The present invention relates to a method for removing MoFx or MoFx and MoOFx, including: bringing a halogen-containing gas into contact with a member having a deposit or a coating of MoFx or MoFx and MoOFx (where x represents a number greater than 0 and less than 6); and removing MoFx or MoFx and MoOFx from the member, a method for removing a deposit or a coating from a member having the deposit or the coating of MoFx or MoFx and MoOFx mixed as impurities in MoF6 by a method for producing a semiconductor device including the above removing method, and a method for producing a semiconductor device that includes removing a deposit or a coating from a semiconductor device production apparatus having a deposit or coating of MoFx or MoFx and MoOFx, and that can avoid clogging or contamination of the production apparatus.
Provided are: a method for removing MoFx or MoFx and MoOFx, wherein a halogen-containing gas is brought into contact with a member having MoFx or MoFx and MoOFx deposited or coated thereon (where x represents a number greater than 0 and less than 6) to remove the MoFx or the MoFx and MoOFx from the member; and a method for manufacturing a semiconductor device, the method comprising said removal method. By using these methods, provided are: a method for removing deposited or coated matter from a member on which MoFx or MoFx and MoOFx, which are incorporated into MoF6 as impurities, are deposited or coated; and a method for manufacturing a semiconductor device, the method comprising a step for removing deposited or coated matter from a manufacturing apparatus for a semiconductor device on which MoFx or MoFx and MoOFx are deposited or coated, wherein clogging or contamination of the manufacturing apparatus can be avoided.
The invention relates to a small molecule probe as well as a preparation method and application thereof, the chemical structural formula of the probe is as follows: # imgabs0 #, in which R1 is 1-propanesulfonic acid or 1-butanesulfonic acid; r2 is independently selected from trifluoromethyl or sulfenyl pentafluoride, and the substitution position of R2 is ortho-position, para-position or meta-position of hydroxyl on a benzene ring; the preparation method comprises the following steps: directly introducing a fluorinesubstituent group into a spiropyrane molecular structure with pH response through condensation reaction of salicylaldehyde containing the fluorinesubstituent group and indoline, and preparing the pH response type bimodal imaging small molecular probe with both < 19 > F MRI (Magnetic Resonance Imaging) and fluorescence imaging. Compared with the prior art, the small molecule probe shows remarkably different < 19 > F NMR chemical shifts and fluorescence intensities in different pH environments, high-resolution < 19 > F MRI imaging and fluorescence imaging in different pH environments can be realized, the imaging sensitivity and accuracy are greatly improved, and the small molecule probe has important application prospects in the fields of biosensing, cell imaging, medical diagnosis and the like.
The invention discloses an electrolyte, a preparation method thereof and application of the electrolyte in a lithium / carbon fluorideprimary battery. The electrolyte contains lithium salt, lipid substances, ether substances, sulfone substances and additives. The purpose of regulating and controlling the solvation structure in the electrolyte is achieved by optimizing and adjusting the ratio, the lithium salt, the lipid solvent and the sulfonesolvent can form a double-layer solvation shell layer, the viscosity and density of the electrolyte can be reduced by the ethersolvent, and the discharge capacity of the lithium / carbon fluoride battery can be exerted and the specific energy of the battery can be integrally improved. The phenyl sulfurpentafluoride additive has the effects of improving the wettability of the electrolyte and reducing side reactions on the surface of the electrode, and the dischargevoltage is improved; in addition, in the discharging process of the lithium carbon fluoride battery, the phenyl sulfurpentafluoride additive is reduced and decomposed, and the discharging capacity is contributed. In conclusion, due to the appropriate solvation structure in the electrolyte, the lithium / carbon fluoride primary battery shows excellent energy performance through the additives, and the actual application process of the lithium-carbon fluoride battery is further promoted.
The invention discloses an organic light-emitting diode of a derivative phosphorescent material containing a boronpentafluoride unit. At present, although many RTP materials are explored, OLED phosphorescent materials with high luminescence and high performance are still scarce, which limits the development of electroluminescent devices to a certain extent. According to the invention, a series of boronpentafluoride compounds are synthesized from malonyl chloride as a raw material, and the compounds show very good phosphorescent properties. Meanwhile, when the compound is applied to an electroluminescent device structure, the mobility of holes and electrons can be well balanced, so that the problem that the mobility of carriers is unbalanced is well solved. The material can be used as a novel photoelectric material and has applicability in the fields of OLED and the like.
The invention relates to a variable-pressure condensation filter for preparing electronic-grade molybdenumhexafluoride and a control method of the variable-pressure condensation filter. The condensation pipeline is communicated between the gas phase inlet and the liquid phase outlet, and the condensation pipeline is soaked in the low-temperature cavity; the heat exchange controllable layers are made of elastic flexible materials, a plurality of through holes are formed in the middle-rear section of a gas path of the condensation pipeline, and the heat exchange controllable layers cover the through holes respectively; the press-fit forming piece is arranged in the condensation pipeline, and the press-fit forming piece and the heat exchange controllable layer are arranged at an interval; the pressurizing part is arranged in the tank body, after the pressurizing part pressurizes the interior of the tank body, the heat exchange controllable layer expands towards the interior of the condensation pipeline and is close to the press-fit forming part, the heat exchange efficiency is improved after the heat exchange controllable layer expands, and semi-solidmolybdenumpentafluoride is cooled and solidified into molybdenumpentafluoride blocky crystals; after the pressure in the tank body is relieved by the pressurizing piece, the heat exchange controllable layer is shrunk, and the molybdenum pentafluoride blocky crystals fall off; and a filter plate.
The invention discloses a preparation method of liquid hyperbranched polycarbosilane containing an epoxyactive group and application of the liquid hyperbranched polycarbosilane in photocuring 3D printing, the preparation method comprises the following steps: pre-reacting hydrogenated polycarbosilane with allyl pentafluoride, uniformly grafting a propyl pentafluoride branched chain, supplementing and adding in vacancy by using short straight-chain olefin containing the epoxy group, and carrying out photocuring 3D printing to obtain the liquid hyperbranched polycarbosilane containing the epoxyactive group. And finally, liquid hyperbranched polycarbosilane EP-LHBPCS with an epoxy active group is obtained, a benzenepentafluoride branched chain and an epoxy group branched chain form 121 type alternate modification, and a classic wear-resistant bearing structure is formed in the microstructure, so that the characteristic of super wear resistance is achieved.
This invention relates to a pressure swing condenser filter for the preparation of electronic-grade molybdenumhexafluoride and its control method, comprising: a tank; a condenser pipe connected between a gas phase inlet and a liquid phase outlet, the condenser pipe being immersed in a low-temperature chamber; several controllable heat exchange layers made of an elastic flexible material, the condenser pipe having several through holes in the middle and later sections of the gas path, the controllable heat exchange layers covering the through holes respectively; a pressing molding component disposed within the condenser pipe and spaced apart from the controllable heat exchange layers; a pressurizing component disposed within the tank, the pressurizing component pressurizing the tank to cause the controllable heat exchange layers to expand into the condenser pipe and approach the pressing molding component, the expansion of the controllable heat exchange layer improving the heat exchange efficiency, causing the semi-solidmolybdenumpentafluoride to solidify into blocky molybdenumpentafluoride crystals upon cooling; after the pressurizing component depressurizes the tank, the controllable heat exchange layers contract and cause the blocky molybdenum pentafluoride crystals to detach; and a filter plate.