The invention relates to the field of ceramics for semiconductors, and discloses aluminum
nitride ceramic tape casting slurry, a high-elongation aluminum
nitride ceramic green tape and a preparation method and application thereof.The aluminum
nitride ceramic tape casting slurry is prepared from, by
mass, 70-75 parts of aluminum nitride raw
powder and 25-30 parts of
organic solvent through mixing and ball milling, the dispersing agent accounts for 0.5%-0.8% of the
mass of the aluminum nitride raw
powder, the binder accounts for 3%-10% of the
mass of the aluminum nitride raw
powder, the composite preparation accounts for 1%-9% of the mass of the aluminum nitride raw powder, and the composite preparation comprises dioctyl
phthalate,
dibutyl phthalate and
dioctyl adipate according to the
mass ratio of (2-4): (1-2): (1-2). By adopting the composite preparation with a specific ratio, the uniformity and flowability of the tape-
casting slurry can be remarkably improved, the surface defects of a
green belt are reduced, the elongation rate of the tape-
casting slurry is up to 37%, the
processing requirements of tubular curved
surface structure aluminum nitride ceramic parts can be met, the
cracking risk in the glue discharging and
sintering process is reduced, and the service life of the tape-
casting slurry is prolonged. The method can be widely applied to preparation of special-shaped ceramic elements for
semiconductor equipment.