Aluminium nitride ceramics material and preparation method thereof

A technology of aluminum nitride ceramics and aluminum nitride, which is applied in the field of aluminum nitride ceramic materials and its preparation, can solve the problems of affecting product qualification rate, increasing manufacturing cost, and difficulty in controlling the performance of substrate products, so as to improve production qualification The effect of improving the rate, improving the flatness and improving the sintering activity

Active Publication Date: 2009-03-18
无锡海古德新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Based on the appearance and size characteristics of substrate products, high sintering temperature not only leads to increased manufacturing costs, but more importantly, it is not easy to control the performance of substrate products, such as color consistency, flatness and roughness, etc. Affect the pass rate of the product

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Example 1, Preparation of AlN Ceramic Substrate by Tape Casting Method Adding Nano-alumina

[0040] Raw materials: Ceramic raw materials include AlN powder, Y 2 o 3 Powder, CaCO 3 Powder and Nano Al 2 o 3 (D50=250nm) powder, material mixing and molding organic additives include solvent butanone and absolute ethanol, binder PVB, dispersant castor oil and plasticizer dibutyl phthalate (DBP), polyethylene glycol (PEG).

[0041] AlN ceramic composition formula: AlN, Y 2 o 3 , CaO and nano-Al 2 o 3 The weight percentages are respectively 94.0%, 5.0%, 0.8% and 0.2%. Among them, CaO is actually composed of CaCO 3 Introduce, CaCO 3 The amount added is converted by the weight percentage of CaO in its molecular formula, that is, CaCO 3 The molar addition of CaO is the same as that of CaO.

[0042] Tape casting slurry preparation: according to the composition formula of the above AlN ceramics, using the usual tape casting process, AlN, Y 2 o 3 , CaCO 3 and nano Al ...

Embodiment 2

[0050] Example 2, Preparation of AlN ceramic substrate by tape casting method adding aluminum isopropoxide

[0051] Raw materials: Ceramic raw materials include AlN powder, Y 2 o 3 Powder, aluminum isopropoxide C 9 h 21 AlO 3 , Material mixing and molding organic additives include solvent butanone and absolute ethanol, binder PVB, dispersant castor oil and plasticizers dibutyl phthalate (DBP), polyethylene glycol (PEG).

[0052] AlN ceramic composition formula: AlN, Y 2 o 3 and Al 2 o 3 The weight percentages are respectively 95.0%, 4.5%, 0.5%. Among them, Al 2 o 3 actually made of aluminum isopropoxide C 9 h 21 AlO 3 Introduced, Aluminum Isopropoxide C 9 h 21 AlO 3 The amount of addition is determined by the Al in its molecular formula 2 o 3 The percentage by weight is converted, that is, C 9 h 21 AlO 3 The molar addition amount of Al 2 o 3 2 times the molar amount added.

[0053] Tape casting slurry preparation: according to the composition formula of...

Embodiment 3

[0061] Example 3, Preparation of AlN Ceramics by Dry Press Forming Method Adding Nano-alumina

[0062] Raw materials: Ceramic raw materials include AlN powder, Y 2 o 3 Powder, CaF 2 Powder, nano-alumina powder (D50=200nm), material mixing and molding organic additives include solvent absolute ethanol, binder PVB, dispersant castor oil.

[0063] AlN ceramic composition formula: AlN, Y 2 o 3 , CaF 2 and nano Al 2 o 3 The weight percentages are respectively 96.0%, 2.8%, 0.5% and 0.7%.

[0064] Preparation of mixed materials: according to the composition formula of the above-mentioned AlN ceramics, using the usual dry pressing molding process, AlN, Y 2 o 3 , CaF 2 and nano Al 2 o 3 With a certain weight percentage of absolute ethanol, binder PVB, and dispersant castor oil, use a ball mill to mix for 36 hours to obtain a mixed slurry. The obtained mixed slurry is dried, crushed and granulated to obtain the mixed material, which is set aside. Wherein, the consumption o...

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PUM

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Abstract

The invention discloses an aluminium nitride ceramic material and a preparation method thereof. The method is to add nano-alumina to raw materials in the prior preparation method for preparation according to the prior preparation process. In-situ growing nano-alumina can be obtained directly through adding the nano-alumina, or indirectly through adding organic aluminum, such as aluminium secondary butylate, aluminium isopropoxide or aluminium acetylacetonate, and by means of low-temperature decomposition of the organic alumina. The method can be applied to dry pressing and tape casting shaping, can obtain slurry with good dispersing characteristic and even mixing of the aluminium nitride and the nano-alumina by the ceramic preparation process, such as normal pressure, hot pressed sintering or the like, and is favorable for the improvement of sintering activity of materials, the reduction of sintering temperature, the improvement of luster uniformity, planeness and roughness for a ceramic substrate, and the reduction of production cost. The aluminium nitride ceramic material and the preparation method thereof can be widely applied to the field of aluminium nitride ceramic production.

Description

technical field [0001] The invention relates to an aluminum nitride ceramic material and a preparation method thereof, in particular to an aluminum nitride ceramic material added with nano-alumina and a preparation method thereof. Background technique [0002] With the continuous development of electronic information, power electronics, and semiconductor laser technology in the direction of high integration, high speed, miniaturization, and intelligence. Adapting to this trend, the ceramic substrate, which is one of the main basic components that play the role of carrying components, interconnection, external mounting, protection and cooling in the circuit, proposes more and higher requirements in both quantity and quality. requirements. In particular, higher and higher requirements are put forward for the thermal conductivity and dielectric properties of substrate materials. Currently, widely used Al 2 o 3 Ceramic substrates have become less and less suitable for the ab...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/581
Inventor 周和平孙伟
Owner 无锡海古德新技术有限公司
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