The invention discloses a preparation method of fine-grain aluminum
oxide ceramics, and belongs to the technical field of electrostatic chucks, the preparation method comprises the following steps:
powder pretreatment: dispersing nano aluminum
oxide powder in a horizontal
ball mill, adding a second-phase additive accounting for 1-10% of the total
volume fraction, and uniformly stirring; mixing a second phase additive with a
solvent, then adding a structure-directing agent PEG and a dispersing agent, carrying out ball milling in a planetary
ball mill, and finally transferring the obtained solution into a vertical stirring mill for
grinding;
sol: firstly adding 60 parts of
toluene, 20 parts of isopropanol and 20 parts of
plasticizer into a pneumatic
sol machine, and then adding 30-50 parts of
adhesive; dispersing: weighing a certain amount of 3mm balls and a mixed
solvent of methylbenzene and n-butyl
alcohol into a stirring mill, then adding the pretreated nano aluminum
oxide powder, and stirring; mixing: adding PVB
colloid and transferring into a defoaming tank; vacuum defoaming: feeding the
slurry in the roller
ball mill into a defoaming tank by using N2 air pressure; and forming and
sintering.