15 results about "Trimethylsilane" patented technology

Trimethylsilane or trimethylsilyl hydride, is a gas at ambient conditions with the formula C₃H₁₀Si. It is very flammable. Trimethylsilane is used in the semi-conductor industry as precursor to deposit dielectrics and barrier layers via plasma-enhanced chemical vapor deposition (PE-CVD).. It is also used a source gas to deposit TiSiCN hard coatings via plasma-enhanced magnetron sputtering (PEMS). It has also been used to deposit silicon carbide hard coatings via low-pressure chemical vapor deposition (LP-CVD) at relatively low temperatures <1000ᵒC. It is an expensive gas but safer to use than silane (SiH₄); and produces properties in the coatings that cannot be undertaken by multiple source gases containing silicon and carbon.