The invention provides an epitaxial
growth control method and device,
computer equipment and a storage medium. The epitaxial
growth control method comprises the following steps: irradiating a
wafer to be measured and the surface of a reference
irradiation surface by adopting a super-continuum spectrum
laser light source to obtain a reflected
light signal; synchronously scanning and filtering the reflected
light signal to output two paths of narrow-band light; the two paths of narrow-band light are converted into electric signals and then differential operation is carried out, and the
reflectivity of the
wafer to be measured is calculated according to a differential result; and determining growth parameters of the epitaxial layer based on the
reflectivity, and adjusting process parameters of the reaction cavity according to the growth parameters so as to control epitaxial growth of the
wafer to be tested. According to the super-continuum spectrum
laser light source, multiple characteristic wavelengths can be scanned in one process step, synchronous monitoring of multiple growth parameters is achieved, and the monitoring requirement of a complex epitaxial structure is met; in addition, common-mode
noise in the measurement process is eliminated in real time through the double-beam
differential measurement technology, the
signal-to-
noise ratio is greatly increased, the
measurement precision is improved, and accurate control over epitaxial growth is achieved.