20 results about "Disilane" patented technology

The invention relates to the technical field of semiconductor materials, in particular to a method for preparing a semiconductor material from high-purity quartz sand. The method comprises the following steps: firstly, grafting and modifying the surface of quartz sand through 3-aminopropyltriethoxysilane, complexing metal impurities by using amino functional groups, and improving the purity of a precursor from the source; secondly, hydrogen / deuterium gas pulse back-and-forth switching is adopted, surface hydrogen atom dynamics is regulated and controlled through the isotope effect, and an etching-nucleation synergistic window is created; and finally, through sequential alternate supply of silane and disilane, time separation of a weak bond etching period and a high-activity nucleation period is realized. The prepared semiconductor material shows excellent performance, and compared with a traditional method, the technical problem of low-temperature deposition of a high-quality semiconductor film is solved through full-process optimization from a material source to a deposition end.

The invention relates to a method and a system for recovering hydrogen in mixed gas by using a pressure swing adsorption and membrane separation method. The method comprises the following steps: S1, preliminary impurity removal: carrying out multi-layer adsorption impurity removal on mixed gas containing silane, disilane and hydrogen, and cooling to 22-28 DEG C; s2, pressure swing adsorption: feeding the mixed gas subjected to primary impurity removal into a pressure swing adsorption device, wherein an adsorbent in the adsorption device is modified activated carbon which is activated at high temperature and is loaded with 3-5% of copper oxide on the surface; s3, membrane separation and adsorption: the mixed gas passing through the pressure swing adsorption device enters a filter and a dryer, and finally passes through a membrane separation device, silane and disilane are collected on the enrichment side of the membrane separation device for further purification, and hydrogen is collected on the permeation side of the membrane separation device for further purification. According to the invention, a process of combining pressure swing adsorption and a membrane separation method is adopted, the advantages of the two technologies are fully exerted, and efficient separation of silane, disilane and hydrogen is realized.

The utility model relates to the technical field of chemical equipment, and discloses a disilane preparation device, which comprises a mounting plate, the supporting block is arranged on the mounting plate; the clamping sleeve is fixedly arranged above the supporting block; the reaction kettle is fixedly arranged in the jacket; the feeding hole is formed in the reaction kettle, and a feeding pipe is fixedly arranged in the feeding hole; the outlet is formed in the reaction kettle and is formed in one side of the feeding hole, and a discharging pipe is fixedly connected to the outlet; the gas inlet hole is formed in the reaction kettle, and the output end of a gas compressor is fixedly connected to the interior of the gas inlet hole; the stirring mechanism is arranged in the reaction kettle; the slag discharge pipe is communicated with the jacket and the reaction kettle, and the slag discharge pipe is arranged at the bottom of the reaction kettle; the rectifying tower is communicated with the discharging pipe, the top of the rectifying tower is connected with a condenser, the bottom of the rectifying tower is connected with a reboiler, and the rectifying tower is communicated with a storage tank. The disilane preparation device disclosed by the utility model is used for solving the problems of the existing equipment.

The invention discloses a high-purity disilane production system and a high-purity disilane production method. The system comprises a reactor (100), a primary gas-solid separator (200), supercharging equipment (300), a secondary gas-solid separator (400), a gas separation membrane assembly (500), a light component removal tower (600) and a product tower (700) which are sequentially connected through pipelines. The core of the invention lies in that a two-stage gas-solid separation structure is adopted to effectively solve the contradiction between the low-pressure operation of the reactor and the high-pressure feeding of the membrane module, and core equipment is fully protected; meanwhile, a mixed matrix molecular sieve membrane is arranged in the gas separation membrane assembly, and screening of hydrogen and monosilane molecules can be efficiently achieved, so that the reaction byproduct hydrogen is removed through a one-step method. According to the method, monosilane is taken as a raw material, after reaction synthesis, primary dust removal, pressurization, fine dust removal, membrane-method dehydrogenation and rectification separation are sequentially carried out on a product, a high-purity disilane product is finally obtained, and unreacted monosilane is returned to a system for cyclic utilization.

This utility model discloses a trace ammonia analysis system for the synthesis and purification process of silane, relating to the field of trace ammonia analysis technology. The system includes: a valve with a first, second, third, fourth, fifth, and sixth interface; the second interface is a carrier gas inlet, the fifth interface is a sample gas inlet, and the sixth interface is a vent hole; a quantitative tube, one end of which is fixedly connected to the first interface and the other end to the fourth interface; and a chromatographic column, one end of which is fixedly connected to the third interface and the other end of which is fixedly connected to an MS quadrupole mass detector. The trace ammonia analysis system for the synthesis and purification process of silane provided by this utility model, using MS for the analysis of trace impurities, has the advantages of high sensitivity, a universal detector for all components, and the ability to vent analytical errors caused by the additional equipment of silane through backflushing technology in the gas path design, resulting in accurate quantification and effectively reducing analysis time.

The utility model relates to the technical field of silane production, in particular to an electronic-grade silane system device which comprises a partition plate tower, the partition plate tower is communicated with a purification furnace through a first pipeline, the purification furnace is connected with a rectifying tower through a second pipeline, and a filter is arranged on the second pipeline. Process gas prepared by a silicon-magnesium method reaction kettle is conveyed to the middle of a partition plate tower, light component impurities such as H2 and N2 are removed at the top of the partition plate tower, and after non-metal hydride and high-order silane components such as silane and disilane are removed at the bottom of the tower, crude silane is extracted from the tower side and is introduced into a purification furnace through a first pipeline, and by means of the property that the thermal stability of the silane and the hydride impurities is different, the high-order silane is obtained. And adjusting the temperature of the purification furnace to a proper temperature, carrying out thermal decomposition on hydride impurities, filtering a silane gas phase obtained in the purification furnace through a filter on a second pipeline, introducing the filtered silane gas phase into a rectifying tower for refining, and finally extracting a liquid phase, thereby obtaining the high-purity electronic-grade silane.

The invention relates to a process for the production of monosilanes of formula H4-nSiCln with n being 2, 3 or 4 comprising the step of subjecting a starting material composition comprising one or more disilanes with formula HxSi2Cl6-x containing at least one Si—H bond and optionally further silanes, in particular the side-product mixture of the Siemens Process or fractions thereof, to a reaction with a reaction-promoting agent chosen from—ether / HCI solutions—amines, phosphines, or mixtures thereof—ammonium halides, phosphonium halides, or mixtures thereof at temperatures below 200° C.

A disilane preparation device and a disilane preparation method. The disilane preparation device comprises a reactor (1), a heating part (2), a high-voltage electrode (3), and a high-voltage pulse power supply (4). The reactor (1) comprises a dissociation part (11) and a reaction part (12) that are communicated, and the dissociation part (11) is arranged upstream of the reaction part (12); the dissociation part (11) is provided with a dissociation inlet (111), and the reaction part (12) is provided with a reaction inlet (121) and a reaction outlet (122); the high-voltage electrode (3) is arranged in the dissociation part (11), and the high-voltage pulse power supply (4) is configured to supply power to the high-voltage electrode (3), so as to dissociate a silane gas introduced into the dissociation part (11) through the dissociation inlet (111) to generate active ions; and a catalyst (5) is provided in the reaction part (12), the heating part (2) is configured to heat the reaction part (12), and the active ions introduced into the reaction part (12) from the dissociation part (11) react with a silane gas introduced into the reaction part (12) through the reaction inlet (121) to generate disilane. The disilane preparation device enables disilane preparation, improves the production capacity of disilane, simplifies the process flow, and reduces costs.

The invention discloses an analysis system and an analysis method for impurities in high-purity disilane. The analysis system comprises a first ten-way valve, a first quantitative tube, a first chromatographic column, a first six-way valve, a second quantitative tube, a second chromatographic column, a second six-way valve, a first PDD detector, a third chromatographic column, a second twenty-way valve, a third quantitative tube, a fourth chromatographic column, a third six-way valve, a fifth chromatographic column and a second PDD detector. According to the analysis system and the analysis method for the impurities in the high-purity disilane, a five-valve five-column double-detector configuration mode is adopted, different impurities are distributed on different detectors, the working state of a multi-way valve is controlled, and the valve switching time is regulated and controlled, so that sample introduction of the same gas path and separation and analysis of multiple gas paths are realized, and the detection accuracy is improved. Therefore, analysis results of all impurities in the sample gas can be obtained in one analysis process, main components or silane impurities can be reversely blown out, interference of a main peak background is removed, and the efficiency and accuracy of the analysis process are improved.

According to the preparation device of the electronic-grade disilane, high-order silane is generated on the basis of pyrolysis polymerization reaction of crude monosilane, after the high-order silane is primarily separated by the circulating tower, heavy components are rectified twice to remove light components and heavy components respectively, and then are purified twice to remove water, oxygen and metal ions to obtain the electronic-grade disilane, so that continuous production is realized, the production cost is reduced, and the production efficiency is improved. And common unit equipment combination can be directly used, so that the cost is low, the efficiency is high, and a new choice is provided for preparation of electronic-grade disilane.

The invention relates to the technical field of gas separation and purification, in particular to a method for recycling hydrogen in silane and disilane mixed gas through a membrane separation method. Comprising the following steps: S1, pretreating mixed gas containing 20%-25% of silane, 10%-15% of disilane and 60%-70% of hydrogen to remove solid particles and moisture; s2, the pretreated mixed gas is introduced into a membrane separation device, silane and disilane are collected on the enrichment side of the membrane separation device for further rectification, and hydrogen is collected on the permeation side of the membrane separation device for further purification. According to the method, hydrogen recovery and silane and disilane enrichment can be efficiently achieved, the hydrogen recovery rate is high, and compared with a traditional separation method, the method is low in energy consumption and has remarkable economic benefits and environmental protection benefits.

A manufacturing method of a semiconductor device includes depositing, using a first atomic layer deposition, a first thin poly silicon layer on an active area, in which the active area includes a trench; depositing, using a second atomic layer deposition, a second thin poly silicon layer on the active area; and depositing, using a chemical vapor deposition, a poly silicon layer on the active area to form a poly silicon structure, in which a gas for the chemical vapor deposition includes disilane, a thickness of the poly silicon layer in a bottom of the trenches is substantially zero.

A novel tubular reactor device for producing ethylsilane comprises a tubular reactor, which is of a split structure and comprises an upper cover, a barrel and a lower cover which are detachably and sealingly connected from top to bottom, and has a feeding port and a discharging port, the feeding port is sequentially communicated with a material mixer and a material preheater which are located outside the tubular reactor, and a rotary flow gas distributor is connected to the lower side of the inner side of the feeding port through a connecting pipe; the rotary flow gas distributor is detachably connected to the upper part of the barrel through a support frame, and the upper end of the support frame is clamped to the inner side of the connection between the upper cover and the upper end surface of the barrel. The novel device strengthens the rotation of mixed gas, avoids the generation of silicon powder due to long-time heating of silane, improves the conversion rate of silane, and designs the rotary flow gas distributor as a spiral pipe, so that the mixed gas can be more uniformly distributed in the reactor, the heating is uniform, the temperature rising speed is fast, the temperature rising time is further saved, and the yield of ethylsilane is improved.

The invention discloses a device and method for continuously synthesizing disilane through a discharge reaction, the device comprises a plasma reactor, an adsorption tower and two rectifying towers, an annular electrode anode and an annular electrode cathode are arranged in the plasma reactor, and the electrode anode and the electrode cathode are coaxially arranged. The synthesis method comprises the following steps: evacuating a device for continuously synthesizing disilane through discharge reaction until the absolute pressure is 5-10 Pa; preheating the plasma reactor to 60-100 DEG C; monosilane and hydrogen enter a first buffer tank through a flow meter to be mixed; introducing the mixed gas into a plasma reactor for reaction, wherein the reaction temperature is 60-100 DEG C; a product obtained after reaction enters a cold trap, and part of high-order silane is removed; pumping the crude disilane gas subjected to cold trap into an adsorption tower through a compressor for adsorption, and removing moisture and part of carbon dioxide; and feeding the adsorbed gas into a rectifying tower for rectifying to obtain the electronic-grade disilane with the purity of 5N and above. The device and the method are safe, high in disilane selectivity, low in energy consumption and good in product quality.

The invention belongs to the technical field of catalyst preparation, and particularly relates to a Fe3S4 / FeS heterojunction composite catalyst and a preparation method and application thereof.A Joule heating technology is adopted to replace traditional tube furnace roasting, short-time thermal shock is conducted on a precursor, the preparation time is greatly shortened, energy consumption is reduced, meanwhile, the catalyst prepared through Joule heating is in a uniform spherical shape, and the preparation method is suitable for large-scale industrial production. More catalytic active sites can be exposed, and the catalytic performance is improved. The Fe3S4 / FeS heterojunction composite catalyst is utilized to catalyze reduction of hexachlorodisilane to prepare disilane, so that the selectivity and yield of disilane are remarkably improved.

The utility model belongs to the technical field of chemical equipment, and particularly relates to a high-purity disilane analysis device which comprises an analyzer, a detection module, an analysis module, a display device, a getter pump, a power supply and a control device are arranged in the analyzer, a liquid crystal display screen, control keys, an air inlet and an air outlet are arranged on the surface of the analyzer, one end of the air inlet is connected with the getter pump, and the other end of the air inlet is connected with the power supply; the other end is externally connected with a sampling handle; the supporting seat is arranged at the bottom of the analyzer, and supporting legs are arranged at the bottom of the supporting seat; the height adjusting devices are arranged on the supporting legs and used for adjusting the heights of the supporting legs; the supporting legs are connected with the supporting base in a hinged mode. The height adjusting device has the beneficial effects that by arranging the height adjusting device, a thread fixing mode is abandoned, the problem of fastening failure caused by thread abrasion is reduced, and therefore the service life of the height adjusting device is prolonged.

The invention belongs to the technical field of chemical synthesis, and particularly relates to a production method and system of industrial-grade disilane, raw materials monosilane and hydrogen are preheated and mixed, so that the reaction time can be shortened, silica powder precipitation can be reduced, and the conversion rate of the monosilane can be increased; the high-temperature heat exchanger, the circulating monosilane superheater and the circulating hydrogen superheater are used for carrying out three-stage heat exchange to recover waste heat, so that the temperature of reaction gas can be reduced, the temperature of circulating hydrogen and the temperature of circulating monosilane can be increased, and the energy consumption for greatly increasing the temperature of a hydrogen preheater and a monosilane preheater is saved; hydrogen and monosilane are recycled, and external hydrogen supply is not needed after stable operation of the reaction, so that the production cost is reduced.

A catalyst of formula (I) where Ar is a substituted or unsubstituted aryl group; and E1 and E2 are, individually, a moiety having a double or triple bond, or where E1 and E2 join together to form a cyclic structure with the Ni to which they are bound.

A preparation method for catalyzing silane to generate disilane through a high-entropy catalyst comprises the following steps that S1, five metal chlorides and a carbon material are dissolved in absolute ethyl alcohol, stirred and mixed, after sufficient dissolution, the mixture is put into a vacuum drying oven to be dried, and a carbon material loaded high-entropy alloy precursor is obtained; s2, the dried carbon material loaded high-entropy alloy precursor is subjected to high-temperature alloying in a reactor in an inert atmosphere, and the high-entropy alloy catalyst loaded on the carbon material is obtained; and S3, introducing silane into the reactor filled with the high-entropy alloy catalyst for full reaction to obtain disilane. The silane is used as the raw material gas and is matched with the high-entropy alloy catalyst for catalytic reaction to obtain disilane and hydrogen, the energy consumption is low, the product is easy to separate, the purity and the yield of disilane are improved by reasonably setting the addition amount of the high-entropy alloy catalyst, the technical problems in the prior art are properly optimized, and the method is suitable for industrial production. The industrial production of disilane is more convenient.