma treatment and room temperature aging treatment to obtain a polydimethylsiloxane flat plate; dissolving PET particles and PMMA particles in a solvent to obtain a polymer solution; placing the polydimethylsiloxane flat plate above the polymer solution and standing to obtain the optical diffusion film. In the application, PMMA is used as a high glass transition temperature component to be blended with PET, the overall glass transition temperature of the blended system is improved, and the practicability of the optical diffusion film in a high-temperature environment is improved; strong scattering is provided by the difference between the refractive indexes of air holes and a polymer phase, a refractive index gradient is formed by using the refractive index difference between PET and PMMA, a secondary scattering interface is formed, high haze is ensured, light absorption is reduced, and high transmittance is maintained.
Owner:SHENZHEN CHANGSONG NEW MATERIAL TECHNOLOGY CO LTD

Preparation method of hydrogen evolution electrode based on three-period minimal curved surface structure

A hydrogen evolution electrode preparation method based on a three-period minimal curved surface structure belongs to the technical field of new energy electrolytic hydrogen production and fluid transportation, and comprises the following steps: constructing a three-dimensional model of the required three-period minimal curved surface structure; performing image slicing processing on the three-dimensional model by using slicing software; printing a required three-period minimal curved surface structure by using a plane projection micro-stereolithography 3D printer; a nanometer ultraviolet lamp is adopted to circularly irradiate the three-period extremely-small curved surface structure; soaking in a sulfuric acid solution and carrying out ultrasonic oscillation; carrying out vacuum drying and carrying out oxygen plasma hydrophilic treatment; depositing a nickel-based compact conductive layer on the three-period minimal curved surface structure by using chemical deposition; depositing a nickel-iron alloy catalyst on the three-period minimal curved surface structure of the nickel substrate by using electro-deposition; and carrying out ultrasonic oscillation with ethanol and vacuum drying. According to the application, collaborative design of catalyst distribution and a macro-microstructure is realized, and a new way is provided for preparation of a high-performance water electrolysis hydrogen production electrode.
Owner:HARBIN INST OF TECH

Wear-resistant HDPE (high-density polyethylene) pipe and preparation method thereof

The invention relates to a wear-resistant HDPE (high-density polyethylene) pipe and a preparation method thereof.The wear-resistant pipe comprises an inner-layer pipe and an outer-layer pipe, the inner-layer pipe contains high-density polyethylene resin, pretreated aluminum oxide filler and antibacterial particles, and the pretreatment process comprises oxygen plasma treatment, metal organic framework coating treatment and titanate coupling agent treatment; the filler dispersity and the interface bonding strength are effectively improved. The preparation method comprises the steps of raw material mixing, extrusion molding, foaming agent spraying, outer layer covering and cooling shaping. By optimizing filler pretreatment and the pipe structure, the wear resistance, pressure resistance, impact strength and environmental adaptability of the pipe are remarkably improved, and the pipe is suitable for harsh working conditions and water purification pipes.
Owner:HUBEI ZHONGSU PIPE IND CO LTD

Preparation method and transferring method of bearing carrier plate for transferring micro LED (light-emitting diode) chip

PendingCN121620027AOxygen plasmaSilica gel
The invention relates to the technical field of microelectronic manufacturing, and discloses a preparation method and a transfer method of a bearing support plate for transferring a miniature LED chip, and the preparation method comprises the steps: carrying out the cleaning and oxygen plasma activation of a bearing support plate base material; a five-layer structure composite membrane material is prepared by adopting a roller blade coating process, and the composite membrane material comprises a PET base material layer, and a first silica gel layer and a second silica gel layer which are respectively coated on two sides of the PET base material layer; after curing, the second silica gel layer side of the composite membrane material is attached to the bearing carrier plate base material; according to the transferring method, chip transferring is achieved through the steps of contact attaching, laser stripping and thermocompression bonding by means of the bearing carrier plate. According to the invention, the thickness uniformity of an adhesive layer is improved, precise adhesive force regulation and control of chip picking and releasing are realized, the high-temperature process of a traditional spin coating process on a carrier plate is avoided, the problems of chip fragmentation, displacement and the like are effectively solved, and the yield, efficiency and precision of Micro LED mass transfer are greatly improved.
Owner:SUZHOU XINJU SEMICON LTD

Preparation method of substrate activation assisted aerosol deposition film

PendingCN121344585APressure inorganic powder coatingNitrogen plasmaAerosol deposition
The invention relates to a method for preparing a substrate activation-assisted aerosol deposition film, which comprises the following steps of: activating a substrate before the aerosol deposition film, namely sequentially performing plasma activation treatment of argon, oxygen and nitrogen at 25 + / -1 DEG C and under the pressure of 50-100Pa, removing organic matters on the surface by argon plasma activation, and removing organic matters on the surface by nitrogen plasma activation. A weak boundary layer is removed to form a certain rough structure, so that the surface area is increased; oxygen plasma generates a large number of polar groups such as hydroxyl on the surface of the substrate; nitrogen plasma nitrides the base material to generate Al-N bonds, so that the surface energy is improved, and a strong interface is formed; experiments prove that compared with an unactivated base material, the bonding strength of the coating subjected to aerosol deposition and the surface of the base material is improved to 33.5 MPa from 17.2 MPa, and an SEM pattern shows that the interface between the activated base material and the coating is clear, the coating is uniform, and the porosity is low.
Owner:CHONGQING GENORI IND CO LTD +1

Carbon material rich in intrinsic defect as well as preparation method and application thereof

The invention discloses a carbon material rich in intrinsic defects as well as a preparation method and application thereof, and belongs to the technical field of catalysts, fullerene or fullerene derivative carbon cages adopted by the invention have a pi conjugated structure, so that relatively strong pi-pi interaction force exists among molecules. Fullerene or a fullerene derivative is used as a raw material, a macroscopic crystalline material, namely a fullerene condensed state precursor, is obtained through self-assembly based on intermolecular acting force, the fullerene condensed state precursor is subjected to pre-etching treatment through oxygen plasma, surface modification is conducted on the fullerene condensed state precursor, and the fullerene or fullerene derivative is obtained. The preparation method comprises the following steps: preparing a fullerene condensed state precursor, performing two-stage temperature programming heat treatment of low-temperature pre-etching treatment and high-temperature roasting in ZnCl2 molten salt, endowing the fullerene condensed state precursor with five-membered ring topological defects and carbon intrinsic defects of boundaries and curvatures, so as to obtain the carbon material rich in intrinsic defects, and endowing the carbon material with good electro-catalytic performance by the intrinsic defect sites.
Owner:LIAONING RUILIN HYDROGEN ENERGY TECH CO LTD

A heating table structure for a vacuum cavity

The utility model relates to heating platform structure technical field especially relates to a kind of heating platform structure for vacuum cavity.Its technical scheme includes vacuum cavity and with the lower cavity component of vacuum cavity moulding, the lower cavity component includes lower cavity plate and heating plate component, vacuum joint and at least one group of collar joint are fixedly installed on lower cavity plate, oil passage is equipped in the heating plate component, temperature measuring thermocouple component is fixedly installed on lower cavity component, and the temperature measuring thermocouple component real-time monitoring heating plate component's temperature.The utility model improves the temperature of reaction cavity to suitable range, makes the active particle movement speed of oxygen plasma accelerate, and the chemical reaction rate of photoresist is significantly improved, realizes the uniform distribution of cavity temperature, and promotes to ensure the plasma reaction consistency of each area of workpiece surface.
Owner:中科光智(重庆)科技有限公司

Solar cell, preparation method thereof and photovoltaic module

The invention provides a solar cell and a preparation method thereof, and a photovoltaic module, and the preparation method of the solar cell comprises the following steps: providing a solar cell substrate, the surface of which is provided with a transparent conductive layer; forming a mask layer with a patterned through hole on the transparent conductive layer; performing oxygen plasma treatment, ammonia plasma treatment or oxygen-ammonia mixed plasma treatment on the transparent conductive layer in the region corresponding to the patterned through hole; removing the mask layer; and preparing a metal electrode on the transparent conductive layer in an area corresponding to the patterned through hole. The preparation method is beneficial to improving the photoelectric conversion efficiency of the solar cell.
Owner:TONGWEI SOLAR ENERGY (CHENGDU) CO LID

Apparatus and method for regenerating spent catalyst

The application relates to a device and method for regenerating waste catalysts, belonging to the field of solid waste catalyst recycling. After being ground, the waste catalysts enter a plasma discharge area under the action of a blower, are in a fluidized state in a bed layer, are activated by plasma generated by an equal dielectric barrier discharge (DBD) device, enter a cyclone separator, and the separated waste catalyst powder is recycled to the plasma discharge area through a return pipeline. The device is divided into two modules. The first module utilizes argon and oxygen plasma to degrade the carbon and sulfides in the waste catalysts, effectively increasing the active area of the precious metals. The second module utilizes hydrogen to reduce the precious metal oxides in the waste catalysts, increasing the concentration of the precious metals, and thus realizing the regeneration of the waste catalysts. After the waste catalysts are treated, water vapor is introduced into the device to generate water vapor plasma to clean the device to prevent clogging, prolong the service life of the device, and improve the quality of the products.
Owner:JIANGNAN UNIV

A method for improving the electrical stability of nickel oxide thin films

This invention discloses a method for improving the electrical stability of nickel oxide thin films. Increasing the deposition temperature of the nickel oxide film and combining it with a post-deposition oxygen plasma surface treatment process can effectively suppress the degradation of the conductivity of the nickel oxide film. The concentration of conductive holes in nickel oxide films decreases sharply with the post-deposition storage time, leading to a significant increase in film resistivity and a substantial reduction in the reliability of devices based on this film. In this invention, by increasing the deposition temperature of the nickel oxide film, its crystallinity and structural stability are improved; and by treating the film surface with oxygen plasma, intrinsic point defects within the film are stabilized and the film surface is effectively passivated. Combining these two methods stabilizes the core source of conductive holes in the nickel oxide film—intrinsic point defects—and fundamentally suppresses the degradation of its electrical properties. This technology provides an effective way to solve the problem of poor electrical stability of nickel oxide films and has the significant advantages of low equipment requirements and simple process operation, possessing good practical application value.
Owner:BEIJING UNIV OF TECH

Method of selective deposition on substrate, substrate fabricated thereby, semiconductor device, and electronic device comprising same

A method of selectively depositing silicon oxide on a substrate, a method of fabricating a semiconductor device, and a semiconductor device are provided. The method includes: providing a substrate that includes a first surface including silicon oxide and a second surface including silicon nitride in a deposition chamber; selectively depositing a metal oxide precursor on the first surface of the substrate; treating the substrate with an oxygen plasma; and treating the substrate with a silicon oxide precursor.
Owner:SAMSUNG ELECTRONICS CO LTD +1

Processing technology of colored superfine flat elastic polyester network yarn

The application relates to the field of fiber processing, and particularly discloses a processing technology of colored superfine flat elastic polyester network yarn, which comprises the following steps: S1, PET chips are subjected to oxygen plasma treatment, then maleic anhydride coated nanometer crystal whiskers are added under the condition of 60-70 DEG C, the temperature is gradually increased to 200-210 DEG C for pre-crystallization for 24-28 h, and then drying is carried out under the condition of 155-165 DEG C, so that crystallized chips are obtained; S2, the crystallized chips are subjected to melt spinning, so that fiber yarns are obtained; and S3, the fiber yarns are subjected to ring blowing air cooling, spinning oiling, and elastic treatment, so that finished polyester network yarns are obtained. The finished polyester network yarns have the advantages of good dyeing effect, stable color, high strength, good elasticity, easy control of flatness, and good stability.
Owner:ZHEJIANG HENGBAIHUA CHEM FIBER CO LTD

Thermal interface bonding method of copper-clad laminated board

The invention relates to the technical field of printed circuit board manufacturing, in particular to a thermal interface bonding method of a copper-clad laminate, which comprises the following steps of: 1, cleaning the surfaces of a copper foil and an insulating base material, removing surface pollutants, and measuring the contact angle of water on the surfaces of the copper foil and the insulating base material through a contact angle measuring instrument; 2, performing low-temperature oxygen plasma activating treatment on the cleaned surfaces of the copper foil and the insulating base material; 3, forming a thermal stress buffer layer on the surfaces of the activated copper foil and the insulating base material; 4, carrying out thermocompression bonding, wherein temperature, pressure and time parameters of thermocompression bonding are dynamically optimized according to thickness data and surface energy data of the buffer layer; and step 5, carrying out post-curing treatment on the copper-clad laminated board subjected to primary bonding. Through cleaning, low-temperature oxygen plasma activation and the addition of the thermal stress buffer layer, the surface quality and thermal stability of the copper foil and the insulating base material are effectively improved.
Owner:JIANGXI CHUANGJU ELECTRONIC TECH CO LTD

An asymmetric polypyrrole nanopillar array thin film, its preparation method, and its application in gas sensors.

This invention relates to an asymmetric polypyrrole nanopillar array thin film, its preparation method, and its application in gas sensors. The method includes the following steps: immersing a flexible, biodegradable porous filter membrane in a polymerization catalyst solution; adding a pyrrole dispersion dropwise to the polymerization catalyst solution with the porous filter membrane immersed in it, followed by freezing and static reaction; removing the reacted porous filter membrane, washing, and drying it; performing surface treatment on one side of the dried porous filter membrane; placing the surface-treated porous filter membrane in a solvent to remove the porous membrane, and then washing and drying it to obtain the asymmetric polypyrrole nanopillar array thin film, which is used to construct a gas sensor. Compared with existing technologies, the preparation method of this invention mainly involves impregnation and dropwise addition. Through simple dip-coating and oxygen plasma surface treatment steps, the asymmetric polypyrrole nanopillar array thin film is prepared without the need for prolonged ultrasonication, simplifying the process.
Owner:ZHEJIANG LAB

Metal halide single crystal array and preparation method and application thereof

The invention belongs to the technical field of photoelectric devices, and particularly relates to a metal halide single crystal array and a preparation method and application thereof.The preparation method comprises the steps that 1, an aluminum oxide substrate is cleaned and dried, and then fluorosilane is adopted for hydrophobic modification to obtain a hydrophobic substrate; (2) placing the metal mask plate on a hydrophobic substrate, and performing oxygen plasma treatment to obtain an aluminum oxide substrate with a hydrophilic and hydrophobic array; (3) removing the metal mask plate, dropwise adding an inorganic metal halide solution onto the aluminum oxide substrate with the hydrophilic and hydrophobic array, and performing blade coating by adopting a PDMS (Polydimethylsiloxane) template, so that the solution is uniformly dispersed; and (4) standing the substrate treated in the step (3) in a closed environment at 25-30 DEG C until the solvent is volatilized and removed, thereby obtaining the metal halide single crystal array. The lattice parameters of the metal halide inorganic crystals are matched with those of the substrate through the aluminum oxide substrate, so that the in-plane pure orientation of the metal halide inorganic single crystal array is realized.
Owner:ZHENGZHOU UNIV

Neutralized metal plate sputtering pollution control method and system for atomic oxygen equipment

The invention relates to the technical field of space environment effect ground tests, and provides a neutralized metal plate sputtering pollution control method and system for an atomic oxygen simulation test. The method comprises the following steps: determining a neutralized metal plate according to a relation curve of sputtering yield and atomic number of target material elements; the generated oxygen plasma is guided to the determined neutralization plate according to the optimized incident angle, the oxygen plasma is neutralized on the surface of the neutralization plate to form atomic oxygen, and the atomic oxygen is guided to the sample to be tested; the bias voltage applied to the neutralization plate is controlled, so that the energy of incident oxygen ions is lower than a sputtering threshold value of the neutralization plate while the energy of atomic oxygen reflected by the neutralization metal plate and the neutralization efficiency are ensured, and sputtering is effectively controlled; the temperature of the neutralized metal plate is controlled to prevent an increase in the sputtering level of the neutralized metal plate. According to the invention, the sputtering pollution of the neutralized metal plate in the test process is effectively controlled.
Owner:BEIJING INST OF SPACECRAFT ENVIRONMENT ENG

Method of manufacturing semiconductor device

A method of manufacturing a semiconductor device, the method including forming a lower film on a substrate; forming a metal-containing photoresist material film on the lower film; patterning the metal-containing photoresist material film to form a photoresist pattern including openings therein such that a scum remains on the lower film; performing a descum operation to remove the scum from the lower film; and etching the lower film using the photoresist pattern, wherein performing the descum operation includes providing the substrate to a processing chamber; generating oxygen plasma; and reacting the scum with the oxygen plasma.
Owner:SAMSUNG ELECTRONICS CO LTD

Semiconductor device and method for fabricating the same

PendingUS20260190881A1Oxygen plasmaDevice material
A method for fabricating a semiconductor device is provided. The method includes depositing a ferroelectric layer over a non-insulating layer by an atomic layer deposition (ALD) process. The ferroelectric layer comprises a first metal element and a second metal element different from the first metal element. The ALD process comprises a plurality of cycles. Each of the cycles includes introducing a first precursor gas comprising the first metal element into a chamber; after introducing the first precursor gas into the chamber, introducing a second precursor gas comprising the second metal element into the chamber, such that a precursor surface layer comprising the first metal element and the second metal element is formed over the non-insulating layer; and performing an oxygen plasma treatment to convert the precursor surface layer into a monolayer of the ferroelectric layer.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD +1

Grafted plastic, preparation method thereof and surface metallization material

The invention provides a grafted plastic, a preparation method thereof and a surface metallization material. The grafted plastic comprises a polymer and an active group grafted on the surface of the polymer; and the roughness of the grafted plastic surface is 0.2-6.3 microns. The preparation method of the grafted plastic comprises the following steps: providing a plastic part, placing the plastic part in a reaction cavity, and vacuumizing the reaction cavity; introducing inert gas and oxygen into the reaction cavity; performing oxygen plasma treatment on the plastic part, introducing an active monomer, and initiating a grafting reaction of the active monomer on the surface of the plastic part to obtain grafted plastic; wherein the active monomer has a polar group. The plastic part is subjected to oxygen plasma treatment, the surface of the plastic part can be activated through high-energy oxygen plasma, the roughness of the surface of the plastic part is improved, when inert gas carries active monomers to make contact with the surface of the plastic part, free radical chain reaction can be triggered, and the active monomers are promoted to be grafted to the surface of the plastic part through chemical bonding; the efficient grafting of the plastic part is realized.
Owner:SICHUAN HUAFENG ENTERPRISE GRP