The present invention provides a method for producing a high-density multi-layer
ceramic substrate with stable characteristics, the substrate incorporating therein a passive component such as a high-precision
capacitor or
inductor. The method comprises the steps of providing compact blocks containing a green
ceramic functional material to form the passive components; providing a composite green laminate having a plurality of
ceramic green sheets comprising a ceramic insulating material and in which the compact blocks are built in pre-disposed spaces and a paste containing a
metal inducing, during firing, oxidation reaction accompanied by expansion is provided in space between inside walls of the spaces and the compact blocks; firing the composite green laminate in a state in which the laminate is sandwiched by the sheet-like supports formed of green ceramics that cannot be sintered at the
sintering temperature, so as to prevent shrinkage of the laminate; and removing the unsintered sheet-like supports.