A fluid storage and dispensing
system including a vessel containing a low
heel carbon
sorbent having fluid adsorbed thereon, with the
system arranged to effect
desorption of the fluid from the
sorbent for dispensing of fluid
on demand. The low
heel carbon
sorbent preferably is characterized by at least one of the following characteristics: (i)
Heel, measured for gaseous
arsine (AsH3) at 20° C. at 20
Torr, of not more than 50 grams AsH3 per
liter of
bed of the sorbent material; (ii)
Heel, measured for gaseous
boron trifluoride (BF3) at 20° C. at 20
Torr, of not more than 20 grams
boron trifloride per
liter of
bed of the sorbent material; (iii)
Heel, measured for gaseous
germanium tetrafluoride (GeF4) at 20° C. at 20
Torr, of not more than 250 grams AsH3 per
liter of
bed of the sorbent material; (iv) Heel, measured for gaseous
arsenic pentafluoride (AsF5) at 20° C. at 20 Torr, of not more than 700 grams AsF5 per liter of bed of the sorbent material; (v) Heel, measured for gaseous trimethyl
silane (3MS) at 20° C. at 20 Torr, of not more than 160 grams 3MS per liter of bed of the sorbent material; and (vi) Heel, measured for gaseous ethane (C2H4) at 21° C. at 25 Torr, of not more than 10 grams ethane per liter of bed of the sorbent material.