The invention relates to an
air tightness detection device and method based on
resonance frequency shift of a
resonant cavity, belongs to the technical field of
air tightness detection, and aims to solve the problems of high equipment cost, complex operation, low efficiency and difficulty in realizing multi-parameter quantitative detection in the traditional
air tightness detection technology. High-purity
helium with rated pressure is filled into a to-be-detected piece through a
gas compressor, the to-be-detected piece is placed in a volume-adjustable detection container after pressure maintaining, and leaked
helium is pumped by a
vacuum pump to flow into a
resonant cavity;
resonance frequency deviation caused by
helium concentration changes is monitored, temperature and
humidity calibration data are combined, three air tightness parameters including the
leakage rate (Pa.m / s), the leakage speed (mL / min) and the leakage pressure (Pa) are calculated in real time through a
microcontroller, and the air tightness grade of a to-be-detected piece is output according to the air tightness detection standard. According to the device, the volume of the detection container is adaptively adjusted through the sliding rail, and the detection efficiency and adaptability can be remarkably improved by combining
frequency mixing excitation and a rapid frequency calibration technology; according to the method,
resonance frequency shift-helium concentration-airtightness parameters are converted, and high-precision, multi-parameter and integrated airtightness detection is realized. The invention has the advantages of fast response speed, strong anti-interference performance, low cost and the like, is suitable for fast automatic
leak detection of industrial products such as sealing devices, pressure containers and the like, and provides a new scheme for
trace gas detection and gas tightness grading.