The invention discloses a glue discharging method for a dry-pressed
ceramic body of an electrostatic chuck, and belongs to the technical field of electrostatic chucks, and the glue discharging method comprises the following steps: S1, carrying out ball-milling mixing on
alumina ceramic powder, a binder and a
plasticizer, sieving to obtain
granulation powder, carrying out primary dry-pressing molding to obtain an upper
ceramic body and a lower ceramic body, printing an adsorption
electrode layer, and carrying out secondary dry-pressing molding to obtain an upper ceramic body and a lower ceramic body; after lamination, carrying out secondary dry-pressing molding to obtain a dry-pressing molded ceramic
green body; s2, after a furnace door of the rubber discharging furnace is closed, air is introduced into the rubber discharging furnace, the temperature in the rubber discharging furnace is increased to 150 DEG C, heat preservation is conducted, then the temperature in the rubber discharging furnace is increased to 300 DEG C, and heat preservation is conducted for 3-5 h; and S3, closing the air valve, opening the
nitrogen valve, introducing
nitrogen into a humidifier to convert the
nitrogen into wet nitrogen
mixed gas, introducing the wet nitrogen
mixed gas into the rubber discharging furnace, raising the temperature to 450 DEG C, keeping the temperature for 3-6 hours, then reducing the temperature in the rubber discharging furnace to 300 DEG C, then reducing the temperature to 100 DEG C, and naturally cooling to obtain the dry-pressing formed ceramic
green body after rubber discharging.