The invention discloses a preparation method of a high-volume-resistivity electrostatic chuck aluminum
nitride ceramic plate, and belongs to the technical field of electrostatic chucks, the method comprises the following steps:
raw material preparation: aluminum
nitride powder, an
oxide dopant and an organic additive are used as raw materials, the
oxide dopant comprises 0.1-1 wt% of SiO2, 0.1-1 wt% of TiO2, 0.1-5 wt% of Y2O3, 0.1-2 wt% of CaO, 0.1-2 wt% of MgO and 0.1-2 wt% of BaO, the organic additive is added into the aluminum
nitride powder, and the organic additive is added into the aluminum nitride
powder; the organic additives comprise a
solvent, a dispersing agent and a binder; the raw materials are subjected to mixing and ball milling for 4-8 h through a planetary
ball mill, the ball milling rotating speed is 350-450 r / min, and the ball milling temperature is 25-30 DEG C; forming: forming by adopting a
dry pressing forming method or a
tape casting forming method; glue discharging: the highest temperature of glue discharging is 500-600 DEG C;
sintering: adopting double-shaft pressurized
nitrogen hot pressed
sintering, keeping the highest temperature of the
ceramic body at 1600-1800 DEG C for 2-8 hours, and keeping the pressure at 5-30 Mpa.