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2481 results about "Electric discharge" patented technology

An electric discharge is the release and transmission of electricity in an applied electric field through a medium such as a gas.

Plasma processing device and method of monitoring plasma discharge state in plasma processing device

An object is to provide a plasma processing device capable of rightly monitoring existence of plasma discharge and also rightly monitoring existence of abnormal discharge. Another object of the present invention is to provide a method of monitoring a state of plasma discharge in the plasma processing device.A discharge detection sensor 23, in which a dielectric member 21 and a probe electrode unit 22 are combined with each other, is attached to an opening portion 2a provided in a lid portion 2 composing a vacuum chamber. A change in the electric potential induced in the probe electrode 22b according to a change in plasma discharge is received, electric potential change wave-forms of specific patterns are respectively detected by an N-type wave-form detecting portion 34 and V-type wave-form detecting 35, and a discharge state judgment including a judgment of whether the electric discharge exists or does not exist and whether the electric discharge is normal or abnormal is made according to a counted value of counting the number of times of appearance of these electric potential change wave forms for each type of wave-form by a discharge ON wave-form counter 36, a discharge OFF wave-form counter 37, an abnormal discharge wave-form counter 38 and a leak discharge wave-form counter 39.
Owner:PANASONIC CORP

Laser spectral engineering for lithographic process

An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.
Owner:CYMER INC

Multifunctional hydrocarbon oil composition

A multifunctional, high-performance hydrocarbon composition is demanded. Concretely, a metalworking oil composition having high workability even under a severer lubricating condition while resisting to high productivity, and further capable of suppressing deterioration of working environments or degradation of quality of a product without rise of lubricant cost, a metalworking oil composition for minimal quantitative lubrication system, which is excellent in characteristics as a water-insoluble lubricant for nonferrous metalworking and also in characteristics as a lubricant for cutting/grinding by minimal quantitative lubrication method, and can attain improvement in working efficiency and a further extended tool life, an electric discharge machining oil improved in working environments such as odor or skin roughness and further improved in processing rate, particularly processing rate in high-level finish, a rust preventing oil composition improved in resin compatibility, and a detergent excellent in adaptability with organic material are demanded.
Therefore, metalworking oil which contains, as hydrocarbon base oil, hydrocarbon base oil having a density at 15° C. of 0.7 to 0.8 g/cm3, and including a n-paraffin content of 10 to 90% by mass, an aromatic content of 0 to 3% by volume, and a naphthene content of 0 to 20% by volume, a metalworking oil including the above-mentioned base oil and ester oil, and electric discharge machining oil, rust preventing oil, and a detergent composition including the above-mentioned base oil are provided.
Owner:NIPPON OIL CORP

Mass Spectrometer

The present invention provides a mass spectrometer having an ion lens capable of transporting an ion having a large mass to charge ratio with a high level of ion-passing efficiency even under a low-vacuum atmosphere. In conventional atmospheric pressure ionization mass spectrometers or similar mass spectrometers, applying an excessively high voltage to the ion lens undesirably causes an electric discharge. Therefore, the passing efficiency for an ion having a large mass to charge ratio cannot be adequately improved, which leads to a poor detection sensitivity. To solve this problem, the mass spectrometer according to the present invention includes a voltage controller 21 that controls a variable radiofrequency (RF) voltage generator 24 so that both the amplitude and the frequency of the RF voltage applied to the lens electrodes of an ion lens 5 are changed according to the mass to charge ratio of an ion to be analyzed. This control enables the ion lens 5 to focus an ion and transport it to the subsequent stage with a high level of passing efficiency even in the case of analyzing an ion having a large mass to charge ratio. Thus, the detection sensitivity is improved. The aforementioned control is conducted on the basis of the control data stored in a voltage control data storage 22. These data are obtained in advance by a measurement of a sample containing a substance having a known mass to charge ratio, in which the intensity of the signal of an ion detector is maintained while the analysis conditions are changed.
Owner:SHIMADZU CORP
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