The present invention relates to a method for removing MoFx or MoFx and MoOFx, including: bringing a halogen-containing gas into contact with a member having a deposit or a coating of MoFx or MoFx and MoOFx (where x represents a number greater than 0 and less than 6); and removing MoFx or MoFx and MoOFx from the member, a method for removing a deposit or a coating from a member having the deposit or the coating of MoFx or MoFx and MoOFx mixed as impurities in MoF6 by a method for producing a semiconductor device including the above removing method, and a method for producing a semiconductor device that includes removing a deposit or a coating from a semiconductor device production apparatus having a deposit or coating of MoFx or MoFx and MoOFx, and that can avoid clogging or contamination of the production apparatus.
Provided are: a method for removing MoFx or MoFx and MoOFx, wherein a halogen-containing gas is brought into contact with a member having MoFx or MoFx and MoOFx deposited or coated thereon (where x represents a number greater than 0 and less than 6) to remove the MoFx or the MoFx and MoOFx from the member; and a method for manufacturing a semiconductor device, the method comprising said removal method. By using these methods, provided are: a method for removing deposited or coated matter from a member on which MoFx or MoFx and MoOFx, which are incorporated into MoF6 as impurities, are deposited or coated; and a method for manufacturing a semiconductor device, the method comprising a step for removing deposited or coated matter from a manufacturing apparatus for a semiconductor device on which MoFx or MoFx and MoOFx are deposited or coated, wherein clogging or contamination of the manufacturing apparatus can be avoided.
The invention discloses an electrolyte, a preparation method thereof and application of the electrolyte in a lithium / carbon fluorideprimary battery. The electrolyte contains lithium salt, lipid substances, ether substances, sulfone substances and additives. The purpose of regulating and controlling the solvation structure in the electrolyte is achieved by optimizing and adjusting the ratio, the lithium salt, the lipid solvent and the sulfonesolvent can form a double-layer solvation shell layer, the viscosity and density of the electrolyte can be reduced by the ethersolvent, and the discharge capacity of the lithium / carbon fluoride battery can be exerted and the specific energy of the battery can be integrally improved. The phenyl sulfurpentafluoride additive has the effects of improving the wettability of the electrolyte and reducing side reactions on the surface of the electrode, and the dischargevoltage is improved; in addition, in the discharging process of the lithium carbon fluoride battery, the phenyl sulfurpentafluoride additive is reduced and decomposed, and the discharging capacity is contributed. In conclusion, due to the appropriate solvation structure in the electrolyte, the lithium / carbon fluoride primary battery shows excellent energy performance through the additives, and the actual application process of the lithium-carbon fluoride battery is further promoted.
The invention relates to a variable-pressure condensation filter for preparing electronic-grade molybdenumhexafluoride and a control method of the variable-pressure condensation filter. The condensation pipeline is communicated between the gas phase inlet and the liquid phase outlet, and the condensation pipeline is soaked in the low-temperature cavity; the heat exchange controllable layers are made of elastic flexible materials, a plurality of through holes are formed in the middle-rear section of a gas path of the condensation pipeline, and the heat exchange controllable layers cover the through holes respectively; the press-fit forming piece is arranged in the condensation pipeline, and the press-fit forming piece and the heat exchange controllable layer are arranged at an interval; the pressurizing part is arranged in the tank body, after the pressurizing part pressurizes the interior of the tank body, the heat exchange controllable layer expands towards the interior of the condensation pipeline and is close to the press-fit forming part, the heat exchange efficiency is improved after the heat exchange controllable layer expands, and semi-solidmolybdenumpentafluoride is cooled and solidified into molybdenumpentafluoride blocky crystals; after the pressure in the tank body is relieved by the pressurizing piece, the heat exchange controllable layer is shrunk, and the molybdenum pentafluoride blocky crystals fall off; and a filter plate.
This invention relates to a pressure swing condenser filter for the preparation of electronic-grade molybdenumhexafluoride and its control method, comprising: a tank; a condenser pipe connected between a gas phase inlet and a liquid phase outlet, the condenser pipe being immersed in a low-temperature chamber; several controllable heat exchange layers made of an elastic flexible material, the condenser pipe having several through holes in the middle and later sections of the gas path, the controllable heat exchange layers covering the through holes respectively; a pressing molding component disposed within the condenser pipe and spaced apart from the controllable heat exchange layers; a pressurizing component disposed within the tank, the pressurizing component pressurizing the tank to cause the controllable heat exchange layers to expand into the condenser pipe and approach the pressing molding component, the expansion of the controllable heat exchange layer improving the heat exchange efficiency, causing the semi-solidmolybdenumpentafluoride to solidify into blocky molybdenumpentafluoride crystals upon cooling; after the pressurizing component depressurizes the tank, the controllable heat exchange layers contract and cause the blocky molybdenum pentafluoride crystals to detach; and a filter plate.