The invention relates to the technical field of
ceramic manufacturing processes, and particularly discloses a preparation method of a 96 aluminum
oxide ceramic substrate, which comprises the following steps:
slurry preparation: carrying out ball milling treatment on high-purity aluminum
oxide powder, a
sintering aid, a binder, a
plasticizer, an
organic solvent and a dispersing agent, and fully mixing to obtain
tape casting slurry; forming a
green body,
coating a carrier film with the
tape casting slurry through a
tape casting machine with a wet film which is uniform in thickness and flat in surface, and
drying the carrier film through a
drying box in a partitioned manner to obtain a cured
green body; and
sintering densification treatment: carrying out glue removal treatment on the
green body, and carrying out stepped heating
sintering to obtain the 96 aluminum
oxide ceramic substrate. According to the 96 aluminum
oxide ceramic substrate prepared by the scheme, a large number of uniform
crystal cores can be formed, small
crystal grains can be dissolved, large
crystal grains grow at a
constant speed, and the uniformity of the crystal grain size is ensured, so that scattering of phonons on a crystal boundary can be reduced, and a structural foundation is laid for improvement of heat
conductivity.